JPS53110470A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53110470A JPS53110470A JP2621277A JP2621277A JPS53110470A JP S53110470 A JPS53110470 A JP S53110470A JP 2621277 A JP2621277 A JP 2621277A JP 2621277 A JP2621277 A JP 2621277A JP S53110470 A JPS53110470 A JP S53110470A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- proton
- radiating
- insulated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Junction Field-Effect Transistors (AREA)
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE: To manufacture the device, by providing the electrodes on the crystal surface semi-insulated by radiating proton, and by protecting the surface with anode oxide film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2621277A JPS6051263B2 (en) | 1977-03-09 | 1977-03-09 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2621277A JPS6051263B2 (en) | 1977-03-09 | 1977-03-09 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53110470A true JPS53110470A (en) | 1978-09-27 |
JPS6051263B2 JPS6051263B2 (en) | 1985-11-13 |
Family
ID=12187118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2621277A Expired JPS6051263B2 (en) | 1977-03-09 | 1977-03-09 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6051263B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59195822A (en) * | 1983-04-20 | 1984-11-07 | Sanyo Electric Co Ltd | Formation of impurity region |
JPS60145675A (en) * | 1984-01-09 | 1985-08-01 | Mitsubishi Electric Corp | Gaas fet |
-
1977
- 1977-03-09 JP JP2621277A patent/JPS6051263B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59195822A (en) * | 1983-04-20 | 1984-11-07 | Sanyo Electric Co Ltd | Formation of impurity region |
JPS60145675A (en) * | 1984-01-09 | 1985-08-01 | Mitsubishi Electric Corp | Gaas fet |
Also Published As
Publication number | Publication date |
---|---|
JPS6051263B2 (en) | 1985-11-13 |
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