JPS5440083A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5440083A JPS5440083A JP10700377A JP10700377A JPS5440083A JP S5440083 A JPS5440083 A JP S5440083A JP 10700377 A JP10700377 A JP 10700377A JP 10700377 A JP10700377 A JP 10700377A JP S5440083 A JPS5440083 A JP S5440083A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- diffusion
- areasoof
- integration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To realize a small size for the MOS transistor with an enhanced degree of integration by first forming the shallow source and drain region through diffusion and then providing a deep contact region through the push-in diffusion to the necessary areasoof these regions.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10700377A JPS5440083A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10700377A JPS5440083A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5440083A true JPS5440083A (en) | 1979-03-28 |
Family
ID=14448014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10700377A Pending JPS5440083A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5440083A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0474417A (en) * | 1990-07-16 | 1992-03-09 | Matsushita Electron Corp | Manufacture of semiconductor device |
-
1977
- 1977-09-05 JP JP10700377A patent/JPS5440083A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0474417A (en) * | 1990-07-16 | 1992-03-09 | Matsushita Electron Corp | Manufacture of semiconductor device |
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