JPS52147084A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52147084A JPS52147084A JP6361076A JP6361076A JPS52147084A JP S52147084 A JPS52147084 A JP S52147084A JP 6361076 A JP6361076 A JP 6361076A JP 6361076 A JP6361076 A JP 6361076A JP S52147084 A JPS52147084 A JP S52147084A
- Authority
- JP
- Japan
- Prior art keywords
- film
- production
- semiconductor device
- forming
- overhangs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To remove the residue of a Si film and obtain fine patterns by removing the overhangs of the Si film by side-etching of an Al film in forming two-layered wiring conductive paths by forming the Si film on the Al film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6361076A JPS52147084A (en) | 1976-06-02 | 1976-06-02 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6361076A JPS52147084A (en) | 1976-06-02 | 1976-06-02 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52147084A true JPS52147084A (en) | 1977-12-07 |
Family
ID=13234225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6361076A Pending JPS52147084A (en) | 1976-06-02 | 1976-06-02 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52147084A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427372A (en) * | 1977-08-02 | 1979-03-01 | Seiko Epson Corp | Manufacture of semiconductor device |
JPH04154168A (en) * | 1990-10-18 | 1992-05-27 | Fuji Xerox Co Ltd | Manufacture of image sensor |
-
1976
- 1976-06-02 JP JP6361076A patent/JPS52147084A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427372A (en) * | 1977-08-02 | 1979-03-01 | Seiko Epson Corp | Manufacture of semiconductor device |
JPH04154168A (en) * | 1990-10-18 | 1992-05-27 | Fuji Xerox Co Ltd | Manufacture of image sensor |
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