JPH04317067A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH04317067A JPH04317067A JP8400091A JP8400091A JPH04317067A JP H04317067 A JPH04317067 A JP H04317067A JP 8400091 A JP8400091 A JP 8400091A JP 8400091 A JP8400091 A JP 8400091A JP H04317067 A JPH04317067 A JP H04317067A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- recording medium
- magnetic recording
- film
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 10
- 239000000956 alloy Substances 0.000 claims abstract description 10
- 229910020708 Co—Pd Inorganic materials 0.000 claims abstract description 8
- 239000000203 mixture Substances 0.000 claims description 17
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 abstract description 19
- 230000004907 flux Effects 0.000 abstract description 8
- 238000000151 deposition Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 40
- 238000000034 method Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 230000005415 magnetization Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910000599 Cr alloy Inorganic materials 0.000 description 3
- 229910000767 Tm alloy Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- AYTAKQFHWFYBMA-UHFFFAOYSA-N chromium dioxide Chemical compound O=[Cr]=O AYTAKQFHWFYBMA-UHFFFAOYSA-N 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、磁気潜像を形成するた
めの磁気記録媒体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for forming a magnetic latent image.
【０００２】0002
【従来の技術】従来、磁気記録媒体は、例えば熱磁気プ
リンタに用いられており、その場合磁気プリンタドラム
に磁気潜像が形成され、これを磁気的に現像して可視像
を得るようにしている（「マグネトグラフィプリンタ」
今村舜仁著、大野信編集、ＣＭＣ「ノンインパクトプリ
ンティング」第１５章Ｐ． １５９〜Ｐ．１６８、１９
８６参照） 。2. Description of the Related Art Conventionally, magnetic recording media have been used, for example, in thermomagnetic printers, in which a magnetic latent image is formed on a magnetic printer drum, and this is magnetically developed to obtain a visible image. (“Magnetography Printer”)
Written by Shunjin Imamura, edited by Shin Ohno, CMC "Non-Impact Printing" Chapter 15 P. 159-P. 168, 19
86).
【０００３】図２は従来の熱磁気プリンタの印刷プロセ
ス図である。図において、記録用磁気ドラム１は矢印Ａ
方向に回転する。該記録用磁気ドラム１面上には磁気潜
像を形成するための磁気記録媒体であるＣｒＯ２ 薄膜
などが設けられている。印刷プロセスにおいて、まず消
磁手段２が磁気記録媒体を一定方向に磁化する。次に、
磁気記録手段３が所定の磁気潜像を形成し、現像手段４
が磁気潜像上にトナーを付着させることにより、磁気潜
像は可視像化される。ここで、トナーは磁気記録媒体面
上の漏れ磁界による磁力線と磁気記録媒体面とが交差す
る部分に付着し、その結果、磁気潜像は可視像化される
。FIG. 2 is a diagram showing the printing process of a conventional thermomagnetic printer. In the figure, the recording magnetic drum 1 is indicated by the arrow A.
Rotate in the direction. A CrO2 thin film, which is a magnetic recording medium for forming a magnetic latent image, is provided on one surface of the recording magnetic drum. In the printing process, first, the demagnetizing means 2 magnetizes the magnetic recording medium in a certain direction. next,
The magnetic recording means 3 forms a predetermined magnetic latent image, and the developing means 4
The magnetic latent image is made visible by depositing toner on the magnetic latent image. Here, the toner adheres to a portion where lines of magnetic force due to a leakage magnetic field on the surface of the magnetic recording medium intersect with the surface of the magnetic recording medium, and as a result, the magnetic latent image is visualized.
【０００４】その後、転写手段５及び定着手段６は、可
視像を用紙上に転写、定着する。最後にクリーニング手
段７は磁気記録媒体上の残留トナーを除去し、印刷プロ
セスを終了する。ところで、上記磁気記録媒体上に磁気
潜像を記録する方法としてはサーマルヘッドを用いる方
法やレーザビーム光照射によって加熱する方法がある。
また、磁気記録媒体の磁化方向を、主として磁気記録媒
体の面に沿う方向にする方法（面内記録法） と磁気記
録媒体の面に対し垂直の方向にする方法 （垂直記録法
） とがあり、高解像度を必要とする場合には垂直記録
法が用いられる。垂直記録用の磁気記録媒体は、希土類
元素と鉄族元素との合金膜、すなわちＲＥ−ＴＭ合金膜
又はＣｏ−Ｃｒ合金膜で形成される。ＲＥ−ＴＭ合金膜
は光磁気記録法を用いた光磁気ディスクに、またＣｏ−
Ｃｒ合金膜は磁気ヘッド記録法を用いた磁気ディスクに
多く用いられている。[0004] Thereafter, the transfer means 5 and the fixing means 6 transfer and fix the visible image onto the paper. Finally, the cleaning means 7 removes the residual toner on the magnetic recording medium and ends the printing process. By the way, methods for recording a magnetic latent image on the magnetic recording medium include a method using a thermal head and a method of heating by laser beam irradiation. In addition, there are two methods: one in which the magnetization direction of the magnetic recording medium is set primarily along the surface of the magnetic recording medium (in-plane recording method), and the other method is set in a direction perpendicular to the surface of the magnetic recording medium (perpendicular recording method). , perpendicular recording is used when high resolution is required. A magnetic recording medium for perpendicular recording is formed of an alloy film of rare earth elements and iron group elements, that is, an RE-TM alloy film or a Co-Cr alloy film. The RE-TM alloy film is used for magneto-optical disks using magneto-optical recording method, and also for Co-magneto-optical disks.
Cr alloy films are often used in magnetic disks using the magnetic head recording method.
【０００５】さらに、最近では、Ｃｏ／Ｐｔ人工格子膜
やＣｏ／Ｐｄ人工格子膜などの薄膜を垂直磁化膜として
熱磁気記録用に利用することができるようになっている
。Furthermore, recently, thin films such as Co/Pt superlattice films and Co/Pd superlattice films can be used as perpendicularly magnetized films for thermomagnetic recording.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、上記構
成の磁気記録媒体において、Ｃｏ−Ｃｒ合金膜で形成し
た場合はキュリー温度が高いため熱磁気記録が困難とな
り、ＲＥ−ＴＭ合金膜で形成した場合は残留磁束密度が
小さいため、磁性体であるトナーの付着力が不十分とな
る。[Problems to be Solved by the Invention] However, in the magnetic recording medium having the above structure, when formed with a Co-Cr alloy film, thermomagnetic recording becomes difficult due to the high Curie temperature, and when formed with an RE-TM alloy film, it becomes difficult to perform thermomagnetic recording. Since the residual magnetic flux density is small, the adhesion force of the magnetic toner becomes insufficient.
【０００７】また、Ｃｏ／Ｐｔ人工格子膜やＣｏ／Ｐｄ
人工格子膜の場合、膜を形成するために多元スパッタ装
置を使用する必要があって、その製造装置が複雑になる
だけでなく、製造装置のコストが高くなってしまう。こ
のように、垂直記録用の垂直磁化膜を使用した熱磁気プ
リンタは、原理的には記録の安定性が高く、高解像度を
得ることができ、しかも低消費電力で作動させることが
できるが、垂直磁化膜として有効な磁気記録媒体がない
。[0007] Furthermore, Co/Pt superlattice films and Co/Pd
In the case of a superlattice film, it is necessary to use multiple sputtering equipment to form the film, which not only complicates the manufacturing equipment but also increases the cost of the manufacturing equipment. As described above, a thermomagnetic printer using a perpendicular magnetization film for perpendicular recording has high recording stability in principle, can obtain high resolution, and can operate with low power consumption. There is no magnetic recording medium that is effective as a perpendicular magnetization film.
【０００８】本発明は、上記従来の磁気記録媒体の問題
点を解決して、残留磁束密度が十分に高く、しかもキュ
リー温度が十分に低く、熱磁気記録を行うことができる
垂直記録用の磁気記録媒体を提供することを目的とする
。The present invention solves the problems of the conventional magnetic recording media described above, and provides a magnetic recording medium for perpendicular recording which has a sufficiently high residual magnetic flux density, a sufficiently low Curie temperature, and is capable of performing thermomagnetic recording. The purpose is to provide recording media.
【０００９】[0009]
【課題を解決するための手段】そのために、本発明の磁
気記録媒体においては、基板の上に垂直磁化膜を形成し
ており、該垂直磁化膜は、Ｃｏ−Ｐｄ合金膜で構成され
、Ｘを原子％とした時、組成式ＣｏＸ Ｐｄ１００−Ｘ
で示されるものとする。この時、組成範囲は１０≦Ｘ
≦５０となるように設定される。[Means for Solving the Problems] To this end, in the magnetic recording medium of the present invention, a perpendicular magnetization film is formed on the substrate, and the perpendicular magnetization film is made of a Co-Pd alloy film, When expressed as atomic %, composition formula CoX Pd100-X
shall be indicated by At this time, the composition range is 10≦X
It is set so that ≦50.
【００１０】0010
【作用】本発明によれば、上記のように基板の上にＣｏ
−Ｐｄ合金膜から成る垂直磁化膜を形成している。この
場合、Ｃｏターゲット及びＰｄターゲットを使用し、基
板を高速回転させて各ターゲットを通過させて多元スパ
ッタ法でスパッタリングを行うか、Ｃｏ−Ｐｄ合金のタ
ーゲットを使用し、単元スパッタ法でスパッタリングを
行うようにしている。[Operation] According to the present invention, Co is deposited on the substrate as described above.
- A perpendicular magnetization film made of a Pd alloy film is formed. In this case, a Co target and a Pd target are used, and the substrate is rotated at high speed and passed through each target to perform sputtering using a multi-source sputtering method, or a Co-Pd alloy target is used and sputtering is performed using a single-source sputtering method. That's what I do.
【００１１】そして、上記垂直磁化膜は、Ｘを原子％と
した時、組成式ＣｏＸ Ｐｄ１００−Ｘ で示されるも
のとする。この時、組成範囲は１０≦Ｘ≦５０となるよ
うに設定される。The perpendicularly magnetized film has a compositional formula of CoX Pd100-X, where X is expressed as atomic %. At this time, the composition range is set so that 10≦X≦50.
【００１２】0012
【実施例】以下、本発明の実施例について図面を参照し
ながら詳細に説明する。図１は本発明の磁気記録媒体を
示す図であり、図の（Ａ）は磁気記録媒体の断面図、（
Ｂ）は記録用磁気ドラムの断面図である。図において、
厚さが数十〜数百ミクロンの曲折自在なステンレス基板
８上に、数十〜数百ミクロンの膜厚の垂直磁化膜である
Ｃｏ−Ｐｄ合金膜１４が積層されて磁気記録媒体１５が
形成される。該磁気記録媒体１５はシート状に形成され
、記録用磁気ドラム芯材１２上に巻き付けられる。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a magnetic recording medium of the present invention, in which (A) is a cross-sectional view of the magnetic recording medium, (
B) is a sectional view of the recording magnetic drum. In the figure,
A magnetic recording medium 15 is formed by laminating a Co-Pd alloy film 14, which is a perpendicularly magnetized film with a thickness of several tens to several hundred microns, on a bendable stainless steel substrate 8 with a thickness of several tens to several hundred microns. be done. The magnetic recording medium 15 is formed into a sheet shape and is wound onto the recording magnetic drum core material 12 .
【００１３】図３は本発明の磁気記録媒体を製造するた
めの高周波スパッタ装置の概略図である。図の（Ａ）は
正面図、（Ｂ）は平面図を示している。図において、２
１は回転板２２上に配設され、多元スパッタ法によって
垂直磁化膜が形成される基板である。２４は上記基板２
１に対向して配設されるＣｏターゲットであり、２５は
同様に基板２１に対向して配設されるＰｄターゲットで
ある。上記Ｃｏターゲット２４及びＰｄターゲット２５
と上記回転板２２との間にスパッタ用の高周波（ＲＦ）
電源２６， ２７が接続される。また、Ｃｏターゲッ
ト２４とＰｄターゲット２５間にはしきり板２８が配設
される。FIG. 3 is a schematic diagram of a high frequency sputtering apparatus for manufacturing the magnetic recording medium of the present invention. (A) of the figure shows a front view, and (B) shows a plan view. In the figure, 2
Reference numeral 1 denotes a substrate disposed on a rotating plate 22, on which a perpendicular magnetization film is formed by multi-dimensional sputtering. 24 is the above board 2
A Co target 25 is disposed facing the substrate 21, and a Pd target 25 is similarly disposed facing the substrate 21. The above Co target 24 and Pd target 25
A radio frequency (RF) wave for sputtering is provided between the rotary plate 22 and the rotary plate 22.
Power supplies 26 and 27 are connected. Further, a partition plate 28 is provided between the Co target 24 and the Pd target 25.
【００１４】上記構成の電圧印加型で多元の高周波スパ
ッタ装置においては、回転板２２を高速回転させ、Ｃｏ
ターゲット２４とＰｄターゲット２５上を基板２１が通
過すると、該基板２１上にＣｏ−Ｐｄ合金膜１４が形成
される。ここで、スパッタリングの条件は、バックグラ
ウンド真空度：ＰＢＧ＝２．０×１０−６Ｔｏｒｒ以下
アルゴンガス圧 ：ＰＡｒ＝３．０×１
０−３Ｔｏｒｒ
投入電力 ：高周波３００
〜７００Ｗ基板回転数 ：ｒ＝
１７０ｒｐｍである。そして、上記Ｃｏ−Ｐｄ合金膜１
４は、ＣｏＸ Ｐｄ１００−Ｘ
なる組成式で示され、その組成範囲は、１０≦Ｘ≦５０
である。ただし、Ｘは原子％とする。In the voltage application type multi-source high frequency sputtering apparatus having the above configuration, the rotary plate 22 is rotated at high speed, and the Co
When the substrate 21 passes over the target 24 and the Pd target 25, the Co--Pd alloy film 14 is formed on the substrate 21. Here, the sputtering conditions are as follows: Background vacuum: PBG = 2.0 x 10-6 Torr or less Argon gas pressure: PAr = 3.0 x 1
0-3 Torr Input power: High frequency 300
~700W Substrate rotation speed: r=
It is 170 rpm. Then, the Co-Pd alloy film 1
4 is represented by the composition formula CoX Pd100-X, and its composition range is 10≦X≦50. However, X is atomic %.
【００１５】なお、Ｃｏ−Ｐｄ合金のターゲットを使用
した場合には、単元スパッタ法によって磁性膜を形成す
ることができる。次に、上記構成の磁気記録媒体１５を
用いて熱磁気記録を行った結果について説明する。この
実験においては、組成がＣｏ２０Ｐｄ８０であるＣｏ−
Ｐｄ合金膜１４から成る垂直磁化膜を用いた。この磁気
記録媒体１５を評価したところ、保磁力は１８００Ｏｅ
程度で残留磁束密度は１４００Ｇａｕｓｓ程度であり、
磁性体であるトナーを吸収するのに十分な磁気力を有す
る。
また、キュリー温度は２００°Ｃ程度である。Note that when a Co--Pd alloy target is used, the magnetic film can be formed by unit sputtering. Next, the results of thermomagnetic recording using the magnetic recording medium 15 having the above configuration will be explained. In this experiment, Co-
A perpendicularly magnetized film made of a Pd alloy film 14 was used. When this magnetic recording medium 15 was evaluated, the coercive force was 1800 Oe.
The residual magnetic flux density is about 1400 Gauss,
It has sufficient magnetic force to absorb toner, which is a magnetic substance. Further, the Curie temperature is about 200°C.
【００１６】次に、上記条件で作成した磁気記録媒体１
５の特性について説明する。図４は磁気記録媒体の磁化
曲線の比較図である。図のａに示すように、組成がＣｏ
２０Ｐｄ８０であるＣｏ−Ｐｄ合金膜１４から成る垂直
磁化膜を使用すると、保磁力及び残留磁束密度が著しく
増加することが分かる。ｂは磁化膜を磁気記録媒体の面
に沿う方向に形成した場合の磁化曲線である。Next, magnetic recording medium 1 prepared under the above conditions
The characteristics of No. 5 will be explained. FIG. 4 is a comparison diagram of magnetization curves of magnetic recording media. As shown in figure a, the composition is Co
It can be seen that when a perpendicularly magnetized film made of the Co--Pd alloy film 14 of 20Pd80 is used, the coercive force and residual magnetic flux density are significantly increased. b is a magnetization curve when the magnetization film is formed in the direction along the surface of the magnetic recording medium.
【００１７】図５はＣｏの組成を変化させたときの磁気
特性図である。図に示すように、Ｃｏの組成が１０原子
％以下になると、残留磁束密度は１０００Ｇａｕｓｓ以
下となり、熱磁気記録が困難になる。また、Ｃｏの組成
が５０原子％以上になると、残留磁束密度は１０００Ｇ
ａｕｓｓ以下で、保磁力は５００Ｏｅ以下となり、この
場合においても熱磁気記録が困難になる。FIG. 5 is a diagram of magnetic characteristics when the composition of Co is changed. As shown in the figure, when the Co composition is 10 atomic % or less, the residual magnetic flux density becomes 1000 Gauss or less, making thermomagnetic recording difficult. Furthermore, when the Co composition is 50 atomic % or more, the residual magnetic flux density is 1000 G.
auss or less, the coercive force is less than 500 Oe, and even in this case, thermomagnetic recording becomes difficult.
【００１８】図６はＣｏの組成を変化させたときのキュ
リー温度変化図である。図に示すように、Ｃｏが増加す
るとともにキュリー温度Ｔｃが増加し、Ｃｏが５０原子
％以上になると、５００°Ｃ程度以上となり、熱磁気記
録が困難になる。なお、本発明は上記実施例に限定され
るものではなく、本発明の趣旨に基づいて種々変形する
ことが可能であり、これらを本発明の範囲から排除する
ものではない。FIG. 6 is a Curie temperature change diagram when the Co composition is changed. As shown in the figure, as the Co content increases, the Curie temperature Tc increases, and when the Co content exceeds 50 atomic %, the temperature exceeds about 500°C, making thermomagnetic recording difficult. Note that the present invention is not limited to the above-mentioned embodiments, and various modifications can be made based on the spirit of the present invention, and these are not excluded from the scope of the present invention.
【００１９】例えば、上記実施例においては、磁気記録
媒体１５を応用した例として熱磁気プリンタを示してい
るが、熱及び光の照射によって記録を行う他の記録装置
にも応用することができる。また、垂直磁化膜の全膜厚
を数十〜数百ミクロンとし、ステンレス基板８の板厚を
数十〜数百ミクロンとしているが、これらの厚さは用途
に応じて変化させることができる。For example, in the above embodiment, a thermomagnetic printer is shown as an example to which the magnetic recording medium 15 is applied, but the present invention can also be applied to other recording devices that perform recording by irradiation of heat and light. Further, although the total film thickness of the perpendicular magnetization film is several tens to several hundred microns, and the plate thickness of the stainless steel substrate 8 is several tens to several hundred microns, these thicknesses can be changed depending on the application.
【００２０】[0020]
【発明の効果】以上詳細に説明したように、本発明によ
れば、基板の上にＣｏ−Ｐｄ合金膜から成る垂直磁化膜
を形成している。この場合、Ｃｏターゲット及びＰｄタ
ーゲットを使用し、基板を高速回転させて各ターゲット
を通過させて多元スパッタ法でスパッタリングを行うか
、Ｃｏ−Ｐｄ合金のターゲットを使用し、単元スパッタ
法でスパッタリングを行うようにしている。As described above in detail, according to the present invention, a perpendicularly magnetized film made of a Co--Pd alloy film is formed on a substrate. In this case, a Co target and a Pd target are used, and the substrate is rotated at high speed and passed through each target to perform sputtering using a multi-source sputtering method, or a Co-Pd alloy target is used and sputtering is performed using a single-source sputtering method. That's what I do.
【００２１】したがって、人工格子膜を形成することな
く垂直磁化膜を形成することができ、単元スパッタ法も
採用することができるとともに、製造装置を簡素化し、
かつ製造装置のコストを低減することができる。そして
、上記垂直磁化膜は、Ｘを原子％とした時、組成式Ｃｏ
Ｘ Ｐｄ１００−Ｘ で示されるものとする。この時、
組成範囲は１０≦Ｘ≦５０となるように設定される。こ
のような組成にすることによって、保磁力は１８００Ｏ
ｅ程度の、残留磁束密度は１４００Ｇａｕｓｓ程度の高
い値にすることができ、磁性体であるトナーを吸収する
のに十分な磁気力を有することができるとともに、キュ
リー温度は２００°Ｃ程度の低い値にすることができる
。したがって、熱磁気記録を容易に行うことができるよ
うになる。Therefore, it is possible to form a perpendicularly magnetized film without forming an artificial lattice film, it is possible to employ a unitary sputtering method, and the manufacturing equipment is simplified.
Moreover, the cost of manufacturing equipment can be reduced. The perpendicularly magnetized film has a composition formula of Co when X is atomic %.
It shall be expressed as X Pd100-X. At this time,
The composition range is set so that 10≦X≦50. With this composition, the coercive force is 1800O
The residual magnetic flux density can be set to a high value of about 1400 Gauss, and the magnetic force can be sufficient to absorb toner, which is a magnetic substance, and the Curie temperature is a low value of about 200°C. It can be done. Therefore, thermomagnetic recording can be easily performed.
【図１】本発明の磁気記録媒体を示す図である。FIG. 1 is a diagram showing a magnetic recording medium of the present invention.
【図２】従来の熱磁気プリンタの印刷プロセス図である
。FIG. 2 is a printing process diagram of a conventional thermomagnetic printer.
【図３】本発明の磁気記録媒体を製造するための高周波
スパッタ装置の概略図である。FIG. 3 is a schematic diagram of a high frequency sputtering apparatus for manufacturing the magnetic recording medium of the present invention.
【図４】磁気記録媒体の磁化曲線の比較図である。FIG. 4 is a comparison diagram of magnetization curves of magnetic recording media.
【図５】Ｃｏの組成を変化させたときの磁気特性図であ
る。FIG. 5 is a diagram of magnetic characteristics when the composition of Co is changed.
【図６】Ｃｏの組成を変化させたときのキュリー温度変
化図である。FIG. 6 is a Curie temperature change diagram when the Co composition is changed.
８ ステンレス基板１２
記録用磁気ドラム芯材１４ Ｃｏ
−Ｐｄ合金膜１５ 磁気記録媒体8 Stainless steel substrate 12
Recording magnetic drum core material 14 Co
-Pd alloy film 15 Magnetic recording medium
Claims (2)
た垂直磁化膜から成り、（ｃ）該垂直磁化膜は、Ｃｏ−
Ｐｄ合金膜で構成されることを特徴とする磁気記録媒体
。Claim 1: Consists of (a) a substrate; (b) a perpendicularly magnetized film formed on the substrate; (c) the perpendicularly magnetized film is made of Co-
A magnetic recording medium comprising a Pd alloy film.
ｄ１００−Ｘ Ｘ：原子％ なる組成式で示され、その組成範囲が、１０≦Ｘ≦５０ である請求項１記載の磁気記録媒体。2. The Co-Pd alloy film is made of CoXP
2. The magnetic recording medium according to claim 1, which is represented by the composition formula d100-X: atomic %, and has a composition range of 10≦X≦50.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8400091A JPH04317067A (en) | 1991-04-16 | 1991-04-16 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8400091A JPH04317067A (en) | 1991-04-16 | 1991-04-16 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04317067A true JPH04317067A (en) | 1992-11-09 |
Family
ID=13818265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8400091A Withdrawn JPH04317067A (en) | 1991-04-16 | 1991-04-16 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04317067A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1724368A2 (en) * | 2004-10-12 | 2006-11-22 | Heraeus, Inc. | Low oxygen content alloy compositions |
-
1991
- 1991-04-16 JP JP8400091A patent/JPH04317067A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1724368A2 (en) * | 2004-10-12 | 2006-11-22 | Heraeus, Inc. | Low oxygen content alloy compositions |
| EP1724368A3 (en) * | 2004-10-12 | 2010-02-17 | Heraeus, Inc. | Low oxygen content alloy compositions |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980711 |