JPS52122080A - Forming methods of ohmic electrodes - Google Patents

Forming methods of ohmic electrodes

Info

Publication number
JPS52122080A
JPS52122080A JP3817576A JP3817576A JPS52122080A JP S52122080 A JPS52122080 A JP S52122080A JP 3817576 A JP3817576 A JP 3817576A JP 3817576 A JP3817576 A JP 3817576A JP S52122080 A JPS52122080 A JP S52122080A
Authority
JP
Japan
Prior art keywords
forming methods
ohmic electrodes
layers
substrate
ohmic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3817576A
Other languages
Japanese (ja)
Inventor
Kiyoo Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3817576A priority Critical patent/JPS52122080A/en
Publication of JPS52122080A publication Critical patent/JPS52122080A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form an ohmic electrode by alternately laminating more than three layers of Ge and Au layers on an n type GaAs substrate and subjecting the substrate to high temperature treatment.
COPYRIGHT: (C)1977,JPO&Japio
JP3817576A 1976-04-07 1976-04-07 Forming methods of ohmic electrodes Pending JPS52122080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3817576A JPS52122080A (en) 1976-04-07 1976-04-07 Forming methods of ohmic electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3817576A JPS52122080A (en) 1976-04-07 1976-04-07 Forming methods of ohmic electrodes

Publications (1)

Publication Number Publication Date
JPS52122080A true JPS52122080A (en) 1977-10-13

Family

ID=12518039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3817576A Pending JPS52122080A (en) 1976-04-07 1976-04-07 Forming methods of ohmic electrodes

Country Status (1)

Country Link
JP (1) JPS52122080A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101671686B1 (en) 2015-06-16 2016-11-07 홍성무 Device For Sleep Out

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101671686B1 (en) 2015-06-16 2016-11-07 홍성무 Device For Sleep Out

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