JPS51140493A - Method of fabricating mis semiconductor device - Google Patents
Method of fabricating mis semiconductor deviceInfo
- Publication number
- JPS51140493A JPS51140493A JP6429575A JP6429575A JPS51140493A JP S51140493 A JPS51140493 A JP S51140493A JP 6429575 A JP6429575 A JP 6429575A JP 6429575 A JP6429575 A JP 6429575A JP S51140493 A JPS51140493 A JP S51140493A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- mis semiconductor
- fabricating
- fabricating mis
- prevents
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To provide a method of fabricating a MIS semiconductor device which prevents semiconductive surface from forming an inversion layer under insulating film having less masking process.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6429575A JPS51140493A (en) | 1975-05-30 | 1975-05-30 | Method of fabricating mis semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6429575A JPS51140493A (en) | 1975-05-30 | 1975-05-30 | Method of fabricating mis semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140493A true JPS51140493A (en) | 1976-12-03 |
Family
ID=13254095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6429575A Pending JPS51140493A (en) | 1975-05-30 | 1975-05-30 | Method of fabricating mis semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140493A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57180145A (en) * | 1981-04-30 | 1982-11-06 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semiconductor integrated circuit device |
-
1975
- 1975-05-30 JP JP6429575A patent/JPS51140493A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57180145A (en) * | 1981-04-30 | 1982-11-06 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semiconductor integrated circuit device |
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