JPH11111158A - Electron gun - Google Patents
Electron gunInfo
- Publication number
- JPH11111158A JPH11111158A JP27162597A JP27162597A JPH11111158A JP H11111158 A JPH11111158 A JP H11111158A JP 27162597 A JP27162597 A JP 27162597A JP 27162597 A JP27162597 A JP 27162597A JP H11111158 A JPH11111158 A JP H11111158A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- electron emission
- needle
- electron gun
- emission source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、ブラウン管など
に用いられる電子銃に関する。The present invention relates to an electron gun used for a cathode ray tube or the like.
【０００２】[0002]
【従来の技術】電子銃は、例えばテレビジョンに用いら
れる受像管の構成要素である。この電子銃（カソード）
の基本的な構成は、図３に示すように、先端部が閉じた
構成の陰極筒３０１の先端に、電子放出層３０２が形成
されている。また、陰極筒３０１の内部にはヒータ３０
３が備えられている。この陰極筒３０１は、マグネシウ
ムや珪素などの還元剤をドープした高純度のＮｉから構
成し、厚さは０．１ｍｍ程度である。また、電子放出層
３０２は、酸化バリウム・酸化カルシウム・酸化ストロ
ンチウムのいわゆる三元酸化物から構成するようにして
いる。2. Description of the Related Art An electron gun is a component of a picture tube used for a television, for example. This electron gun (cathode)
As shown in FIG. 3, the basic configuration of the first embodiment is such that an electron emission layer 302 is formed at the tip of a cathode tube 301 having a closed tip. The heater 30 is provided inside the cathode tube 301.
3 are provided. The cathode tube 301 is made of high-purity Ni doped with a reducing agent such as magnesium or silicon, and has a thickness of about 0.1 mm. The electron emission layer 302 is made of a so-called ternary oxide of barium oxide / calcium oxide / strontium oxide.
【０００３】そして、電子放出層３０２は、ヒータ３０
３により８００℃程度に加熱されると、主にバリウムが
還元されて遊離し、この遊離されたバリウムが電子放出
層３０２表面に向かい、これが電子放出を容易にしてい
る。放出された電子ビームは、第１グリッド３０４で集
められ、第２グリッド３０５，第３グリッド３０６，ホ
ーカス電極である第４グリッド３０７，第５グリッド３
０８を通過して蛍光面３０９に収束される（図３
（ｂ））。[0003] The electron emission layer 302 is provided with a heater 30.
When heated to about 800 ° C. by 3, barium is mainly reduced and released, and the released barium is directed to the surface of the electron-emitting layer 302, which facilitates electron emission. The emitted electron beams are collected by the first grid 304, and the second grid 305, the third grid 306, the fourth grid 307 as a focus electrode, and the fifth grid 3
08 and converges on the phosphor screen 309 (FIG. 3
(B)).
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、そのバ
リウムは使用中にガスと反応して消耗するので、常に電
子放出層３０２内部から補給されるように作られてい
る。しかし、多くの電子を放出させるために高電流を流
そうとしても、そのバリウムの補給が十分にはできな
い。加えて、電子放出のために加熱されるが、電子放出
層３０２は熱で劣化するという問題があった。However, since the barium is consumed by reacting with the gas during use, the barium is always supplied from the inside of the electron emission layer 302. However, even if an attempt is made to flow a high current to emit many electrons, barium cannot be sufficiently supplied. In addition, heating is performed for electron emission, but there is a problem that the electron emission layer 302 is deteriorated by heat.
【０００５】この発明は、以上のような問題点を解消す
るためになされたものであり、耐性がありより多くの電
子を放出させることができるようにすることを目的とす
る。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to be resistant and capable of emitting more electrons.
【０００６】[0006]
【課題を解決するための手段】この発明の電子銃は、円
筒状のグラファイトからなるカーボンナノチューブから
構成された電子放出源と、その電子放出源の電子放出側
に所定の距離離れて配置されてその先端部より電子を引
き出すための電子引き出し電極とを備えるようにした。
このように構成したので、電子放出源と電子引き出し電
極との間に電位を印加すると、カーボンナノチューブの
先端に高電界が集中して電子が引き出される。An electron gun according to the present invention comprises an electron emission source composed of a carbon nanotube made of cylindrical graphite and a predetermined distance from the electron emission side of the electron emission source. An electron extraction electrode for extracting electrons from the tip is provided.
With this configuration, when a potential is applied between the electron emission source and the electron extraction electrode, a high electric field is concentrated on the tip of the carbon nanotube, and electrons are extracted.
【０００７】[0007]
【発明の実施の形態】以下この発明の実施の形態を図を
参照して説明する。図１は、この発明の実施の形態にお
ける電子銃の要部構成を示す構成図である。この電子銃
は、基台１０１上にｘｙ方向に移動可能な可動ステージ
１０２を備え、その可動ステージ１０２上に針状エミッ
タ（電子放出源）１０３を配置している。また、針状エ
ミッタ１０３の先端部延長上に、基台１０１に固定され
た状態で引き出し電極１０４が配置されている。なお、
この引き出し電極１０４には、アパーチャ１０４ａが形
成されている。つまり、この実施の形態では、針状エミ
ッタ１０３と引き出し電極１０４とによる電界放出型冷
陰極電子源で電子銃を構成するようにした。また、可動
ステージ１０２を移動させて、アパーチャ１０４ａに対
する針状エミッタ１０３の先端部の位置と向きを制御す
ることで、電子引き出し効率の最適化を図ることができ
る。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing a main configuration of an electron gun according to an embodiment of the present invention. This electron gun includes a movable stage 102 that can move in xy directions on a base 101, and a needle-like emitter (electron emission source) 103 is arranged on the movable stage 102. Further, on the extension of the distal end portion of the needle-shaped emitter 103, the extraction electrode 104 is arranged in a state fixed to the base 101. In addition,
The extraction electrode 104 has an aperture 104a. That is, in this embodiment, the electron gun is constituted by a field emission type cold cathode electron source including the needle-shaped emitter 103 and the extraction electrode 104. Further, by moving the movable stage 102 and controlling the position and the direction of the tip of the needle-shaped emitter 103 with respect to the aperture 104a, the efficiency of electron extraction can be optimized.
【０００８】そして、この実施の形態においては、針状
エミッタ１０３をカーボンナノチューブの集合体から構
成するようにした。より詳しく説明すれば、カーボンナ
ノチューブの集合体からなる長さ数１０μｍの針形状の
柱状グラファイト複数が、その長手方向をほぼ同一方向
に向けて束ねられた状態に、針状エミッタ１０３が構成
されている。そして、針状エミッタ１０３は、長さ５ｍ
ｍ程度で１〜３ｍｍφに形成され、その先端部の０．５
〜１ｍｍ程度のところが、先細となるように加工形成さ
れている。ここで、カーボンナノチューブについて説明
すると、これは、例えば図１（ｄ）に示すように、完全
にグラファイト化して筒状をなし、その直径は４〜５０
ｎｍ程度であり、その長さは１μｍオーダである。そし
て、図１（ｅ）に示すように、その先端部は五員環が入
ることにより閉じている。なお、おれることで先端が閉
じていない場合もある。[0008] In this embodiment, the needle-like emitter 103 is made of an aggregate of carbon nanotubes. More specifically, the needle-like emitter 103 is configured such that a plurality of needle-like columnar graphites each having a length of several 10 μm, each of which is made of an aggregate of carbon nanotubes, are bundled with their longitudinal directions substantially in the same direction. I have. The needle-like emitter 103 has a length of 5 m.
m about 1-3 mmφ, and 0.5
A portion of about 1 mm is formed so as to be tapered. Here, the carbon nanotube will be described. For example, as shown in FIG. 1D, the carbon nanotube is completely graphitized to have a cylindrical shape, and has a diameter of 4 to 50.
nm and its length is on the order of 1 μm. Then, as shown in FIG. 1 (e), the tip is closed by the five-membered ring. Note that the tip may not be closed due to being on.
【０００９】このカーボンナノチューブは、ヘリウムガ
ス中で２本の炭素電極を１〜２ｍｍ程度離した状態で直
流アーク放電を起こしたときに、陽極側の炭素が蒸発し
て陰極側の炭素電極先端に凝集した堆積物中に形成され
る。すなわち、炭素電極間のギャップを１ｍｍ程度に保
った状態で、ヘリウム中で安定なアーク放電を持続させ
ると、陽極の炭素電極の直径とほぼ同じ径をもつ円柱状
の堆積物が、陰極先端に形成される。その円柱状の堆積
物は、外側の固い殻と、その内側のもろくて黒い芯との
２つの領域から構成されている。そして、内側の芯は、
堆積物柱の長さ方向にのびた繊維状の組織をもってい
る。その繊維状の組織が、上述した柱状グラファイトで
あり、堆積物柱を切り出すことなどにより、柱状グラフ
ァイトを得ることができる。なお、外側の固い殻は、グ
ラファイトの多結晶体である。When a direct current arc discharge occurs in a helium gas with two carbon electrodes separated by about 1 to 2 mm, the carbon on the anode side evaporates and is deposited on the tip of the carbon electrode on the cathode side. Formed in aggregated sediments. That is, when a stable arc discharge is maintained in helium with the gap between the carbon electrodes maintained at about 1 mm, a columnar deposit having a diameter substantially equal to the diameter of the carbon electrode of the anode is formed at the tip of the cathode. It is formed. The columnar deposit is composed of two regions: a hard shell on the outside and a fragile black core on the inside. And the inner core is
It has a fibrous structure extending along the length of the sediment column. The fibrous structure is the above-described columnar graphite, and columnar graphite can be obtained by cutting out a sediment column or the like. The outer hard shell is a graphite polycrystal.
【００１０】そして、その柱状グラファイトにおいて、
カーボンナノチューブは、炭素の多面体微粒子（ナノポ
リヘドロン：nanopolyhedoron）とともに、複数が集合
している。そして、図１（ｆ）に示すように、柱状グラ
ファイト１３１は、カーボンナノチューブ１３２が、ほ
ぼ同一方向を向いて集合した構造体である。なお、この
図１（ｅ）は、柱状グラファイトを途中で切った断面を
みる斜視図である。なお、カーボンナノチューブは、図
１（ｄ），（ｅ）では、グラファイトの単層が円筒状に
閉じた形状として模式的に示した。しかし、これに限る
ものではなく、複数のグラファイトの層が入れ子構造的
に積層し、それぞれのグラファイト層が円筒状に閉じた
同軸多層構造となっている形状もある。そして、それら
の中心部分は、空洞となっている。And in the columnar graphite,
A plurality of carbon nanotubes are aggregated together with carbon polyhedral fine particles (nanopolyhedoron). Then, as shown in FIG. 1F, the columnar graphite 131 is a structure in which the carbon nanotubes 132 are gathered in substantially the same direction. FIG. 1E is a perspective view showing a cross section of the columnar graphite cut in the middle. The carbon nanotube is schematically shown in FIGS. 1D and 1E as a single-layer graphite closed in a cylindrical shape. However, the shape is not limited to this, and there is also a shape in which a plurality of graphite layers are stacked in a nested structure, and each of the graphite layers has a coaxial multilayer structure closed in a cylindrical shape. And the center part of them is hollow.
【００１１】以上示したように、この実施の形態におい
ては、カーボンナノチューブによる針状エミッタ１０３
と引き出し電極１０４とによる電界放出型冷陰極電子源
で電子銃を構成するようにした。この結果、この実施の
形態によれば、電流密度（エミッション量）として１０
Ａ／ｃｍ2 の性能が得られた。また、理論的には、４０
０Ａ／ｃｍ2 の性能が得られる。そして、可動ステージ
１０２による針状エミッタ１０３の位置制御ができるの
で、針状エミッタ１０３の先端部が劣化して削られてき
ても、針状エミッタ１０３の配置を引き出し電極１０４
側へ移動させることができ、電子放出効率を維持してい
くことが容易に可能となる。As described above, in this embodiment, the needle-shaped emitter 103 made of carbon nanotubes is used.
An electron gun is constituted by a field emission cold-cathode electron source composed of a cathode and an extraction electrode 104. As a result, according to this embodiment, the current density (emission amount) is 10
A / cm 2 performance was obtained. In theory, 40
A performance of 0 A / cm 2 is obtained. Further, since the position of the needle-shaped emitter 103 can be controlled by the movable stage 102, even if the tip of the needle-shaped emitter 103 is deteriorated and shaved, the arrangement of the needle-shaped emitter 103 can be extracted and the extraction electrode 104 can be used.
Side, and it is possible to easily maintain the electron emission efficiency.
【００１２】ところで、上述では、柱状グラファイトを
その長手方向をほぼ同一方向に向けて束ねることでエミ
ッタを構成するようにしたが、これに限るものではな
い。図２に示すように、陰極筒２０１の先端部に複数の
柱状グラファイト（エミッタ）２０２を配置し、陰極筒
２０１と取り出し電極２０３との間に電界をかけること
で、柱状グラファイト２０２より電子を取り出すように
してもよい。この柱状グラファイト２０２は、例えば、
導電性接着剤により陰極筒２０１に固定すればよい。こ
の場合、図２（ａ）に示すように、柱状グラファイト２
０２の長手方向の向きを、電子取り出し方向になるべく
揃えるようにして配置した方がよい。In the above description, the emitter is formed by bundling columnar graphite with the longitudinal direction thereof substantially in the same direction. However, the present invention is not limited to this. As shown in FIG. 2, a plurality of columnar graphites (emitters) 202 are arranged at the tip of the cathode tube 201, and electrons are extracted from the columnar graphite 202 by applying an electric field between the cathode tube 201 and the extraction electrode 203. You may do so. The columnar graphite 202 is, for example,
What is necessary is just to fix to the cathode cylinder 201 with a conductive adhesive. In this case, as shown in FIG.
It is better to arrange them in such a way that the direction of the longitudinal direction of 02 is aligned as much as possible in the electron extraction direction.
【００１３】図２（ｃ）は柱状グラファイトの長手方向
の向きによるエミッション量の違いを示す特性図であ
る。図２（ｃ）において、（ｃ−１）は、図２（ａ）に
示したように、柱状グラファイト２０２の長手方向の向
きが、ほぼ電子取り出し方向を向いた状態の場合のエミ
ッション量を示している。また、（ｃ−２）は、図２
（ａ）に示したように、柱状グラファイト２０２の長手
方向の向きが、あまり電子取り出し方向を向いていない
状態の場合のエミッション量を示している。図２（ｃ）
から明らかなように、柱状グラファイトの長手方向の向
きが、電子取り出し方向の向いていた方が、より多くの
エミッション量を得ることができる。FIG. 2C is a characteristic diagram showing a difference in emission amount depending on a longitudinal direction of the columnar graphite. In FIG. 2C, (c-1) shows the emission amount when the longitudinal direction of the columnar graphite 202 is substantially in the electron extraction direction as shown in FIG. 2A. ing. (C-2) corresponds to FIG.
As shown in (a), the emission amount in the state where the longitudinal direction of the columnar graphite 202 is not so oriented in the electron extraction direction is shown. FIG. 2 (c)
As is clear from FIG. 5, a larger amount of emission can be obtained when the longitudinal direction of the columnar graphite is oriented in the electron extraction direction.
【００１４】[0014]
【発明の効果】以上説明したように、この発明では、円
筒状のグラファイトからなるカーボンナノチューブから
構成された電子放出源と、その電子放出源の電子放出側
に所定の距離離れて配置されてその先端部より電子を引
き出すための電子引き出し電極とを備えるようにした。
このように構成したので、電子銃は、電子放出源と電子
引き出し電極との間に電位を印加すると、カーボンナノ
チューブの先端に高電界が集中して電子が引き出される
電界放出型冷陰極電子源の構成となる。そして、この発
明によれば、従来のように使用中にガスと反応して熱電
子発生源が消耗するなどのことが無く、より長期に安定
してより多くの電子を放出させることができるという効
果を有する。As described above, according to the present invention, an electron emission source composed of a carbon nanotube made of a cylindrical graphite, and an electron emission source arranged at a predetermined distance from the electron emission side of the electron emission source. An electron extraction electrode for extracting electrons from the tip is provided.
With this configuration, the electron gun is a field emission cold cathode electron source in which a high electric field is concentrated at the tip of the carbon nanotube and electrons are extracted when a potential is applied between the electron emission source and the electron extraction electrode. Configuration. According to the present invention, it is possible to stably emit more electrons for a longer period of time without the need to react with the gas during use and to consume the thermoelectron generation source as in the related art. Has an effect.
【図１】 この発明の実施の形態における電子銃の要部
構成を示す構成図である。FIG. 1 is a configuration diagram showing a main configuration of an electron gun according to an embodiment of the present invention.
【図２】 この発明の他の実施の形態における電子銃の
要部構成を示す説明図である。FIG. 2 is an explanatory diagram showing a main configuration of an electron gun according to another embodiment of the present invention.
【図３】 従来の電子銃の構成を示す説明図である。FIG. 3 is an explanatory diagram showing a configuration of a conventional electron gun.
１０１…基台、１０２…可動ステージ、１０３…針状エ
ミッタ（電子放出源）、１０４…引き出し電極、１０４
ａ…アパーチャ、１３１…柱状グラファイト、１３２…
カーボンナノチューブ。101: base, 102: movable stage, 103: needle-like emitter (electron emission source), 104: extraction electrode, 104
a: aperture, 131: columnar graphite, 132:
carbon nanotube.
Claims (4)
ナノチューブから構成された電子放出源と、 前記電子放出源の電子放出側に所定の距離離れて配置さ
れてその先端部より電子を引き出すための電子引き出し
電極とを備えたことを特徴とする電子銃。1. An electron emission source made of a carbon nanotube made of cylindrical graphite, and an electron extraction source arranged at a predetermined distance on the electron emission side of the electron emission source to extract electrons from a tip end thereof. An electron gun comprising: an electrode;
からなる柱状グラファイトから構成されていることを特
徴とする電子銃。2. The electron gun according to claim 1, wherein said electron emission source is made of columnar graphite made of an aggregate of said carbon nanotubes.
手方向が同一方向を向いた集合体から構成され、針状に
形成されていることを特徴とする電子銃。3. The electron gun according to claim 2, wherein the electron emission source is formed of an aggregate of the plurality of columnar graphites whose longitudinal directions are oriented in the same direction, and is formed in a needle shape. And an electron gun.
を変更できる移動可能な可動ステージ上に固定されてい
ることを特徴とする電子銃。4. The electron gun according to claim 1, wherein said electron emission source is fixed on a movable movable stage capable of changing a relative position with respect to said electron extraction electrode. gun.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27162597A JP3792859B2 (en) | 1997-10-03 | 1997-10-03 | Electron gun |
| EP98118206A EP0905737B1 (en) | 1997-09-30 | 1998-09-25 | Electron-emitting source |
| EP03017290A EP1361592B1 (en) | 1997-09-30 | 1998-09-25 | Method of manufacturing an electron-emitting source |
| DE69834673T DE69834673T2 (en) | 1997-09-30 | 1998-09-25 | Method for producing an electron-emitting source |
| DE69823441T DE69823441T2 (en) | 1997-09-30 | 1998-09-25 | Electron emitting source |
| US09/162,731 US6239547B1 (en) | 1997-09-30 | 1998-09-28 | Electron-emitting source and method of manufacturing the same |
| KR10-1998-0041222A KR100363005B1 (en) | 1997-09-30 | 1998-09-30 | Electronic emission source and its manufacturing method |
| KR10-2002-0051959A KR100539696B1 (en) | 1997-09-30 | 2002-08-30 | Electron emission source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27162597A JP3792859B2 (en) | 1997-10-03 | 1997-10-03 | Electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11111158A true JPH11111158A (en) | 1999-04-23 |
| JP3792859B2 JP3792859B2 (en) | 2006-07-05 |
Family
ID=17502691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27162597A Expired - Fee Related JP3792859B2 (en) | 1997-09-30 | 1997-10-03 | Electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3792859B2 (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6400091B1 (en) | 1999-03-18 | 2002-06-04 | Matsushita Electric Industrial Co., Ltd. | Electron emission element and image output device |
| US6456691B2 (en) | 2000-03-06 | 2002-09-24 | Rigaku Corporation | X-ray generator |
| US6692327B1 (en) | 1999-01-13 | 2004-02-17 | Matsushita Electric Industrial Co., Ltd. | Method for producing electron emitting element |
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-
1997
- 1997-10-03 JP JP27162597A patent/JP3792859B2/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6692327B1 (en) | 1999-01-13 | 2004-02-17 | Matsushita Electric Industrial Co., Ltd. | Method for producing electron emitting element |
| US6400091B1 (en) | 1999-03-18 | 2002-06-04 | Matsushita Electric Industrial Co., Ltd. | Electron emission element and image output device |
| US6456691B2 (en) | 2000-03-06 | 2002-09-24 | Rigaku Corporation | X-ray generator |
| JP2004511884A (en) * | 2000-10-06 | 2004-04-15 | ザ ユニバーシティ オブ ノース カロライナ − チャペル ヒル | X-ray generation mechanism using electron field emission cathode |
| US6734087B2 (en) | 2001-11-07 | 2004-05-11 | Hitachi, Ltd. | Method for fabricating electrode device |
| US8481158B2 (en) | 2004-04-19 | 2013-07-09 | Technology Research Institute Of Osaka Prefecture | Carbon-based fine structure array, aggregate of carbon-based fine structures, use thereof and method for preparation thereof |
| US9682862B2 (en) | 2004-04-19 | 2017-06-20 | Taiyo Nippon Sanso Corporation | Carbon-based fine structure array, aggregate of carbon-based fine structures, use thereof and method for preparation thereof |
| JP2008505832A (en) * | 2004-07-06 | 2008-02-28 | ナノプロプリエタリー，インコーポレイテッド | Activation of carbon nanotubes for field emission applications |
| JP2008507096A (en) * | 2004-07-14 | 2008-03-06 | ザ ボード オブ トラスティーズ オブ ザ ユニバーシティ オブ イリノイ | Microdischarge device assisted by field emission |
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| US8237344B2 (en) | 2008-02-01 | 2012-08-07 | Tsinghua University | Electron emission apparatus and method for making the same |
| JP2009231288A (en) * | 2008-03-19 | 2009-10-08 | Qinghua Univ | Field emission type electron source |
| JP2009231287A (en) * | 2008-03-19 | 2009-10-08 | Qinghua Univ | Carbon nanotube needle and manufacturing method of the same |
| US8995608B2 (en) | 2009-01-16 | 2015-03-31 | The University Of North Carolina At Chapel Hill | Compact microbeam radiation therapy systems and methods for cancer treatment and research |
| US9782136B2 (en) | 2014-06-17 | 2017-10-10 | The University Of North Carolina At Chapel Hill | Intraoral tomosynthesis systems, methods, and computer readable media for dental imaging |
| US9907520B2 (en) | 2014-06-17 | 2018-03-06 | The University Of North Carolina At Chapel Hill | Digital tomosynthesis systems, methods, and computer readable media for intraoral dental tomosynthesis imaging |
| US10980494B2 (en) | 2014-10-20 | 2021-04-20 | The University Of North Carolina At Chapel Hill | Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging |
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