JPH0380600A - Electronic component inspection device - Google Patents

Electronic component inspection device

Info

Publication number
JPH0380600A
JPH0380600A JP1215963A JP21596389A JPH0380600A JP H0380600 A JPH0380600 A JP H0380600A JP 1215963 A JP1215963 A JP 1215963A JP 21596389 A JP21596389 A JP 21596389A JP H0380600 A JPH0380600 A JP H0380600A
Authority
JP
Japan
Prior art keywords
light
lead
leads
received
aligned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1215963A
Other languages
Japanese (ja)
Inventor
Masayasu Shimizu
清水 雅康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1215963A priority Critical patent/JPH0380600A/en
Publication of JPH0380600A publication Critical patent/JPH0380600A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To enable alignment of a lead to be detected accurately and achieve an inexpensive production by projecting a parallel light flux toward a lead column of electronic component, by receiving the parallel light flux which passes the lead column, and then by comparing the amount of received light at this light-receiving part with a reference amount of received light for judging to see if the lead is aligned. CONSTITUTION:A lead column 13 is transferred to a light path of a parallel light flux 22 which is located at the mid point between a projection light part 20 and a light-receiving part 21 of an inspection device 18 and the parallel light flux 22 is projected from the projection light part 20, which passes through the lead column 13 and is received at the light-receiving part 21. The amount of received light which this light-receiving part 21 receives and reference amount of received light when the previously set lead 13a is aligned are compared for judging the alignment of the lead 13a. Then, only a conforming IC 11 where the lead 13a is aligned is mounted on a substrate.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、フラットパッケージIC等の電子部品のリー
ド列を構成する複数本のリードの揃いの様子を検査する
電子部品検査装置に関する。
[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention is an electronic component inspection method that inspects the alignment of a plurality of leads that constitute a lead row of an electronic component such as a flat package IC. Regarding equipment.

(従来の技術) 電子部品例えば第7図に示すようなフラットパッケージ
ICIは、パッケージ2の側辺に多数本のり−ド3aを
並設したリード列3を有している。このようなICIに
おいては、一部のリード3aが他よりも浮上がっている
等の不揃いがあると、基板へのはんだ付は時に未接続や
導通不良等の一接続不良を生ずる虞があるため、基板へ
の実装前にリード3aの揃いの様子を検査して良品、不
良品を選別することが行われている。
(Prior Art) An electronic component, for example, a flat package ICI as shown in FIG. 7, has a lead row 3 on the side of the package 2 in which a large number of leads 3a are arranged in parallel. In such an ICI, if there is an irregularity such as some leads 3a being higher than others, there is a risk of one connection failure such as no connection or poor continuity when soldering to the board. Before mounting on a board, the alignment of the leads 3a is inspected to select good products and defective products.

かかる検査を行うための装置としては、第7図に示すよ
うに、光源4からICIに光を照射し、そのICIをC
CDカメラ5により認識し、図示しない画像処理装置に
よりその投影像を基に良品。
As shown in FIG. 7, an apparatus for performing such an inspection is such that the ICI is irradiated with light from a light source 4 and the ICI is
It is recognized by the CD camera 5 and determined to be non-defective based on the projected image by an image processing device (not shown).

不良品の判定を行うものがある。このものは、−部のリ
ード3bが他よりも浮上がっていると、第8図に示すよ
うに、投影像6(ハツチングして示す)に、リード3b
の先端が他のリード3aよりも凹んでしまうことによる
欠損部7が検出されるようになり、この欠損部7の有無
によって全てのリード3aが揃っているかどうかすなわ
ちリードの曲がりがないかどうかを判定するものである
There is something that determines whether a product is defective. In this case, if the negative part of the lead 3b is higher than the others, the projected image 6 (shown by hatching) will show the lead 3b as shown in FIG.
A defect 7 caused by the tip of the lead 3a being recessed more than the other leads 3a is now detected, and the presence or absence of this defect 7 can be used to determine whether all the leads 3a are aligned, that is, whether the leads are bent. It is something to judge.

(発明が解決しようとする課題) しかしながら、上記従来の装置では、CCDカメラ5及
び画像処理装置を用いて上方からの矧影像6によって欠
損部7を検出するようにしてり゛るため、リード3bの
浮上がり量がある程度大きくないと欠落部7を検出でき
ず、検出精度がさほど良いものではなかった。また、C
CDカメラ空の設備導入のため、設備費用としても高価
になってしまうという欠点もあった。
(Problem to be Solved by the Invention) However, in the above-mentioned conventional device, the defect portion 7 is detected using a rectangular image 6 from above using a CCD camera 5 and an image processing device. The missing portion 7 could not be detected unless the floating amount was large to a certain extent, and the detection accuracy was not very good. Also, C
There was also the drawback that equipment costs were high because the CD camera was not installed.

本発明は上記事情に鑑みてなされたもので、その目的は
、リードの揃いの様子を精度良く検出でき、しかも安価
に製造することのできる電子部品検査装置を提供するに
ある。
The present invention has been made in view of the above circumstances, and its object is to provide an electronic component inspection device that can accurately detect the alignment of leads and can be manufactured at low cost.

[発明の構成] (課題を解決するための手段) 本発明の電子部品検査装置は、電子部品のリード列に向
けて平行光束を照射する投光部と、リード列を通過した
平行光束を受光する受光部と、この受光部の受光量とリ
ードが揃っている場合の基準受光量とを比較してリード
が揃っているかどうかを判定する判定手段とを具備した
ところに特徴を有する。
[Structure of the Invention] (Means for Solving the Problems) The electronic component inspection device of the present invention includes a light projecting section that irradiates a parallel light beam toward a lead array of an electronic component, and a light receiving section that receives the parallel light beam that has passed through the lead array. The present invention is characterized in that it is equipped with a light receiving section, and a determining means for comparing the amount of light received by the light receiving section with a reference amount of light received when the leads are aligned, and determining whether or not the leads are aligned.

(作用) 上記手段によれば、投光部からの平行光束はその一部が
リードに遮断され、そのリードに相当する陰影を有した
状態で受光部に受光される。このとき、リードが揃って
いる場合には、全てのリードの陰影がラップして遮光量
が少なくなるから受光部の受光量が大きくなり、リード
が不揃いの場合には、陰影が大きくなるからその分量光
量が小さくなる。従って、判定手段により受光部の受光
量とリードが揃っている場合の基準受光量とを比較すれ
ば、リードが揃っているかどうかを判定することができ
る。
(Function) According to the above means, part of the parallel light beam from the light projecting section is blocked by the lead, and the light is received by the light receiving section with a shadow corresponding to the lead. At this time, if the leads are aligned, the shadows of all the leads overlap and the amount of light shielded is reduced, so the amount of light received by the light receiving section is increased.If the leads are not aligned, the shadows are large and the amount of light received by the light receiving section is increased. The amount of light becomes smaller. Therefore, by comparing the amount of light received by the light receiving section with the reference amount of light received when the leads are aligned, the determining means can determine whether the leads are aligned.

この場合、受光量の検出により判定を行うものであるか
ら、リードに微少な浮上がりがあっても受光部の受光量
は基準受光量とは異なってくるがら、検出精度を比較的
高くすることができ、また、カメラ等の高価な部品を必
要としないので、装置コストが安価になる。
In this case, the determination is made by detecting the amount of received light, so even if there is a slight lift in the lead, the amount of light received by the light receiving section will differ from the standard amount of received light, but the detection accuracy can be made relatively high. Furthermore, since expensive parts such as a camera are not required, the cost of the device is reduced.

(実施例) 以下本発明をIC実装装置に組込まれた検査装置に適用
した第1実施例について、第1図乃至第4図を参照して
説明する。
(Embodiment) A first embodiment in which the present invention is applied to an inspection device incorporated in an IC mounting apparatus will be described below with reference to FIGS. 1 to 4.

まず、電子部品たるIC11は、第1図及び第2図に示
すように、四角形のパッケージ12の各側辺にリード列
13乃至16を有しており、各リード列13乃至16は
、夫々多数本のリード13a乃至16aが並設されて構
成されている。
First, the IC 11, which is an electronic component, has lead rows 13 to 16 on each side of a rectangular package 12, as shown in FIGS. Book leads 13a to 16a are arranged in parallel.

図示はしないが、IC実装装置は、tcllが供給され
る部品供給部、基板が搬入されICIIの実装作業が行
われる作業台、吸着ノズル17(第1図参照)により前
記部品供給部の1011を吸着しそれを前記作業台まで
移送して基板に実装する実装ヘッド等から構成されてい
る。そして図示しないマイクロコンピュータからなる制
御装置により、所定のプログラムに従ってICIIの実
装作業が自動的に行なわれるようになっているこのとき
、基板への実装前に、本実施例に係る検査装置18によ
りIC11のリードの揃いの様子を検査して良品、不良
品を選別し、リード13a乃至16aが不揃いのICI
Iは排除されて良品のICIIのみが基板に実装される
ようになっている。
Although not shown, the IC mounting apparatus includes a component supply section to which tclll is supplied, a work table on which the board is carried and ICII mounting work is performed, and a suction nozzle 17 (see FIG. 1) to pick up the component supply section 1011. It consists of a mounting head and the like that picks up the material, transfers it to the workbench, and mounts it on the board. Then, a control device including a microcomputer (not shown) automatically performs the ICII mounting work according to a predetermined program. The ICIs with leads 13a to 16a that are not aligned are inspected to select good products and defective products.
I is excluded so that only good ICII is mounted on the board.

ここで、本実施例に係る検査装置18について述べる。Here, the inspection device 18 according to this embodiment will be described.

このリード検査装置18は、第1図及び第2図に示すよ
うに、基台19上に、投光部2゜とこれに対向する受光
部21とを備えて構成されている。投光部20は、図示
はしないが半導体レーザ装置及び光学系を備えて構成さ
れ、受光部21へ向けてレーザビームよりなる平行光束
22を出力するようになっている。一方、受光部21は
、前記平行光束22が照射される部位に縦長なスリット
23(第3図参照)を有すると共に、このスリット23
を透過した光を受ける光センサ(図示せず)を備え、そ
の受光量に応じた大きさの電気信号を判定手段に出力す
るようになっている。判定手段は、前記制御装置に含ま
れて構成されており、後述するように、予めリード13
a乃至16aが揃っている場合の基準受光量が入力され
るようになっていて、この基準受光量に基づいてリド1
3a乃至16aが揃っているかどうかを判するようにな
っている。尚、制御装置は、前記先部20の作動制御も
行うようになっている。
As shown in FIGS. 1 and 2, this lead inspection device 18 is constructed of a base 19, and includes a light projecting section 2.degree. and a light receiving section 21 facing thereto. Although not shown, the light projecting section 20 includes a semiconductor laser device and an optical system, and outputs a parallel light beam 22 consisting of a laser beam toward the light receiving section 21 . On the other hand, the light receiving section 21 has a vertically elongated slit 23 (see FIG. 3) in a region where the parallel light beam 22 is irradiated, and this slit 23
The device is equipped with an optical sensor (not shown) that receives the transmitted light, and outputs an electrical signal having a magnitude corresponding to the amount of received light to the determining means. The determination means is configured to be included in the control device, and as described later, the lead 13 is
The standard amount of received light when all the items a to 16a are aligned is input, and the lid 1 is adjusted based on this standard amount of received light.
It is determined whether 3a to 16a are aligned. Note that the control device also controls the operation of the tip portion 20.

次に、上記構成の作用について述べる。Next, the operation of the above configuration will be described.

吸着ノズル17に吸着されたIC11は、節回乃至第3
図に示すように、検査装置18の段部20と受光部21
との中間部位に、まず、リド列13が平行光束22の光
路にあってリード3aの並び方向に平行光束22が照射
される位に移送される。そして、投光部20から平行光
22が照射されリード列13を通過して受光部1に受光
される。判定手段は、この受光部21受光した受光量と
予め設定されているリード1aが揃っている場合の基準
受光量とを比較してのようにリード13aの揃いを判定
する。
The IC 11 adsorbed by the suction nozzle 17 is
As shown in the figure, the stepped portion 20 and the light receiving portion 21 of the inspection device 18
First, the lead array 13 is moved to a position intermediate between the leads 3a and the leads 3a so that the lead array 13 is in the optical path of the parallel light beam 22 and is irradiated with the parallel light beam 22 in the direction in which the leads 3a are arranged. Then, parallel light 22 is emitted from the light projecting section 20, passes through the lead array 13, and is received by the light receiving section 1. The determining means determines whether the leads 13a are aligned by comparing the amount of light received by the light receiving section 21 with a preset reference amount of light received when the leads 1a are aligned.

即ち、このとき、受光部21では、平行光束2がリード
列13に遮断された分に相当する陰ができた状態で受光
されるようになるが、リ−13aが揃っている場合には
、第4図(a)にすように、陰影24(ハツチングして
示す)は全てのリード13aがラップした状態となる。
That is, at this time, the light receiving unit 21 receives the parallel light beam 2 with a shadow corresponding to the amount blocked by the lead array 13, but when the leads 13a are aligned, As shown in FIG. 4(a), the shade 24 (indicated by hatching) is a state in which all the leads 13a are wrapped.

このときの受光部21の受光量が予め判定手段に基準受
光量として入力されており、従って、受光部21の受光
量がこの基準受光量に一致すれば、現在検査されている
リード列13のリード13aが揃っていると判定され、
引続き、吸着ノズル17が90度ずつ回転されてリード
列14,15.16の揃いが順次判定されるようになる
The amount of light received by the light receiving section 21 at this time is input in advance to the determination means as the reference amount of received light. Therefore, if the amount of light received by the light receiving section 21 matches this reference amount of received light, the amount of light received by the lead array 13 currently being inspected is It is determined that the leads 13a are aligned,
Subsequently, the suction nozzle 17 is rotated by 90 degrees, and the alignment of the lead rows 14, 15, and 16 is sequentially determined.

一方、第3図に示すように、例えばリード列13のなか
に浮上がっているリード13bがあると、第4図(b)
に示すように、受光部21に陰影24の他に浮上がって
いるリード13bに対応する陰影25(同じくハツチン
グして示す)が生ずるようになる。従って、この場合に
は陰影25の分だけ基準受光量よりも受光量が少なくな
るから、判定手段はリード13aが不揃いであると判定
する。制御装置は、この判定手段が不揃いと判定したI
CIIを不良品として排除し、この後新たなICIIに
ついての検査装置18による検査が行われる。
On the other hand, as shown in FIG. 3, if there is a lead 13b floating in the lead row 13, for example, as shown in FIG.
As shown in FIG. 2, in addition to the shadow 24, a shadow 25 (also shown hatched) corresponding to the raised lead 13b appears on the light receiving portion 21. Therefore, in this case, since the amount of received light is less than the reference amount of received light by the shadow 25, the determining means determines that the leads 13a are not aligned. The control device determines that the I
The CII is rejected as a defective product, and then a new ICII is inspected by the inspection device 18.

以上のようにして検査装置18にてリード1=aの揃い
が判定され、リード13aが揃った良SのIC11のみ
が基板に実装される。
As described above, the inspection device 18 determines whether the leads 1=a are aligned, and only ICs 11 of good S quality with the leads 13a aligned are mounted on the board.

このように、本実施例では、アナログ出力で凌る受光量
の検出により微小な浮上りをも判定すZことができるか
ら、リード3bの浮上がり量がよる程度大きくないと欠
落部7を検出できなかった従来のものに比べて、検出精
度を向上させることができる。しかも、平行光束22を
照射する投黄部20とそれを受光する光センサを有する
受光m21とからり一ド13aが揃っているかどうかを
検査することができるから、CCDカメラ5を用いてい
た従来のものと異なり、極めて安価に製迅することがで
きる。
In this way, in this embodiment, even minute lifting can be determined by detecting the amount of received light, which is superior to analog output. Detection accuracy can be improved compared to conventional methods. In addition, it is possible to inspect whether the yellow projecting unit 20 that emits the parallel light beam 22, the light receiving unit m21 having a light sensor that receives the yellow light, and the trigger door 13a are aligned. Unlike the above, it can be manufactured very quickly and at low cost.

第5図は本発明の第2実施例を示すもので、上記第1実
施例と穴なるところは、反射鏡26乃至28を設けた点
にある。これら反射鏡26乃至28は、投光部29から
の平行光束3oが90度ずつ折曲がって受光部31に達
するように配設されており、その他の構成は上記第1実
施例と同様となっている。これにより、Ic11を図示
のように配置することにより、−度に4辺全てのリード
13a乃至16aの揃いを判定でき、短時間で検査を行
うことができるものである。
FIG. 5 shows a second embodiment of the present invention, which differs from the first embodiment in that reflecting mirrors 26 to 28 are provided. These reflecting mirrors 26 to 28 are arranged so that the parallel light beam 3o from the light projecting section 29 is bent by 90 degrees and reaches the light receiving section 31, and the other configurations are the same as in the first embodiment. ing. By arranging the ICs 11 as shown in the figure, it is possible to determine the alignment of the leads 13a to 16a on all four sides at the same time, and the inspection can be performed in a short time.

また、第6図は本発明の第3実施例を示すもので、上記
第1実施例と異なるところは、投光部(図示せず)と受
光部32との間に棒状の遮光体33を設けた点にある。
FIG. 6 shows a third embodiment of the present invention, which differs from the first embodiment in that a rod-shaped light shielding body 33 is provided between a light projecting section (not shown) and a light receiving section 32. It is at the point that I have set.

この遮光体33は、IC11のリード13aと路間等の
厚さ寸法を有し、ICIIはリード列13がこの遮光体
33の陰に位置するように配置され、リード13aが揃
っている場合にはそれらの陰影が遮光体33の陰影にラ
ップするようになっている。その他の構成は上記第1実
施例と同様であり、これにより、第1実施例と同様の作
用、効果が得られる他、基準受光量の設定が実際のIc
11を用いずとも遮光体33に基づいて行うことができ
る利点がある。
This light shielding body 33 has a thickness dimension such as between the leads 13a of the IC 11 and the path, and the ICII is arranged so that the lead row 13 is located in the shadow of this light shielding body 33, and when the leads 13a are aligned. These shadows overlap the shadows of the light shielding body 33. The rest of the configuration is the same as that of the first embodiment, and as a result, the same functions and effects as those of the first embodiment can be obtained, and the setting of the reference amount of received light can be adjusted to the actual Ic.
There is an advantage that it can be performed based on the light shielding body 33 without using the light shielding body 11.

尚、上記実施例では本発明をIC実装装置に組込んだも
のについて説明したが、それに限らず工Cの生産工程で
の検査用に適用しても良い。その他、本発明は上記各実
施例に限定されるものではなく、例えば投光部及び受光
部を複数組設けて同時に4辺あるいは2辺のリード列に
対してリードの揃いを検査させるようにしても良い等、
要旨を逸脱しない範囲内で適宜変更して実施し得るもの
である。
In the above embodiment, the present invention has been described as being incorporated into an IC mounting apparatus, but the present invention is not limited thereto, and may be applied to inspections in the production process of the machine C. In addition, the present invention is not limited to the above-mentioned embodiments; for example, a plurality of sets of light emitting parts and light receiving parts may be provided to simultaneously inspect lead alignment on four sides or two sides. Good, etc.
The invention may be modified and implemented as appropriate without departing from the gist of the invention.

[発明の効果] 以上の説明にて明らかなように、本発明の電子部品検査
装置によれば、カメラ認識によるICのリード曲がり検
出ではなく、光線の照射によりICのリード曲がりを検
出するようにしたので、リードの不揃いすなわちリード
曲がりを精度良く検出でき、しかも安価に製造すること
ができるという優れた効果を奏する。
[Effects of the Invention] As is clear from the above description, according to the electronic component inspection apparatus of the present invention, bending of IC leads is detected not by camera recognition but by irradiation with a light beam. Therefore, it is possible to detect lead misalignment, that is, lead bending, with high accuracy, and to manufacture the device at a low cost, which is an excellent effect.

【図面の簡単な説明】[Brief explanation of drawings]

第1図乃至第4図は本発明の第1実施例を示すもので、
第1図はリード検査装置の概略的な正面図、第2図は同
上面図、第3図は第2図の■−■線に沿う縦断側面図、
第4図は受光部の受光状態を示す図であり、第5図は本
発明の第2実施例を示す第2図相当図、第6図は本発明
の第3実施例を示す第3図相当図である。また、第7図
は従来例を示す第1図相当図、第8図は従来例を示すC
CDカメラが取込んだICの投影像を示す図である。 図面中、11はIC(電子部品)、13乃至16はリー
ド列、13a乃至16aはリード、18は検査装置、2
0.29は投光部、21,31゜32は受光部、22.
30は平行光束、26乃至28は反射鏡、33は遮光体
を示す。
1 to 4 show a first embodiment of the present invention,
Fig. 1 is a schematic front view of the lead inspection device, Fig. 2 is a top view of the same, Fig. 3 is a vertical side view taken along the line ■-■ in Fig. 2,
FIG. 4 is a diagram showing the light receiving state of the light receiving section, FIG. 5 is a diagram corresponding to FIG. 2 showing the second embodiment of the present invention, and FIG. 6 is a diagram showing the third embodiment of the present invention. This is a corresponding diagram. In addition, Fig. 7 is a diagram equivalent to Fig. 1 showing a conventional example, and Fig. 8 is a diagram equivalent to Fig. 1 showing a conventional example.
FIG. 3 is a diagram showing a projected image of an IC captured by a CD camera. In the drawing, 11 is an IC (electronic component), 13 to 16 are lead rows, 13a to 16a are leads, 18 is an inspection device, and 2
0.29 is a light emitting part, 21,31°32 is a light receiving part, 22.
30 is a parallel light beam, 26 to 28 are reflecting mirrors, and 33 is a light shielding body.

Claims (1)

【特許請求の範囲】[Claims] 1.複数本のリードが並設されたリード列を備える電子
部品を検査する電子部品検査装置において、前記電子部
品のリード列に向けて平行光束を照射する投光部と、前
記リード列を通過した前記平行光束を受光する受光部と
、この受光部の受光量とリードが揃っている場合の基準
受光量とを比較して前記リードが揃っているかどうかを
判定する判定手段とを具備したことを特徴とする電子部
品検査装置。
1. In an electronic component inspection apparatus for inspecting an electronic component including a lead array in which a plurality of leads are arranged in parallel, a light projecting section that irradiates a parallel light beam toward the lead array of the electronic component; It is characterized by comprising a light receiving section that receives a parallel light beam, and a determining means that compares the amount of light received by the light receiving section with a reference amount of received light when the leads are aligned, and determines whether the leads are aligned. Electronic component inspection equipment.
JP1215963A 1989-08-24 1989-08-24 Electronic component inspection device Pending JPH0380600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1215963A JPH0380600A (en) 1989-08-24 1989-08-24 Electronic component inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1215963A JPH0380600A (en) 1989-08-24 1989-08-24 Electronic component inspection device

Publications (1)

Publication Number Publication Date
JPH0380600A true JPH0380600A (en) 1991-04-05

Family

ID=16681143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1215963A Pending JPH0380600A (en) 1989-08-24 1989-08-24 Electronic component inspection device

Country Status (1)

Country Link
JP (1) JPH0380600A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104596A (en) * 1992-08-07 1994-04-15 Yamaha Motor Co Ltd Method and system for loading component
JPH06152195A (en) * 1992-11-05 1994-05-31 Yamaha Motor Co Ltd Detecting equipment for component suction state of mounting machine
US7113398B2 (en) 2001-12-27 2006-09-26 Fujitsu Limited Removable storage device unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104596A (en) * 1992-08-07 1994-04-15 Yamaha Motor Co Ltd Method and system for loading component
JPH06152195A (en) * 1992-11-05 1994-05-31 Yamaha Motor Co Ltd Detecting equipment for component suction state of mounting machine
US7113398B2 (en) 2001-12-27 2006-09-26 Fujitsu Limited Removable storage device unit

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