JPS5267270A - Photo etching method - Google Patents

Photo etching method

Info

Publication number
JPS5267270A
JPS5267270A JP50143470A JP14347075A JPS5267270A JP S5267270 A JPS5267270 A JP S5267270A JP 50143470 A JP50143470 A JP 50143470A JP 14347075 A JP14347075 A JP 14347075A JP S5267270 A JPS5267270 A JP S5267270A
Authority
JP
Japan
Prior art keywords
etching method
photo etching
pattern
forming
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50143470A
Other languages
Japanese (ja)
Inventor
Shigeru Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50143470A priority Critical patent/JPS5267270A/en
Publication of JPS5267270A publication Critical patent/JPS5267270A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent pinhole and stage breakage by forming 1st pattern through 1st photo resist film to have etching of phosphosilicic acid glass and by forming 2nd pattern through 2nd photo resist film to have composite mask respectively.
COPYRIGHT: (C)1977,JPO&Japio
JP50143470A 1975-12-01 1975-12-01 Photo etching method Pending JPS5267270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50143470A JPS5267270A (en) 1975-12-01 1975-12-01 Photo etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50143470A JPS5267270A (en) 1975-12-01 1975-12-01 Photo etching method

Publications (1)

Publication Number Publication Date
JPS5267270A true JPS5267270A (en) 1977-06-03

Family

ID=15339442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50143470A Pending JPS5267270A (en) 1975-12-01 1975-12-01 Photo etching method

Country Status (1)

Country Link
JP (1) JPS5267270A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844715A (en) * 1981-09-11 1983-03-15 Fujitsu Ltd Forming method for minute pattern
JPS5860539A (en) * 1981-10-06 1983-04-11 Fujitsu Ltd Patterning method for positive resist

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844715A (en) * 1981-09-11 1983-03-15 Fujitsu Ltd Forming method for minute pattern
JPH0143450B2 (en) * 1981-09-11 1989-09-20 Fujitsu Ltd
JPS5860539A (en) * 1981-10-06 1983-04-11 Fujitsu Ltd Patterning method for positive resist

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