JPS52128084A - Manufacture of semiconductor ic unit - Google Patents
Manufacture of semiconductor ic unitInfo
- Publication number
- JPS52128084A JPS52128084A JP4528276A JP4528276A JPS52128084A JP S52128084 A JPS52128084 A JP S52128084A JP 4528276 A JP4528276 A JP 4528276A JP 4528276 A JP4528276 A JP 4528276A JP S52128084 A JPS52128084 A JP S52128084A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- unit
- self
- short
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain a short-channel MOS transistor which features the flat element surface and a high integration density by providing deep and shallow diffusion regions at the source and drain regions through self-matching system.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4528276A JPS5918875B2 (en) | 1976-04-20 | 1976-04-20 | Method for manufacturing semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4528276A JPS5918875B2 (en) | 1976-04-20 | 1976-04-20 | Method for manufacturing semiconductor integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52128084A true JPS52128084A (en) | 1977-10-27 |
JPS5918875B2 JPS5918875B2 (en) | 1984-05-01 |
Family
ID=12714942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4528276A Expired JPS5918875B2 (en) | 1976-04-20 | 1976-04-20 | Method for manufacturing semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5918875B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54128293A (en) * | 1978-03-29 | 1979-10-04 | Hitachi Ltd | Manufacture of semiconductor device especially for insulator gate type semiconductor device |
JPH01130542A (en) * | 1987-11-17 | 1989-05-23 | Mitsubishi Electric Corp | Semiconductor device having interelement isolation region and manufacture thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63143171U (en) * | 1987-03-11 | 1988-09-21 |
-
1976
- 1976-04-20 JP JP4528276A patent/JPS5918875B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54128293A (en) * | 1978-03-29 | 1979-10-04 | Hitachi Ltd | Manufacture of semiconductor device especially for insulator gate type semiconductor device |
JPH01130542A (en) * | 1987-11-17 | 1989-05-23 | Mitsubishi Electric Corp | Semiconductor device having interelement isolation region and manufacture thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5918875B2 (en) | 1984-05-01 |
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