JPS52128084A - Manufacture of semiconductor ic unit - Google Patents

Manufacture of semiconductor ic unit

Info

Publication number
JPS52128084A
JPS52128084A JP4528276A JP4528276A JPS52128084A JP S52128084 A JPS52128084 A JP S52128084A JP 4528276 A JP4528276 A JP 4528276A JP 4528276 A JP4528276 A JP 4528276A JP S52128084 A JPS52128084 A JP S52128084A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
unit
self
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4528276A
Other languages
Japanese (ja)
Other versions
JPS5918875B2 (en
Inventor
Takeshi Ishihara
Shigero Kuninobu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4528276A priority Critical patent/JPS5918875B2/en
Publication of JPS52128084A publication Critical patent/JPS52128084A/en
Publication of JPS5918875B2 publication Critical patent/JPS5918875B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To obtain a short-channel MOS transistor which features the flat element surface and a high integration density by providing deep and shallow diffusion regions at the source and drain regions through self-matching system.
COPYRIGHT: (C)1977,JPO&Japio
JP4528276A 1976-04-20 1976-04-20 Method for manufacturing semiconductor integrated circuit device Expired JPS5918875B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4528276A JPS5918875B2 (en) 1976-04-20 1976-04-20 Method for manufacturing semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4528276A JPS5918875B2 (en) 1976-04-20 1976-04-20 Method for manufacturing semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS52128084A true JPS52128084A (en) 1977-10-27
JPS5918875B2 JPS5918875B2 (en) 1984-05-01

Family

ID=12714942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4528276A Expired JPS5918875B2 (en) 1976-04-20 1976-04-20 Method for manufacturing semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5918875B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54128293A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Manufacture of semiconductor device especially for insulator gate type semiconductor device
JPH01130542A (en) * 1987-11-17 1989-05-23 Mitsubishi Electric Corp Semiconductor device having interelement isolation region and manufacture thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143171U (en) * 1987-03-11 1988-09-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54128293A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Manufacture of semiconductor device especially for insulator gate type semiconductor device
JPH01130542A (en) * 1987-11-17 1989-05-23 Mitsubishi Electric Corp Semiconductor device having interelement isolation region and manufacture thereof

Also Published As

Publication number Publication date
JPS5918875B2 (en) 1984-05-01

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