JPS531473A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS531473A
JPS531473A JP7568776A JP7568776A JPS531473A JP S531473 A JPS531473 A JP S531473A JP 7568776 A JP7568776 A JP 7568776A JP 7568776 A JP7568776 A JP 7568776A JP S531473 A JPS531473 A JP S531473A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
conductive film
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7568776A
Other languages
Japanese (ja)
Inventor
Kazuhiko Tsuji
Takashi Osone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7568776A priority Critical patent/JPS531473A/en
Publication of JPS531473A publication Critical patent/JPS531473A/en
Pending legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: To enable the wiring with high density, by utilizing the oxidization of the surface of the conductive film in peeling off the photo resist film in the oxigen plasma atomosphere, forming the oxide film on the conductive film simultaneously with the removal of resist film, an using this as the etching mask.
COPYRIGHT: (C)1978,JPO&Japio
JP7568776A 1976-06-25 1976-06-25 Manufacture for semiconductor device Pending JPS531473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7568776A JPS531473A (en) 1976-06-25 1976-06-25 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7568776A JPS531473A (en) 1976-06-25 1976-06-25 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS531473A true JPS531473A (en) 1978-01-09

Family

ID=13583348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7568776A Pending JPS531473A (en) 1976-06-25 1976-06-25 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS531473A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551824U (en) * 1978-10-03 1980-04-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551824U (en) * 1978-10-03 1980-04-05
JPS583221Y2 (en) * 1978-10-03 1983-01-20 株式会社宝製作所 switch terminal board

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