JPS5267270A - Photo etching method - Google Patents
Photo etching methodInfo
- Publication number
- JPS5267270A JPS5267270A JP50143470A JP14347075A JPS5267270A JP S5267270 A JPS5267270 A JP S5267270A JP 50143470 A JP50143470 A JP 50143470A JP 14347075 A JP14347075 A JP 14347075A JP S5267270 A JPS5267270 A JP S5267270A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- photo etching
- pattern
- forming
- resist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent pinhole and stage breakage by forming 1st pattern through 1st photo resist film to have etching of phosphosilicic acid glass and by forming 2nd pattern through 2nd photo resist film to have composite mask respectively.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50143470A JPS5267270A (en) | 1975-12-01 | 1975-12-01 | Photo etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50143470A JPS5267270A (en) | 1975-12-01 | 1975-12-01 | Photo etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5267270A true JPS5267270A (en) | 1977-06-03 |
Family
ID=15339442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50143470A Pending JPS5267270A (en) | 1975-12-01 | 1975-12-01 | Photo etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5267270A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844715A (en) * | 1981-09-11 | 1983-03-15 | Fujitsu Ltd | Forming method for minute pattern |
JPS5860539A (en) * | 1981-10-06 | 1983-04-11 | Fujitsu Ltd | Patterning method for positive resist |
-
1975
- 1975-12-01 JP JP50143470A patent/JPS5267270A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844715A (en) * | 1981-09-11 | 1983-03-15 | Fujitsu Ltd | Forming method for minute pattern |
JPH0143450B2 (en) * | 1981-09-11 | 1989-09-20 | Fujitsu Ltd | |
JPS5860539A (en) * | 1981-10-06 | 1983-04-11 | Fujitsu Ltd | Patterning method for positive resist |
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