JPS52119867A - Formation of fine pattern - Google Patents
Formation of fine patternInfo
- Publication number
- JPS52119867A JPS52119867A JP3660476A JP3660476A JPS52119867A JP S52119867 A JPS52119867 A JP S52119867A JP 3660476 A JP3660476 A JP 3660476A JP 3660476 A JP3660476 A JP 3660476A JP S52119867 A JPS52119867 A JP S52119867A
- Authority
- JP
- Japan
- Prior art keywords
- fine pattern
- formation
- regist
- element material
- electronic beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To apply an electronic beam regist on a pattern formed in a heavy element material and then X-ray on the heavy element material so that an electronic beam regist may be selectively exposed by means of a generated secondary electron and a fine pattern obtained.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3660476A JPS5824936B2 (en) | 1976-03-31 | 1976-03-31 | How to form fine patterns |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3660476A JPS5824936B2 (en) | 1976-03-31 | 1976-03-31 | How to form fine patterns |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119867A true JPS52119867A (en) | 1977-10-07 |
JPS5824936B2 JPS5824936B2 (en) | 1983-05-24 |
Family
ID=12474389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3660476A Expired JPS5824936B2 (en) | 1976-03-31 | 1976-03-31 | How to form fine patterns |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5824936B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57143869A (en) * | 1981-03-03 | 1982-09-06 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of field-effect transistor |
-
1976
- 1976-03-31 JP JP3660476A patent/JPS5824936B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57143869A (en) * | 1981-03-03 | 1982-09-06 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of field-effect transistor |
Also Published As
Publication number | Publication date |
---|---|
JPS5824936B2 (en) | 1983-05-24 |
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