JPH10244259A - Water treatment method - Google Patents

Water treatment method

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Publication number
JPH10244259A
JPH10244259A JP9049039A JP4903997A JPH10244259A JP H10244259 A JPH10244259 A JP H10244259A JP 9049039 A JP9049039 A JP 9049039A JP 4903997 A JP4903997 A JP 4903997A JP H10244259 A JPH10244259 A JP H10244259A
Authority
JP
Japan
Prior art keywords
water
cation exchange
treated
membrane separation
exchange resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9049039A
Other languages
Japanese (ja)
Other versions
JP3622407B2 (en
Inventor
Isamu Kato
勇 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurita Water Industries Ltd
Original Assignee
Kurita Water Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Industries Ltd filed Critical Kurita Water Industries Ltd
Priority to JP04903997A priority Critical patent/JP3622407B2/en
Publication of JPH10244259A publication Critical patent/JPH10244259A/en
Application granted granted Critical
Publication of JP3622407B2 publication Critical patent/JP3622407B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Removal Of Specific Substances (AREA)

Abstract

PROBLEM TO BE SOLVED: To treat efficiently water containing fluoride ions F or calcium ions Ca and water containing F and Ca and prepare pure water. SOLUTION: Water containing Ca and F is passed through a cation exchange column 2 and then treated by an RO membrane separation device 3 to prepare permeated water (purified water). Or Ca containing water is treated by a cation exchange column, and F containing water is RO membrane separation treated. Concentrated water in the RO membrane separation device 3 is mixed with regenerated waste liquid in the cation exchange column 2 to separate CaF2 precipitation to prepare treated water. The pure water is prepared by using cation exchange resin to remove Ca, and separating F and other salts by an RO membrane. The pure water is discharged by regenerating the cation exchange resin. CaF2 is separated by mixing the regenerated waste liquid containing a large amount of Ca with concentrated water containing a large amount of F provided by the RO membrane separation treatment, and the regenerated waste liquid and the concentrated water can be treated easily to prepare dischargeable treated water.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はフッ化物イオン
(F)及びカルシウムイオン(Ca)を含有する水、或
いは、Fを含有する水及びCaを含有する水を処理して
高純度水を製造する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention processes high-purity water by treating water containing fluoride ions (F) and calcium ions (Ca), or water containing F and water containing Ca. About the method.

【0002】[0002]

【従来の技術】従来、純水の製造手段としては、イオン
交換樹脂によるイオン交換法又は逆浸透(RO)膜分離
装置によるRO膜分離法があるが、イオン交換法では、
イオン交換樹脂の再生のために酸又はアルカリを多量に
必要とすることから、RO膜分離法が採用される場合が
多い。
2. Description of the Related Art Conventionally, as a means for producing pure water, there is an ion exchange method using an ion exchange resin or an RO membrane separation method using a reverse osmosis (RO) membrane separation apparatus.
Since a large amount of acid or alkali is required for regeneration of the ion exchange resin, the RO membrane separation method is often employed.

【0003】しかし、RO膜分離法は、膜で不純物を分
離する方法であるため、原水中にSSが混入したり、膜
濃縮水中の塩類濃度が高くなり、溶解度を超える濃度と
なって塩類が析出したりすると、膜表面にこれらが沈積
し、膜の目詰りで通水が不可能となる。特に、原水中に
CaとFが含まれている場合には、難溶性のCaF2
生成することになるが、このCaF2 の溶解度は8pp
m(F換算)と低いため、濃縮によるCaF2 の析出で
RO膜を閉塞させ易い。即ち、例えば、原水のF濃度が
5ppmの場合、純水(透過水)回収率90%でRO膜
分離処理すると、濃縮水のF濃度は50ppmとなり、
また、純水回収率95%でRO膜分離処理すると濃縮水
のF濃度は100ppmとなり、Caが共存するとCa
2 の析出でRO膜が閉塞し、通水は不可能となる。
[0003] However, since the RO membrane separation method is a method of separating impurities by a membrane, SS is mixed in the raw water or the salt concentration in the membrane concentrated water becomes high, and the concentration exceeds the solubility, and the salt is removed. When they are deposited, they are deposited on the surface of the membrane, and clogging of the membrane makes it impossible to pass water. In particular, if it contains Ca and F in the raw water, but will produce the CaF 2 hardly soluble, the solubility of the CaF 2 is 8pp
m (in terms of F), the RO film is easily clogged by the precipitation of CaF 2 by concentration. That is, for example, when the F concentration of the raw water is 5 ppm, when the RO membrane separation treatment is performed at a pure water (permeated water) recovery rate of 90%, the F concentration of the concentrated water becomes 50 ppm,
Further, when the RO membrane separation treatment is performed at a pure water recovery rate of 95%, the F concentration of the concentrated water becomes 100 ppm.
The RO film is blocked by the deposition of F 2 , and water cannot be passed.

【0004】このため、従来においては、原水中にCa
及びFが含まれている場合には、RO膜分離を行わず、
イオン交換樹脂によるイオン交換法が採用されている。
或いは、Caをソーダライム法でCaCO3 として沈殿
分離させた後、F等の塩類をRO膜で分離する方法が採
用されている。
For this reason, conventionally, in the raw water, Ca
And F is contained, RO membrane separation is not performed,
An ion exchange method using an ion exchange resin is employed.
Alternatively, a method is employed in which Ca is precipitated and separated as CaCO 3 by the soda lime method, and then salts such as F are separated by an RO membrane.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、イオン
交換樹脂のみで処理する方法では、前述の如く、再生の
ための酸やアルカリを多量に必要とするため、工業的に
不利である。
However, the method of treating with only an ion exchange resin is industrially disadvantageous as described above because it requires a large amount of acid or alkali for regeneration.

【0006】また、Caを沈殿分離した後RO膜分離す
る方法では、 Caの沈殿分離のための薬注条件やpH管理が難し
い。 沈殿槽を必要とする。 CaCO3 の汚泥が発生する。 RO膜分離処理の原水中にNa,CO3 等のイオン
が増加するため、膜負荷が大きくなり、RO膜分離装置
を大型化する必要がある。 Fが濃縮されたRO膜濃縮水の処理の問題がある。 といった欠点がある。
Further, in the method of separating Ca by precipitation and then RO membrane separation, it is difficult to control chemical injection conditions and pH for precipitation and separation of Ca. Requires a settling tank. CaCO 3 sludge is generated. Since ions such as Na and CO 3 increase in the raw water for the RO membrane separation treatment, the membrane load increases, and it is necessary to increase the size of the RO membrane separation apparatus. There is a problem in the treatment of RO membrane concentrated water in which F is concentrated. There are drawbacks.

【0007】本発明は上記従来の問題点を解決し、F及
びCaを含有する水或いはFを含有する水及びCaを含
有する水を効率的に処理して純水を製造する方法を提供
することを目的とする。
The present invention solves the above-mentioned conventional problems, and provides a method for producing pure water by efficiently treating water containing F and Ca or water containing F and Ca. The purpose is to:

【0008】[0008]

【課題を解決するための手段】請求項1の水処理方法
は、フッ化物イオン及びカルシウムイオンを含有する水
を処理する方法において、該水をカチオン交換樹脂と接
触させ、次いで逆浸透膜分離処理して透過水を第1処理
水とする第1工程と、該カチオン交換樹脂の再生排液と
該逆浸透膜分離処理の濃縮水とを混合してCaF2 を生
成させ、このCaF2 を分離して分離水を第2処理水と
する第2工程とを有することを特徴とする。
According to a first aspect of the present invention, there is provided a method for treating water containing fluoride ions and calcium ions, the method comprising contacting the water with a cation exchange resin, and then subjecting the water to reverse osmosis membrane separation. and a first step of the permeate from the first treated water, by mixing a concentrate of the regeneration effluent and the reverse osmosis membrane separation process of the cation exchange resin to produce a CaF 2, the CaF 2 separation And using the separated water as the second treated water.

【0009】請求項2の水処理方法は、フッ化物イオン
を含有するF含有水とカルシウムイオンを含有するCa
含有水とを処理する方法において、該Ca含有水をカチ
オン交換樹脂と接触させて第1処理水を得る第1工程
と、該F含有水を逆浸透膜分離処理して透過水を第2処
理水とする第2工程と、該カチオン交換樹脂の再生排液
と該逆浸透膜分離処理の濃縮水とを混合してCaF2
生成させ、このCaF2を分離して分離水を第3処理水
とする第3工程とを有することを特徴とする。なお、C
a含有水はCaF2 として析出するレベル以下の濃度で
あればFを含有していても良い。
According to a second aspect of the present invention, there is provided the water treatment method, wherein the F-containing water containing fluoride ions and the Ca-containing water containing calcium ions.
In the method for treating water containing water, a first step of contacting the water containing Ca with a cation exchange resin to obtain a first treated water, and a second treatment of separating the permeated water by subjecting the F containing water to a reverse osmosis membrane separation treatment A second step of forming water, mixing the regenerated effluent of the cation exchange resin with the concentrated water of the reverse osmosis membrane separation treatment to generate CaF 2 , separating the CaF 2 and subjecting the separated water to third treatment And a third step of forming water. Note that C
The a-containing water may contain F as long as it has a concentration equal to or lower than the level at which it precipitates as CaF 2 .

【0010】本発明の方法では、被処理水中のCaをカ
チオン交換樹脂で除去し、F、その他の塩類をRO膜で
分離することにより純水を得る。このカチオン交換樹脂
の再生により排出される、Caを多量に含む再生排液
と、RO膜分離処理で得られるFを多量に含む濃縮水と
を混合することでCaF2 を析出させ、これを分離除去
することにより、再生排液及び濃縮水についても放流可
能な処理水にまで容易に処理することができる。
In the method of the present invention, pure water is obtained by removing Ca in the water to be treated with a cation exchange resin and separating F and other salts with an RO membrane. CaF 2 is precipitated by mixing a regenerated effluent containing a large amount of Ca, which is discharged by regeneration of the cation exchange resin, and a concentrated water containing a large amount of F obtained by RO membrane separation treatment, and separated. By removing, even the regenerated effluent and the concentrated water can be easily processed into treated water that can be discharged.

【0011】[0011]

【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0012】図1は請求項1の水処理方法の実施の形態
を示す系統図、図2は請求項2の水処理方法の実施の形
態を示す系統図である。なお、図2において、図1に示
す部材と同一機能を奏する部材には同一符号を付してあ
る。
FIG. 1 is a system diagram showing an embodiment of the water treatment method of the first aspect, and FIG. 2 is a system diagram showing an embodiment of the water treatment method of the second aspect. In FIG. 2, members having the same functions as those shown in FIG. 1 are denoted by the same reference numerals.

【0013】図1に示す方法は、Ca及びFを共に含有
する水(以下、Ca・F含有水ということがある。)を
処理する方法であって、Ca・F含有水はまずpH調整
槽1で必要に応じて酸又はアルカリのpH調整剤を添加
して後段のRO膜分離装置3の通水条件であるpH5〜
8にpH調整される。
The method shown in FIG. 1 is a method for treating water containing both Ca and F (hereinafter sometimes referred to as Ca.F containing water). In step 1, an acid or alkali pH adjuster is added as needed to adjust the pH of the RO membrane
The pH is adjusted to 8.

【0014】pH調整された水は、次いでカチオン交換
塔2に通水され、カチオン交換樹脂によりCaが除去さ
れる。カチオン交換塔2の流出水は次いでRO膜分離装
置3に導入される。そしてRO膜でF、その他の塩類が
分離された透過水を純水(第1処理水)として回収す
る。一方、濃縮水は混合槽4に導入される。
The pH-adjusted water is then passed through a cation exchange tower 2 to remove Ca by a cation exchange resin. The effluent from the cation exchange column 2 is then introduced into the RO membrane separation device 3. Then, the permeated water from which F and other salts have been separated by the RO membrane is recovered as pure water (first treated water). On the other hand, the concentrated water is introduced into the mixing tank 4.

【0015】混合槽4には、カチオン交換塔2から排出
されるカチオン交換樹脂の再生排液が導入され、Fが濃
縮され、高濃度にFを含むRO膜分離装置3の濃縮水
と、カチオン交換樹脂の再生によりCaを多量に含む再
生排液とが混合される。
In the mixing tank 4, a regenerated effluent of the cation exchange resin discharged from the cation exchange tower 2 is introduced, F is concentrated, and the concentrated water of the RO membrane separation device 3 containing F at a high concentration is mixed with the cation exchange resin. By the regeneration of the exchange resin, the regeneration wastewater containing a large amount of Ca is mixed.

【0016】本発明においては、カチオン交換塔2の再
生液としてはNaCl水溶液を用いるのが、中性の再生
排液が得られるため有利である。即ち、再生排液が中性
であれば、RO膜分離装置3の濃縮水もpH5〜8のほ
ぼ中性域であるため、これらを混合すれば、pH調整を
行うことなく、CaF2 の沈殿に好適なpH域(pH6
〜8)とすることができる。従って、カチオン交換塔2
のカチオン交換樹脂としてはNa型弱酸性カチオン交換
樹脂又はNa型強酸性カチオン交換樹脂を用いる。
In the present invention, it is advantageous to use an aqueous solution of NaCl as the regenerating solution for the cation exchange column 2 because a neutral regenerating effluent can be obtained. That is, if the regenerated effluent is neutral, the concentrated water in the RO membrane separation device 3 is also in a substantially neutral range of pH 5 to 8, and if these are mixed, the CaF 2 precipitates without pH adjustment. PH range (pH 6
To 8). Therefore, the cation exchange column 2
As the cation exchange resin, a Na type weakly acidic cation exchange resin or a Na type strongly acidic cation exchange resin is used.

【0017】RO膜分離装置3の濃縮水とカチオン交換
樹脂の再生排液とは混合槽4で混合された後、凝集槽5
でポリアクリルアミド系ポリマー等の高分子凝集剤が添
加され、これにより、CaF2 が析出沈殿する。このC
aF2 は沈殿槽6で分離される。
After the concentrated water of the RO membrane separation device 3 and the regenerated effluent of the cation exchange resin are mixed in the mixing tank 4, the coagulation tank 5
, A polymer coagulant such as a polyacrylamide polymer is added, whereby CaF 2 precipitates and precipitates. This C
aF 2 is separated in the sedimentation tank 6.

【0018】沈殿槽6でCaF2 を分離して得られる分
離水は、放流可能な排出基準(一般的にはF濃度15p
pm以下)にまで十分にF濃度を低減したものとなり、
処理水として系外に排出し放流することができる。
The separated water obtained by separating CaF 2 in the sedimentation tank 6 is discharged according to a discharge standard (generally, an F concentration of 15 p
pm or less).
It can be discharged outside the system as treated water and discharged.

【0019】なお、この場合、FをCaF2 として十分
に除去するには、再生排液中のCaが不足する場合に
は、混合槽4に別途Ca源を添加してCaの不足分を補
う。この場合、Ca源としてCaCl2 を添加すれば、
pH調整を行う必要がないが、Ca(OH)2 を用いた
場合には更にHCl又はH2 SO4 等の酸を添加して系
内のpHを6〜8程度に調整する必要がある。
In this case, in order to sufficiently remove F as CaF 2 , if Ca in the regenerated effluent is insufficient, a Ca source is separately added to the mixing tank 4 to make up for the insufficient Ca. . In this case, if CaCl 2 is added as a Ca source,
Although not necessary to perform the pH adjustment, it is necessary to further adjust the 6 to 8 the pH in acid added systems such as HCl or H 2 SO 4 in the case of using Ca (OH) 2.

【0020】図1に示す方法は、Fを含む地下水やFを
含む排水を予めCa塩を添加して沈殿処理を行ない、こ
れをそのまま放流又は雑用水として再利用あるいは純水
として回収等、多目的のため一次処理を行なったCa及
びFを含む排水の処理等に有効である。
In the method shown in FIG. 1, groundwater containing F or wastewater containing F is subjected to a precipitation treatment by adding Ca salt in advance, and this is discharged as it is or reused as miscellaneous water or recovered as pure water. Therefore, it is effective for the treatment of wastewater containing Ca and F which has been subjected to the primary treatment.

【0021】図2に示す方法は、Caを含むがFをほと
んど含まない通常の工水、水道水、あるいはCa塩を使
用した排水処理水等のCa含有水と、IC製造工程から
排出されるような、HF,NH4 F等のFとHNO3
の酸を含み、Caを含まないF含有水とがそれぞれ分別
されて排出される場合に好適な方法であり、この場合に
は、図2に示す如く、Ca含有水のみをカチオン交換塔
2で処理し、F含有水はカチオン交換塔2に通水するこ
となく、直接RO膜分離装置3で処理する。このように
することにより、Ca含有水とF含有水とを混合して処
理する場合に比べて、カチオン交換塔2の通水量が低減
されるため、カチオン交換塔2を小型化することができ
る。
In the method shown in FIG. 2, Ca-containing water such as ordinary industrial water containing tap water, tap water, or treated waste water using Ca salt, which contains Ca but hardly contains F, is discharged from the IC manufacturing process. Such a method is suitable for a case in which F such as HF and NH 4 F and F-containing water containing an acid such as HNO 3 and containing no Ca are separated and discharged, respectively. As shown in FIG. 2, only Ca-containing water is treated in the cation exchange column 2, and F-containing water is treated directly in the RO membrane separation device 3 without passing through the cation exchange column 2. By doing so, the amount of water passing through the cation exchange tower 2 is reduced as compared with the case where the Ca-containing water and the F-containing water are mixed and treated, so that the cation exchange tower 2 can be downsized. .

【0022】図2に示す方法では、Ca含有水及びF含
有水をそれぞれpH調整槽1A,1Bに導入して、前述
の如く、RO膜分離装置3の通水条件であるpH5〜8
にpH調整する。
In the method shown in FIG. 2, Ca-containing water and F-containing water are introduced into the pH adjusting tanks 1A and 1B, respectively, and the pH of the RO membrane separation apparatus 3 is adjusted to pH 5 to 8 as described above.
Adjust the pH to.

【0023】そして、F含有水はそのまま滞留槽7へ送
られる。一方、Ca含有水はカチオン交換塔2に通水し
てCaを除去して第1処理水とされ、滞留槽7へ送られ
る。F含有水と第1処理水とが混合された水は、この滞
留槽7からRO膜分離装置3に導入され、RO膜でF及
びその他の塩類を除去して得られる透過水を純水(第2
処理水)として回収する。
Then, the F-containing water is sent to the retention tank 7 as it is. On the other hand, the Ca-containing water is passed through the cation exchange tower 2 to remove Ca and becomes the first treated water, which is sent to the retention tank 7. The water in which the F-containing water and the first treated water are mixed is introduced into the RO membrane separation device 3 from the retention tank 7, and the permeated water obtained by removing F and other salts with the RO membrane is purified water ( Second
(Treated water).

【0024】このRO膜分離装置3の濃縮水とカチオン
交換塔2の再生排液は、図1に示す方法と同様に、混合
槽4に導入されて混合された後、凝集槽5で高分子凝集
剤の添加を受けて凝集処理され、次いで沈殿槽6でCa
2 が沈殿分離され、分離水は処理水(第3処理水)と
して系外へ排出される。
The concentrated water of the RO membrane separation device 3 and the regenerated effluent of the cation exchange column 2 are introduced into a mixing tank 4 and mixed, as in the method shown in FIG. Coagulation treatment is performed by adding a coagulant, and then Ca
F 2 is precipitated and separated, and the separated water is discharged out of the system as treated water (third treated water).

【0025】この方法においても、再生排液中のCaの
みでは、濃縮水中のFをCaF2 として十分に除去する
ことができない場合には、別途CaCl2 などのCa源
を混合槽4に添加する。Ca(OH)2 を使用する場合
はHCl又はH2 SO4 でpH6〜8に調整する必要が
ある。これは混合槽で行なってもよいが、混合槽の次工
程にpH調整槽を設置した方が運転管理は容易となる。
Also in this method, when F in the concentrated water cannot be sufficiently removed as CaF 2 only by Ca in the regenerated effluent, a Ca source such as CaCl 2 is separately added to the mixing tank 4. . When using Ca (OH) 2 has to be adjusted to pH6~8 with HCl or H 2 SO 4. This may be carried out in a mixing tank, but operation management is easier if a pH adjusting tank is provided in the next step of the mixing tank.

【0026】[0026]

【実施例】以下に、実施例を挙げて本発明をより具体的
に説明する。
The present invention will be described below more specifically with reference to examples.

【0027】実施例1 Ca及びFを含む下記水質の地下水を原水として図1に
示す方法で処理を行った。
Example 1 Groundwater of the following quality containing Ca and F was treated as raw water by the method shown in FIG.

【0028】原水水質 pH:6.2 Ca:12mg/L F :6.5mg/L このCa・F含有水を直接カチオン交換樹脂としてレバ
チットCNP−80(バイエル社製)を1.0L充填し
たカチオン交換塔2にSV20/hrで通水した。
Raw water quality pH: 6.2 Ca: 12 mg / L F: 6.5 mg / L Cation filled with 1.0 L of Levatit CNP-80 (manufactured by Bayer) using the Ca.F-containing water directly as a cation exchange resin. Water was passed through the exchange tower 2 at SV 20 / hr.

【0029】次いで、カチオン交換塔2の流出水(水質
は表1に示す通り。)をRO膜分離装置3に導入し、透
過水を純水として回収すると共に、濃縮水を混合槽4に
送給した。このRO膜分離装置3は、RO膜としてポリ
アミド系材質のスパイラル型のものを用いたものであ
り、RO膜分離は水回収率80%で操作圧10〜15気
圧の条件で行った。
Next, the effluent from the cation exchange tower 2 (the water quality is as shown in Table 1) is introduced into the RO membrane separation device 3, and the permeated water is recovered as pure water, and the concentrated water is sent to the mixing tank 4. Paid. The RO membrane separator 3 uses a spiral type RO membrane made of a polyamide material as the RO membrane. The RO membrane separation was performed at a water recovery of 80% and an operating pressure of 10 to 15 atm.

【0030】得られた純水及び濃縮水の水質は表1に示
す通りであり、高純度の純水が得られた。
The quality of the obtained pure water and concentrated water is as shown in Table 1, and high-purity pure water was obtained.

【0031】カチオン交換塔2は10重量%NaCl水
溶液により、4000BVに1回の頻度で再生レベル1
00g−NaCl/L−樹脂,SV5/hrの条件で再
生処理した。再生により得られた表1に示す水質の再生
排液は、混合槽4に送給した。
The cation exchange column 2 is regenerated with a 10% by weight aqueous solution of NaCl once every 4000 BV.
Regeneration treatment was performed under the conditions of 00g-NaCl / L-resin and SV5 / hr. The regenerated wastewater of the quality shown in Table 1 obtained by the regeneration was fed to the mixing tank 4.

【0032】混合槽4では、再生排液と濃縮水とを1:
80の容量比で混合し、その後、CaCl2 300mg
/L(as Ca)及び凝集槽5でポリマー(クリフロ
ックPA367(栗田工業(株)製))を1mg/L添
加した後、沈殿槽6でCaF2 を分離した。
In the mixing tank 4, the regenerated effluent and the concentrated water are mixed at 1:
Mix at a volume ratio of 80, then add 300 mg of CaCl 2
/ L (as Ca) and 1 mg / L of polymer (Cryfloc PA367 (manufactured by Kurita Kogyo Co., Ltd.)) were added in the flocculation tank 5, and then CaF 2 was separated in the precipitation tank 6.

【0033】沈殿槽6の分離水の水質は表1に示す通り
であり、放流可能な処理水が得られた。
The quality of the separated water in the sedimentation tank 6 was as shown in Table 1, and treated water that could be discharged was obtained.

【0034】[0034]

【表1】 [Table 1]

【0035】実施例2 半導体工場の総合廃水処理設備から排出されるCaを含
む下記水質の排水とエッチング工程から排出されるFを
含む下記水質の排水を原水として図2に示す方法で処理
を行った。
Example 2 The wastewater of the following quality containing Ca discharged from the integrated wastewater treatment facility of a semiconductor factory and the wastewater of the following quality containing F discharged from the etching step are treated as raw water by the method shown in FIG. Was.

【0036】Ca系原水水質 pH:9.5 Ca:60mg/L F :0.1mg/L以下F系原水水質 pH:3.1 F :32.6mg/L Ca:0.1mg/L以下 このCa含有水及びF含有水をそれぞれpH調整槽1
A,1BでHCl又はNaOHを添加してpH6.0に
調整した後、Ca含有水はカチオン交換樹脂としてレバ
チットCNP−80(バイエル社製)を1.0L充填し
たカチオン交換塔2にSV20/hrで通水した。
Ca-based raw water quality pH: 9.5 Ca: 60 mg / L F: 0.1 mg / L or less F-based raw water quality pH: 3.1 F: 32.6 mg / L Ca: 0.1 mg / L or less The Ca-containing water and the F-containing water are each stored in a pH adjusting tank 1
After adjusting the pH to 6.0 by adding HCl or NaOH with A and 1B, the Ca-containing water was placed in a cation exchange column 2 packed with 1.0 L of Levatit CNP-80 (manufactured by Bayer) as a cation exchange resin, and the SV20 / hr was added. Water was passed.

【0037】このカチオン交換塔2の流出水(水質は表
2に示す通り。)とpH調整したF含有水を滞留槽7を
経てRO膜分離装置3に導入し、透過水を純水として回
収すると共に、濃縮水を混合槽4に送給した。滞留槽7
へ流入するカチオン交換塔処理水とF含有水の比率は
2:1であった。このRO膜分離装置3は、RO膜とし
てポリアミド系材質のスパイラル型のものを用いたもの
であり、RO膜分離は水回収率90%で操作圧10〜1
5気圧の条件で行った。
The effluent (water quality is as shown in Table 2) of the cation exchange tower 2 and the F-containing water whose pH has been adjusted are introduced into the RO membrane separation device 3 through the retention tank 7, and the permeated water is recovered as pure water. At the same time, the concentrated water was fed to the mixing tank 4. Retention tank 7
The ratio of the cation exchange tower treated water and the F-containing water flowing into the reactor was 2: 1. The RO membrane separation apparatus 3 uses a spiral type of a polyamide material as the RO membrane. The RO membrane separation is performed at a water recovery rate of 90% and an operating pressure of 10 to 1%.
The test was performed under the condition of 5 atm.

【0038】得られた純水及び濃縮水の水質は表2に示
す通りであり、高純度の純水が得られた。
The quality of the obtained pure water and concentrated water is as shown in Table 2, and high-purity pure water was obtained.

【0039】カチオン交換塔2は10重量%NaCl水
溶液により、700BVに1回の頻度で再生レベル10
0g−NaCl/L−樹脂,SV5/hrの条件で再生
処理した。再生により得られた表2に示す水質の再生排
液は、混合槽4に送給した。
The cation exchange column 2 is regenerated with a 10 wt% aqueous solution of NaCl once every 700 BV.
Regeneration treatment was performed under the conditions of 0 g-NaCl / L-resin and SV5 / hr. The regenerated wastewater of the water quality shown in Table 2 obtained by the regeneration was fed to the mixing tank 4.

【0040】混合槽4では、再生排液と濃縮水とを1:
10の容量比で混合し、その後、凝集槽5でポリマー
(クリフロックPA367(栗田工業(株)社製))を
1mg/L添加した後、沈殿槽6でCaF2 を分離し
た。
In the mixing tank 4, the regenerated effluent and the concentrated water are mixed at 1:
After mixing at a volume ratio of 10 and then adding 1 mg / L of polymer (Cryfloc PA367 (manufactured by Kurita Kogyo Co., Ltd.)) in the flocculation tank 5, CaF 2 was separated in the precipitation tank 6.

【0041】沈殿槽6の分離水の水質は表2に示す通り
であり、放流可能な処理水が得られた。
The quality of the separated water in the sedimentation tank 6 was as shown in Table 2, and the treated water that could be discharged was obtained.

【0042】[0042]

【表2】 [Table 2]

【0043】[0043]

【発明の効果】以上詳述した通り、Caをカチオン交換
樹脂で除去し、F、その他の塩類をRO膜で分離除去す
る本発明の水処理方法によれば、 CaF2 によるRO膜の閉塞がない。 従来のイオン交換樹脂法に比べて、イオン交換樹脂
の再生のための薬剤量は大幅に低減される。 CaをCaCO3 として沈殿分離した後、RO膜分
離処理する従来法に比べて、CaCO3 汚泥発生がな
く、しかも、RO膜の負荷の増大もないため、装置を小
型化できる。 といった効果が奏され、Ca・F含有水或いは、Ca含
有水及びF含有水を低コストにて、安定かつ効率的に処
理することができる。
As described above in detail, according to the water treatment method of the present invention in which Ca is removed by a cation exchange resin and F and other salts are separated and removed by an RO membrane, the RO membrane is blocked by CaF 2. Absent. Compared with the conventional ion exchange resin method, the amount of drug for regenerating the ion exchange resin is greatly reduced. Compared to the conventional method of separating RO by Ca as CaCO 3 and separating the RO membrane, CaCO 3 sludge is not generated and the load on the RO membrane is not increased, so that the apparatus can be downsized. Thus, Ca-F-containing water or Ca-containing water and F-containing water can be treated stably and efficiently at low cost.

【0044】しかもカチオン交換樹脂の再生排液とRO
膜分離処理の濃縮水とを混合し、生成したCaF2 を分
離するのみで、これらを放流可能な処理水にまで処理す
ることができ、再生排液や濃縮水の処理も効率的に行え
る。
In addition, the regenerated effluent of the cation exchange resin and the RO
By merely mixing the concentrated water of the membrane separation treatment and separating the generated CaF 2 , it is possible to treat the treated water into a treated water that can be discharged, and the regenerated wastewater and the concentrated water can be efficiently treated.

【図面の簡単な説明】[Brief description of the drawings]

【図1】請求項1の水処理方法の実施の形態を示す系統
図である。
FIG. 1 is a system diagram showing an embodiment of a water treatment method according to claim 1;

【図2】請求項2の水処理方法の実施の形態を示す系統
図である。
FIG. 2 is a system diagram showing an embodiment of a water treatment method according to claim 2;

【符号の説明】[Explanation of symbols]

1,1A,1B pH調整槽 2 カチオン交換塔 3 RO膜分離装置 4 混合槽 5 凝集槽 6 沈殿槽 7 滞留槽 1, 1A, 1B pH adjustment tank 2 Cation exchange tower 3 RO membrane separation device 4 Mixing tank 5 Coagulation tank 6 Sedimentation tank 7 Retention tank

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 フッ化物イオン及びカルシウムイオンを
含有する水を処理する方法において、 該水をカチオン交換樹脂と接触させ、次いで逆浸透膜分
離処理して透過水を第1処理水とする第1工程と、 該カチオン交換樹脂の再生排液と該逆浸透膜分離処理の
濃縮水とを混合してCaF2 を生成させ、このCaF2
を分離して分離水を第2処理水とする第2工程とを有す
ることを特徴とする水処理方法。
1. A method for treating water containing fluoride ions and calcium ions, wherein the water is brought into contact with a cation exchange resin, and then subjected to reverse osmosis membrane separation treatment to obtain permeated water as first treated water. a step, to generate CaF 2 by mixing a concentrate of the regeneration effluent and the reverse osmosis membrane separation process of the cation exchange resin, the CaF 2
And treating the separated water as second treated water.
【請求項2】 フッ化物イオンを含有するフッ化物含有
水とカルシウムイオンを含有するカルシウム含有水とを
処理する方法において、 該Ca含有水をカチオン交換樹脂と接触させて第1処理
水を得る第1工程と、 該F含有水を逆浸透膜分離処理して透過水を第2処理水
とする第2工程と、 該カチオン交換樹脂の再生排液と該逆浸透膜分離処理の
濃縮水とを混合してCaF2 を生成させ、このCaF2
を分離して分離水を第3処理水とする第3工程とを有す
ることを特徴とする水処理方法。
2. A method for treating fluoride-containing water containing fluoride ions and calcium-containing water containing calcium ions, comprising: contacting the Ca-containing water with a cation exchange resin to obtain a first treated water. One step, a second step in which the F-containing water is subjected to reverse osmosis membrane separation treatment to make permeated water a second treated water, and a regenerated effluent of the cation exchange resin and concentrated water in the reverse osmosis membrane separation treatment. Mixing to form CaF 2 , and this CaF 2
And treating the separated water as third treated water.
【請求項3】 請求項2の方法において、該第1処理水
をF含有水と共に逆浸透膜分離処理することを特徴とす
る水処理方法。
3. The water treatment method according to claim 2, wherein the first treated water is subjected to a reverse osmosis membrane separation treatment together with F-containing water.
JP04903997A 1997-03-04 1997-03-04 Water treatment method Expired - Fee Related JP3622407B2 (en)

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Application Number Priority Date Filing Date Title
JP04903997A JP3622407B2 (en) 1997-03-04 1997-03-04 Water treatment method

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JPH10244259A true JPH10244259A (en) 1998-09-14
JP3622407B2 JP3622407B2 (en) 2005-02-23

Family

ID=12819954

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Application Number Title Priority Date Filing Date
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Country Link
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006095425A (en) * 2004-09-29 2006-04-13 Kurita Water Ind Ltd Method for purifying biological treatment water-containing water of waste water and apparatus for purifying the same
JP4543482B2 (en) * 2000-03-06 2010-09-15 栗田工業株式会社 Fluorine-containing water treatment method
JP2020018992A (en) * 2018-08-03 2020-02-06 オルガノ株式会社 Method and apparatus for treating silica/hardness component-containing water
JP2020124668A (en) * 2019-02-04 2020-08-20 株式会社東芝 Water treatment system and water treatment method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4543482B2 (en) * 2000-03-06 2010-09-15 栗田工業株式会社 Fluorine-containing water treatment method
JP2006095425A (en) * 2004-09-29 2006-04-13 Kurita Water Ind Ltd Method for purifying biological treatment water-containing water of waste water and apparatus for purifying the same
JP2020018992A (en) * 2018-08-03 2020-02-06 オルガノ株式会社 Method and apparatus for treating silica/hardness component-containing water
JP2020124668A (en) * 2019-02-04 2020-08-20 株式会社東芝 Water treatment system and water treatment method

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