JPS5248469A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5248469A JPS5248469A JP12482775A JP12482775A JPS5248469A JP S5248469 A JPS5248469 A JP S5248469A JP 12482775 A JP12482775 A JP 12482775A JP 12482775 A JP12482775 A JP 12482775A JP S5248469 A JPS5248469 A JP S5248469A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- serration
- eliminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate serration of contact part and improve the yield of contact formation, by selective etching og the compound film of an oxide film and Mo film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12482775A JPS5248469A (en) | 1975-10-15 | 1975-10-15 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12482775A JPS5248469A (en) | 1975-10-15 | 1975-10-15 | Process for production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5248469A true JPS5248469A (en) | 1977-04-18 |
Family
ID=14895073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12482775A Pending JPS5248469A (en) | 1975-10-15 | 1975-10-15 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5248469A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125671A (en) * | 1979-03-22 | 1980-09-27 | Shindengen Electric Mfg Co Ltd | High withstand voltage semiconductor device |
JPS5895856A (en) * | 1981-12-02 | 1983-06-07 | Matsushita Electronics Corp | Semiconductor device |
-
1975
- 1975-10-15 JP JP12482775A patent/JPS5248469A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125671A (en) * | 1979-03-22 | 1980-09-27 | Shindengen Electric Mfg Co Ltd | High withstand voltage semiconductor device |
JPS5895856A (en) * | 1981-12-02 | 1983-06-07 | Matsushita Electronics Corp | Semiconductor device |
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