JPH04317068A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH04317068A JPH04317068A JP8400191A JP8400191A JPH04317068A JP H04317068 A JPH04317068 A JP H04317068A JP 8400191 A JP8400191 A JP 8400191A JP 8400191 A JP8400191 A JP 8400191A JP H04317068 A JPH04317068 A JP H04317068A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- recording medium
- magnetic
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 229910020708 Co—Pd Inorganic materials 0.000 claims abstract description 19
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 19
- 239000000956 alloy Substances 0.000 claims abstract description 19
- 238000010030 laminating Methods 0.000 claims abstract description 6
- 239000010409 thin film Substances 0.000 claims description 68
- 239000010408 film Substances 0.000 claims description 54
- 239000000203 mixture Substances 0.000 claims description 16
- 101150071146 COX2 gene Proteins 0.000 claims 1
- 101100114534 Caenorhabditis elegans ctc-2 gene Proteins 0.000 claims 1
- 101150000187 PTGS2 gene Proteins 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 11
- 230000004907 flux Effects 0.000 abstract description 9
- 238000000151 deposition Methods 0.000 abstract description 2
- 229910052763 palladium Inorganic materials 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 20
- 229910001252 Pd alloy Inorganic materials 0.000 description 16
- 230000005415 magnetization Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910000599 Cr alloy Inorganic materials 0.000 description 3
- 229910000767 Tm alloy Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- AYTAKQFHWFYBMA-UHFFFAOYSA-N chromium dioxide Chemical compound O=[Cr]=O AYTAKQFHWFYBMA-UHFFFAOYSA-N 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 235000010799 Cucumis sativus var sativus Nutrition 0.000 description 1
- 244000299906 Cucumis sativus var. sativus Species 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、高密度の磁気潜像を形
成するための磁気記録媒体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for forming a high-density magnetic latent image.
【０００２】0002
【従来の技術】従来、磁気記録媒体は、例えば熱磁気プ
リンタに用いられており、その場合磁気プリンタドラム
に磁気潜像が形成され、これを磁気的に現像して可視像
を得るようにしている（「マグネトグラフィプリンタ」
今村舜仁著、大野信編集、ＣＭＣ「ノンインパクトプリ
ンティング」第１５章Ｐ． １５９〜Ｐ．１６８、１９
８６参照） 。2. Description of the Related Art Conventionally, magnetic recording media have been used, for example, in thermomagnetic printers, in which a magnetic latent image is formed on a magnetic printer drum, and this is magnetically developed to obtain a visible image. (“Magnetography Printer”)
Written by Shunjin Imamura, edited by Shin Ohno, CMC "Non-Impact Printing" Chapter 15 P. 159-P. 168, 19
86).
【０００３】図２は従来の熱磁気プリンタの印刷プロセ
ス図である。図において、記録用磁気ドラム１は矢印Ａ
方向に回転する。該記録用磁気ドラム１面上には磁気潜
像を形成するための磁気記録媒体であるＣｒＯ２ 薄膜
などが設けられている。印刷プロセスにおいて、まず消
磁手段２が磁気記録媒体を一定方向に磁化する。次に、
磁気記録手段３が所定の磁気潜像を形成し、現像手段４
が磁気潜像上にトナーを付着させることにより、磁気潜
像は可視像化される。ここで、トナーは磁気記録媒体面
上の漏れ磁界による磁力線と磁気記録媒体面とが交差す
る部分に付着し、その結果、磁気潜像は可視像化される
。FIG. 2 is a diagram showing the printing process of a conventional thermomagnetic printer. In the figure, the recording magnetic drum 1 is indicated by the arrow A.
Rotate in the direction. A CrO2 thin film, which is a magnetic recording medium for forming a magnetic latent image, is provided on one surface of the recording magnetic drum. In the printing process, first, the demagnetizing means 2 magnetizes the magnetic recording medium in a certain direction. next,
The magnetic recording means 3 forms a predetermined magnetic latent image, and the developing means 4
The magnetic latent image is made visible by depositing toner on the magnetic latent image. Here, the toner adheres to a portion where lines of magnetic force due to a leakage magnetic field on the surface of the magnetic recording medium intersect with the surface of the magnetic recording medium, and as a result, the magnetic latent image is visualized.
【０００４】その後、転写手段５及び定着手段６は、可
視像を用紙上に転写、定着する。最後にクリーニング手
段７は磁気記録媒体上の残留トナーを除去し、印刷プロ
セスを終了する。ところで、上記磁気記録媒体上に磁気
潜像を記録する方法としてはサーマルヘッドを用いる方
法やレーザビーム光照射によって加熱する方法がある。
また、磁気記録媒体の磁化方向を、主として磁気記録媒
体の面に沿う方向にする方法（面内記録法） と磁気記
録媒体の面に対し垂直の方向にする方法 （垂直記録法
） とがあり、高解像度を必要とする場合には垂直記録
法が用いられる。垂直記録用の磁気記録媒体は、希土類
元素と鉄族元素との合金膜、すなわちＲＥ−ＴＭ合金膜
又はＣｏ−Ｃｒ合金膜で形成される。ＲＥ−ＴＭ合金膜
は光磁気記録法を用いた光磁気ディスクに、またＣｏ−
Ｃｒ合金膜は磁気ヘッド記録法を用いた磁気ディスクに
多く用いられている。[0004] Thereafter, the transfer means 5 and the fixing means 6 transfer and fix the visible image onto the paper. Finally, the cleaning means 7 removes the residual toner on the magnetic recording medium and ends the printing process. By the way, methods for recording a magnetic latent image on the magnetic recording medium include a method using a thermal head and a method of heating by laser beam irradiation. In addition, there are two methods: one in which the magnetization direction of the magnetic recording medium is set primarily along the surface of the magnetic recording medium (in-plane recording method), and the other method is set in a direction perpendicular to the surface of the magnetic recording medium (perpendicular recording method). , perpendicular recording is used when high resolution is required. A magnetic recording medium for perpendicular recording is formed of an alloy film of rare earth elements and iron group elements, that is, an RE-TM alloy film or a Co-Cr alloy film. The RE-TM alloy film is used for magneto-optical disks using magneto-optical recording method, and also for Co-magneto-optical disks.
Cr alloy films are often used in magnetic disks using the magnetic head recording method.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記構
成の磁気記録媒体において、Ｃｏ−Ｃｒ合金膜で形成し
た場合はキュリー温度が高いため熱磁気記録が困難とな
り、ＲＥ−ＴＭ合金膜で形成した場合は残留磁束密度が
小さいため、磁性体であるトナーの付着力が不十分とな
る。[Problems to be Solved by the Invention] However, in the magnetic recording medium having the above structure, when formed with a Co-Cr alloy film, thermomagnetic recording becomes difficult due to the high Curie temperature, and when formed with an RE-TM alloy film, it becomes difficult to perform thermomagnetic recording. Since the residual magnetic flux density is small, the adhesion force of the magnetic toner becomes insufficient.
【０００６】このように、垂直記録用の垂直磁化膜を使
用した熱磁気プリンタは、原理的には記録の安定性が高
く、高解像度を得ることができ、しかも低消費電力で作
動させることができるが、垂直磁化膜として有効な磁気
記録媒体がない。本発明は、上記従来の磁気記録媒体の
問題点を解決して、残留磁束密度が十分に高く、保磁力
が十分大きく、しかもキュリー温度が低く、高密度の熱
磁気記録を行うことができる垂直記録用の磁気記録媒体
を提供することを目的とする。As described above, a thermomagnetic printer using a perpendicular magnetization film for perpendicular recording has high recording stability in principle, can obtain high resolution, and can operate with low power consumption. However, there is no magnetic recording medium that is effective as a perpendicularly magnetized film. The present invention solves the problems of the conventional magnetic recording media described above, has a sufficiently high residual magnetic flux density, a sufficiently large coercive force, a low Curie temperature, and is capable of performing high-density thermomagnetic recording. The purpose is to provide a magnetic recording medium for recording.
【０００７】[0007]
【課題を解決するための手段】そのために、本発明の磁
気記録媒体においては、基板の上に垂直磁化膜を形成し
ており、該垂直磁化膜は、極薄状態のＣｏ−Ｐｄ合金薄
膜と非磁性薄膜を交互に積層して成る積層膜で構成され
、Ｘを原子％とした時、組成式ＣｏＸ Ｐｄ１００−Ｘ
で示されるものとする。この時、組成範囲は１０≦Ｘ
≦５０となるように設定される。[Means for Solving the Problems] To achieve this, in the magnetic recording medium of the present invention, a perpendicularly magnetized film is formed on the substrate, and the perpendicularly magnetized film is composed of an extremely thin Co--Pd alloy thin film. It is composed of a laminated film consisting of alternating layers of non-magnetic thin films, and has a compositional formula of CoX Pd100-X, where X is atomic%.
shall be indicated by At this time, the composition range is 10≦X
It is set so that ≦50.
【０００８】また、上記Ｃｏ−Ｐｄ合金薄膜の膜厚Ｔ１
及び非磁性薄膜の膜厚Ｔ２ の範囲は、いずれも１０
Å〜１０００Åの範囲とされる。[0008] Furthermore, the film thickness T1 of the Co-Pd alloy thin film is
and the range of the film thickness T2 of the nonmagnetic thin film are both 10
It is in the range of Å to 1000 Å.
【０００９】[0009]
【作用】本発明によれば、上記のように基板の上に極薄
状態のＣｏ−Ｐｄ合金薄膜と非磁性薄膜を交互に積層し
て成る積層膜が形成され、該積層膜によって垂直磁化膜
が構成されている。この場合、Ｃｏターゲット及びＰｄ
ターゲットを使用し、基板を高速回転させて各ターゲッ
トを通過させて多元スパッタ法でスパッタリングを行っ
てＣｏ−Ｐｄ合金薄膜を形成し、例えばＰｄターゲット
のみを使用し、非磁性薄膜を形成する。[Function] According to the present invention, a laminated film is formed by alternately laminating ultrathin Co-Pd alloy thin films and non-magnetic thin films on a substrate as described above, and the perpendicularly magnetized film is formed by the laminated film. is configured. In this case, Co target and Pd
Using targets, the substrate is rotated at high speed and passed through each target to perform sputtering using a multi-source sputtering method to form a Co--Pd alloy thin film. For example, only a Pd target is used to form a non-magnetic thin film.
【００１０】そして、上記垂直磁化膜は、Ｘを原子％と
した時、組成式ＣｏＸ Ｐｄ１００−Ｘ で示されるも
のとする。この時、組成範囲は１０≦Ｘ≦５０となるよ
うに設定される。また、上記Ｃｏ−Ｐｄ合金薄膜の膜厚
Ｔ１ 及び非磁性薄膜の膜厚Ｔ２ の範囲は、いずれも
１０Å〜１０００Åの範囲とされる。The perpendicularly magnetized film has a compositional formula of CoX Pd100-X, where X is expressed as atomic %. At this time, the composition range is set so that 10≦X≦50. Further, the thickness T1 of the Co--Pd alloy thin film and the thickness T2 of the nonmagnetic thin film are both in the range of 10 Å to 1000 Å.
【００１１】[0011]
【実施例】以下、本発明の実施例について図面を参照し
ながら詳細に説明する。図１は本発明の磁気記録媒体を
示す図であり、図の（Ａ）は磁気記録媒体の断面図、（
Ｂ）は記録用磁気ドラムの断面図である。図において、
１１は磁気記録媒体、８は厚さが数十〜数百ミクロンの
曲折自在なステンレス基板、１０は該ステンレス基板８
の上に形成された厚さが数〜数十ミクロンの積層膜であ
る。該積層膜１０は垂直磁化膜を構成する極薄のＣｏ−
Ｐｄ合金薄膜と非磁性薄膜を構成するＰｄ薄膜を交互に
形成することによって構成されている。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a magnetic recording medium of the present invention, in which (A) is a cross-sectional view of the magnetic recording medium, (
B) is a sectional view of the recording magnetic drum. In the figure,
11 is a magnetic recording medium, 8 is a bendable stainless steel substrate with a thickness of several tens to hundreds of microns, and 10 is the stainless steel substrate 8.
A laminated film with a thickness of several to several tens of microns is formed on top. The laminated film 10 is made of extremely thin Co- which constitutes a perpendicular magnetization film.
It is constructed by alternately forming a Pd alloy thin film and a Pd thin film constituting a nonmagnetic thin film.
【００１２】上記構成の磁気記録媒体１１はシート状に
形成され、記録用磁気ドラム芯材１２上に巻き付けられ
る。図３は本発明の磁気記録媒体の積層膜の拡大図であ
る。図において、８はステンレス基板、１３は非磁性薄
膜を構成するＰｄ薄膜、１４は垂直磁化膜を構成する極
薄のＣｏ−Ｐｄ合金薄膜である。上記Ｐｄ薄膜１３とＣ
ｏ−Ｐｄ合金薄膜１４は交互に積層されて、積層膜１０
を形成している。The magnetic recording medium 11 having the above structure is formed into a sheet shape, and is wound onto the recording magnetic drum core material 12 . FIG. 3 is an enlarged view of the laminated film of the magnetic recording medium of the present invention. In the figure, 8 is a stainless steel substrate, 13 is a Pd thin film constituting a non-magnetic thin film, and 14 is an extremely thin Co--Pd alloy thin film constituting a perpendicular magnetization film. The above Pd thin film 13 and C
The o-Pd alloy thin films 14 are alternately laminated to form a laminated film 10.
is formed.
【００１３】上記Ｃｏ−Ｐｄ合金薄膜１４の膜厚Ｔ１
及びＰｄ薄膜１３の膜厚Ｔ２ はいずれも１０〜１００
０Åの範囲で形成され、積層膜１０全体の膜厚Ｔが数〜
数十ミクロンになるようにしてある。図４は本発明の磁
気記録媒体を製造するための高周波スパッタ装置の概略
図である。図の（Ａ）は正面図、（Ｂ）は平面図を示し
ている。Thickness T1 of the Co--Pd alloy thin film 14
and the film thickness T2 of the Pd thin film 13 are both 10 to 100
It is formed in the range of 0 Å, and the film thickness T of the entire laminated film 10 is several to
It is designed to be several tens of microns. FIG. 4 is a schematic diagram of a high frequency sputtering apparatus for manufacturing the magnetic recording medium of the present invention. (A) of the figure shows a front view, and (B) shows a plan view.
【００１４】図において、２１は回転板２２上に配設さ
れ、多元スパッタ法によって積層膜１０が形成される基
板である。２４は上記基板２１に対向して配設されるＣ
ｏターゲットであり、２５は同様に基板２１に対向して
配設されるＰｄターゲットである。上記Ｃｏターゲット
２４及びＰｄターゲット２５と上記回転板２２との間に
スパッタ用の高周波（ＲＦ） 電源２６， ２７が接続
される。また、Ｃｏターゲット２４とＰｄターゲット２
５間にはしきり板２８が配設される。In the figure, reference numeral 21 denotes a substrate disposed on a rotating plate 22, on which the laminated film 10 is formed by multi-dimensional sputtering. 24 is C disposed opposite to the substrate 21.
25 is a Pd target similarly disposed facing the substrate 21. Radio frequency (RF) power supplies 26 and 27 for sputtering are connected between the Co target 24 and Pd target 25 and the rotating plate 22. In addition, Co target 24 and Pd target 2
A partition plate 28 is disposed between 5 and 5.
【００１５】上記構成の電圧印加型で多元の高周波スパ
ッタ装置においては、回転板２２が高速回転させられ、
Ｃｏターゲット２４とＰｄターゲット２５上を基板２１
が通過すると、該基板２１上にＣｏ−Ｐｄ合金薄膜１４
が形成される。また、Ｐｄ薄膜１３を形成する場合には
、Ｐｄターゲット２５のみに高周波電圧が印加させられ
るようになっている。In the voltage application type multi-source high frequency sputtering apparatus having the above configuration, the rotary plate 22 is rotated at high speed,
The substrate 21 is placed on the Co target 24 and the Pd target 25.
passes through, a Co-Pd alloy thin film 14 is formed on the substrate 21.
is formed. Further, when forming the Pd thin film 13, a high frequency voltage is applied only to the Pd target 25.
【００１６】ここで、スパッタリングの条件は、バック
グラウンド真空度：ＰＢＧ＝２．０×１０−６Ｔｏｒｒ
以下
アルゴンガス圧 ：ＰＡｒ＝３．０×１
０−３Ｔｏｒｒ
投入電力 ：高周波３００
〜７００Ｗ基板回転数 ：ｒ＝
１７０ｒｐｍである。そして、上記Ｃｏ−Ｐｄ合金膜１
４は、ＣｏＸ Ｐｄ１００−Ｘ
なる組成式で示され、その組成範囲は、１０≦Ｘ≦５０
である。ただし、Ｘは原子％とする。[0016] Here, the sputtering conditions are background vacuum: PBG = 2.0 x 10-6 Torr.
Argon gas pressure below: PAr=3.0×1
0-3 Torr Input power: High frequency 300
~700W Substrate rotation speed: r=
It is 170 rpm. Then, the Co-Pd alloy film 1
4 is represented by the composition formula CoX Pd100-X, and its composition range is 10≦X≦50. However, X is atomic %.
【００１７】また、上述したように、Ｃｏ−Ｐｄ合金薄
膜１４の膜厚Ｔ１ 及びＰｄ薄膜１３の膜厚Ｔ２ は、
１０Å≦Ｔ１ ≦１０００Å
１０Å≦Ｔ２ ≦１０００Å
の範囲となるようにしてある。Furthermore, as mentioned above, the thickness T1 of the Co--Pd alloy thin film 14 and the thickness T2 of the Pd thin film 13 are as follows:
The ranges are 10 Å≦T1 ≦1000 Å and 10 Å≦T2 ≦1000 Å.
【００１８】次に、上記構成の磁気記録媒体１１を用い
て熱磁気記録を行った結果について説明する。この実験
においては、垂直磁化膜を組成がＣｏ２５Ｐｄ７５で膜
厚Ｔ１ が５００ÅのＣｏ−Ｐｄ合金薄膜１４で構成し
、非磁性薄膜を膜厚Ｔ２ が１００ÅのＰｄ薄膜１３で
構成し、これらＣｏ−Ｐｄ合金薄膜１４とＰｄ薄膜１３
を交互に積層して磁気記録媒体１１を形成した。この磁
気記録媒体１１を評価したところ、保磁力は２０００Ｏ
ｅ程度で残留磁束密度は２５００Ｇａｕｓｓ程度であり
、磁性体であるトナーを吸収するのに十分な磁気力を有
する。また、キュリー温度は２００°Ｃ程度である。Next, the results of thermomagnetic recording using the magnetic recording medium 11 having the above configuration will be explained. In this experiment, the perpendicular magnetization film was composed of a Co-Pd alloy thin film 14 with a composition of Co25Pd75 and a film thickness T1 of 500 Å, and the non-magnetic thin film was composed of a Pd thin film 13 with a film thickness T2 of 100 Å. Alloy thin film 14 and Pd thin film 13
The magnetic recording medium 11 was formed by alternately stacking the following layers. When this magnetic recording medium 11 was evaluated, the coercive force was 2000O.
The residual magnetic flux density is about 2,500 Gauss, and has sufficient magnetic force to absorb toner, which is a magnetic material. Further, the Curie temperature is about 200°C.
【００１９】次に、上記条件で作成した磁気記録媒体１
１の特性について説明する。図５は基板にＣｏ−Ｐｄ合
金薄膜を形成して成る磁気記録媒体の磁化曲線図、図６
は本発明の第１の実施例を示す磁気記録媒体の磁化曲線
図である。図５及び図６を比較して分かるように、Ｃｏ
−Ｐｄ合金薄膜１４とＰｄ薄膜１３を交互に形成して成
る磁気記録媒体１１においては、角形比が１となり、残
留磁束密度が増加する。Next, magnetic recording medium 1 prepared under the above conditions
The characteristics of No. 1 will be explained. FIG. 5 is a magnetization curve diagram of a magnetic recording medium formed by forming a Co-Pd alloy thin film on a substrate, and FIG.
1 is a magnetization curve diagram of a magnetic recording medium showing a first embodiment of the present invention. As can be seen by comparing FIGS. 5 and 6, Co
In the magnetic recording medium 11 formed by alternately forming the -Pd alloy thin film 14 and the Pd thin film 13, the squareness ratio becomes 1, and the residual magnetic flux density increases.
【００２０】図７はＣｏ−Ｐｄ合金薄膜の膜厚と角形比
との関係図である。図に示すように、Ｃｏ−Ｐｄ合金薄
膜１４が非常に薄い場合には、角形比は１となるが、膜
厚Ｔ１ が１０００Å程度以上になると、角形比は１よ
り小さくなり残留磁束密度が低下してしまう。図８はＣ
ｏの組成を変化させたときの磁気特性図である。ここで
、Ｃｏ−Ｐｄ合金薄膜１４の膜厚Ｔ１ はすべて５００
Åとしてある。FIG. 7 is a diagram showing the relationship between the thickness and squareness ratio of a Co--Pd alloy thin film. As shown in the figure, when the Co-Pd alloy thin film 14 is very thin, the squareness ratio becomes 1, but when the film thickness T1 becomes about 1000 Å or more, the squareness ratio becomes smaller than 1 and the residual magnetic flux density decreases. Resulting in. Figure 8 shows C
FIG. 3 is a diagram of magnetic characteristics when changing the composition of o. Here, the film thickness T1 of the Co-Pd alloy thin film 14 is all 500
There is a.
【００２１】図に示すように、Ｃｏの組成が１０原子％
以下になると、残留磁束密度は１５００Ｇａｕｓｓ以下
となり、高密度の熱磁気記録が困難になる。また、Ｃｏ
の組成が５０原子％以上になると、Ｃｏ−Ｐｄ合金薄膜
１４は面内磁化膜になって垂直記録法を用いた熱磁気記
録が困難になる。図９はＣｏの組成を変化させたときの
キュリー温度変化図である。As shown in the figure, the composition of Co is 10 atomic %.
Below this, the residual magnetic flux density becomes 1500 Gauss or less, making high-density thermomagnetic recording difficult. Also, Co
When the composition exceeds 50 atomic %, the Co--Pd alloy thin film 14 becomes an in-plane magnetized film, making thermomagnetic recording using the perpendicular recording method difficult. FIG. 9 is a Curie temperature change diagram when the Co composition is changed.
【００２２】図に示すように、Ｃｏが増加するとともに
キュリー温度Ｔｃが増加し、Ｃｏが５０原子％以上にな
ると、５００°Ｃ程度以上になり、熱磁気記録が困難に
なる。図１０は本発明の第２の実施例を示す磁気記録媒
体の磁化曲線図、図１１は第２の実施例との比較を行う
ための磁化曲線図である。As shown in the figure, as the Co content increases, the Curie temperature Tc increases, and when the Co content exceeds 50 atomic %, the temperature exceeds about 500°C, making thermomagnetic recording difficult. FIG. 10 is a magnetization curve diagram of a magnetic recording medium showing a second embodiment of the present invention, and FIG. 11 is a magnetization curve diagram for comparison with the second embodiment.
【００２３】図１０においては、垂直磁化膜を組成がＣ
ｏ２５Ｐｄ７５で膜厚Ｔ１ が１０ÅのＣｏ−Ｐｄ合金
薄膜１４で構成し、非磁性薄膜を膜厚Ｔ２ が１０Åの
Ｐｄ薄膜１３で構成し、これらＣｏ−Ｐｄ合金薄膜１４
とＰｄ薄膜１３を交互に積層して磁気記録媒体１１を形
成した。
また、図１１においては、垂直磁化膜を組成がＣｏ２５
Ｐｄ７５で膜厚Ｔ１ が８．５ÅのＣｏ−Ｐｄ合金薄膜
１４で構成し、非磁性薄膜を膜厚Ｔ２ が８．５ÅのＰ
ｄ薄膜１３で構成し、これらＣｏ−Ｐｄ合金薄膜１４と
Ｐｄ薄膜１３を交互に積層して磁気記録媒体１１を形成
した。In FIG. 10, the perpendicularly magnetized film has a composition of C.
The Co-Pd alloy thin film 14 is composed of o25Pd75 and has a thickness T1 of 10 Å, and the non-magnetic thin film is composed of a Pd thin film 13 with a thickness T2 of 10 Å.
A magnetic recording medium 11 was formed by alternately laminating Pd thin films 13 and Pd thin films 13. In addition, in FIG. 11, the perpendicular magnetization film has a composition of Co25
It consists of a Co-Pd alloy thin film 14 made of Pd75 with a film thickness T1 of 8.5 Å, and the nonmagnetic thin film is made of P with a film thickness T2 of 8.5 Å.
The magnetic recording medium 11 was formed by laminating the Co--Pd alloy thin film 14 and the Pd thin film 13 alternately.
【００２４】図１０の場合には角形比は１であるが、図
１１の場合には、非磁性薄膜を介して各Ｃｏ−Ｐｄ合金
薄膜１４間に交換相互作用が働き、角形比は１より小さ
くなって残留磁束密度が減少してしまう。また、上記第
１、第２の実施例においては、非磁性薄膜をＰｄ薄膜１
３で構成し、Ｃｏ−Ｐｄ合金薄膜１４とで積層膜１０を
形成しているが、Ｐｄ薄膜１３をＰｔ薄膜に変えた場合
にも、上記第１の実施例と同じ特性の磁気記録媒体１１
を得ることができる。In the case of FIG. 10, the squareness ratio is 1, but in the case of FIG. 11, exchange interaction acts between each Co--Pd alloy thin film 14 via the nonmagnetic thin film, and the squareness ratio is less than 1. As a result, the residual magnetic flux density decreases. In addition, in the first and second embodiments described above, the nonmagnetic thin film is replaced by the Pd thin film 1.
3 and a Co-Pd alloy thin film 14 to form a laminated film 10, but even when the Pd thin film 13 is replaced with a Pt thin film, the magnetic recording medium 11 with the same characteristics as in the first embodiment can be obtained.
can be obtained.
【００２５】なお、本発明は上記実施例に限定されるも
のではなく、本発明の趣旨に基づいて種々変形すること
が可能であり、これらを本発明の範囲から排除するもの
ではない。例えば、上記実施例においては、非磁性薄膜
を形成するためにＰｄやＰｔを使用しているが、そのほ
かにＡｌ，Ｓｉ，Ｔｉ，Ｍｏ，Ａｇ，Ｗ，Ａｕ，Ｒｕ，
Ｒｈ，Ｏｓ，Ｉｒ等の材料を使用してもよい。Note that the present invention is not limited to the above-mentioned embodiments, and various modifications can be made based on the spirit of the present invention, and these are not excluded from the scope of the present invention. For example, in the above embodiment, Pd and Pt are used to form the nonmagnetic thin film, but other materials include Al, Si, Ti, Mo, Ag, W, Au, Ru,
Materials such as Rh, Os, and Ir may also be used.
【００２６】また、上記実施例においては、磁気記録媒
体１１を応用した例として熱磁気プリンタを示している
が、熱及び光の照射によって記録を行う他の記録装置に
も応用することができる。さらに、垂直磁化膜の全膜厚
を数〜数十ミクロンとし、ステンレス基板８の板厚を数
〜数百ミクロンとしているが、これらの厚さは用途に応
じて変化させることができる。Further, in the above embodiment, a thermomagnetic printer is shown as an example of application of the magnetic recording medium 11, but the present invention can also be applied to other recording devices that perform recording by irradiation of heat and light. Further, the total thickness of the perpendicularly magnetized film is several to several tens of microns, and the thickness of the stainless steel substrate 8 is several to several hundred microns, but these thicknesses can be changed depending on the application.
【００２７】[0027]
【発明の効果】以上詳細に説明したように、本発明によ
れば、基板の上に極薄状態のＣｏ−Ｐｄ合金薄膜と非磁
性薄膜を交互に積層して成る積層膜が形成され、該積層
膜によって垂直磁化膜が構成されている。この場合、Ｃ
ｏターゲット及びＰｄターゲットを使用し、基板を高速
回転させて各ターゲットを通過させて多元スパッタ法で
スパッタリングを行ってＣｏ−Ｐｄ合金薄膜を形成し、
例えばＰｄターゲットのみを使用し、非磁性薄膜を形成
する。As described above in detail, according to the present invention, a laminated film is formed by alternately laminating ultra-thin Co--Pd alloy thin films and non-magnetic thin films on a substrate. A perpendicular magnetization film is constituted by the stacked films. In this case, C
Using an o target and a Pd target, the substrate is rotated at high speed and passed through each target to perform sputtering using a multi-source sputtering method to form a Co-Pd alloy thin film,
For example, only a Pd target is used to form a nonmagnetic thin film.
【００２８】したがって、人工格子膜を形成することな
く垂直磁化膜を形成することが可能となるので、製造装
置を簡素化し、かつ製造装置のコストを低減することが
できる。そして、上記垂直磁化膜は、Ｘを原子％とした
時、組成式ＣｏＸ Ｐｄ１００−Ｘ で示されるものと
する。この時、組成範囲は１０≦Ｘ≦５０となるように
設定される。Therefore, it is possible to form a perpendicularly magnetized film without forming an artificial lattice film, so that the manufacturing equipment can be simplified and the cost of the manufacturing equipment can be reduced. The perpendicularly magnetized film has a compositional formula of CoX Pd100-X, where X is atomic %. At this time, the composition range is set so that 10≦X≦50.
【００２９】また、上記Ｃｏ−Ｐｄ合金薄膜の膜厚Ｔ１
及び非磁性薄膜の膜厚Ｔ２ の範囲は、いずれも１０
Å〜１０００Åの範囲とされる。このような組成にする
ことによって、保磁力は２０００Ｏｅ程度の、残留磁束
密度は２５００Ｇａｕｓｓ程度の高い値にすることがで
き、磁性体であるトナーを吸収するのに十分な磁気力を
有することができるとともに、キューリ温度は２００°
Ｃ程度の低い値にすることができる。したがって、垂直
記録法による高い記録密度の熱磁気記録を容易に行うこ
とができるようになる。[0029] Furthermore, the film thickness T1 of the Co-Pd alloy thin film is
and the range of the film thickness T2 of the nonmagnetic thin film are both 10
It is in the range of Å to 1000 Å. With such a composition, the coercive force can be set to a high value of about 2000 Oe and the residual magnetic flux density can be set to a high value of about 2500 Gauss, and it can have sufficient magnetic force to absorb toner, which is a magnetic substance. At the same time, the cucumber temperature is 200°
The value can be as low as C. Therefore, thermomagnetic recording at high recording density using the perpendicular recording method can be easily performed.
【００３０】また、本発明の磁気記録媒体を熱磁気プリ
ンタに使用すると、解像度を高くし、消費電力を低減す
ることができる。Furthermore, when the magnetic recording medium of the present invention is used in a thermomagnetic printer, resolution can be increased and power consumption can be reduced.
【図１】本発明の磁気記録媒体を示す図である。FIG. 1 is a diagram showing a magnetic recording medium of the present invention.
【図２】従来の熱磁気プリンタの印刷プロセス図である
。FIG. 2 is a printing process diagram of a conventional thermomagnetic printer.
【図３】本発明の磁気記録媒体の積層膜の拡大図である
。FIG. 3 is an enlarged view of a laminated film of the magnetic recording medium of the present invention.
【図４】本発明の磁気記録媒体を製造するための高周波
スパッタ装置の概略図である。FIG. 4 is a schematic diagram of a high frequency sputtering apparatus for manufacturing the magnetic recording medium of the present invention.
【図５】基板にＣｏ−Ｐｄ合金薄膜を形成して成る磁気
記録媒体の磁化曲線図である。FIG. 5 is a magnetization curve diagram of a magnetic recording medium formed by forming a Co--Pd alloy thin film on a substrate.
【図６】本発明の第１の実施例を示す磁気記録媒体の磁
化曲線図である。FIG. 6 is a magnetization curve diagram of a magnetic recording medium showing the first embodiment of the present invention.
【図７】Ｃｏ−Ｐｄ合金薄膜の膜厚と角形比との関係図
である。FIG. 7 is a diagram showing the relationship between the thickness and squareness ratio of a Co--Pd alloy thin film.
【図８】Ｃｏの組成を変化させたときの磁気特性図であ
る。FIG. 8 is a diagram of magnetic characteristics when the composition of Co is changed.
【図９】Ｃｏの組成を変化させたときのキュリー温度変
化図である。FIG. 9 is a Curie temperature change diagram when the Co composition is changed.
【図１０】本発明の第２の実施例を示す磁気記録媒体の
磁化曲線図である。FIG. 10 is a magnetization curve diagram of a magnetic recording medium showing a second embodiment of the present invention.
【図１１】第２の実施例との比較を行うための磁化曲線
図である。FIG. 11 is a magnetization curve diagram for comparison with the second example.
８ ステンレス基板１０
積層膜
１１ 磁気記録媒体
１２ 記録用磁気ドラム芯材１３
Ｐｄ薄膜8 Stainless steel substrate 10
Laminated film 11 Magnetic recording medium 12 Recording magnetic drum core material 13
Pd thin film
Claims (3)
た垂直磁化膜から成り、（ｃ）該垂直磁化膜は、極薄状
態のＣｏ−Ｐｄ合金薄膜と非磁性薄膜を交互に積層して
成る積層膜で構成されることを特徴とする磁気記録媒体
。Claim 1: Consists of (a) a substrate; (b) a perpendicularly magnetized film formed on the substrate; (c) the perpendicularly magnetized film includes an ultrathin Co-Pd alloy thin film and a nonmagnetic thin film; A magnetic recording medium characterized in that it is composed of laminated films formed by alternately laminating layers.
Ｐｄ１００−Ｘ Ｘ：原子％ なる組成式で示され、その組成範囲が、１０≦Ｘ≦５０ である請求項１記載の磁気記録媒体。2. The Co-Pd alloy thin film comprises CoX
2. The magnetic recording medium according to claim 1, which has a compositional formula of Pd100-X X: atomic %, and has a composition range of 10≦X≦50.
及び非磁性薄膜の膜厚Ｔ２ の範囲は、 １０Å≦Ｔ１ ≦１０００Å １０Å≦Ｔ２ ≦１０００Å である請求項１又は２記載の磁気記録媒体。3. Thickness T1 of the Co-Pd alloy thin film
The magnetic recording medium according to claim 1 or 2, wherein the thickness T2 of the nonmagnetic thin film is in the following ranges: 10 Å≦T1 ≦1000 Å and 10 Å≦T2 ≦1000 Å.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8400191A JPH04317068A (en) | 1991-04-16 | 1991-04-16 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8400191A JPH04317068A (en) | 1991-04-16 | 1991-04-16 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04317068A true JPH04317068A (en) | 1992-11-09 |
Family
ID=13818304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8400191A Withdrawn JPH04317068A (en) | 1991-04-16 | 1991-04-16 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04317068A (en) |
-
1991
- 1991-04-16 JP JP8400191A patent/JPH04317068A/en not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5604030A (en) | Magnetic recording medium method and apparatus for fabricating same | |
| JP2700043B2 (en) | Magnetic recording media | |
| JP2550893B2 (en) | Magnetic multilayer film | |
| US5981039A (en) | Magnetic recording medium and a manufacturing method thereof as well as a photo-printing apparatus using such a magnetic recording medium | |
| JPH04317068A (en) | Magnetic recording medium | |
| JPH04317067A (en) | Magnetic recording medium | |
| EP0459411B1 (en) | Magnetic recording medium | |
| JP2699312B2 (en) | Magnetic recording medium and method of manufacturing the same | |
| JPH0580575A (en) | Magnetic recording medium | |
| JP3065335B2 (en) | Thermomagnetic recording medium | |
| JP2706172B2 (en) | Manufacturing method of magnetic recording medium | |
| JPH04260054A (en) | Magnetic recording medium | |
| JPH0580576A (en) | Magnetic recording medium | |
| JPH05150537A (en) | Magnetic recording medium | |
| JPH0431871A (en) | Thermomagnetic recording medium | |
| JPH0580574A (en) | Magnetic recording medium | |
| JP3132254B2 (en) | Soft magnetic film and method for manufacturing soft magnetic multilayer film | |
| JP3932587B2 (en) | Magnetic laminate, magnetic sensor, magnetic recording medium, and magnetic recording / reproducing apparatus | |
| JPH0486269A (en) | Magnetic recording medium and its manufacturing device | |
| JPS5812140A (en) | Magnetic tape transcribing system | |
| JP3205240B2 (en) | Magnetic recording media | |
| JPH0318859A (en) | Thermomagnetic recording medium | |
| Kawano et al. | Magnetic properties and noise characteristics of FeC film for backlayer of double-layered perpendicular magnetic recording medium | |
| JPH0431872A (en) | Thermomagnetic recording medium | |
| JP2696120B2 (en) | Magnetic multilayer film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980711 |