JPH10199697A - Surface treatment device by atmospheric pressure plasma - Google Patents
Surface treatment device by atmospheric pressure plasmaInfo
- Publication number
- JPH10199697A JPH10199697A JP9002937A JP293797A JPH10199697A JP H10199697 A JPH10199697 A JP H10199697A JP 9002937 A JP9002937 A JP 9002937A JP 293797 A JP293797 A JP 293797A JP H10199697 A JPH10199697 A JP H10199697A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- atmospheric pressure
- plasma
- surface treatment
- generating electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、主としてポリエチ
レンやポリプロピレン、ＰＴＦＥ（ポリ四フッ化エチレ
ン）などの樹脂に対して塗料を塗布する場合や印刷を施
す場合にその表面の撥水性を親水性に改質したり、ガラ
ス、セラミックス、金属、半導体等の表面に付着した有
機物を洗浄したりするなどの表面処理を行なう場合に用
いられる大気圧プラズマによる表面処理装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of applying a coating or coating to a resin such as polyethylene, polypropylene, or PTFE (polytetrafluoroethylene) to make the surface water-repellent hydrophilic. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment apparatus using atmospheric pressure plasma, which is used when performing surface treatment such as reforming or cleaning organic substances attached to the surface of glass, ceramics, metal, semiconductor, and the like.
【０００２】[0002]
【従来の技術】この種の表面処理装置として、従来より
一般的に知られているものは、図２に示したように、排
気系２０が接続された真空容器（ベルジャー）２１の上
下位置に絶縁物２２，２３を介して放電発生用電極２４
と対電極２５とを対向状態に配置し、上記排気系２０の
作動により真空容器２１内を真空として該真空空間内に
少なくとも酸素を含む放電用ガスを導入するとともに、
高周波電源２６から整合器２７を通して上記放電発生用
電極２４に高周波電圧を印加することにより低圧グロー
放電プラズマを発生させ、該プラズマにより生成される
化学的に活性な励起種を含むガスによって真空容器２１
内の対電極２５上に設置保持させた被処理物（基板）２
８の表面を処理するように構成されていた。2. Description of the Related Art As a surface treatment apparatus of this type, generally known in the prior art, as shown in FIG. 2, a vacuum vessel (bell jar) 21 to which an exhaust system 20 is connected is located at a vertical position. Discharge generating electrode 24 via insulators 22 and 23
And the counter electrode 25 are placed in opposition to each other, and the exhaust system 20 is operated to evacuate the vacuum vessel 21 to introduce a discharge gas containing at least oxygen into the vacuum space.
A low-pressure glow discharge plasma is generated by applying a high-frequency voltage to the discharge generating electrode 24 from the high-frequency power supply 26 through the matching unit 27, and the vacuum vessel 21 is generated by a gas containing a chemically active excited species generated by the plasma.
To be processed (substrate) 2 installed and held on counter electrode 25 inside
8 surface.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記したよう
な構成の従来一般の低圧グロー放電プラズマによる表面
処理装置は、真空容器２１および排気系といった真空条
件形成用装置が必要であるために、装置全体が大型化
し、その設置が固定化されるために、大きな面積の被処
理物や凹凸の激しい被処理物の表面処理に対しては装置
容量やスペース上の関係から使用が困難で、適用範囲に
自ずと限界があるばかりでなく、装置コストが高価なも
のになるという問題があった。However, the conventional general surface treatment apparatus using a low-pressure glow discharge plasma having the above-described structure requires a vacuum vessel 21 and a vacuum condition forming apparatus such as an exhaust system. Because the whole is large and its installation is fixed, it is difficult to use large-area workpieces or surface-treated workpieces with severe irregularities due to equipment capacity and space. However, there is a problem that not only is there a limit naturally, but also the equipment cost becomes high.
【０００４】また、このような真空条件形成用装置を簡
略化するために、例えば特公平６−７２３０８号公報に
開示されているように、反応容器内の上下位置に配置し
た放電発生用電極と対電極の表面にそれぞれ固体誘電体
を被覆配設して、反応容器内に希ガスとモノマー気体と
を導入し、大気圧下でプラズマ励起させて基板の表面を
処理するように構成された大気圧プラズマによる表面処
理装置も提案されているが、このような大気圧プラズマ
による表面処理装置では、真空条件形成用装置としての
排気系が不要になるものの、真空容器に代わるベルジャ
ーを用いていること、および、そのベルジャー内に被処
理物（基板）を設置させる形式のものであることによっ
て、装置全体の大型化および表面処理可能な被処理物の
大きさや形態が制約されることの問題はなんら解決され
ていない。Further, in order to simplify such an apparatus for forming vacuum conditions, for example, as disclosed in Japanese Patent Publication No. 6-72308, a discharge generating electrode disposed at a vertical position in a reaction vessel is used. A solid dielectric is coated on each surface of the counter electrode, a rare gas and a monomer gas are introduced into the reaction vessel, and the substrate surface is treated by plasma excitation at atmospheric pressure. Although a surface treatment apparatus using atmospheric pressure plasma has been proposed, such a surface treatment apparatus using atmospheric pressure plasma does not require an exhaust system as a vacuum condition forming apparatus, but uses a bell jar instead of a vacuum vessel. In addition, since the object to be processed (substrate) is installed in the bell jar, the size of the entire apparatus and the size and form of the object to be surface treated can be controlled. Is is that the problem has not been any resolution.
【０００５】本発明は上記のような実情に鑑みてなされ
たもので、真空条件形成用装置を全く不要にして装置全
体の小型化および低コスト化を図ることができるととも
に、安定のよいグロー放電プラズマを発生させて被処理
物の大きさや形態のいかんにかかわらず、所定の表面処
理を容易に、かつ効率よく行なうことができる大気圧プ
ラズマによる表面処理装置を提供することを目的として
いる。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and can reduce the size and cost of the entire apparatus by eliminating the need for a vacuum condition forming apparatus at all. An object of the present invention is to provide a surface treatment apparatus using atmospheric pressure plasma that can easily and efficiently perform a predetermined surface treatment regardless of the size and form of an object to be treated by generating plasma.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係る大気圧プラズマによる表面処理装置
は、放電発生用電極と、対電極と、上記放電発生用電極
に高周波電圧を印加する高周波電源とを備え、少なくと
もヘリウムまたは水素を含むガスを上記放電発生用電極
と対電極との間に形成される放電空間に大気圧もしくは
大気圧近傍圧力下で導入し通過させるとともに、上記高
周波電源から放電発生用電極に高周波電圧を印加するこ
とにより上記電極間の放電空間にグロー放電プラズマを
発生させ、該プラズマにより生成される化学的に活性な
励起種を含むガスを被処理物の表面に照射するように構
成されている大気圧プラズマによる表面処理装置であっ
て、上記対電極を上記放電発生用電極の周囲を取り囲
み、かつ、その先端にノズル状の出口を有する円筒状に
形成するとともに、上記放電発生用電極の外周面および
円筒状の対電極の内周面をガラスやセラミック等の無機
絶縁物で密着状に被覆していることを特徴とするもので
ある。In order to achieve the above object, a surface treatment apparatus using atmospheric pressure plasma according to the present invention applies a high frequency voltage to a discharge generating electrode, a counter electrode, and the discharge generating electrode. A high-frequency power supply for introducing and passing a gas containing at least helium or hydrogen into a discharge space formed between the discharge generating electrode and the counter electrode under atmospheric pressure or near atmospheric pressure, and A glow discharge plasma is generated in a discharge space between the electrodes by applying a high-frequency voltage from a power source to a discharge generation electrode, and a gas containing a chemically active excited species generated by the plasma is generated on the surface of the workpiece. A surface treatment apparatus by atmospheric pressure plasma configured to irradiate the counter electrode surrounding the discharge generating electrode, and at the tip thereof While being formed in a cylindrical shape having a chiral outlet, the outer peripheral surface of the discharge generating electrode and the inner peripheral surface of the cylindrical counter electrode are tightly covered with an inorganic insulator such as glass or ceramic. It is a feature.
【０００７】上記構成の本発明によれば、放電発生用電
極と対電極のみを同心状の内外二重構造としたトーチ形
状であり、かつ、それら両電極の対向する内外周面を無
機絶縁物で密着状に被覆させそれら内外の両電極間に放
電空間を形成しているので、大気圧もしくは大気圧近傍
圧力下で少なくともヘリウムまたは水素を含むガスを導
入し、放電発生用電極に高周波電圧を印加することによ
って、内外ともにスパークやアーク放電などの異常放電
の発生に伴うロスを生じることなく、大気圧下でも安定
のよいグロー放電プラズマを発生させ、このプラズマに
より生成される化学的に活性なイオンや励起種を含むガ
ス流をノズル状出口から離れた外部位置に設置した被処
理物に照射させて被処理物の表面を効率よく処理するこ
とが可能である。また、真空条件形成用装置や包囲カバ
ー体などを全く不要にして装置全体を小型軽量で、かつ
可動の容易なトーチ形状としたものであるから、移動さ
せることが難しい大きな被処理物や表面に激しい凹凸な
どを有する異形状の被処理物であっても、該表面処理装
置側の可動によって、所定の表面処理を容易かつ適正に
行なうことが可能である。According to the present invention having the above structure, only the discharge generating electrode and the counter electrode are of a torch shape having a concentric inner / outer double structure, and the inner and outer peripheral surfaces of the two electrodes facing each other are formed of an inorganic insulator. A gas containing at least helium or hydrogen is introduced at atmospheric pressure or near atmospheric pressure, and a high-frequency voltage is applied to the discharge generating electrode. By applying the voltage, a stable glow discharge plasma is generated even at atmospheric pressure without generating a loss associated with the occurrence of abnormal discharge such as spark or arc discharge both inside and outside, and chemically active plasma generated by this plasma is generated. It is possible to efficiently treat the surface of the object by irradiating a gas flow containing ions and excited species to the object disposed at an external position remote from the nozzle-shaped outlet. In addition, since the entire device is small and lightweight and has a torch shape that can be easily moved without using any vacuum condition forming device or surrounding cover body, it can be used for large workpieces and surfaces that are difficult to move. Even if the object to be processed is irregularly shaped and has severe irregularities, the predetermined surface treatment can be easily and appropriately performed by the movement of the surface treatment device.
【０００８】上述のように動作する大気圧プラズマによ
る表面処理装置において、請求項２に記載のように、上
記放電発生用電極に冷却手段を具備させる場合は、長時
間に亘って連続的に表面処理を行なう時、放電発生用電
極の過熱を防いで所定の表面処理を効率よく実行するこ
とが可能であり、また、請求項３に記載のように、上記
高周波電源と放電発生用電極との間に整合器を一体に組
み込んだ構成とする場合は、該表面処理装置をロボット
に装着させて使用するときの適用性に非常に優れてい
る。In the surface treatment apparatus using the atmospheric pressure plasma which operates as described above, when the discharge generating electrode is provided with a cooling means, the surface is continuously provided for a long time. When performing the treatment, it is possible to efficiently perform a predetermined surface treatment by preventing overheating of the discharge generating electrode, and as described in claim 3, the high-frequency power supply and the discharge generating electrode In the case where the matching device is integrally incorporated in between, the applicability when the surface treatment device is mounted on a robot and used is very excellent.
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施の形態を図面
にもとづいて説明する。図１は本発明に係る大気圧プラ
ズマによる表面処理装置の要部断面図であり、同図にお
いて、１は放電発生用電極であり、整合器２を介して高
周波電源３に接続されているとともに、その内部に冷却
水を循環させるための冷却系４が接続されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view of a main part of a surface treatment apparatus using atmospheric pressure plasma according to the present invention. In FIG. 1, reference numeral 1 denotes an electrode for generating discharge, which is connected to a high-frequency power source 3 via a matching unit 2 and , A cooling system 4 for circulating cooling water therein is connected.
【００１０】５は上記放電発生用電極１の周囲を同心状
に取り囲み、かつ、その先端にノズル状のガス出口６を
有するように有底円筒状に形成された対電極であり、上
記放電発生用電極１に対しては絶縁物７を介して電気的
に隔離してアース接地されており、これら内外の放電発
生用電極１と対電極５とは同心状の内外二重構造のトー
チ形状を呈している。そして、これら放電発生用電極１
の外周面および対電極５の内周面がそれぞれガラスある
いはセラミック等の無機絶縁物８，９により密着状に被
覆されており、その内外無機絶縁物８，９間に形成され
る環状の放電空間１２にヘリウムガスまたは水素と酸素
の供給系１０およびアルゴン等の希釈ガスの供給系１１
とが連通接続されている。Reference numeral 5 denotes a counter electrode formed concentrically around the discharge generating electrode 1 and having a bottomed cylindrical shape having a nozzle-like gas outlet 6 at its tip. The discharge electrode 1 and the counter electrode 5 are electrically isolated from each other through an insulator 7 and are grounded to ground. The inner and outer discharge generating electrodes 1 and the counter electrode 5 have a concentric inner / outer double torch shape. Present. Then, these discharge generating electrodes 1
And an inner peripheral surface of the counter electrode 5 are tightly covered with inorganic insulators 8, 9 such as glass or ceramic, respectively, and an annular discharge space formed between the inner and outer inorganic insulators 8, 9 is provided. 12 is a supply system 10 for helium gas or hydrogen and oxygen and a supply system 11 for a diluent gas such as argon.
Are connected to each other.
【００１１】なお、上記整合器２は上記放電発生用電極
１および対電極５側に一体に組み込まれており、高周波
電源３に対しては同軸ケーブル等のフレキシブルチュー
ブを介して電気的に接続されている。また、上記放電発
生用電極１および対電極５はともにアルミパイプ、銅パ
イプ、ステンレスパイプなどの電導性金属材料から構成
されている。The matching device 2 is integrated with the discharge generating electrode 1 and the counter electrode 5 and is electrically connected to the high-frequency power source 3 via a flexible tube such as a coaxial cable. ing. The discharge generating electrode 1 and the counter electrode 5 are both made of a conductive metal material such as an aluminum pipe, a copper pipe, and a stainless steel pipe.
【００１２】次に、上記のように構成された大気圧プラ
ズマによる表面処理装置による動作について説明する。
大気圧または大気圧近傍圧力下において、供給系１０か
らヘリウムガスおよび酸素を、また必要に応じて供給系
１１から希釈ガスも放電発生用電極１と対電極５との間
の環状放電空間１２に導入して該放電空間１２内および
被処理物１３近傍の雰囲気をヘリウムガスを含む酸素雰
囲気に置換する。この状態で高周波電源３より整合器２
を通じて上記放電発生用電極１に高周波電圧（１０ＫＨ
ｚ〜５００ＭＨｚ）を印加することによって、上記放電
空間１２内に大気圧下でグロー放電プラズマを発生さ
せ、このグロー放電プラズマにより生成されるイオン、
ラジカルなどの化学的に活性な励起種を含む反応性ガス
流をノズル状出口６から被処理物１３の表面に向けて照
射させることによって、被処理物１３の表面に付着した
有機物の洗浄や改質などの表面処理を行なう。殊に、被
処理物１３がポリエチレンやポリプロピレン等の樹脂製
品であって、その表面に塗料を塗布したり、印刷を施し
たりする場合において、グロー放電プラズマにより生成
されるイオン、ラジカル等の化学的に活性な励起種を含
む反応性ガス流を樹脂製品の表面に放射させることによ
って、表面の撥水性を親水性に改質して、樹脂製品に対
する塗料やインクののり具合や接着性を著しく改善する
ことができる。Next, the operation of the surface treatment apparatus using the atmospheric pressure plasma configured as described above will be described.
At atmospheric pressure or near atmospheric pressure, helium gas and oxygen from the supply system 10 and, if necessary, diluent gas from the supply system 11 are also transferred to the annular discharge space 12 between the discharge generating electrode 1 and the counter electrode 5. Then, the atmosphere in the discharge space 12 and the vicinity of the object 13 is replaced with an oxygen atmosphere containing helium gas. In this state, the matching device 2 is
The high frequency voltage (10 KH
z to 500 MHz), a glow discharge plasma is generated in the discharge space 12 under atmospheric pressure, and ions generated by the glow discharge plasma are generated.
By irradiating a reactive gas stream containing a chemically active excited species such as a radical from the nozzle-shaped outlet 6 toward the surface of the processing target 13, the organic substance attached to the surface of the processing target 13 is washed or modified. Perform surface treatment such as quality. In particular, when the object to be treated 13 is a resin product such as polyethylene or polypropylene, and a paint is applied or printed on the surface, chemicals such as ions and radicals generated by glow discharge plasma are used. By irradiating the surface of the resin product with a reactive gas stream containing highly active excited species, the water repellency of the surface is modified to hydrophilic, and the coating and ink adhesion and adhesion to the resin product are significantly improved. can do.
【００１３】以上のように動作する表面処理装置におい
て、放電発生用電極１と対電極５のみが同心状に配置さ
れた内外二重構造のトーチ形状で、かつ、それら両電極
１，５の対向する内外周面を無機絶縁物８，９で密着状
に被覆させた構成とすることにより、大気圧もしくは大
気圧近傍圧力下においても、内外周付近にともにスパー
クやアーク放電などの異常放電を発生させることなく、
両電極間の放電空間に安定よいグロー放電プラズマを発
生させることが可能となり、反応活性の大きい励起種を
含むガス流により被処理物１３の表面をロスなく効率よ
く処理することができるとともに、全体をトーチ形状の
コンパクトな装置にして可動式にし易いことから、移動
が困難な大きな被処理物１３であっても、また、平坦な
板状の被処理物だけでなく、表面に激しい凹凸などを有
する異形状表面をもつ被処理物に対しても、所定の表面
処理を適正かつ容易に実現することができる。In the surface treatment apparatus operating as described above, only the discharge generating electrode 1 and the counter electrode 5 are concentrically arranged in a torch shape having an inner / outer double structure, and the two electrodes 1 and 5 are opposed to each other. The inner and outer peripheral surfaces are covered with inorganic insulators 8 and 9 so that abnormal discharges such as sparks and arc discharges occur near the inner and outer periphery even at atmospheric pressure or near atmospheric pressure. Without letting
A stable glow discharge plasma can be generated in the discharge space between the two electrodes, and the surface of the processing target 13 can be efficiently processed by the gas flow containing the excited species having high reaction activity without any loss. Is a torch-shaped compact device, and is easy to move. Therefore, even a large workpiece 13 which is difficult to move, not only a flat plate-shaped workpiece but also severe irregularities on the surface. It is possible to appropriately and easily realize a predetermined surface treatment on an object to be processed having an irregularly shaped surface.
【００１４】特に、放電発生用電極１に冷却水の循環に
よる冷却系４を接続するときは、長時間に亘って連続的
に表面処理する場合の放電発生用電極１の過熱を防いで
連続処理による処理効率の向上を図ることができる。ま
た、整合器２を一体に組み込んだ構成とする場合は、該
表面処理装置をロボットに装着させて使用するときに有
効で、装置の使用形態、つまり適用性を広げることがで
きる。In particular, when the cooling system 4 for circulating cooling water is connected to the discharge generating electrode 1, continuous treatment is performed by preventing overheating of the discharge generating electrode 1 when surface treatment is continuously performed for a long time. Can improve processing efficiency. Further, when the matching device 2 is integrally incorporated, it is effective when the surface treatment device is mounted on a robot and used, and the use form of the device, that is, applicability can be expanded.
【００１５】[0015]
【発明の効果】以上のように、本発明によれば、スパー
クやアーク放電などの異常放電に伴うロスを発生するこ
となく、大気圧もしくは大気圧近傍の圧力下でも安定の
よいグロー放電プラズマを発生させることができるとと
もに、このプラズマにより生成される化学的に活性な励
起種を含むガス流をノズル状出口から離れた位置に設置
した被処理物に照射させてその表面を効率よく処理する
ことが可能であるから、従来の低圧グロー放電プラズマ
による表面処理装置に比べて、真空条件形成のための高
価で、かつ大掛かりな真空容器や排気系、さらには対電
極の外周を包囲するカバー体などが全く不要で、装置全
体の著しい小型軽量化および低コスト化、さらには設置
スペースの大幅な削減を達成できるだけでなく、全体を
トーチ形状の可搬式にして、移動が困難なほどに大きい
被処理物に対しては、該被処理物をその場所に置いたま
までの表面処理を可能にしたり、凹凸の激しい異形状の
表面を持つ被処理物に対しては、表面処理装置側を被処
理物の表面形状に沿わせて移動させてその表面を適正か
つ容易に処理することができるといったように、被処理
物の大きさや形態に制約されることなく、その適用性を
著しく拡大することができるという効果を奏する。As described above, according to the present invention, a glow discharge plasma which is stable under atmospheric pressure or a pressure close to atmospheric pressure without generating a loss due to abnormal discharge such as spark or arc discharge is produced. It is possible to efficiently treat the surface by irradiating a gas flow containing a chemically active excited species generated by this plasma to a workpiece placed at a position away from the nozzle-like outlet, which can be generated. Is more expensive than conventional surface treatment equipment using low-pressure glow discharge plasma, which is expensive and requires a large-scale vacuum vessel or exhaust system for forming vacuum conditions, and a cover body that surrounds the outer periphery of the counter electrode. Is not necessary at all, and not only can the entire device be significantly reduced in size and weight and cost, and the installation space can be significantly reduced, but also the entire device can be transported in the form of a torch. Then, for an object to be processed that is too large to move, it is possible to perform surface treatment while the object to be processed is left in its place, or to an object to be processed having an irregularly shaped surface with severe irregularities. On the other hand, the size and form of the object to be treated are restricted so that the surface treatment device side can be moved along the surface shape of the object to be treated and the surface can be appropriately and easily treated. In addition, there is an effect that the applicability can be significantly expanded.
【図１】本発明に係る大気圧プラズマによる表面処理装
置の要部断面図である。FIG. 1 is a sectional view of a main part of a surface treatment apparatus using atmospheric pressure plasma according to the present invention.
【図２】従来一般に使用されている低圧グロー放電プラ
ズマによる表面処理装置の一例を示す断面図である。FIG. 2 is a cross-sectional view showing an example of a surface treatment apparatus using a low-pressure glow discharge plasma generally used in the related art.
１ 放電発生用電極 ２ 整合器 ３ 高周波電源 ４ 冷却系（冷却手段） ５ 対電極 ６ ノズル状ガス出口 ８，９ 無機絶縁物 １２ 放電空間 １３ 被処理物 DESCRIPTION OF SYMBOLS 1 Discharge generation electrode 2 Matching device 3 High frequency power supply 4 Cooling system (cooling means) 5 Counter electrode 6 Nozzle gas outlet 8, 9 Inorganic insulator 12 Discharge space 13 Workpiece
Claims (3)
発生用電極に高周波電圧を印加する高周波電源とを備
え、 少なくともヘリウムまたは水素を含むガスを上記放電発
生用電極と対電極との間に形成される放電空間に大気圧
もしくは大気圧近傍圧力下で導入し通過させるととも
に、上記高周波電源から放電発生用電極に高周波電圧を
印加することにより上記電極間の放電空間にグロー放電
プラズマを発生させ、該プラズマにより生成される化学
的に活性な励起種を含むガスを被処理物の表面に照射す
るように構成されている大気圧プラズマによる表面処理
装置であって、 上記対電極を上記放電発生用電極の周囲を取り囲み、か
つ、その先端にノズル状の出口を有する円筒状に形成す
るとともに、 上記放電発生用電極の外周面および円筒状の対電極の内
周面をガラスやセラミック等の無機絶縁物で密着状に被
覆していることを特徴とする大気圧プラズマによる表面
処理装置。1. A discharge generating electrode, a counter electrode, and a high-frequency power source for applying a high-frequency voltage to the discharge generating electrode, wherein a gas containing at least helium or hydrogen is supplied between the discharge generating electrode and the counter electrode. Glow discharge plasma is introduced into the discharge space between the electrodes by applying a high-frequency voltage from the high-frequency power source to the discharge generation electrode while introducing and passing the same under the atmospheric pressure or a pressure close to the atmospheric pressure into the discharge space formed therebetween. A surface treatment apparatus using atmospheric pressure plasma configured to generate and irradiate the surface of the object to be treated with a gas containing a chemically active excited species generated by the plasma, comprising: Surrounding the periphery of the discharge generating electrode, and being formed in a cylindrical shape having a nozzle-shaped outlet at its tip, the outer peripheral surface of the discharge generating electrode and the cylindrical shape A surface treatment apparatus using atmospheric pressure plasma, wherein an inner peripheral surface of a counter electrode is closely covered with an inorganic insulator such as glass or ceramic.
れている請求項１に記載の大気圧プラズマによる表面処
理装置。2. The surface treatment apparatus using atmospheric pressure plasma according to claim 1, wherein said discharge generating electrode is provided with cooling means.
に整合器を一体に組み込んでいる請求項１または２に記
載の大気圧プラズマによる表面処理装置。3. The surface treatment apparatus using atmospheric pressure plasma according to claim 1, wherein a matching device is integrally incorporated between the high-frequency power supply and the discharge generating electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9002937A JPH10199697A (en) | 1997-01-10 | 1997-01-10 | Surface treatment device by atmospheric pressure plasma |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9002937A JPH10199697A (en) | 1997-01-10 | 1997-01-10 | Surface treatment device by atmospheric pressure plasma |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10199697A true JPH10199697A (en) | 1998-07-31 |
Family
ID=11543278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9002937A Pending JPH10199697A (en) | 1997-01-10 | 1997-01-10 | Surface treatment device by atmospheric pressure plasma |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10199697A (en) |
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| US6429400B1 (en) | 1997-12-03 | 2002-08-06 | Matsushita Electric Works Ltd. | Plasma processing apparatus and method |
| JP2003059924A (en) * | 2001-08-17 | 2003-02-28 | Sekisui Chem Co Ltd | Multistage discharge plasma treatment method and apparatus thereof |
| JP2003080059A (en) * | 2001-09-10 | 2003-03-18 | Yaskawa Electric Corp | Method and apparatus for treating material using reactive gas |
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| KR20060091869A (en) * | 2005-02-16 | 2006-08-22 | 이상석 | The technical method and its equipment for the low power and multi-applicable plasma generation using a commercial source |
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| JP4546675B2 (en) * | 2001-08-17 | 2010-09-15 | 積水化学工業株式会社 | Multistage discharge plasma processing method and apparatus |
| JP2003059924A (en) * | 2001-08-17 | 2003-02-28 | Sekisui Chem Co Ltd | Multistage discharge plasma treatment method and apparatus thereof |
| JP2003080059A (en) * | 2001-09-10 | 2003-03-18 | Yaskawa Electric Corp | Method and apparatus for treating material using reactive gas |
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| KR20060091869A (en) * | 2005-02-16 | 2006-08-22 | 이상석 | The technical method and its equipment for the low power and multi-applicable plasma generation using a commercial source |
| JP2009119356A (en) * | 2007-11-14 | 2009-06-04 | Toshiba Corp | Discharge surface treatment apparatus and discharge surface treatment method |
| US8268650B2 (en) | 2008-07-22 | 2012-09-18 | Showa Denko K.K. | Process for manufacturing sealed organic electroluminescence devices |
| WO2010010855A1 (en) | 2008-07-22 | 2010-01-28 | 昭和電工株式会社 | Method for manufacturing organic electroluminescence element provided with sealing member |
| JP2011226775A (en) * | 2010-04-22 | 2011-11-10 | Newprotech Co Ltd | Waste gas treatment apparatus |
| JP2016149365A (en) * | 2011-01-25 | 2016-08-18 | アドバンスト・エナジー・インダストリーズ・インコーポレイテッドＡｄｖａｎｃｅｄ Ｅｎｅｒｇｙ Ｉｎｄｕｓｔｒｉｅｓ， Ｉｎｃ． | Electrostatic remote plasma source |
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