JPS5377464A - Taking-in and out unit of semiconductor wafer storage boat - Google Patents
Taking-in and out unit of semiconductor wafer storage boatInfo
- Publication number
- JPS5377464A JPS5377464A JP15460576A JP15460576A JPS5377464A JP S5377464 A JPS5377464 A JP S5377464A JP 15460576 A JP15460576 A JP 15460576A JP 15460576 A JP15460576 A JP 15460576A JP S5377464 A JPS5377464 A JP S5377464A
- Authority
- JP
- Japan
- Prior art keywords
- taking
- semiconductor wafer
- out unit
- wafer storage
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To obtain an equipment which can be used easily in the processing furnace of the pressure reduction system and the pressure increment system by providing hooks on the boat which is used to take in and out wafers in the processing unit such as diffusion, etching and wahsing and the bar which is used to push in and lead out the boat and matching these hooks while entering and rotating the bar.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15460576A JPS5377464A (en) | 1976-12-21 | 1976-12-21 | Taking-in and out unit of semiconductor wafer storage boat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15460576A JPS5377464A (en) | 1976-12-21 | 1976-12-21 | Taking-in and out unit of semiconductor wafer storage boat |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5377464A true JPS5377464A (en) | 1978-07-08 |
Family
ID=15587824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15460576A Pending JPS5377464A (en) | 1976-12-21 | 1976-12-21 | Taking-in and out unit of semiconductor wafer storage boat |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5377464A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48101999A (en) * | 1972-04-07 | 1973-12-21 |
-
1976
- 1976-12-21 JP JP15460576A patent/JPS5377464A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48101999A (en) * | 1972-04-07 | 1973-12-21 |
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