JPS5235981A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS5235981A
JPS5235981A JP11097775A JP11097775A JPS5235981A JP S5235981 A JPS5235981 A JP S5235981A JP 11097775 A JP11097775 A JP 11097775A JP 11097775 A JP11097775 A JP 11097775A JP S5235981 A JPS5235981 A JP S5235981A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing
samller
diffused
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11097775A
Other languages
Japanese (ja)
Inventor
Hisayuki Higuchi
Keijiro Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11097775A priority Critical patent/JPS5235981A/en
Publication of JPS5235981A publication Critical patent/JPS5235981A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To make samller the distance of diffused and buried layer formed on the semiconductor device by using composite films with different etching characteristics.
COPYRIGHT: (C)1977,JPO&Japio
JP11097775A 1975-09-16 1975-09-16 Manufacturing method of semiconductor device Pending JPS5235981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11097775A JPS5235981A (en) 1975-09-16 1975-09-16 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11097775A JPS5235981A (en) 1975-09-16 1975-09-16 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5235981A true JPS5235981A (en) 1977-03-18

Family

ID=14549271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11097775A Pending JPS5235981A (en) 1975-09-16 1975-09-16 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5235981A (en)

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