JPH05325887A - X-ray spectroscopic element and x-ray spectroscopic device using x-ray spectroscopic element - Google Patents
X-ray spectroscopic element and x-ray spectroscopic device using x-ray spectroscopic elementInfo
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- JPH05325887A JPH05325887A JP4152749A JP15274992A JPH05325887A JP H05325887 A JPH05325887 A JP H05325887A JP 4152749 A JP4152749 A JP 4152749A JP 15274992 A JP15274992 A JP 15274992A JP H05325887 A JPH05325887 A JP H05325887A
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は単色Ｘ線光束を取り出す
ためのＸ線分光素子及びそれを用いたＸ線分光装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray spectroscopic element for extracting a monochromatic X-ray beam and an X-ray spectroscopic device using the same.
【０００２】[0002]
【従来の技術】Ｘ線分光素子は、入射Ｘ線をブラッグ反
射させ、単色化したＸ線光束を取り出すものである。こ
のＸ線分光素子には単結晶（Ｓｉ，Ｇｅ，ＬｉＦ等）が
用いられ、その形態としては、表面での１回の反射を利
用する単体の分光結晶や、結晶にコの字型の溝を形成し
溝の両側の壁面での２回の反射を利用するチャンネルカ
ット分光結晶などがある。また、高分解能化を図るため
２個の分光結晶を用いた分光装置をＸ線回折装置に付設
し、入射特性Ｘ線のフィルターとして用いる提案もなさ
れている。2. Description of the Related Art An X-ray spectroscopic element is a device that Bragg-reflects an incident X-ray to extract a monochromatic X-ray beam. A single crystal (Si, Ge, LiF, etc.) is used for this X-ray spectroscopic element, and its form is a single dispersive crystal that utilizes one reflection on the surface or a U-shaped groove in the crystal. And a channel-cut dispersive crystal that utilizes two reflections on the wall surfaces on both sides of the groove. In addition, a proposal has also been made to attach a spectroscopic device using two dispersive crystals to an X-ray diffraction device and use it as a filter for incident characteristic X-rays in order to achieve high resolution.
【０００３】一方、近年、激増している基板上に薄膜結
晶層を設けたデバイスでの薄膜の構造解析、あるいはそ
の場観察の技術として、ＸＡＮＥＳの測定や全反射を用
いた薄膜計測法による測定は最適なものである。On the other hand, in recent years, as a technique for structural analysis of a thin film in a device in which a thin film crystal layer is provided on a substrate, or in-situ observation, measurement by XANES or thin film measurement method using total reflection is performed. Is the best one.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来技術には以下に述べるような問題点があった。２個の
分光結晶を用いた分光装置では、各分光結晶の方位は手
動調整で半固定となっているため方位合わせが困難であ
り、また２個の分光結晶の両回転軸を同期させて回転す
ると精度が出ないなどの欠点があった。高分解能化のた
めには、チャンネルカット型分光結晶を３個以上用いる
ことも考えられる。この場合、回転の同期精度はかなり
厳しいものとなる。However, the above-mentioned prior art has the following problems. In a spectroscope using two dispersive crystals, the orientation of each dispersive crystal is semi-fixed by manual adjustment, so it is difficult to align the orientations. Also, the two rotating axes of the two dispersive crystals rotate in synchronization. Then, there were drawbacks such as inaccuracies. To increase the resolution, it is possible to use three or more channel-cut type dispersive crystals. In this case, the rotation synchronization accuracy becomes rather severe.
【０００５】一方、単体の分光結晶をＸＡＮＥＳの測定
や全反射を利用した薄膜計測法による測定に用いた場
合、必要な分解能を得ることができない。また、チャン
ネルカット分光結晶をこれらの測定に用いた場合、必要
な高分解能を達成するためにはスリット用いなければな
らないが、これは取り出されるＸ線光束の強度低下を招
く。On the other hand, when a single dispersive crystal is used for the XANES measurement or the thin film measurement method utilizing total reflection, the required resolution cannot be obtained. Further, when a channel-cut dispersive crystal is used for these measurements, a slit must be used in order to achieve the required high resolution, but this causes a decrease in the intensity of the X-ray light flux extracted.
【０００６】本発明はこのような従来技術の問題点に鑑
みてなされたもので、Ｘ線光束の強度を低下させること
なく高分解能化が達成され、かつ分光結晶の方位調整が
容易に行えるＸ線分光素子及びそれを用いたＸ線分光装
置を提供することを目的とする。The present invention has been made in view of the problems of the prior art as described above, and it is possible to achieve high resolution without lowering the intensity of the X-ray beam and to easily adjust the orientation of the dispersive crystal. An object is to provide a line spectroscopy element and an X-ray spectroscopy apparatus using the same.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するた
め、本発明によれば、第１結晶壁及び第２結晶壁を有す
る入射Ｘ線を分光するためのチャンネルカット型分光結
晶と、この分光結晶の第２結晶壁を透過したＸ線フォト
ン数を計測するためのＸ線検出手段を一体に備えてなる
ことを特徴とするＸ線分光素子が提供される。To achieve the above object, according to the present invention, there is provided a channel-cut type dispersive crystal for dispersing incident X-rays having a first crystal wall and a second crystal wall, and this spectroscopic crystal. There is provided an X-ray spectroscopic element characterized by integrally including X-ray detection means for measuring the number of X-ray photons transmitted through the second crystal wall of the crystal.
【０００８】また、本発明によれば、上記構成におい
て、Ｘ線検出手段がチャンネルカット型分光結晶の背後
に接着又は圧着されていることを特徴とするＸ線分光素
子が提供される。Further, according to the present invention, there is provided an X-ray spectroscopic element having the above-mentioned structure, wherein the X-ray detection means is bonded or pressure-bonded to the back of the channel-cut type dispersive crystal.
【０００９】また、本発明によれば、上記構成におい
て、モノクロメータとして作用する結晶層の厚さが消衰
距離より大きいことを特徴とするＸ線分光素子が提供さ
れる。Further, according to the present invention, there is provided an X-ray spectroscopic element having the above-mentioned structure, wherein the thickness of the crystal layer acting as a monochromator is larger than the extinction distance.
【００１０】さらに、本発明によれば、入射Ｘ線を分光
するための複数のチャンネルカット型Ｘ線分光素子と、
該Ｘ線分光素子を各々搭載した台を回転駆動させるため
の駆動機構と、該駆動機構の動作を制御する制御手段と
から構成され、前記複数のチャンネルカット型Ｘ線分光
素子のうちＸ線入射側から少なくとも２番目以降のＸ線
分光素子は上記のいずれかのＸ線分光素子からなり、前
記制御手段は、各Ｘ線分光素子に設けられたＸ線検出手
段からの信号を微分し、その微係数が正から負に変化す
る角度位置となるように、該信号を検出したＸ線分光素
子自身の角度位置を制御することを特徴とするＸ線分光
装置が提供される。Further, according to the present invention, a plurality of channel-cut type X-ray spectroscopic elements for separating incident X-rays,
Of the plurality of channel cut type X-ray spectroscopic elements, X-ray incidence is made up of a drive mechanism for rotationally driving a table on which each of the X-ray spectroscopic elements is mounted, and control means for controlling the operation of the drive mechanism. At least the second X-ray spectroscopic element from the side is composed of any of the above X-ray spectroscopic elements, and the control means differentiates the signal from the X-ray detection means provided in each X-ray spectroscopic element, There is provided an X-ray spectroscopic device characterized in that the angular position of the X-ray spectroscopic element itself that has detected the signal is controlled so that the angular position is such that the differential coefficient changes from positive to negative.
【００１１】[0011]
【作用】本発明のＸ線分光素子では、一体に設けられた
Ｘ線検出手段により当該分光素子が受光するＸ線光束強
度のモニターが行えることから、分光結晶の方位調整が
非常に容易となる上、取り出されるＸ線光束の強度を低
下させずに高分解能化が実現される。In the X-ray spectroscopic element of the present invention, since the X-ray detecting means provided integrally can monitor the intensity of the X-ray luminous flux received by the spectroscopic element, the orientation of the dispersive crystal can be adjusted very easily. In addition, high resolution is realized without reducing the intensity of the extracted X-ray light flux.
【００１２】また、本発明のＸ線分光装置では、制御手
段が各Ｘ線分光素子に設けられたＸ線検出手段からの信
号を微分し、その微係数が正から負に変化する角度位置
となるように、該信号を検出したＸ線分光素子自身の角
度位置を制御することにより、各Ｘ線分光素子の角度位
置の設定が容易かつ正確にでき、しかも上記のごとき特
徴を持つＸ線分光素子を使用していることからＸ線光束
の強度を低下させずに高分解能化が実現される。Further, in the X-ray spectroscopic apparatus of the present invention, the control means differentiates the signal from the X-ray detection means provided in each X-ray spectroscopic element, and the differential position of the differential coefficient changes from positive to negative. As described above, by controlling the angular position of the X-ray spectroscopic element itself that has detected the signal, the angular position of each X-ray spectroscopic element can be set easily and accurately, and the X-ray spectroscopic device having the characteristics as described above is also provided. Since the element is used, high resolution can be realized without reducing the intensity of the X-ray luminous flux.
【００１３】[0013]
【実施例】以下本発明を実施例に基づき詳細に説明す
る。図１は本発明による一実施例のＸ線分光素子の構成
を示す斜視図である。このＸ線分光素子は、図１に示す
ようなコの字型のチャンネルカット分光結晶を用いる。
このチャンネルカット分光結晶を用いた分光素子は、全
体が一体の結晶からなるため、第１の壁面でブラッグ反
射したＸ線光束はすべて第２の壁面でブラッグ反射を起
こす。分光結晶としては、ＬｉＦ、グラファイトのほ
か、Ｓｉ、Ｇｅなどの半導体結晶を用いることができ
る。EXAMPLES The present invention will be described in detail below based on examples. FIG. 1 is a perspective view showing the configuration of an X-ray spectroscopic element according to an embodiment of the present invention. This X-ray spectroscopic element uses a U-shaped channel-cut dispersive crystal as shown in FIG.
Since the entire dispersive element using the channel-cut dispersive crystal is made of an integrated crystal, all X-ray light beams that have been Bragg-reflected by the first wall surface are Bragg-reflected by the second wall surface. As the dispersive crystal, a semiconductor crystal such as Si or Ge can be used in addition to LiF and graphite.
【００１４】図中１は第１結晶壁、２は第２結晶壁、３
は第１反射面、４は第２反射面である。コの字型で分離
された各結晶壁１、２の内面である第１反射面３及び第
２反射面４は、本例では互いに平行となっているが、非
対称反射を利用する場合には非平行とすることができ
る。第２結晶壁２の外側面には、Ｘ線検出器５が一体に
設けられている。このＸ線検出器５は、第２結晶壁２の
背後に接着層６を介して接着されているが、圧着されて
いてもよい。検出効率を高めるため、接着層６は可能な
限り薄い方が好ましい。In the figure, 1 is a first crystal wall, 2 is a second crystal wall, 3
Is a first reflecting surface, and 4 is a second reflecting surface. The first reflection surface 3 and the second reflection surface 4, which are the inner surfaces of the crystal walls 1 and 2 separated in a U-shape, are parallel to each other in this example, but when asymmetric reflection is used, It can be non-parallel. An X-ray detector 5 is integrally provided on the outer surface of the second crystal wall 2. The X-ray detector 5 is bonded to the back of the second crystal wall 2 via the bonding layer 6, but may be pressure bonded. In order to enhance the detection efficiency, it is preferable that the adhesive layer 6 be as thin as possible.
【００１５】本発明で用いるＸ線検出器５としては、シ
ンチレーションカウンター、イオンチェンバー、半導体
検出器（ＳＳＤ、フォトダイオード）など一般的に用い
られているものを使用することができる。As the X-ray detector 5 used in the present invention, a commonly used one such as a scintillation counter, an ion chamber, a semiconductor detector (SSD, photodiode) can be used.
【００１６】また、上記において、モノクロメーターと
して作用する結晶層（第１結晶壁及び第２結晶壁）の厚
さは、消衰距離より大きいことが望ましい。Further, in the above, the thickness of the crystal layer (first crystal wall and second crystal wall) acting as a monochromator is preferably larger than the extinction distance.
【００１７】上記Ｘ線分光素子の動作について説明する
と、第１反射面３に入射したＸ線光束は、その波長を
λ、利用する反射指数を例えば（１１１）、ｄ（１１
１）を（１１１）面の面間隔、θをＸ線光束と（１１
１）面のなす角としたとき、２ｄ（１１１）ｓｉｎθ＝
λなる関係式が満足される場合、第１反射面３より第２
反射面４へブラッグ反射される。そして、ブラッグ反射
され第２反射面４に入射したＸ線光束は、そこで直進す
るものとさらにブラッグ反射するものとに分かれる。反
射したＸ線光束は第２反斜面４から取り出され、本実施
例の分光素子出力となる。一方、第２反射面４から第２
結晶壁２の内部に直進したＸ線光束はＸ線検出器５に入
射し、そのフォトン数が計測される。第２反射面４にて
反射するＸ線光束の強度とＸ線検出器５で検出されるＸ
線強度は、比例関係になる。To explain the operation of the X-ray spectroscopic element, the wavelength of the X-ray light flux incident on the first reflecting surface 3 is λ, and the reflection index to be used is, for example, (111), d (11).
1) is the surface spacing of the (111) plane, and θ is the X-ray luminous flux (11
2d (111) sin θ =
If the relational expression λ is satisfied,
Bragg reflection is performed on the reflection surface 4. Then, the X-ray light flux that has been Bragg-reflected and has entered the second reflecting surface 4 is divided into one that travels straight there and one that further undergoes Bragg reflection. The reflected X-ray light flux is extracted from the second anti-slope 4 and becomes the output of the spectroscopic element of this embodiment. On the other hand, from the second reflecting surface 4 to the second
The X-ray light flux that has traveled straight inside the crystal wall 2 is incident on the X-ray detector 5, and the number of photons is measured. The intensity of the X-ray beam reflected by the second reflecting surface 4 and the X detected by the X-ray detector 5.
The line strength has a proportional relationship.
【００１８】次に上記構成のＸ線分光素子を利用した本
発明によるＸ線分光装置の実施例について説明する。図
２は本実施例に係るＸ線分光装置の模式図である。図中
１０は第１のＸ線分光素子、１１は第１結晶壁、１２は
第２結晶壁、１３は第１反射面、１４は第２反射面、１
５はＸ線検出器、１６は第１のＸ線分光素子１０を搭載
した台、１７は台１６を回転駆動させるためのパルスモ
ータである。また、２０は第２のＸ線分光素子、２１は
第１結晶壁、２２は第２結晶壁、２３は第１反射面、２
４は第２反射面、２５はＸ線検出器、２６は第２のＸ線
分光素子２０を搭載した台、２７は台２６を回転駆動さ
せるためのパルスモータである。３０は第１及び第２の
パルスモータ１７、２７を介して台１６、１７、即ち第
１及び第２のＸ線分光素子１０、２０の回転を制御する
制御回路であり、Ｘ線検出器１５、２５の出力を受け取
るとともに、第１及び第２のパルスモータ１７、２７に
駆動信号を送出する。本例においては第１及び第２のＸ
線分光素子１０、２０の両方とも図１で示した構造のも
のを使用しているが、第２のＸ線分光素子２０のみ図１
で示した構造のものを使用しても構わない。また、本例
では２個のＸ線分光素子を利用しているが、３個以上の
Ｘ線分光素子を利用することもできる。この場合、少な
くともＸ線入射側から２番目以降のＸ線分光素子は図１
で示した構造のものとする。Next, an embodiment of the X-ray spectroscopic apparatus according to the present invention using the X-ray spectroscopic element having the above-mentioned structure will be described. FIG. 2 is a schematic diagram of the X-ray spectroscopic device according to the present embodiment. In the figure, 10 is a first X-ray spectroscopic element, 11 is a first crystal wall, 12 is a second crystal wall, 13 is a first reflecting surface, 14 is a second reflecting surface, 1
Reference numeral 5 is an X-ray detector, 16 is a base on which the first X-ray spectroscopic element 10 is mounted, and 17 is a pulse motor for rotating the base 16. Further, 20 is a second X-ray spectroscopic element, 21 is a first crystal wall, 22 is a second crystal wall, 23 is a first reflecting surface, 2
Reference numeral 4 is a second reflecting surface, 25 is an X-ray detector, 26 is a base on which the second X-ray spectroscopic element 20 is mounted, and 27 is a pulse motor for rotating the base 26. Reference numeral 30 is a control circuit for controlling the rotation of the bases 16 and 17, that is, the first and second X-ray spectroscopic elements 10 and 20 via the first and second pulse motors 17 and 27, and the X-ray detector 15 , 25 and outputs drive signals to the first and second pulse motors 17, 27. In this example, the first and second X
Although both of the line spectroscopic elements 10 and 20 have the structure shown in FIG. 1, only the second X-ray spectroscopic element 20 is shown in FIG.
You may use the thing of the structure shown by. Further, in this example, two X-ray spectroscopic elements are used, but three or more X-ray spectroscopic elements can be used. In this case, at least the second and subsequent X-ray spectroscopic elements from the X-ray incident side are shown in FIG.
It has the structure shown in.
【００１９】更に詳しく述べると、例えば、第１のパル
スモータ１７により台１６、即ち第１のＸ線分光素子１
０が所定角度だけ回転駆動され、その後に第２のパルス
モータ２７により台２６、即ち第２のＸ線分光素子２０
が逆方向に同じ角度だけ追尾して回転駆動されるが、こ
の追尾回転駆動は以下のようにして行われる。More specifically, for example, by the first pulse motor 17, the base 16, that is, the first X-ray spectroscopic element 1 is used.
0 is driven to rotate by a predetermined angle, and then the second pulse motor 27 drives the stage 26, that is, the second X-ray spectroscopic element 20.
Are rotated and driven in the opposite direction by the same angle, but this tracking rotation drive is performed as follows.
【００２０】第１のＸ線分光素子１０がはじめに所定角
度だけ回転した状態で、第２のＸ線分光素子２０を逆方
向にθ2 だけ微小回転させた場合の第２のＸ線分光素子
２０における反射強度Ｉ及び反射エネルギーは図３のよ
うになる。即ち、第２のＸ線分光素子２０が第１のＸ線
分光素子１０と同じ角度だけ回転したところで反射強度
Ｉは最大値をとる。したがって、制御回路３０により、
Ｘ線検出器２５の検出するＸ線強度を微分し、その微分
値をモニターすることにより、第２のパルスモータ２７
の駆動を制御して第２のＸ線分光素子２０を追尾させ
る。これにより、両分光素子１０、２０の回転角度位置
を正確に自動設定することが可能となる。このため、制
御回路３０は、少なくとも、Ｘ線検出器２５の検出する
Ｘ線強度の出力を微分して微係数を求める機能（図４の
ａ）と、該機能ａが求めた微係数の符号を判定し、それ
が正又は０のときにはθ2 を増加させるように第２のパ
ルスモータ２７に駆動信号を送出し、微分値が負に変化
したとき（第１及び第２のＸ線分光素子１０、２０が反
対称角度位置になっている状態に相当）には第２のパル
スモータ２７に停止信号を送出する機能（図４のｂ）を
備える必要がある。The second X-ray spectroscopic element 20 when the second X-ray spectroscopic element 20 is slightly rotated in the opposite direction by θ 2 in a state where the first X-ray spectroscopic element 10 is first rotated by a predetermined angle. The reflection intensity I and the reflection energy at are as shown in FIG. That is, the reflection intensity I takes the maximum value when the second X-ray spectroscopic element 20 rotates by the same angle as the first X-ray spectroscopic element 10. Therefore, by the control circuit 30,
The second pulse motor 27 is obtained by differentiating the X-ray intensity detected by the X-ray detector 25 and monitoring the differentiated value.
Is controlled so that the second X-ray spectroscopic element 20 is tracked. As a result, it becomes possible to accurately and automatically set the rotational angle positions of both spectroscopic elements 10 and 20. Therefore, the control circuit 30 has at least a function (a in FIG. 4) of differentiating the output of the X-ray intensity detected by the X-ray detector 25 to obtain a differential coefficient and a sign of the differential coefficient obtained by the function a. Is determined, and when it is positive or 0, a drive signal is sent to the second pulse motor 27 so as to increase θ 2, and when the differential value changes to negative (the first and second X-ray spectroscopic elements). It is necessary to provide a function (b of FIG. 4) of sending a stop signal to the second pulse motor 27 in a state where 10 and 20 are in the antisymmetric angular position).
【００２１】上記の例では２個のＸ線分光素子を用いて
いるが、Ｘ線分光素子を３個以上用いた場合には、順次
上流側から、２番目の分光素子と同様な制御を行えばよ
い。In the above example, two X-ray spectroscopic elements are used. However, when three or more X-ray spectroscopic elements are used, the same control as the second spectroscopic element is sequentially performed from the upstream side. I'll do it.
【００２２】[0022]
【発明の効果】本発明のＸ線分光素子は、第１結晶壁及
び第２結晶壁を有する入射Ｘ線を分光するためのチャン
ネルカット型分光結晶と、この分光結晶の第２結晶壁を
透過したＸ線フォトン数を計測するためのＸ線検出手段
を一体に備えて構成されているので、以下のような顕著
な効果を奏する。 当該Ｘ線分光素子を構成する分光結晶の最適な方位を
分光結晶自身で検出できるので、ＸＡＮＥＳ測定や全反
射測定などの空間的かつエネルギー的に高分解能を要求
される構造解析評価やその場観察に使用できる高精度な
分光素子が実現できる。また、従来は一般に分光結晶の
方位の調整をＸ線を受光しながら行っていたため被爆が
避けられず危険であり、かつ根気のいる調整が必要であ
ったが、本発明のＸ線分光素子によれば、この調整を自
動的に行うことができる。従って、今日の薄膜、超薄膜
デバイスでもっとも必要とされる評価、制御のための技
術の提供が可能となる。 チャンネルカット型分光結晶としては半導体結晶のみ
ならず一般に分光結晶として使用されるすべての結晶を
利用できるので、広い範囲の波長を分光することが可能
となる。 チャンネルカット型分光結晶とＸ線検出手段とを別個
に作製し、接着あるいは圧着により一体化できるため、
素子の製造が容易である。 モノクロメータとして作用する結晶層の厚さを消衰距
離より十分大きくとることにより、反射されるＸ線強度
を飽和値まで大きくすることができ、Ｘ線検出手段の設
置による反射効率への影響がなくなる。The X-ray spectroscopic element of the present invention has a channel-cut type dispersive crystal for separating incident X-rays having a first crystal wall and a second crystal wall and a second crystal wall of this dispersive crystal. Since the X-ray detection means for measuring the number of the X-ray photons is integrally provided, the following remarkable effects are obtained. Since the optimum orientation of the dispersive crystal that constitutes the X-ray dispersive element can be detected by the dispersive crystal itself, structural analysis evaluation and in-situ observation that requires high spatial and energy resolution such as XANES measurement and total reflection measurement. A high-precision spectroscopic element that can be used for Further, conventionally, since the orientation of the dispersive crystal was generally adjusted while receiving the X-ray, it was unavoidable that the exposure was inevitable, and it was necessary to make a careful adjustment. However, in the X-ray spectroscopic element of the present invention, According to this, this adjustment can be automatically performed. Therefore, it is possible to provide the most necessary evaluation and control technology for today's thin film and ultra thin film devices. As the channel-cut type dispersive crystal, not only semiconductor crystals but all crystals generally used as dispersive crystals can be used, so that it is possible to disperse a wide range of wavelengths. Since the channel-cut type dispersive crystal and the X-ray detection means can be produced separately and integrated by adhesion or pressure bonding,
The device is easy to manufacture. By making the thickness of the crystal layer acting as a monochromator sufficiently larger than the extinction distance, the intensity of the reflected X-ray can be increased to the saturation value, and the influence of the installation of the X-ray detection means on the reflection efficiency. Disappear.
【００２３】本発明のＸ線分光装置は、入射Ｘ線を分光
するための複数のチャンネルカット型Ｘ線分光素子と、
該Ｘ線分光素子を各々搭載した台を回転駆動させるため
の駆動機構と、該駆動機構の動作を制御する制御手段と
から構成され、前記複数のチャンネルカット型Ｘ線分光
素子のうちＸ線入射側から少なくとも２番目以降のＸ線
分光素子は請求項１〜３のいずれかに記載のＸ線分光素
子からなり、前記制御手段は、各Ｘ線分光素子に設けら
れたＸ線検出手段からの信号を微分し、その微係数が正
から負に変化する角度位置となるように、該信号を検出
したＸ線分光素子自身の角度位置を制御するので、各Ｘ
線分光素子を最適な角度位置に容易に設定することがで
き、Ｘ線光束の強度を低下させることなく高分解能化が
達成される。The X-ray spectroscopic device of the present invention comprises a plurality of channel-cut type X-ray spectroscopic elements for separating incident X-rays.
Of the plurality of channel cut type X-ray spectroscopic elements, X-ray incidence is made up of a drive mechanism for rotationally driving a table on which each of the X-ray spectroscopic elements is mounted, and control means for controlling the operation of the drive mechanism. At least the second or more X-ray spectroscopic elements from the side are the X-ray spectroscopic elements according to any one of claims 1 to 3, and the control means includes an X-ray detection means provided in each X-ray spectroscopic element. The signal is differentiated, and the angular position of the X-ray spectroscopic element itself that has detected the signal is controlled so that the differential coefficient becomes an angular position that changes from positive to negative.
The line spectroscopic element can be easily set to the optimum angular position, and high resolution can be achieved without reducing the intensity of the X-ray luminous flux.
【図１】本発明によるＸ線分光素子の構造を示す斜視図
である。FIG. 1 is a perspective view showing a structure of an X-ray spectroscopic element according to the present invention.
【図２】本発明によるＸ線分光装置の構造の示す模式図
である。FIG. 2 is a schematic diagram showing the structure of an X-ray spectroscopic device according to the present invention.
【図３】第１のＸ線分光素子を所定角度だけ回転させた
状態で、第２のＸ線分光素子を逆方向に微小回転させた
場合の回転角度と第２のＸ線分光素子による反射強度Ｉ
及び反射エネルギーＥを示す図である。FIG. 3 is a rotation angle and a reflection by the second X-ray spectroscopic element when the second X-ray spectroscopic element is slightly rotated in the opposite direction while the first X-ray spectroscopic element is rotated by a predetermined angle. Strength I
It is a figure which shows and reflected energy E.
【図４】図２の装置の動作説明図である。4 is an operation explanatory diagram of the apparatus of FIG. 2. FIG.
１ 第１結晶壁 ２ 第２結晶壁 ３ 第１反射面 ４ 第２反射面 ５ Ｘ線検出器 １０、２０ Ｘ線分
光素子 １１、２１ 第１結晶壁 １２、２２ 第２
結晶癖 １３、２３ 第１反射面 １４、２４ 第２
反射面 １５、２５ Ｘ線検出器 １６、２６ 載置
台 １７、２７ パルスモータ ３０ 制御回路1 1st crystal wall 2 2nd crystal wall 3 1st reflective surface 4 2nd reflective surface 5 X-ray detector 10, 20 X-ray spectroscopic element 11, 21 1st crystal wall 12, 22 2nd
Crystal habit 13,23 First reflective surface 14,24 Second
Reflective surface 15, 25 X-ray detector 16, 26 Mounting table 17, 27 Pulse motor 30 Control circuit
Claims (4)
Ｘ線を分光するためのチャンネルカット型分光結晶と、
この分光結晶の第２結晶壁を透過したＸ線フォトン数を
計測するためのＸ線検出手段を一体に備えてなることを
特徴とするＸ線分光素子。1. A channel-cut type dispersive crystal for separating incident X-rays having a first crystal wall and a second crystal wall,
An X-ray spectroscopic element characterized by integrally comprising X-ray detection means for measuring the number of X-ray photons transmitted through the second crystal wall of the dispersive crystal.
ト型分光結晶の背後に接着又は圧着されていることを特
徴とする請求項１に記載のＸ線分光素子。2. The X-ray spectroscopic element according to claim 1, wherein the X-ray detection means is bonded or pressure-bonded to the back of the channel-cut type dispersive crystal.
厚さが消衰距離より大きいことを特徴とする請求項１又
は２に記載のＸ線分光素子。3. The X-ray spectroscopic element according to claim 1, wherein the thickness of the crystal layer acting as a monochromator is larger than the extinction distance.
ネルカット型Ｘ線分光素子と、該Ｘ線分光素子を各々搭
載した台を回転駆動させるための駆動機構と、該駆動機
構の動作を制御する制御手段とから構成され、前記複数
のチャンネルカット型Ｘ線分光素子のうちＸ線入射側か
ら少なくとも２番目以降のＸ線分光素子は請求項１〜３
のいずれかに記載のＸ線分光素子からなり、前記制御手
段は、各Ｘ線分光素子に設けられたＸ線検出手段からの
信号を微分し、その微係数が正から負に変化する角度位
置となるように、該信号を検出したＸ線分光素子自身の
角度位置を制御することを特徴とするＸ線分光装置。4. A plurality of channel-cut type X-ray spectroscopic elements for separating incident X-rays, a drive mechanism for rotationally driving a table on which the X-ray spectroscopic elements are mounted, and an operation of the drive mechanism. An X-ray spectroscopic element of at least the second from the X-ray incident side of the plurality of channel-cut type X-ray spectroscopic elements, which comprises a control means for controlling.
The X-ray spectroscopic element according to any one of claims 1 to 3, wherein the control means differentiates a signal from the X-ray detection means provided in each X-ray spectroscopic element, and an angular position at which the differential coefficient changes from positive to negative. The X-ray spectroscopic device is characterized by controlling the angular position of the X-ray spectroscopic element itself that has detected the signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4152749A JPH05325887A (en) | 1992-05-19 | 1992-05-19 | X-ray spectroscopic element and x-ray spectroscopic device using x-ray spectroscopic element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4152749A JPH05325887A (en) | 1992-05-19 | 1992-05-19 | X-ray spectroscopic element and x-ray spectroscopic device using x-ray spectroscopic element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05325887A true JPH05325887A (en) | 1993-12-10 |
Family
ID=15547329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4152749A Pending JPH05325887A (en) | 1992-05-19 | 1992-05-19 | X-ray spectroscopic element and x-ray spectroscopic device using x-ray spectroscopic element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05325887A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008008785A (en) * | 2006-06-29 | 2008-01-17 | Rigaku Corp | X-ray spectrometric method and x-ray spectroscope |
-
1992
- 1992-05-19 JP JP4152749A patent/JPH05325887A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008008785A (en) * | 2006-06-29 | 2008-01-17 | Rigaku Corp | X-ray spectrometric method and x-ray spectroscope |
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