JPS5380165A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS5380165A
JPS5380165A JP15676976A JP15676976A JPS5380165A JP S5380165 A JPS5380165 A JP S5380165A JP 15676976 A JP15676976 A JP 15676976A JP 15676976 A JP15676976 A JP 15676976A JP S5380165 A JPS5380165 A JP S5380165A
Authority
JP
Japan
Prior art keywords
crystal layer
semiconductor
manufacture
anode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15676976A
Other languages
Japanese (ja)
Inventor
Kohei Nagata
Akihiro Shibatomi
Naoki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15676976A priority Critical patent/JPS5380165A/en
Publication of JPS5380165A publication Critical patent/JPS5380165A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To obtain the uniform crystal layer of any thickness of applying the voltage, of the opposite polarity with the anode-oxidization voltage applied between the crystal layer and a cathode, between a substrate and the crystal layer in case of the anode oxidization of the semiconductor single crystal layer on a semi-insulating crystal substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15676976A 1976-12-25 1976-12-25 Manufacture of semiconductor Pending JPS5380165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15676976A JPS5380165A (en) 1976-12-25 1976-12-25 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15676976A JPS5380165A (en) 1976-12-25 1976-12-25 Manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS5380165A true JPS5380165A (en) 1978-07-15

Family

ID=15634902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15676976A Pending JPS5380165A (en) 1976-12-25 1976-12-25 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5380165A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792839A (en) * 1980-12-02 1982-06-09 Matsushita Electronics Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792839A (en) * 1980-12-02 1982-06-09 Matsushita Electronics Corp Manufacture of semiconductor device

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