JPH055640B2 - - Google Patents
Info
- Publication number
- JPH055640B2 JPH055640B2 JP61135629A JP13562986A JPH055640B2 JP H055640 B2 JPH055640 B2 JP H055640B2 JP 61135629 A JP61135629 A JP 61135629A JP 13562986 A JP13562986 A JP 13562986A JP H055640 B2 JPH055640 B2 JP H055640B2
- Authority
- JP
- Japan
- Prior art keywords
- dust
- object storage
- storage section
- outside
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007665 sagging Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 description 21
- 230000032258 transport Effects 0.000 description 21
- 239000004065 semiconductor Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Manipulator (AREA)
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は、たとえば半導体装置の製造等に用い
られる無塵室において製造部品等の搬送を行う無
塵室用搬送ロボツトに関する。[Detailed Description of the Invention] [Object of the Invention] (Industrial Field of Application) The present invention relates to a transport robot for a dust-free chamber that transports manufactured parts, etc. in a dust-free chamber used, for example, in the manufacture of semiconductor devices. .
（従来の技術）
たとえば、超LSI等の半導体装置の製造を行う
無塵室では、フイルタを透過させて清浄化した清
浄空気を上方から下方へ向けて層流状態にて流下
させて循環し、塵の除去が行われている。(Prior art) For example, in a dust-free room where semiconductor devices such as VLSIs are manufactured, clean air that has been purified by passing through a filter is circulated by flowing it downward from above in a laminar flow state. Dust removal is being carried out.
このような無塵室内では、人体が大きな発塵源
となるため、その内部においては無人化が図られ
ており、例えば半導体ウエハ等の製造部品の搬送
に、無塵室用の搬送ロボツトを使用することが考
えられている。 Human bodies are a major source of dust in such dust-free rooms, so the interior is unmanned. For example, transport robots for dust-free rooms are used to transport manufacturing parts such as semiconductor wafers. It is considered to do.
（発明が解決しようとする問題点）
しかしながら、無塵室用搬送ロボツトには、発
塵源となる移動用駆動部、作業用駆動部等が必要
であり、このような駆動部からの塵により、搬送
物または無塵室内の他の物品等を汚す等の問題が
生じる。(Problem to be solved by the invention) However, the transport robot for a dust-free room requires a moving drive unit, a work drive unit, etc., which are a source of dust generation, and dust from such drive units This may cause problems such as contaminating the conveyed items or other items in the dust-free room.
本発明はかかる問題に対処してなされたもの
で、搬送物収容部に収容された搬送物を清浄に保
つことができるとともに、無塵室内の他の物品等
を塵で汚すことのない無塵室用搬送ロボツトを提
供しようとするものである。 The present invention was made in response to such problems, and it is possible to keep the transported objects stored in the transported object storage section clean, and also to prevent dust from contaminating other objects in the dust-free chamber. The purpose is to provide a room-use transportation robot.
［発明の構成］
（問題点を解決するための手段）
すなわち本発明の無塵室用搬送ロボツトは、天
井部から床部へ流下する清浄空気流が形成された
無塵室内で使用される無塵室用搬送ロボツトにお
いて、清浄空気を被収容物に供給する空気清浄フ
イルタと空気送出フアンが設けられ外部より高圧
に保たれた搬送物収容部と、この搬送物収容部よ
り下方に形成された空間であつてその底部に配設
された空気排出フアンにより外部より低圧に保た
れた空間内に配置された移動用駆動部および作業
用駆動部とを備えたことを特徴とする。[Structure of the Invention] (Means for Solving the Problems) That is, the transport robot for a dust-free room of the present invention is a transport robot for a dust-free room that is used in a dust-free room in which a flow of clean air flows down from the ceiling to the floor. A transfer robot for a dust room includes an object storage section that is equipped with an air purifying filter and an air delivery fan that supply clean air to the objects to be stored, and is maintained at a higher pressure than the outside, and a container that is formed below the object storage section. The present invention is characterized by comprising a moving drive section and a working drive section disposed in a space maintained at a lower pressure than the outside by an air exhaust fan disposed at the bottom of the space.
（作用）
本発明の無塵室用搬送ロボツトでは、搬送物収
容部に、空気清浄フイルタと空気送出フアンによ
つて清浄化空気流が形成され、この清浄化空気流
によつて、搬送物収容部内が外部より高圧に保た
れる。したがつて、この搬送物収容部に外部から
塵埃が入り込むことがなく、搬送物収容部内が清
浄雰囲気に保たれるので、内部に収容された半導
体ウエハ等の被収容物に塵埃が付着することを防
止しつつ搬送することができる。(Function) In the transport robot for a dust-free room of the present invention, a clean air flow is formed in the transport object storage section by the air cleaning filter and the air delivery fan, and this clean air flow allows the transport robot to accommodate the transport objects. The internal pressure is kept higher than the external pressure. Therefore, dust does not enter the transported object storage section from the outside, and the inside of the transported object storage section is kept in a clean atmosphere, so that dust does not adhere to objects such as semiconductor wafers stored inside. It is possible to transport while preventing this.
また、上記搬送物収容部の下部には、底部に配
設された空気排出フアンにより外部より低圧に保
たれた空間が形成されており、この空間内に、車
輪等を駆動させるための移動用駆動部、作業用ア
ーム等を駆動する作業用駆動部が配置されてい
る。したがつて、これらの駆動部から発生した塵
埃が外部に飛散することを防止することができ、
また、万一塵埃が外部に漏洩したとしても、搬送
物収容部の下部にこれらの駆動部が配置されてい
るので、クリーンルーム内のダウンフローの作用
により、この漏洩した塵埃がクリーンルーム外に
直ちに排出され、搬送物収容部内の搬送物やクリ
ーンルーム内の他の物品に付着することを防止で
きる。 In addition, a space is formed at the bottom of the conveyed object storage section that is kept at a lower pressure than the outside by an air exhaust fan installed at the bottom. A work drive unit that drives the drive unit, work arm, etc. is arranged. Therefore, it is possible to prevent dust generated from these drive parts from scattering to the outside.
In addition, even if dust leaks outside, these drive parts are located at the bottom of the conveyed object storage area, so the leaked dust will be immediately discharged outside the clean room due to the downflow inside the clean room. This prevents the particles from adhering to the transported objects in the transported object storage section or other articles in the clean room.
（実施例）
以下本発明の詳細を図面に示す一実施例につい
て説明する。(Example) The details of the present invention will be described below with reference to an example shown in the drawings.
図は、本発明の一実施例の無塵室用搬送ロボツ
トとして無塵室内で半導体ウエハを搬送するため
の無塵室用搬送ロボツトを示すもので、この実施
例の無塵室用搬送ロボツトでは、半導体ウエハを
収容する搬送物収容部１が最上部へ配置されてお
り、その下部に配置された搬送ロボツト本体２内
には、半導体ウエハの積み下しを行う作業用アー
ム３と、この作業用アーム３を駆動するための作
業用駆動部４と、作業場所間を移動するための車
輪５を回転する移動用駆動部６とが配置されてい
る。 The figure shows a dust-free room transport robot according to an embodiment of the present invention for transporting semiconductor wafers in a dust-free room. A conveyance object storage section 1 for storing semiconductor wafers is arranged at the top, and a work arm 3 for loading and unloading the semiconductor wafers is provided in the transport robot main body 2 disposed at the bottom thereof. A work drive unit 4 for driving the work arm 3 and a movement drive unit 6 for rotating wheels 5 for moving between work locations are arranged.
また、搬送物収容部１は、その上部を円錐形状
とされ、上方から下方へ流下する無塵室内の空気
流を乱さない形状とされており、その内部へフイ
ルタ７を介して清浄空気を送るフアン８が配置さ
れ、清浄空気により搬送物収容部１内部を外部よ
り高圧に保つ。 Further, the conveyed object storage section 1 has a conical upper part, which is shaped so as not to disturb the air flow in the dust-free chamber flowing downward from above, and clean air is sent into the inside thereof through a filter 7. A fan 8 is arranged to keep the inside of the conveyance object storage section 1 at a higher pressure than the outside with clean air.
そして、搬送ロボツト本体２の底部には、フイ
ルタ９を介して搬送ロボツト本体２内の空気を外
部下方へ排出するフアン１０が配置されており、
搬送ロボツト本体２内は外部より低圧に保たれて
いる。 A fan 10 is disposed at the bottom of the transport robot main body 2 to exhaust the air inside the transport robot main body 2 downward to the outside via a filter 9.
The inside of the transfer robot main body 2 is kept at a lower pressure than the outside.
上記構成のこの実施例の無塵室用搬送ロボツト
では、上方から下方へ向けて流れる清浄空気流を
形成された無塵室内を移動し、作業用アーム３で
半導体ウエハを搬送物収容部１内に収容または搬
送物収容部１内から取出して半導体ウエハの搬送
を行う。 The transfer robot for a dust-free chamber of this embodiment with the above-mentioned configuration moves in a dust-free chamber in which a clean air flow flows from the top to the bottom, and carries the semiconductor wafer into the transfer object storage section 1 with the working arm 3. Semiconductor wafers are transported by being stored in the transport object storage section 1 or taken out from the transport object storage section 1.
このとき、発塵源となる移動用駆動部６、作業
用駆動部４は、外部より低圧に保たれた搬送ロボ
ツト本体２内に収容されており、ここで発生した
塵が外部へ飛散しにくいよう構成されている。そ
して、万一ここで発生した塵が外部へ飛散した場
合でも、搬送物収容部１は、搬送ロボツト本体２
の上部に配置されており、上方から下方へ向けて
流れる無塵室内の清浄空気により、この塵は下方
へ運ばれ、搬送物収容部１内の半導体ウエハおよ
び無塵室内の他の物品を汚すことはない。 At this time, the movement drive unit 6 and the work drive unit 4, which are the sources of dust generation, are housed within the transfer robot main body 2, which is maintained at a lower pressure than the outside, making it difficult for the dust generated here to scatter to the outside. It is configured like this. Even in the unlikely event that the dust generated here scatters to the outside, the conveyed object storage section 1 will be able to accommodate the conveying robot body 2.
The clean air inside the dust-free chamber flowing from the top to the bottom carries this dust downward, contaminating the semiconductor wafers in the conveyed object storage section 1 and other items in the dust-free chamber. Never.
［発明の効果］
上述のように本発明の無塵室用搬送ロボツトで
は、搬送物収容部内に、空気清浄フイルタと空気
送出フアンによつて清浄化空気流が形成され、外
部より高圧に保たれるので、搬送物収容部に外部
から塵埃が入り込むことがなく、搬送物収容部内
が清浄雰囲気に保たれ、内部に収容された半導体
ウエハ等の被収容物に塵埃が付着することを防止
することができる。[Effects of the Invention] As described above, in the dust-free room transport robot of the present invention, a clean air flow is formed in the transport object storage section by the air purifying filter and the air delivery fan, and the air flow is maintained at a higher pressure than the outside. Therefore, dust does not enter the conveyance object storage section from the outside, and the inside of the conveyance object storage section is maintained in a clean atmosphere, and dust is prevented from adhering to objects such as semiconductor wafers housed inside. I can do it.
また、上記搬送物収容部の下部の空気排出フア
ンにより外部より低圧に保たれた空間内に、移動
用駆動部および作業用駆動部が配置されているの
で、これらの駆動部から発生した塵埃が外部に飛
散することを防止することができ、また、万一塵
埃が外部に漏洩したとしても、クリーンルーム内
のダウンフローの作用により、この漏洩した塵埃
が直ちにクリーンルーム外に排出され、搬送物等
に付着することを防止できる。 In addition, since the moving drive unit and the work drive unit are located in a space that is kept at a lower pressure than the outside by the air exhaust fan at the bottom of the conveyed object storage unit, dust generated from these drive units is removed. It is possible to prevent dust from scattering outside, and even if dust leaks outside, the downflow inside the clean room will immediately discharge the leaked dust outside the clean room and prevent it from being carried on objects, etc. Can prevent adhesion.
図は本発明の一実施例の無塵室用搬送ロボツト
の構成を示す縦断面図である。
１……搬送物収容部、２……搬送ロボツト本
体、４……作業用駆動部、６……移動用駆動部。
The figure is a longitudinal sectional view showing the configuration of a transport robot for a dust-free room according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Conveyance object storage part, 2...Transportation robot main body, 4...Working drive part, 6...Movement drive part.
Claims (1)
された無塵室内で使用される無塵室用搬送ロボツ
トにおいて、 清浄空気を被収容物に供給する空気清浄フイル
タと空気送出フアンが設けられ外部より高圧に保
たれた搬送物収容部と、この搬送物収容部より下
方に形成された空間であつてその底部に配設され
た空気排出フアンにより外部より低圧に保たれた
空間内に配置された移動用駆動部および作業用駆
動部とを備えたことを特徴とする無塵室用搬送ロ
ボツト。[Scope of Claims] 1. A transport robot for a dust-free room used in a dust-free room in which a clean air flow is formed flowing down from the ceiling to the floor, comprising: an air purifying filter that supplies clean air to objects to be stored; A conveyed object storage section is provided with an air delivery fan and maintained at a higher pressure than the outside, and a space formed below this conveyed object storage section is maintained at a lower pressure than the outside by an air exhaust fan disposed at the bottom of the space. A transport robot for a dust-free room, characterized by comprising a movement drive unit and a work drive unit arranged in a sagging space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13562986A JPS62292391A (en) | 1986-06-11 | 1986-06-11 | Unmanned cart |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13562986A JPS62292391A (en) | 1986-06-11 | 1986-06-11 | Unmanned cart |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62292391A JPS62292391A (en) | 1987-12-19 |
| JPH055640B2 true JPH055640B2 (en) | 1993-01-22 |
Family
ID=15156274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13562986A Granted JPS62292391A (en) | 1986-06-11 | 1986-06-11 | Unmanned cart |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62292391A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2604012B2 (en) * | 1988-07-29 | 1997-04-23 | 株式会社東芝 | Clean robot |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (en) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | Vehicle height adjustable shock absorber |
| JPS6294291A (en) * | 1985-10-21 | 1987-04-30 | フアナツク株式会社 | Dustproof structure of industrial robot |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292U (en) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | arm mechanism |
-
1986
- 1986-06-11 JP JP13562986A patent/JPS62292391A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (en) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | Vehicle height adjustable shock absorber |
| JPS6294291A (en) * | 1985-10-21 | 1987-04-30 | フアナツク株式会社 | Dustproof structure of industrial robot |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62292391A (en) | 1987-12-19 |
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