JPH05232024A - Icp emission spectral analyzer - Google Patents
Icp emission spectral analyzerInfo
- Publication number
- JPH05232024A JPH05232024A JP4033175A JP3317592A JPH05232024A JP H05232024 A JPH05232024 A JP H05232024A JP 4033175 A JP4033175 A JP 4033175A JP 3317592 A JP3317592 A JP 3317592A JP H05232024 A JPH05232024 A JP H05232024A
- Authority
- JP
- Japan
- Prior art keywords
- sample aerosol
- plasma torch
- ultrasonic nebulizer
- icp emission
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＩＣＰ（高周波誘導結
合プラズマ）発光分光分析装置に係り、詳しくは、超音
波ネブライザからプラズマトーチに至る試料エアロゾル
の搬送経路部分の構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ICP (high frequency inductively coupled plasma) emission spectroscopic analyzer, and more particularly, to a structure of a sample aerosol carrying path portion from an ultrasonic nebulizer to a plasma torch.
【０００２】[0002]
【従来の技術】ＩＣＰ発光分光分析装置には、超音波ネ
ブライザにより液体試料をエアロゾル化し、この試料エ
アロゾルをキャリアガスとともにプラズマトーチに導入
するようにしたものがある。超音波ネブライザは、霧吹
き式のネブライザに比べると、粒径の細かい試料エアロ
ゾルが生成でき、また、キャリアガスの供給量に関係な
く試料エアロゾルの量を調整しうる、という利点があ
る。2. Description of the Related Art Some ICP emission spectroscopic analyzers are those in which a liquid sample is aerosolized by an ultrasonic nebulizer and this sample aerosol is introduced into a plasma torch together with a carrier gas. The ultrasonic nebulizer has advantages that it can generate a sample aerosol having a fine particle size and that the amount of the sample aerosol can be adjusted regardless of the supply amount of the carrier gas, as compared with the nebulizer of the atomization type.
【０００３】図２に、従来のこの種のＩＣＰ発光分光分
析装置の要部の構成を示す。同図において、符号１は超
音波ネブライザ、２はプラズマトーチである。超音波ネ
ブライザ１は、ネブライザ本体３と、脱溶媒部４とから
なる。ネブライザ本体３は、霧化室５内に超音波振動子
６を設けたもので、試料容器７からポンプ８により超音
波振動子６の表面に送り込まれる液体試料Ｓを、超音波
振動子６の振動により霧化する。このネブライザ本体３
でエアロゾル化された試料は、霧化室５内に流入するキ
ャリアガスとともに、脱溶媒部４へ送出される。脱溶媒
部４は、加熱と冷却とにより試料エアロゾルを細粒子化
するとともに、試料エアロゾルから溶媒（通常は水）を
取り除く。脱溶媒部４を通過した試料エアロゾルは、搬
送管９を通じてプラズマトーチ２に搬送される。FIG. 2 shows the structure of the main part of a conventional ICP emission spectroscopic analyzer of this type. In the figure, reference numeral 1 is an ultrasonic nebulizer, and 2 is a plasma torch. The ultrasonic nebulizer 1 includes a nebulizer body 3 and a desolvation unit 4. The nebulizer main body 3 is provided with an ultrasonic vibrator 6 in the atomization chamber 5, and the liquid sample S sent from the sample container 7 to the surface of the ultrasonic vibrator 6 by the pump 8 is transferred to the ultrasonic vibrator 6. It atomizes due to vibration. This nebulizer body 3
The aerosolized sample is sent to the desolvation unit 4 together with the carrier gas flowing into the atomization chamber 5. The desolvation unit 4 atomizes the sample aerosol by heating and cooling and removes the solvent (usually water) from the sample aerosol. The sample aerosol that has passed through the desolvation unit 4 is transported to the plasma torch 2 through the transport tube 9.
【０００４】[0004]
【発明が解決しようとする課題】上記の通り、超音波ネ
ブライザを有する従来のＩＣＰ発光分光分析装置では、
超音波ネブライザ１に脱溶媒部４を付設して、この脱溶
媒部４により試料エアロゾルから溶媒を取り除き、プラ
ズマトーチ２には、溶媒を含まない試料エアロゾルを送
り込むようにしているが、脱溶媒部４での溶媒は、装置
を長時間運転した場合とか、室温が低い場合には、試料
エアロゾルに含まれる溶媒が液滴（通常は水滴）として
搬送管９内に溜まってしまって完全に除去しきれないこ
とがある。そして、搬送管９内に溶媒が液滴として溜ま
ってしまうと、この液滴状の溶媒がプラズマトーチ２に
まで吹き上がり、結果、プラズマ炎が消炎されてしまう
という不具合を引き起こす。As described above, in the conventional ICP emission spectroscopic analyzer having the ultrasonic nebulizer,
A desolvation section 4 is attached to the ultrasonic nebulizer 1, the solvent is removed from the sample aerosol by the desolvation section 4, and a sample aerosol containing no solvent is sent to the plasma torch 2. When the apparatus is operated for a long time or when the room temperature is low, the solvent in 4 is completely removed because the solvent contained in the sample aerosol accumulates in the carrier tube 9 as droplets (usually water droplets). Sometimes I can't. Then, if the solvent accumulates in the carrier tube 9 as a droplet, the droplet-shaped solvent blows up to the plasma torch 2, and as a result, the plasma flame is extinguished.
【０００５】また、従来の装置では、超音波ネブライザ
１からプラズマトーチ２へ試料エアロゾルが円滑に流れ
るように、その間の搬送経路がほぼ同一内径の管路で構
成されているのであるが、ネブライザ本体３で試料エア
ロゾルの粒子密度に濃淡の変動が発生した場合には、そ
の濃淡の変動が疎密波の形でプラズマトーチ２まで直接
送られることになり、プラズマトーチ２で発光の強度変
動を来し、結果、安定した測光信号が得られなくなる、
という問題がある。Further, in the conventional apparatus, the transport path between the ultrasonic nebulizer 1 and the plasma torch 2 is constituted by the conduits having substantially the same inner diameter so that the sample aerosol can smoothly flow. When the density variation of the sample aerosol particle density occurs in 3, the density variation is directly sent to the plasma torch 2 in the form of a compressional wave, and the plasma torch 2 causes a variation in the emission intensity. As a result, a stable photometric signal cannot be obtained,
There is a problem.
【０００６】さらに、脱溶媒部４での試料エアロゾルの
細粒子化が不充分である場合には、粒径にばらつきのあ
る試料エアロゾルがそのままプラズマトーチ２に導入さ
れることにもなり、発光強度にばらつきが生じ、この点
からも、安定した測光信号が得られなくなる。Further, when the sample aerosol in the desolvation section 4 is not sufficiently finely pulverized, the sample aerosol having a variation in particle size may be directly introduced into the plasma torch 2, and the emission intensity may be increased. And a stable photometric signal cannot be obtained from this point as well.
【０００７】本発明は、上記の問題点に鑑みてなされた
ものであって、溶媒の液滴によるプラズ炎の消炎という
不具合の発生を防止するとともに、測光信号を安定化す
ることを課題とする。The present invention has been made in view of the above problems, and it is an object of the present invention to prevent the occurrence of the problem of quenching the plasm flame due to the droplets of the solvent and to stabilize the photometric signal. ..
【０００８】[0008]
【課題を解決するための手段】本発明は、上記の課題を
達成するために、超音波ネブライザとプラズマトーチと
の間の試料エアロゾルの搬送経路に、排液口を有する分
離チャンバが介装されており、この分離チャンバは内筒
と外筒とを有し、この内筒に超音波ネブライザからの試
料エアロゾルが噴出するとともに、外筒からプラズマト
ーチに試料エアロゾルを搬送する構造とした。According to the present invention, in order to achieve the above object, a separation chamber having a drainage port is provided in a transport path of a sample aerosol between an ultrasonic nebulizer and a plasma torch. The separation chamber has an inner cylinder and an outer cylinder, and the sample aerosol is ejected from the ultrasonic nebulizer to the inner cylinder and the sample aerosol is conveyed from the outer cylinder to the plasma torch.
【０００９】[0009]
【作用】上記の構成によれば、超音波ネブライザから送
り出された試料エアロゾルは、プラズマトーチの手前
で、分離チャンバの内筒に噴出し、チャンバ端部で反転
流動した後、その外筒からプラズマトーチ側に流出す
る。その間に試料エアロゾルは、粒子密度が平均化され
るとともに、溶媒の液滴や、試料エアロゾルの大きな粒
子が分離除去される。According to the above construction, the sample aerosol sent from the ultrasonic nebulizer is jetted to the inner cylinder of the separation chamber before the plasma torch, reversely flows at the chamber end, and then the plasma is discharged from the outer cylinder. It flows out to the torch side. In the meantime, the particle density of the sample aerosol is averaged, and droplets of the solvent and large particles of the sample aerosol are separated and removed.
【００１０】[0010]
【実施例】図１は本発明の一実施例に係るＩＣＰ発光分
光分析装置の要部の構成を示す構成図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing the structure of the main part of an ICP emission spectroscopic analyzer according to an embodiment of the present invention.
【００１１】同図に示すように、この実施例のＩＣＰ発
光分光分析装置が、超音波ネブライザ１と、プラズマト
ーチ２とを備え、超音波ネブライザ１が、ネブライザ本
体３と、脱溶媒部４とからなる点は、前記した従来例と
同じである。また、ネブライザ本体３が、霧化室５と、
超音波振動子６とを備え、試料容器７からポンプ８によ
り超音波振動子６の表面に送り込まれる液体試料Ｓを、
超音波振動子６の振動により霧化するものであり、ま
た、脱溶媒部４が、ネブライザ本体３からの試料エアロ
ゾルを加熱と冷却とにより細粒子化するとともに、試料
エアロゾルから溶媒を取り除くものである点も、従来例
と同じである。As shown in the figure, the ICP emission spectroscopic analyzer of this embodiment comprises an ultrasonic nebulizer 1 and a plasma torch 2, and the ultrasonic nebulizer 1 comprises a nebulizer body 3 and a desolvation section 4. Is the same as the conventional example described above. In addition, the nebulizer main body 3 and the atomization chamber 5,
The ultrasonic sample 6 and the liquid sample S sent from the sample container 7 to the surface of the ultrasonic oscillator 6 by the pump 8 are
The atomization is performed by the vibration of the ultrasonic vibrator 6, and the desolvation unit 4 removes the solvent from the sample aerosol while atomizing the sample aerosol from the nebulizer body 3 by heating and cooling. Some points are also the same as the conventional example.
【００１２】この実施例のＩＣＰ発光分光分析装置が従
来例と異なる点は、超音波ネブライザ１の脱溶媒部４か
ら試料エアロゾルを搬送する搬送管９と、プラズマトー
チ１のセンター管２ａとが分離され、その分離部間に、
二重筒構造の分離チャンバ１０が連通接続されているこ
とである。この分離チャンバ１０は、一端が閉じた外筒
１１と、この外筒１１の他端を閉じるキャップ１２と、
外筒１１と同心にキャップ１２側に取り付けられた内筒
１３とから構成され、キャップ１２が若干高くなる傾斜
姿勢で支持されている。そして、キャップ１２には、搬
送管９に連通接続するノズル１４が設けられ、このノズ
ル１４は、内筒１３の内部で傾斜下端側に向けて開口し
ている。一方、外筒１１の傾斜下端には排液口１１ａが
開設され、外筒１１の上部で長さ方向中途位置に、試料
エアロゾルの流出口１１ｂが設けられ、この流出口１１
ｂがプラズマトーチ２のセンター管２ａに接続されてい
る。１５は排液タンクである。The ICP emission spectroscopic analyzer of this embodiment is different from the conventional example in that the carrier tube 9 for carrying the sample aerosol from the desolvation section 4 of the ultrasonic nebulizer 1 and the center tube 2a of the plasma torch 1 are separated. Between the separated parts,
That is, the separation chamber 10 having the double cylinder structure is connected and connected. The separation chamber 10 includes an outer cylinder 11 whose one end is closed, a cap 12 which closes the other end of the outer cylinder 11,
It is composed of an outer cylinder 11 and an inner cylinder 13 concentrically attached to the cap 12 side, and the cap 12 is supported in an inclined posture in which it is slightly higher. Further, the cap 12 is provided with a nozzle 14 which is connected to the transport pipe 9 so as to communicate therewith, and the nozzle 14 is opened inside the inner cylinder 13 toward the inclined lower end side. On the other hand, a drainage port 11a is opened at the lower inclined end of the outer cylinder 11, and a sample aerosol outlet 11b is provided at an upper portion of the outer cylinder 11 in the longitudinal direction.
b is connected to the center tube 2a of the plasma torch 2. Reference numeral 15 is a drainage tank.
【００１３】上記の構成において、ネブライザ本体３で
生成された試料エアロゾルは、脱溶媒部４で、細粒子化
されるとともに溶媒が取り除かれ、搬送管９を通じてプ
ラズマトーチ２側へ送出されるが、プラズマトーチ２の
手前で、分離チャンバ１０に流入する。この分離チャン
バ１０で、試料エアロゾルはノズル１４から内筒１３の
内部に噴出し、外筒１１の傾斜下端で反転して内筒１３
と外筒１１との間隙に流入し、流出口１１ｂからプラズ
マトーチ２側に流出する。In the above structure, the sample aerosol generated in the nebulizer main body 3 is made into fine particles and the solvent is removed in the desolvation section 4, and is sent to the plasma torch 2 side through the carrier tube 9. Before the plasma torch 2, it flows into the separation chamber 10. In this separation chamber 10, the sample aerosol is ejected from the nozzle 14 into the inner cylinder 13, and is inverted at the lower end of the inclination of the outer cylinder 11 to be reversed.
Flows into the gap between the outer cylinder 11 and the outer cylinder 11, and flows out from the outlet 11b toward the plasma torch 2 side.
【００１４】この間、試料エアロゾルは、分離チャンバ
１０内部で反転流動することで、粒径に応じて選別分離
される。すなわち、試料エアロゾルに溶媒の液滴が含ま
れていると、その液滴は外筒１１の壁面に付着し、壁面
に沿って傾斜下端に集まる。そして、排液口１１ａから
外部に排出される。During this period, the sample aerosol flows and reverses in the separation chamber 10 and is selectively separated according to the particle size. That is, when the sample aerosol contains a droplet of the solvent, the droplet adheres to the wall surface of the outer cylinder 11 and collects at the lower end of the slope along the wall surface. Then, the liquid is discharged to the outside from the drainage port 11a.
【００１５】また、分離チャンバ１０に流入する試料エ
アロゾルのうち、粒径の細かいものは流出口１１ｂに達
するが、粒径の大きなものは外筒１１の壁面に付着し、
試料エアロゾルから取り除かれる。したがって、試料エ
アロゾルは分離チャンバ１０を通過することで、粒径の
細かいものが選別され、プラズマトーチ２には、細かい
粒径に揃えられた試料エアロゾルが供給され、発光強度
のばらつきが生じなくなる。Further, among the sample aerosols flowing into the separation chamber 10, those having a small particle size reach the outlet 11b, but those having a large particle size adhere to the wall surface of the outer cylinder 11,
Removed from the sample aerosol. Therefore, as the sample aerosol passes through the separation chamber 10, those having a small particle size are selected, the sample aerosol having a uniform particle size is supplied to the plasma torch 2, and variations in emission intensity do not occur.
【００１６】さらに、試料エアロゾルは、分離チャンバ
１０の内部で反転流動することで、一時的に滞留し、撹
拌される。そのため、ネブライザ本体３から、粒子密度
に濃淡の変動がある試料エアロゾルが送られてきても、
分離チャンバ１０内でその粒子密度が平均化され、プラ
ズマトーチ２では、粒子密度の濃淡による発光強度の変
動がなくなり、発光強度が安定する。Further, the sample aerosol is caused to reversely flow inside the separation chamber 10 so that it is temporarily retained and agitated. Therefore, even if the sample aerosol with the particle density varying in density is sent from the nebulizer main body 3,
The particle densities are averaged in the separation chamber 10, and in the plasma torch 2, there is no fluctuation in the emission intensity due to the density of the particle density, and the emission intensity is stable.
【００１７】[0017]
【発明の効果】本発明によれば、分離チャンバ内で溶媒
の液滴が分離除去されるから、プラズマトーチの手前に
液滴が溜まるようなことがなく、液滴の吹き上げにより
プラズマ炎が消炎するという不具合の発生が確実に防止
される。According to the present invention, since the droplets of the solvent are separated and removed in the separation chamber, the droplets do not accumulate in front of the plasma torch, and the plasma flame is extinguished by blowing up the droplets. It is possible to prevent the occurrence of such a trouble.
【００１８】また、超音波ネブライザからの試料エアロ
ゾルに粒子密度の濃淡変動があっても、その試料エアロ
ゾルは、分離チャンバ内で粒子密度が平均化されるか
ら、プラズマトーチでの発光強度も平均化し、安定した
測光信号が得られる。Further, even if the sample aerosol from the ultrasonic nebulizer has a variation in the density of the particle density, the particle density of the sample aerosol is averaged in the separation chamber, and therefore the emission intensity of the plasma torch is also averaged. , A stable photometric signal can be obtained.
【００１９】しかも、分離チャンバで粒径の大きな試料
エアロゾルが分離除去され、プラズマトーチには、細か
い粒径に揃えられた試料エアロゾルが供給されるから、
この点からも、測光信号が安定化する。Moreover, the sample aerosol having a large particle size is separated and removed in the separation chamber, and the sample aerosol having a uniform particle size is supplied to the plasma torch.
From this point as well, the photometric signal is stabilized.
【図１】本発明の一実施例に係るＩＣＰ発光分光分析装
置の要部の構成図である。FIG. 1 is a configuration diagram of a main part of an ICP emission spectroscopy analyzer according to an embodiment of the present invention.
【図２】従来のＩＣＰ発光分光分析装置の要部の構成図
である。FIG. 2 is a configuration diagram of a main part of a conventional ICP emission spectroscopy analyzer.
１ 超音波ネブライザ ２ プラズマトーチ ９ 搬送管 １０ 分離チャンバ １１ 外筒 １１ａ 排液口 １２ 内筒 １４ ノズル 1 Ultrasonic Nebulizer 2 Plasma Torch 9 Transfer Pipe 10 Separation Chamber 11 Outer Cylinder 11a Drainage Port 12 Inner Cylinder 14 Nozzle
Claims (1)
間の試料エアロゾルの搬送経路に、排液口を有する分離
チャンバが介装されており、この分離チャンバは内筒と
外筒とを有し、この内筒に超音波ネブライザからの試料
エアロゾルが噴出するとともに、外筒からプラズマトー
チに試料エアロゾルを搬送する構造になっていることを
特徴とするＩＣＰ発光分光分析装置。1. A separation chamber having a drainage port is provided in a sample aerosol transfer path between an ultrasonic nebulizer and a plasma torch, and the separation chamber has an inner cylinder and an outer cylinder. An ICP emission spectroscopic analyzer characterized in that the sample aerosol is ejected from the ultrasonic nebulizer to the inner cylinder and the sample aerosol is conveyed from the outer cylinder to the plasma torch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04033175A JP3084885B2 (en) | 1992-02-20 | 1992-02-20 | ICP emission spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04033175A JP3084885B2 (en) | 1992-02-20 | 1992-02-20 | ICP emission spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05232024A true JPH05232024A (en) | 1993-09-07 |
| JP3084885B2 JP3084885B2 (en) | 2000-09-04 |
Family
ID=12379187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04033175A Expired - Fee Related JP3084885B2 (en) | 1992-02-20 | 1992-02-20 | ICP emission spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3084885B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988000572A1 (en) * | 1986-07-24 | 1988-01-28 | Shiseido Company Ltd. | Spherical clay mineral powder, process for its production, and composition containing same |
| JP2009008689A (en) * | 2008-08-08 | 2009-01-15 | Shimadzu Corp | Aerosol generator |
| JP2012032210A (en) * | 2010-07-29 | 2012-02-16 | Yamatake Corp | Analysis light generation device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6058078B2 (en) * | 2015-06-12 | 2017-01-11 | 幸人 河本 | Garbage cover protection device |
-
1992
- 1992-02-20 JP JP04033175A patent/JP3084885B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988000572A1 (en) * | 1986-07-24 | 1988-01-28 | Shiseido Company Ltd. | Spherical clay mineral powder, process for its production, and composition containing same |
| JP2009008689A (en) * | 2008-08-08 | 2009-01-15 | Shimadzu Corp | Aerosol generator |
| JP2012032210A (en) * | 2010-07-29 | 2012-02-16 | Yamatake Corp | Analysis light generation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3084885B2 (en) | 2000-09-04 |
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