JPS52147084A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52147084A
JPS52147084A JP6361076A JP6361076A JPS52147084A JP S52147084 A JPS52147084 A JP S52147084A JP 6361076 A JP6361076 A JP 6361076A JP 6361076 A JP6361076 A JP 6361076A JP S52147084 A JPS52147084 A JP S52147084A
Authority
JP
Japan
Prior art keywords
film
production
semiconductor device
forming
overhangs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6361076A
Other languages
Japanese (ja)
Inventor
Hiroshi Umezaki
Naoki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6361076A priority Critical patent/JPS52147084A/en
Publication of JPS52147084A publication Critical patent/JPS52147084A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To remove the residue of a Si film and obtain fine patterns by removing the overhangs of the Si film by side-etching of an Al film in forming two-layered wiring conductive paths by forming the Si film on the Al film.
COPYRIGHT: (C)1977,JPO&Japio
JP6361076A 1976-06-02 1976-06-02 Production of semiconductor device Pending JPS52147084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6361076A JPS52147084A (en) 1976-06-02 1976-06-02 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6361076A JPS52147084A (en) 1976-06-02 1976-06-02 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52147084A true JPS52147084A (en) 1977-12-07

Family

ID=13234225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6361076A Pending JPS52147084A (en) 1976-06-02 1976-06-02 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52147084A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427372A (en) * 1977-08-02 1979-03-01 Seiko Epson Corp Manufacture of semiconductor device
JPH04154168A (en) * 1990-10-18 1992-05-27 Fuji Xerox Co Ltd Manufacture of image sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427372A (en) * 1977-08-02 1979-03-01 Seiko Epson Corp Manufacture of semiconductor device
JPH04154168A (en) * 1990-10-18 1992-05-27 Fuji Xerox Co Ltd Manufacture of image sensor

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