JPH0394062A - Diamond-coated sintered hard alloy - Google Patents

Diamond-coated sintered hard alloy

Info

Publication number
JPH0394062A
JPH0394062A JP1232218A JP23221889A JPH0394062A JP H0394062 A JPH0394062 A JP H0394062A JP 1232218 A JP1232218 A JP 1232218A JP 23221889 A JP23221889 A JP 23221889A JP H0394062 A JPH0394062 A JP H0394062A
Authority
JP
Japan
Prior art keywords
diamond
alloy
amount
binding phase
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1232218A
Other languages
Japanese (ja)
Other versions
JP2539922B2 (en
Inventor
Minoru Nakano
稔 中野
Toshio Nomura
俊雄 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP1232218A priority Critical patent/JP2539922B2/en
Publication of JPH0394062A publication Critical patent/JPH0394062A/en
Application granted granted Critical
Publication of JP2539922B2 publication Critical patent/JP2539922B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To improve the adhesive strength of a diamond film without deteriorating the strength of a sintered alloy by gradually increasing Co content from the surface of a sintered alloy toward a position at a specific depth at the time of improving wear resistance by forming a diamond film on the surface of a super hard sintered alloy in which WC and Co as a binding phase are used. CONSTITUTION:At the time of forming a synthetic film of super hard diamond on the surface of a sintered hard alloy prepared by sintering hard WC by using Co as binding phase by a CVD method, etc., the amount of Co binding phase in the part between the surface of the sintered hard alloy and a position at 100mum depth from the surface is decreased as compared with that in the inner part, and the amount of binding phase in a layer enriched in Co binding phase existing in the part between a position at 5mum depth from the surface and a position at 100mum depth from the surface is enriched to the amount 1.2-5 times the amount of binding phase in the inner part of the alloy. The absorption of C as a raw material for diamond by Co and resulting inhibition of the synthesis of diamond can be prevented because the amount of Co in the binding phase in the surface of the sintered hard alloy is small, and further, deterioration in the strength and toughness of the sintered hard alloy can be prevented due to the presence of the layer enriched in binding phase and also the sintered hard alloy having a diamond film excellent in adhesive strength can be produced.

Description

【発明の詳細な説明】 く産業上の利用分野〉 この発明は、例えば切削工具や耐摩部品等に好適な耐摩
耗性の極めて優れたダイヤモンド被覆超硬合金部品に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a diamond-coated cemented carbide component having extremely excellent wear resistance and suitable for use in, for example, cutting tools and wear-resistant parts.

〈従来の技術〉 ダイヤモンドの合成において超高圧・高温を用いずに、
炭化水素を分解して気相から母材表面にダイヤモンドを
合成させ被覆する、ダイヤモンドの気相合成技術が19
81年に無機材質研究所によって開発されて以来、種々
の分野でダイヤモンド気相合成技術の応用が考えられて
いる。
<Conventional technology> Diamond synthesis without using ultra-high pressure and high temperature.
Diamond vapor phase synthesis technology that decomposes hydrocarbons and synthesizes and coats diamond onto the surface of the base material from the gas phase is 19
Since it was developed by the Inorganic Materials Research Institute in 1981, applications of diamond vapor phase synthesis technology have been considered in various fields.

ダイヤモンドは特に硬い物質であり、又、化学的にも極
めて安定で、酸素及び鉄を除き他の物質と殆ど反応しな
いという際立った特徴を有するため、切削工具材料とし
て極めて好ましいことは言うまでもない。そのため、超
硬合金等の従来工具の表面にダイヤモンドの薄膜を厚さ
5〜lOμm程度に被覆したダイヤモンド被覆超硬合金
が盛んに研究されている。
It goes without saying that diamond is a particularly hard material, and has the distinguishing feature of being extremely chemically stable and hardly reacting with other substances except oxygen and iron, making it extremely desirable as a cutting tool material. Therefore, diamond-coated cemented carbide, in which the surface of a conventional tool such as cemented carbide is coated with a thin film of diamond to a thickness of about 5 to 10 μm, is being actively researched.

く発明が解決しようとする課題〉 気相合成法で超硬合金表面にダイヤモンド被覆を形成し
た場合、母材との接着性が十分でなく、工具性能として
は実用の域に達していないというのが現状である。
Problems to be Solved by the Invention When a diamond coating is formed on the surface of a cemented carbide using a vapor phase synthesis method, the adhesion to the base material is insufficient and the tool performance has not reached the level of practical use. is the current situation.

特に、ダイヤモンド焼結体工具の代替用として需要の高
いAll − SL合金に対しては、極めて低い寿命し
か示さない。
In particular, the All-SL alloy, which is in high demand as a substitute for diamond sintered tools, shows an extremely short service life.

これは、ダイヤモンド被覆中に合金表面のCOが合金中
より炭素を吸収してダイヤモンド合成を抑制したり、あ
るいは生成したダイヤモンドをグラファイトに変態させ
る等してダイヤモンドの密着性を低下させているものと
考えられる。
This is because CO on the alloy surface absorbs carbon from the alloy during diamond coating, suppressing diamond synthesis, or transforming the formed diamond into graphite, reducing the adhesion of the diamond. Conceivable.

このため、従来は靭性を若干犠牲にして合金中のGo量
を少なくさせて対応している。
Conventionally, this has been dealt with by reducing the amount of Go in the alloy at the expense of some toughness.

しかしながら、上記のAI−Si合金切削にはかなりの
靭性が要求され、Go量を低下させて密着性を向上させ
たダイヤモンド被覆超硬合金では欠損しやすく、本来の
目的が達成されないのである。
However, considerable toughness is required for cutting the above-mentioned AI-Si alloy, and diamond-coated cemented carbide, which has improved adhesion by reducing the amount of Go, is prone to chipping and cannot achieve its original purpose.

〈課題を解決するための手段〉 この発明は上記の問題点を解決すべく検討の結果、得ら
れたものであって、気相合成技術によりダイヤモンドの
薄膜な超硬合金母材に被覆してなる超硬合金において、
該超硬合金の表面から100μmまでの間の結合相を該
超硬合金内部の結合相に比較して減少させ、超硬合金表
面から5〜100μmの間に存在する結合相富化層の結
合相量が合金内部の結合相量に対して1.2〜5倍に富
化されてなり、かかる合金表面にダイヤモンド膜を被覆
させたダイヤモンド被覆超硬合金を提供するものである
<Means for Solving the Problems> The present invention was obtained as a result of studies to solve the above-mentioned problems. In the cemented carbide,
Reduce the binder phase within 100 μm from the surface of the cemented carbide compared to the binder phase inside the cemented carbide, and bond the binder phase enriched layer existing between 5 and 100 μm from the surface of the cemented carbide. The present invention provides a diamond-coated cemented carbide in which the phase amount is enriched 1.2 to 5 times as much as the binder phase amount inside the alloy, and the surface of the alloy is coated with a diamond film.

〈作用〉 この発明においては、■ 超硬合金表面から100ll
mの間のGo等の結合相量が減少しているため、ダイヤ
モンドとの密着性が大幅に向上する。
<Function> In this invention, ■ 100 liters from the cemented carbide surface
Since the amount of the binder phase such as Go between m is reduced, the adhesion with diamond is significantly improved.

このGo等の結合相の減少が超硬合金表面から100l
lm以上におよぶと合金強度の大幅な低下が生じてくる
ので好ましくない。
This reduction of the binder phase such as Go is 100L from the cemented carbide surface.
If it exceeds lm, the alloy strength will be significantly reduced, which is not preferable.

■ 超硬合金表面部のCo結合相量の減少による強度の
低下は、表面から5〜100 1mの間に存在する結合
相富化層で補うことができる。
(2) The decrease in strength due to a decrease in the amount of Co binder phase on the surface of the cemented carbide can be compensated for by a binder phase enriched layer existing between 5 and 100 m from the surface.

5 gm以内であると、ダイヤモンド生成時にダイヤモ
ンドの合成を抑制したり、グラファイトに変態させるこ
とがあり、好ましくない。
If it is less than 5 gm, it may inhibit the synthesis of diamond during diamond production or transform it into graphite, which is not preferable.

また100μm以上であると合金強度の低下抑制に効果
がない。Coの富化量は1.2倍以下では抑制効果がな
く、5倍を越えると耐摩耗性を低下させ好ましくない。
Moreover, if it is 100 μm or more, it is not effective in suppressing a decrease in alloy strength. If the enrichment amount of Co is 1.2 times or less, there is no suppressing effect, and if it exceeds 5 times, the wear resistance is decreased, which is not preferable.

この発明の超硬合金を得る手段としては、1つは結合相
量の異なる圧1接体をラミネート構造としてプレス、成
形、焼結することによって達成できる。または同一組成
の完粉を液相または固相下で脱炭処理や浸炭処置を繰返
して達成させることができる。
One method for obtaining the cemented carbide of the present invention can be achieved by pressing, molding, and sintering a laminated structure of pressed bodies having different binder phase amounts. Alternatively, finished powder having the same composition can be repeatedly subjected to decarburization treatment or carburization treatment in a liquid phase or solid phase.

ダイヤモンド被覆の方法としては、例えば熱CVD法、
プラズマCvD法、EACVD法、アークプラズマCV
D法等が知られている。例えば熱CVD法によれば、H
2とCI.の混合ガス(CH4濃度が0.1〜5容積%
程度)を2000℃以上で加熱したタングステン等の金
属フィラメントにて予熱した後、700〜1000℃に
加熱した基材表面上で混合ガスを分解してダイヤモンド
を析出させることができる。
Examples of diamond coating methods include thermal CVD method,
Plasma CvD method, EACVD method, arc plasma CV
D method etc. are known. For example, according to the thermal CVD method, H
2 and CI. mixed gas (CH4 concentration is 0.1 to 5% by volume)
After preheating a metal filament of tungsten or the like heated to 2000°C or higher, the mixed gas can be decomposed on the surface of the base material heated to 700 to 1000°C to precipitate diamond.

ダイヤモンド被覆の厚さは0.1μm以上20pm以下
が好ましい。20μmを越えると膜中の熱応力により膜
が剥離するので好ましくなく、0.1gm未満では被覆
の効果が認められない。
The thickness of the diamond coating is preferably 0.1 μm or more and 20 pm or less. If it exceeds 20 μm, the film will peel off due to thermal stress in the film, which is undesirable, and if it is less than 0.1 gm, no coating effect will be observed.

〈実施例〉 以下、この発明を実施例により詳細に説明する。<Example> Hereinafter, this invention will be explained in detail with reference to Examples.

実施例1 wc−io%Co合金完粉を用いてISO SPGN 
120308の形状にプレスした後、1350℃で0.
I Torrの真空雰囲気中で30分間保持した。
Example 1 ISO SPGN using wc-io%Co alloy complete powder
After pressing into the shape of 120308, it was heated to 1350°C and 0.
It was held in a vacuum atmosphere of I Torr for 30 minutes.

次いで 5℃/min.(4), 2℃/min.@,
0.5℃/ m i n . (Qの3種の冷却速度で
1250℃まで5TorrのCH4とH2の混合ガス雰
囲気中で冷却した。
Then 5°C/min. (4), 2°C/min. @,
0.5℃/min. (It was cooled to 1250° C. at three cooling rates (Q) in a mixed gas atmosphere of CH4 and H2 at 5 Torr.

次に、上記で得た3種の合金を1400℃、0. lT
orrのCH4の微浸炭性雰囲気中で2時間保持した。
Next, the three types of alloys obtained above were heated at 1400°C and 0.5°C. lT
It was held for 2 hours in a slightly carburizing atmosphere of CH4 of orr.

かくして得た合金のGo分布をXMAで分析したところ
、第1図に示す結果が得られた。
When the Go distribution of the thus obtained alloy was analyzed by XMA, the results shown in FIG. 1 were obtained.

又、比較として通常のwc−io%Co合金を用いて表
面に一般的な熱CVD法でダイヤモンドを5μm被覆し
た。この表面にロックウエル圧子を60kgfで10秒
間圧入し、密着性を評価したところ、通常の合金は圧子
周辺で膜剥離が生じていたが、この発明の合金は膜剥離
は殆ど生じていなかった。
For comparison, a normal wc-io%Co alloy was used and its surface was coated with 5 μm of diamond by a general thermal CVD method. A Rockwell indenter was injected into this surface at 60 kgf for 10 seconds and the adhesion was evaluated. In the case of ordinary alloys, film peeling occurred around the indenter, but in the case of the alloy of the present invention, almost no film peeling occurred.

実施例2 実施例1で作製した(4)、(ロ)、0の3種の合金及
び通常の合金(5%CoとlO%Co)にダイヤモンド
膜を被覆したものを用いて下記の条件で切削テストを行
なった。
Example 2 Three types of alloys (4), (b), and 0 prepared in Example 1 and ordinary alloys (5%Co and 1O%Co) coated with a diamond film were used under the following conditions. A cutting test was conducted.

切削条件 被削材  u − ig%Si 切削速度   200m/min 切込み  0.5mm 送り量  0.1mm/rev 切削時間   10分 この結果、囚,@,0のv8摩耗量は0. 26mm,
0. 49mm、0.24mmであり、一方、通常の合
金では5%および10%Co合金は1分切削後、摩耗量
が0. 30mmを越して寿命と認められた。
Cutting conditions Work material u - ig%Si Cutting speed 200m/min Depth of cut 0.5mm Feed rate 0.1mm/rev Cutting time 10 minutes As a result, the v8 wear amount of @, 0 is 0. 26mm,
0. 49 mm and 0.24 mm, while the normal alloys, 5% and 10% Co alloys, have a wear amount of 0.0.5 mm after 1 minute of cutting. When the length exceeded 30 mm, it was recognized that the service life had expired.

【図面の簡単な説明】[Brief explanation of drawings]

図面はこの発明で作威した超硬合金の表面からの距離と
CO分布の関係を示す線図である。
The drawing is a diagram showing the relationship between the distance from the surface of the cemented carbide used in this invention and the CO distribution.

Claims (2)

【特許請求の範囲】[Claims] (1) WCと鉄族金属の1種もしくはそれ以上を結合
相とした超硬合金において、該超硬合金の表面から10
0μmまでの間の結合相量を該超硬合金内部の結合相量
に比較して減少させるとともに該超硬合金表面にダイヤ
モンド膜を被覆させたことを特徴とするダイヤモンド被
覆超硬合金。
(1) In a cemented carbide with a binder phase of WC and one or more iron group metals, the surface of the cemented carbide is
1. A diamond-coated cemented carbide, characterized in that the amount of the bonding phase between 0 μm and 0 μm is reduced compared to the amount of the bonding phase inside the cemented carbide, and the surface of the cemented carbide is coated with a diamond film.
(2) 超硬合金の表面から5〜100μmの間に存在
する結合相富化層の結合相量が合金内部の結合相量に対
して1.2〜5倍に富化されていることを特徴とする請
求項(1)記載のダイヤモンド被覆超硬合金。
(2) The amount of binder phase in the binder phase enriched layer existing between 5 and 100 μm from the surface of the cemented carbide is 1.2 to 5 times the amount of binder phase inside the alloy. A diamond-coated cemented carbide according to claim (1).
JP1232218A 1989-09-06 1989-09-06 Diamond coated cemented carbide Expired - Lifetime JP2539922B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1232218A JP2539922B2 (en) 1989-09-06 1989-09-06 Diamond coated cemented carbide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1232218A JP2539922B2 (en) 1989-09-06 1989-09-06 Diamond coated cemented carbide

Publications (2)

Publication Number Publication Date
JPH0394062A true JPH0394062A (en) 1991-04-18
JP2539922B2 JP2539922B2 (en) 1996-10-02

Family

ID=16935835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1232218A Expired - Lifetime JP2539922B2 (en) 1989-09-06 1989-09-06 Diamond coated cemented carbide

Country Status (1)

Country Link
JP (1) JP2539922B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995012009A1 (en) * 1993-10-29 1995-05-04 Balzers Aktiengesellschaft Coated body, its method of production and its use
JPH07238483A (en) * 1994-02-23 1995-09-12 Osaka Diamond Ind Co Ltd Guide for strand
US6998173B2 (en) * 2000-03-24 2006-02-14 Kennametal Inc. Cemented carbide tool and method of making

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6195068B2 (en) * 2013-02-25 2017-09-13 三菱マテリアル株式会社 Diamond coated cemented carbide cutting tool with improved cutting edge strength

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267174A (en) * 1985-09-19 1987-03-26 Sumitomo Electric Ind Ltd Production of hard carbon film coated sintered hard alloy
JPS63100182A (en) * 1986-04-24 1988-05-02 Mitsubishi Metal Corp Cutting tool tip made of diamond-coated tungsten carbide-based sintered hard alloy

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267174A (en) * 1985-09-19 1987-03-26 Sumitomo Electric Ind Ltd Production of hard carbon film coated sintered hard alloy
JPS63100182A (en) * 1986-04-24 1988-05-02 Mitsubishi Metal Corp Cutting tool tip made of diamond-coated tungsten carbide-based sintered hard alloy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995012009A1 (en) * 1993-10-29 1995-05-04 Balzers Aktiengesellschaft Coated body, its method of production and its use
JPH07238483A (en) * 1994-02-23 1995-09-12 Osaka Diamond Ind Co Ltd Guide for strand
US6998173B2 (en) * 2000-03-24 2006-02-14 Kennametal Inc. Cemented carbide tool and method of making

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JP2539922B2 (en) 1996-10-02

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