JPS5272171A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5272171A
JPS5272171A JP14885075A JP14885075A JPS5272171A JP S5272171 A JPS5272171 A JP S5272171A JP 14885075 A JP14885075 A JP 14885075A JP 14885075 A JP14885075 A JP 14885075A JP S5272171 A JPS5272171 A JP S5272171A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
layer
layer composed
pbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14885075A
Other languages
Japanese (ja)
Other versions
JPS5852328B2 (en
Inventor
Hiromi Sakurai
Ikunori Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14885075A priority Critical patent/JPS5852328B2/en
Publication of JPS5272171A publication Critical patent/JPS5272171A/en
Publication of JPS5852328B2 publication Critical patent/JPS5852328B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To form insulating films free from pinholes and cracks by forming two layer films of an under layer composed of one or combination of P2O5, Al2O3 and PbO and an upper layer composed of SiO2 at the PN junction of a semiconductor device by vapor growth and laminating said two layer film several times.
COPYRIGHT: (C)1977,JPO&Japio
JP14885075A 1975-12-12 1975-12-12 hand tai souchi no seizou houhou Expired JPS5852328B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14885075A JPS5852328B2 (en) 1975-12-12 1975-12-12 hand tai souchi no seizou houhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14885075A JPS5852328B2 (en) 1975-12-12 1975-12-12 hand tai souchi no seizou houhou

Publications (2)

Publication Number Publication Date
JPS5272171A true JPS5272171A (en) 1977-06-16
JPS5852328B2 JPS5852328B2 (en) 1983-11-22

Family

ID=15462124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14885075A Expired JPS5852328B2 (en) 1975-12-12 1975-12-12 hand tai souchi no seizou houhou

Country Status (1)

Country Link
JP (1) JPS5852328B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0574760A (en) * 1991-09-17 1993-03-26 Sharp Corp Thin film dielectric

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0574760A (en) * 1991-09-17 1993-03-26 Sharp Corp Thin film dielectric

Also Published As

Publication number Publication date
JPS5852328B2 (en) 1983-11-22

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