JPH05315197A - Method of manufacturing aluminum electrode for electrolytic capacitor - Google Patents
Method of manufacturing aluminum electrode for electrolytic capacitorInfo
- Publication number
- JPH05315197A JPH05315197A JP12160192A JP12160192A JPH05315197A JP H05315197 A JPH05315197 A JP H05315197A JP 12160192 A JP12160192 A JP 12160192A JP 12160192 A JP12160192 A JP 12160192A JP H05315197 A JPH05315197 A JP H05315197A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- oxide
- aluminum metal
- electrolytic capacitor
- tub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は複合誘電体皮膜の形成さ
れた電解コンデンサ用アルミニウム電極の製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an aluminum electrode for electrolytic capacitors having a composite dielectric film formed thereon.
【０００２】[0002]
【従来の技術】従来のこの種の製造方法としては図３に
示すように高純度アルミニウムにチタンをイオンプレー
ティングにより付着させて表面にアルミニウム−チタン
合金層を形成させた後、陽極酸化処理してアルミニウム
−チタン混在酸化物誘電体層を形成させるものがあった
（特開昭６３−３０６１４号公報）。そしてイオンプレ
ーティングは図４に示す方法で行われていた。すなわ
ち、図４において、１は真空容器であり、陰極板２に高
純度アルミニウム３が付着されている。真空容器１内を
１０-4Torr程度に減圧しながら高周波発振器４よりマッ
チングボックス５を経てＲＦコイル６に振動電場（通常
１３．５６ＭHz）を印加すると同時に蒸発源７からチタ
ン蒸気を蒸発させてプラズマ８を発生させかつ蒸発源７
と陰極板２の間に直流電源８により直流電場を印加して
チタンを高純度アルミニウムにコーティングしていた。2. Description of the Related Art As a conventional manufacturing method of this kind, as shown in FIG. 3, titanium is attached to high-purity aluminum by ion plating to form an aluminum-titanium alloy layer on the surface, and then anodizing treatment is performed. In some cases, an aluminum-titanium mixed oxide dielectric layer was formed (JP-A-63-30614). Ion plating was performed by the method shown in FIG. That is, in FIG. 4, reference numeral 1 is a vacuum container, and high-purity aluminum 3 is attached to the cathode plate 2. While depressurizing the inside of the vacuum container 1 to about 10 −4 Torr, an oscillating electric field (usually 13.56 MHz) is applied to the RF coil 6 from the high frequency oscillator 4 through the matching box 5, and at the same time titanium vapor is evaporated from the evaporation source 7 to generate plasma And evaporation source 7
A high-purity aluminum was coated with titanium by applying a DC electric field between the cathode plate 2 and the cathode plate 2 by a DC power source 8.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら上記の従
来の製造方法でチタンを連続的にコーティングするため
には大型のイオンプレーティング装置が必要であり、し
かもコーティングに時間を要するという問題があった。However, there is a problem that a large ion plating device is required for continuously coating titanium by the above-mentioned conventional manufacturing method, and that coating takes time.
【０００４】本発明は上記の問題を解決し、簡単な装置
により連続的に比誘電率の高い電解コンデンサ用アルミ
ニウム電極の製造方法の提供を目的とする。An object of the present invention is to solve the above problems and to provide a method for producing an aluminum electrode for an electrolytic capacitor having a high relative dielectric constant continuously by a simple device.
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
めに本発明の電解コンデンサ用アルミニウム電極の製造
方法は、アルミニウム金属の表面に金属塩の水溶液また
は有機金属塩の溶液を塗布し、次に前記金属塩または有
機金属塩を熱分解して金属酸化物とし、次に陽極酸化法
により酸化アルミニウムを形成して酸化アルミニウムよ
り比誘電率の高い複合誘電体皮膜を形成する。In order to achieve the above object, a method of manufacturing an aluminum electrode for an electrolytic capacitor according to the present invention comprises applying an aqueous solution of a metal salt or a solution of an organic metal salt onto the surface of aluminum metal, Then, the metal salt or organic metal salt is thermally decomposed to form a metal oxide, and then aluminum oxide is formed by an anodic oxidation method to form a composite dielectric film having a higher relative dielectric constant than aluminum oxide.
【０００６】[0006]
【作用】上記の構成によれば常圧（７６０Torr）で溶液
の塗布、熱分解、陽極酸化ができる。According to the above construction, application of the solution, thermal decomposition, and anodic oxidation can be carried out at normal pressure (760 Torr).
【０００７】[0007]
（実施例１）以下本発明の第１の実施例について図１お
よび図２を参照しながら説明する。(Embodiment 1) A first embodiment of the present invention will be described below with reference to FIGS.
【０００８】まず純度９９．９％、厚さ１００μｍのア
ルミニウム金属を塩酸を主体とするエッチング液で約５
０倍の表面積を有するように加工する。次に図２に示す
ように巻出しロール１０に巻かれたエッチングされたア
ルミニウム金属１１は巻取ロール１２との間に架設さ
れ、一定速度で巻取ロール１２に巻取られる。First, an aluminum metal having a purity of 99.9% and a thickness of 100 μm is about 5 by an etching solution containing hydrochloric acid as a main component.
It is processed to have a surface area of 0 times. Next, as shown in FIG. 2, the etched aluminum metal 11 wound on the unwinding roll 10 is installed between the winding roll 12 and the winding roll 12, and is wound on the winding roll 12 at a constant speed.
【０００９】その途中においてアルミニウム金属１１は
まず塗布槽１３に入る。塗布槽１３内にはｎ−ヘキサン
にチタニウムテトラブトキシドを１８重量％含有する溶
液が入れてある。溶液の塗布されたアルミニウム金属１
１は上方に引上げられ乾燥炉１４に入る。乾燥炉１４は
１００℃に保持されているために溶剤のｎ−ヘキサンが
蒸発し、チタニウムテトラブトキシドで被覆されたアル
ミニウム金属が形成される。次に乾燥炉１５は３００℃
に保持されているためにチタニウムテトラブトキシドは
熱分解されて酸化チタンとなる。酸化チタンで被覆され
たアルミニウム金属は次に化成槽１６に入る。化成槽１
６内には３０ｇ／ｌのアジピン酸アンモニウムの水溶液
からなる化成液が入れてあり、７０℃において酸化チタ
ンで被覆されたアルミニウム金属に８０ＶＤ．Ｃを印加
して陽極酸化を行なった後巻取ロール１２に巻取った。On the way, the aluminum metal 11 first enters the coating tank 13. The coating tank 13 contains a solution containing 18% by weight of titanium tetrabutoxide in n-hexane. Aluminum metal coated with solution 1
1 is pulled upward and enters the drying furnace 14. Since the drying furnace 14 is kept at 100 ° C., the solvent n-hexane is evaporated and aluminum metal coated with titanium tetrabutoxide is formed. Next, the drying oven 15 is 300 ° C
The titanium tetrabutoxide is thermally decomposed into titanium oxide because it is retained in the titanium oxide. The aluminum metal coated with titanium oxide then enters the conversion tank 16. Formation tank 1
A chemical conversion liquid consisting of an aqueous solution of 30 g / l ammonium adipate was placed in 6 and the aluminum metal coated with titanium oxide at 70 ° C. had 80 VD. After applying C to carry out anodization, it was wound on a winding roll 12.
【００１０】本実施例による電解コンデンサ用アルミニ
ウム電極の静電容量と耐電圧をエッチングのみを施した
電解コンデンサ用アルミニウム電極の特性と比較して
（表１）に示した。The electrostatic capacity and the withstand voltage of the aluminum electrode for electrolytic capacitors according to this example are shown in Table 1 in comparison with the characteristics of the aluminum electrode for electrolytic capacitors which has been subjected only to etching.
【００１１】[0011]
【表１】 [Table 1]
【００１２】静電容量はエチレングリコール電解液中に
おいて１２０Hzで測定し、耐電圧は同じエチレングリコ
ール電解液中で０．２mA／cm2を通電したときの電圧−
時間特性を測定し、電圧上昇停止点を耐電圧とした。
（表１）より本実施例によれば従来より誘電率が６３％
高い電解コンデンサ用アルミニウム電極が得られること
が明らかである。その理由は比誘電率が８５の酸化チタ
ン９体積％と比誘電率が８の酸化アルミニウム９１体積
％が等価的に並列接続した複合誘電体皮膜を形成したた
めである。The capacitance was measured at 120 Hz in the ethylene glycol electrolyte, and the withstand voltage was the voltage when 0.2 mA / cm 2 was applied in the same ethylene glycol electrolyte.
The time characteristic was measured, and the voltage rising stop point was defined as the withstand voltage.
From Table 1, according to this embodiment, the dielectric constant is 63% as compared with the conventional one.
It is clear that a high aluminum electrode for electrolytic capacitors can be obtained. The reason for this is that 9% by volume of titanium oxide having a relative permittivity of 85 and 91% by volume of aluminum oxide having a relative permittivity of 8 are equivalently connected in parallel to form a composite dielectric film.
【００１３】（実施例２）本実施例の製造方法が実施例
１と相違する点は、塗布槽１３内にチタニウムテトラブ
トキシドと等モルのバリウムアセテートを１２重量％含
有するエタノール溶液を入れた点である。(Example 2) The manufacturing method of this example is different from Example 1 in that an ethanol solution containing 12% by weight of titanium tetrabutoxide and equimolar barium acetate was placed in the coating tank 13. Is.
【００１４】本実施例による電解コンデンサ用アルミニ
ウム電極の静電容量と耐電圧を（表１）に示した。The capacitance and the withstand voltage of the aluminum electrode for electrolytic capacitors according to this example are shown in (Table 1).
【００１５】（表１）より本実施例によれば誘電率が１
１６％高い電解コンデンサ用アルミニウム電極が得られ
ることが明らかである。その理由は比誘電率が１５００
のチタン酸バリウム５体積％と比誘電率が８の酸化アル
ミニウム９５体積％が等価的に並列接続した複合誘電体
皮膜を形成したためである。From Table 1, according to this embodiment, the dielectric constant is 1
It is clear that a 16% higher aluminum electrode for electrolytic capacitors is obtained. The reason is that the relative permittivity is 1500
5% by volume of barium titanate and 95% by volume of aluminum oxide having a relative dielectric constant of 8 are equivalently connected in parallel to form a composite dielectric film.
【００１６】なお、実施例では酸化アルミニウムと酸化
チタンまたはチタン酸バリウムとの複合誘電体皮膜につ
いて説明したがこれらに代えて比誘電率が２００のチタ
ン酸鉛、比誘電率が３８０〜１８００のジルコニウム・
チタン酸鉛、比誘電率が３８０のニオブ酸鉛、比誘電率
が３８０のニオブ酸ストロンチウム・バリウムを用いて
もよい。In the examples, the composite dielectric film of aluminum oxide and titanium oxide or barium titanate was described. Instead of these, lead titanate having a relative dielectric constant of 200 and zirconium having a relative dielectric constant of 380 to 1800 are used.・
Lead titanate, lead niobate having a relative permittivity of 380, and strontium barium niobate having a relative permittivity of 380 may be used.
【００１７】また溶液の塗布方法としてはディップ法で
説明したがこれに代えてスプレー法を用いてもよい。Further, although the dipping method has been described as the method for applying the solution, a spray method may be used instead.
【００１８】[0018]
【発明の効果】以上の説明から明らかなように、本発明
の電解コンデンサ用アルミニウム電極の製造方法によれ
ば、常圧で溶液の塗布、熱分解、陽極酸化を行なうので
簡単な装置で連続的に比誘電率の大きいものが製造でき
る。As is apparent from the above description, according to the method for producing an aluminum electrode for an electrolytic capacitor of the present invention, application of a solution, thermal decomposition and anodic oxidation are carried out under normal pressure, so that continuous operation is possible with a simple apparatus. In addition, a material having a large relative dielectric constant can be manufactured.
【００１９】また本発明の製造方法によるコンデンサ用
アルミニウム電極によれば小型のアルミニウム電解コン
デンサが製造できる。The aluminum electrode for a capacitor according to the manufacturing method of the present invention can manufacture a small-sized aluminum electrolytic capacitor.
【図１】本発明の電解コンデンサ用アルミニウム電極の
製造方法の工程図FIG. 1 is a process diagram of a method for manufacturing an aluminum electrode for an electrolytic capacitor according to the present invention.
【図２】同じく製造装置の断面図FIG. 2 is a sectional view of the same manufacturing apparatus.
【図３】従来の電解コンデンサ用アルミニウム電極の製
造方法の工程図FIG. 3 is a process diagram of a conventional method for manufacturing an aluminum electrode for an electrolytic capacitor.
【図４】同じく製造装置の断面図FIG. 4 is a sectional view of the manufacturing apparatus.
Claims (2)
または有機金属塩の溶液を塗布し、次に前記金属塩また
は有機金属塩を熱分解して金属酸化物とし、次に陽極酸
化法により酸化アルミニウムを形成して酸化アルミニウ
ムより比誘電率の高い複合誘電体皮膜を形成する電解コ
ンデンサ用アルミニウム電極の製造方法。1. An aluminum metal surface is coated with an aqueous solution of a metal salt or a solution of an organic metal salt, and then the metal salt or the organic metal salt is thermally decomposed to form a metal oxide, and then oxidized by an anodic oxidation method. A method for manufacturing an aluminum electrode for an electrolytic capacitor, which comprises forming aluminum to form a composite dielectric film having a higher relative dielectric constant than aluminum oxide.
バリウム、チタン酸鉛、ジルコニウム・チタン酸鉛、ニ
オブ酸鉛、ニオブ酸ストロンチウム・バリウムの１種以
上と酸化アルミニウムとからなる請求項１記載の電解コ
ンデンサ用アルミニウム電極の製造方法。2. The composite dielectric film comprises one or more of titanium dioxide, barium titanate, lead titanate, zirconium lead titanate, lead niobate, strontium barium niobate, and barium, and aluminum oxide. Manufacturing method of aluminum electrode for electrolytic capacitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12160192A JPH05315197A (en) | 1992-05-14 | 1992-05-14 | Method of manufacturing aluminum electrode for electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12160192A JPH05315197A (en) | 1992-05-14 | 1992-05-14 | Method of manufacturing aluminum electrode for electrolytic capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05315197A true JPH05315197A (en) | 1993-11-26 |
Family
ID=14815296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12160192A Pending JPH05315197A (en) | 1992-05-14 | 1992-05-14 | Method of manufacturing aluminum electrode for electrolytic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05315197A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007055121A1 (en) * | 2005-11-10 | 2007-05-18 | Toyo Aluminium Kabushiki Kaisha | Electrode structure, capacitor and method for producing electrode structure |
| WO2007077883A1 (en) * | 2005-12-28 | 2007-07-12 | Showa Denko K. K. | Capacitor and method for manufacturing same |
| JPWO2006035579A1 (en) * | 2004-09-29 | 2008-07-31 | 東洋アルミニウム株式会社 | Electrode material and manufacturing method thereof |
| JP2010183091A (en) * | 1999-06-09 | 2010-08-19 | Showa Denko Kk | Method of manufacturing electrode material for capacitor |
| JP2011096872A (en) * | 2009-10-30 | 2011-05-12 | Panasonic Corp | Electrode foil and method of manufacturing the same, and capacitor using the electrode foil |
-
1992
- 1992-05-14 JP JP12160192A patent/JPH05315197A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010183091A (en) * | 1999-06-09 | 2010-08-19 | Showa Denko Kk | Method of manufacturing electrode material for capacitor |
| JP4723139B2 (en) * | 1999-06-09 | 2011-07-13 | 昭和電工株式会社 | Electrode material for capacitors |
| JPWO2006035579A1 (en) * | 2004-09-29 | 2008-07-31 | 東洋アルミニウム株式会社 | Electrode material and manufacturing method thereof |
| JP4705583B2 (en) * | 2004-09-29 | 2011-06-22 | 東洋アルミニウム株式会社 | Electrode material and manufacturing method thereof |
| WO2007055121A1 (en) * | 2005-11-10 | 2007-05-18 | Toyo Aluminium Kabushiki Kaisha | Electrode structure, capacitor and method for producing electrode structure |
| KR101224064B1 (en) * | 2005-11-10 | 2013-01-18 | 도요 알루미늄 가부시키가이샤 | Electrode structure, capacitor and method for producing electrode structure |
| WO2007077883A1 (en) * | 2005-12-28 | 2007-07-12 | Showa Denko K. K. | Capacitor and method for manufacturing same |
| JPWO2007077883A1 (en) * | 2005-12-28 | 2009-06-11 | 昭和電工株式会社 | Capacitor and manufacturing method thereof |
| US7697267B2 (en) | 2005-12-28 | 2010-04-13 | Showa Denko K.K. | Capacitor and method for manufacturing same |
| JP2011096872A (en) * | 2009-10-30 | 2011-05-12 | Panasonic Corp | Electrode foil and method of manufacturing the same, and capacitor using the electrode foil |
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