JPS5232682A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS5232682A
JPS5232682A JP10878375A JP10878375A JPS5232682A JP S5232682 A JPS5232682 A JP S5232682A JP 10878375 A JP10878375 A JP 10878375A JP 10878375 A JP10878375 A JP 10878375A JP S5232682 A JPS5232682 A JP S5232682A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
steadly
semiconductors
manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10878375A
Other languages
Japanese (ja)
Inventor
Yoshinori Yukimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10878375A priority Critical patent/JPS5232682A/en
Publication of JPS5232682A publication Critical patent/JPS5232682A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: The oxidization film is formed at the lower part of gate region of semiconductor device in order to secure insulation with substrate, through which input can be taken in independently. In this way, semiconductors of high integration capability can be steadly manufactured.
COPYRIGHT: (C)1977,JPO&Japio
JP10878375A 1975-09-08 1975-09-08 Manufacturing process of semiconductor device Pending JPS5232682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10878375A JPS5232682A (en) 1975-09-08 1975-09-08 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10878375A JPS5232682A (en) 1975-09-08 1975-09-08 Manufacturing process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5232682A true JPS5232682A (en) 1977-03-12

Family

ID=14493355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10878375A Pending JPS5232682A (en) 1975-09-08 1975-09-08 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5232682A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141760A (en) * 1979-04-21 1980-11-05 Nippon Telegr & Teleph Corp <Ntt> Field effect transistor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131685A (en) * 1973-04-20 1974-12-17
JPS5028785A (en) * 1973-07-13 1975-03-24
JPS5081074A (en) * 1973-11-14 1975-07-01

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131685A (en) * 1973-04-20 1974-12-17
JPS5028785A (en) * 1973-07-13 1975-03-24
JPS5081074A (en) * 1973-11-14 1975-07-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141760A (en) * 1979-04-21 1980-11-05 Nippon Telegr & Teleph Corp <Ntt> Field effect transistor

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