JPS5377464A - Taking-in and out unit of semiconductor wafer storage boat - Google Patents

Taking-in and out unit of semiconductor wafer storage boat

Info

Publication number
JPS5377464A
JPS5377464A JP15460576A JP15460576A JPS5377464A JP S5377464 A JPS5377464 A JP S5377464A JP 15460576 A JP15460576 A JP 15460576A JP 15460576 A JP15460576 A JP 15460576A JP S5377464 A JPS5377464 A JP S5377464A
Authority
JP
Japan
Prior art keywords
taking
semiconductor wafer
out unit
wafer storage
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15460576A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Sueo Tsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15460576A priority Critical patent/JPS5377464A/en
Publication of JPS5377464A publication Critical patent/JPS5377464A/en
Pending legal-status Critical Current

Links

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  • Weting (AREA)

Abstract

PURPOSE: To obtain an equipment which can be used easily in the processing furnace of the pressure reduction system and the pressure increment system by providing hooks on the boat which is used to take in and out wafers in the processing unit such as diffusion, etching and wahsing and the bar which is used to push in and lead out the boat and matching these hooks while entering and rotating the bar.
COPYRIGHT: (C)1978,JPO&Japio
JP15460576A 1976-12-21 1976-12-21 Taking-in and out unit of semiconductor wafer storage boat Pending JPS5377464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15460576A JPS5377464A (en) 1976-12-21 1976-12-21 Taking-in and out unit of semiconductor wafer storage boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15460576A JPS5377464A (en) 1976-12-21 1976-12-21 Taking-in and out unit of semiconductor wafer storage boat

Publications (1)

Publication Number Publication Date
JPS5377464A true JPS5377464A (en) 1978-07-08

Family

ID=15587824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15460576A Pending JPS5377464A (en) 1976-12-21 1976-12-21 Taking-in and out unit of semiconductor wafer storage boat

Country Status (1)

Country Link
JP (1) JPS5377464A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48101999A (en) * 1972-04-07 1973-12-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48101999A (en) * 1972-04-07 1973-12-21

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