JPS5272171A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5272171A JPS5272171A JP14885075A JP14885075A JPS5272171A JP S5272171 A JPS5272171 A JP S5272171A JP 14885075 A JP14885075 A JP 14885075A JP 14885075 A JP14885075 A JP 14885075A JP S5272171 A JPS5272171 A JP S5272171A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- layer
- layer composed
- pbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To form insulating films free from pinholes and cracks by forming two layer films of an under layer composed of one or combination of P2O5, Al2O3 and PbO and an upper layer composed of SiO2 at the PN junction of a semiconductor device by vapor growth and laminating said two layer film several times.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14885075A JPS5852328B2 (en) | 1975-12-12 | 1975-12-12 | hand tai souchi no seizou houhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14885075A JPS5852328B2 (en) | 1975-12-12 | 1975-12-12 | hand tai souchi no seizou houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5272171A true JPS5272171A (en) | 1977-06-16 |
JPS5852328B2 JPS5852328B2 (en) | 1983-11-22 |
Family
ID=15462124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14885075A Expired JPS5852328B2 (en) | 1975-12-12 | 1975-12-12 | hand tai souchi no seizou houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5852328B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0574760A (en) * | 1991-09-17 | 1993-03-26 | Sharp Corp | Thin film dielectric |
-
1975
- 1975-12-12 JP JP14885075A patent/JPS5852328B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0574760A (en) * | 1991-09-17 | 1993-03-26 | Sharp Corp | Thin film dielectric |
Also Published As
Publication number | Publication date |
---|---|
JPS5852328B2 (en) | 1983-11-22 |
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