JPH0347753B2 - - Google Patents
Info
- Publication number
- JPH0347753B2 JPH0347753B2 JP61024049A JP2404986A JPH0347753B2 JP H0347753 B2 JPH0347753 B2 JP H0347753B2 JP 61024049 A JP61024049 A JP 61024049A JP 2404986 A JP2404986 A JP 2404986A JP H0347753 B2 JPH0347753 B2 JP H0347753B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- discharge
- gas
- tube
- glass tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011521 glass Substances 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000010355 oscillation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
この発明は高速軸流ガスレーザ発振器詳しくは
パルス放電時に安定な放電を得ることができる高
速軸流ガスレーザ発振器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a high-speed axial flow gas laser oscillator, and more particularly, to a high-speed axial flow gas laser oscillator that can obtain stable discharge during pulse discharge.
（従来の技術）
従来から高速軸流ガスレーザの放電は第１電
極、第２電極のうちの一方の電極をグランド電位
あるいは低電位にし、他方の電極に高電圧を印加
することにより行われている。又、パルス放電は
高電圧の印加を開閉することにより放電をパルス
化することにより行われている。(Prior art) Discharge of a high-speed axial gas laser has traditionally been performed by setting one of the first and second electrodes to ground potential or a low potential, and applying a high voltage to the other electrode. . Further, pulsed discharge is performed by pulsing the discharge by opening and closing the application of a high voltage.
一方、低電位あるいはグランド電位の電極近く
に高周波電極を設け、微弱な高周波放電によつて
イオンを発生させ、放電開始電圧を下げる技術も
従来存在した。 On the other hand, there has conventionally been a technique in which a high-frequency electrode is provided near an electrode at a low potential or ground potential, and ions are generated by a weak high-frequency discharge to lower the discharge starting voltage.
（発明が解決しようとする問題点）
しかしこの従来の装置ではCW（連続放電）時
には良好なグロー放電を得ることができるが、パ
ルス放電時には一様な放電をさせるまでにはいた
らなかつた。(Problems to be Solved by the Invention) However, with this conventional device, although it is possible to obtain a good glow discharge during CW (continuous discharge), it is not possible to achieve a uniform discharge during pulse discharge.
これはパルス放電の際、パルス幅ご短く、繰り
返しが遅いと、CWあるいは繰り返しの速いパル
スの場合に比べ、イオン化した分子の一部が高速
ガス流で運び去られ、分子が減少し、放電管内で
インピーダンスの低い一部分にかたよつてしまう
からであり、アーク状放電になりやすい欠点があ
つた。 This is because during pulse discharge, if the pulse width is short and the repetition is slow, some of the ionized molecules will be carried away by the high-speed gas flow than in the case of CW or fast repetition pulses, reducing the number of molecules inside the discharge tube. This is because the impedance is biased toward a portion with low impedance, and it has the disadvantage of being prone to arc-like discharge.
また、放電管近傍にグランド電位に近い金属が
あると静電容量を通じて電流が流れようとする
為、放電がその方向にかたむく現象が発生し、極
端にレーザのパワーが低下する現象も発生してい
た。 Additionally, if there is a metal near the discharge tube that is close to ground potential, current will tend to flow through the capacitance, causing the discharge to skew in that direction, which can lead to an extreme drop in laser power. Ta.
この発明はこれら従来の高速軸流ガスレーザ発
振器の欠点を除去することを目的とするものであ
り、パルス放電時にも安定した放電を得ることが
できる高速軸流ガスレーザ発振器を提供せんとす
るものである。 The purpose of this invention is to eliminate these drawbacks of conventional high-speed axial flow gas laser oscillators, and to provide a high-speed axial flow gas laser oscillator that can obtain stable discharge even during pulse discharge. .
［発明の構成］
（問題点を解決するための手段）
この発明は、一方の端面を全反射鏡１、他方の
端面を半透過鏡２で閉塞した筒状のガラス管３の
全反射鏡１寄りの管壁にガス導入口４、半透過鏡
２寄りの管壁にガス排出口５を設け、前記ガス導
入口４内にグランド電位又は低電位に接続された
第２電極６を、ガス導入口４とガス排出口５の間
で、ガス排出口５寄りの管内周壁にマイナスの高
電圧が印加される第１電極７をそれぞれ位置さ
せ、更に第１電極７と第２電極６の間の外周壁に
ガラス管３を囲撓する様に一様な静電容量を有
し、第２電極６と同じ電位を持つた第３電極８を
設けることにより上記目的を達成せんとするもの
である。[Structure of the Invention] (Means for Solving the Problems) This invention provides a total reflection mirror 1 of a cylindrical glass tube 3 whose one end face is closed with a total reflection mirror 1 and the other end face is closed with a semi-transmission mirror 2. A gas inlet 4 is provided in the tube wall closer to the semi-transparent mirror 2, and a gas outlet 5 is provided in the tube wall closer to the semi-transparent mirror 2, and a second electrode 6 connected to the ground potential or a low potential is connected to the gas inlet 4 to introduce the gas. Between the port 4 and the gas outlet 5, first electrodes 7 to which a negative high voltage is applied are placed on the inner circumferential wall of the tube near the gas outlet 5, and further between the first electrode 7 and the second electrode 6. The above objective is achieved by providing a third electrode 8 having a uniform capacitance and having the same potential as the second electrode 6 so as to surround the glass tube 3 on the outer peripheral wall. .
（作用）
この発明におけるガスレーザ発振器の第３電極
はコンデンサに相当する働きをするものであり、
ガラス管の外周壁を同じ電位でとりまいており、
低電位に接続されることにより放電の電位に対
し、静電容量を持つている。そして、このガラス
管３内を第２電極から第１電極の方向に向かつて
混合ガスＧを流し、第１電極に高圧パルスを印加
すると、第１電極から第３電極まではガラス管３
の中心にそつて細いアーク状の放電がおこるが第
３電極から第２電極までの間にはガラス管３の内
容積ほぼ全域にわたり一様なグロー放電が発生す
る。(Function) The third electrode of the gas laser oscillator in this invention functions as a capacitor,
The outer peripheral wall of the glass tube is surrounded by the same potential.
By being connected to a low potential, it has a capacitance against the discharge potential. Then, when the mixed gas G flows through the glass tube 3 from the second electrode to the first electrode and a high voltage pulse is applied to the first electrode, the glass tube 3 from the first electrode to the third electrode
A thin arc-shaped discharge occurs along the center of the glass tube 3, but a uniform glow discharge occurs over almost the entire internal volume of the glass tube 3 between the third electrode and the second electrode.
従つて、このパルス放電時にアークが少なく、
かたよりのない一様なグロー放電を得ることがで
き、パルス放電の際に極端にパワーが低下するこ
ともなく、安定な放電を得ることが可能となる。 Therefore, there is less arcing during this pulse discharge,
It is possible to obtain a uniform glow discharge without any bias, and it is possible to obtain a stable discharge without an extreme drop in power during pulse discharge.
（実施例）
第１図はこの発明にかかる高速軸流ガスレーザ
発振器の断面図であり、一方の端面を全反射鏡
１、他方の端面を半透過鏡２で閉塞した筒状のガ
ラス管３の全反射鏡１寄りの管壁にはガス導入口
４が、半透過鏡２寄りの管壁にはガス排出口５が
それぞれ設けられており、ガラス管３内にCO2、
N2、Heの混合ガスＧを流通させる様になつてい
る。そして、前記ガス導入口４内には第２電極６
が位置されており、この第２電極６はグランド電
位又は低電位に接続されている。一方、ガス導入
口４とガス排出口５の間でガス排出口５寄りのガ
ラス管３の内周壁には第１電極７が位置してお
り、この第１電極７はマイナスの高電圧が印加さ
れている。(Example) FIG. 1 is a cross-sectional view of a high-speed axial flow gas laser oscillator according to the present invention. A gas inlet 4 is provided in the tube wall closer to the total reflection mirror 1, and a gas outlet 5 is provided in the tube wall closer to the semi-transmissive mirror 2 .
A mixed gas G of N 2 and He is made to flow through it. A second electrode 6 is provided in the gas inlet 4.
is located, and this second electrode 6 is connected to ground potential or a low potential. On the other hand, a first electrode 7 is located on the inner peripheral wall of the glass tube 3 near the gas outlet 5 between the gas inlet 4 and the gas outlet 5, and a negative high voltage is applied to the first electrode 7. has been done.
なお、これらの配置は従来の高速軸流タイプの
ガスレーザ発振器と同じである。 Note that these arrangements are the same as those of a conventional high-speed axial flow type gas laser oscillator.
更に、この第１電極７から第２電極６側へ約50
mm離れた位置の外周壁にはこのガラス管３を囲撓
する様に一様な静電容量を持つた円周状の第３電
極８が設けられている。 Furthermore, from this first electrode 7 to the second electrode 6 side, approximately 50
A circumferential third electrode 8 having a uniform capacitance is provided on the outer peripheral wall at a distance of mm so as to surround the glass tube 3.
この第３電極８はこの実施例においてはテフロ
ン被覆した導線を用いており、ガラス管３の外周
壁に２回巻き付けている。そして、この第３電極
８は前記第２電極６と接続されており、この第２
電極６と同じ電位を持つ様にされている。なお、
この第２電極６はガラス管３の外周を一様にとり
まくことができる導電性を有するリング等を用い
ても良い。 In this embodiment, the third electrode 8 is a conductor coated with Teflon, and is wound around the outer circumferential wall of the glass tube 3 twice. This third electrode 8 is connected to the second electrode 6, and this third electrode 8 is connected to the second electrode 6.
It is made to have the same potential as the electrode 6. In addition,
This second electrode 6 may be a conductive ring or the like that can uniformly surround the outer periphery of the glass tube 3.
第３電極８は第２図に示すこの実施例の等価回
路の通り、グランド電位あるいは低電位に接続さ
れ、放電の電位に対し、静電容量を持つており、
コンデンサに相当する働きを行う。従つて、パル
ス発振の際、スイツチ９を高速開閉すると、等価
である為、電流はバラスト抵抗１０、放電インピ
ーダンス１１だけでなく、第３電極８にも流れ、
この第３電極８の静電容量は放電をガラス管内一
ぱいに広げる役目をし、かたよりのない又、アー
クの少ない均一なグロー放電をさせることとな
る。 As shown in the equivalent circuit of this embodiment shown in FIG. 2, the third electrode 8 is connected to the ground potential or a low potential, and has a capacitance with respect to the discharge potential.
It performs a function equivalent to a capacitor. Therefore, when the switch 9 is opened and closed at high speed during pulse oscillation, the current flows not only through the ballast resistor 10 and the discharge impedance 11 but also through the third electrode 8 because it is equivalent.
The capacitance of the third electrode 8 serves to spread the discharge throughout the glass tube, resulting in a uniform glow discharge with no deviation and less arcing.
なお、CW発振の場合はスイツチ９は閉された
ままであり、電流はバラスト抵抗１０、放電イン
ピーダンス１１側のみを流れ、この第３電極８に
は流れない。従つて、このCW発振の際にはこの
第３電極８は何らの悪影響も与えない。 Note that in the case of CW oscillation, the switch 9 remains closed, and the current flows only through the ballast resistor 10 and discharge impedance 11 side, and does not flow through the third electrode 8. Therefore, during this CW oscillation, the third electrode 8 does not have any adverse effect.
［発明の効果］
この発明に係るガスレーザー発振器は上述の通
り、ガラス管の外周壁にパルス放電との間に静電
容量を持たせた第３電極を設けたので、CW発振
に何ら悪影響を与えることなく、パルス放電の際
にはアークの少ないかたよりのない均一で安定な
グロー放電を発生させることができるすぐれた効
果を有する。[Effects of the Invention] As mentioned above, the gas laser oscillator according to the present invention has the third electrode provided on the outer circumferential wall of the glass tube with a capacitance between it and the pulse discharge, so there is no adverse effect on CW oscillation. It has an excellent effect of generating a uniform and stable glow discharge with little arc and no bias during pulse discharge without giving any bias.
第１図はこの発明に係る高速軸流ガスレーザ発
振器の一実施例の断面図、第２図はその等価回路
図である。
１……全反射鏡、２……半透過鏡、３……ガラ
ス管、４……ガス導入口、５……ガス排出口、６
……第２電極、７……第１電極、８……第３電
極、９……スイツチ、１０……バラスト抵抗、１
１……放電インピーダンス、Ｇ……混合ガス。
FIG. 1 is a sectional view of an embodiment of a high-speed axial flow gas laser oscillator according to the present invention, and FIG. 2 is an equivalent circuit diagram thereof. 1... Totally reflecting mirror, 2... Semi-transmitting mirror, 3... Glass tube, 4... Gas inlet, 5... Gas outlet, 6
...Second electrode, 7...First electrode, 8...Third electrode, 9...Switch, 10...Ballast resistance, 1
1...Discharge impedance, G...Mixed gas.
Claims (1)
過鏡２で閉塞した筒状のガラス管３の全反射鏡１
寄りの管壁にガス導入口４、半透過鏡２寄りの管
壁にガス排出口５を設け、前記ガス導入口４内に
グランド電位又は低電位に接続された第２電極６
を、ガス導入口４とガス排出口５の間で、ガス排
出口５寄りの管内周壁にマイナスの高電圧が印加
される第１電極７をそれぞれ位置させ、更に第１
電極７と第２電極６の間に外周壁にガラス管３を
囲撓する様に一様な静電容量を有し、第２電極６
と同じ電位を持つた第３電極を設けたことを特徴
とする高速軸流ガスレーザ発振器。1 Total reflection mirror 1 of a cylindrical glass tube 3 with one end face closed by a total reflection mirror 1 and the other end face closed with a semi-transmission mirror 2
A gas inlet 4 is provided in the tube wall closer to the semi-transparent mirror 2, a gas outlet 5 is provided in the tube wall closer to the semi-transparent mirror 2, and a second electrode 6 is connected to the ground potential or a low potential within the gas inlet 4.
A first electrode 7 to which a negative high voltage is applied to the inner circumferential wall of the tube near the gas outlet 5 is positioned between the gas inlet 4 and the gas outlet 5, and
A uniform capacitance is provided between the electrode 7 and the second electrode 6 so as to surround the glass tube 3 on the outer peripheral wall, and the second electrode 6
A high-speed axial flow gas laser oscillator characterized in that a third electrode having the same potential as that of the third electrode is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2404986A JPS62183581A (en) | 1986-02-07 | 1986-02-07 | High-speed axial-flow gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2404986A JPS62183581A (en) | 1986-02-07 | 1986-02-07 | High-speed axial-flow gas laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62183581A JPS62183581A (en) | 1987-08-11 |
| JPH0347753B2 true JPH0347753B2 (en) | 1991-07-22 |
Family
ID=12127614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2404986A Granted JPS62183581A (en) | 1986-02-07 | 1986-02-07 | High-speed axial-flow gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62183581A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4731421U (en) * | 1971-04-20 | 1972-12-08 | ||
| JPS4827662U (en) * | 1971-08-02 | 1973-04-03 | ||
| JPS5514759B2 (en) * | 1976-04-12 | 1980-04-18 | ||
| JPS6052070A (en) * | 1983-09-01 | 1985-03-23 | Mitsubishi Electric Corp | Coaxial type laser oscillator |
| JPS61112389A (en) * | 1984-11-07 | 1986-05-30 | Nec Corp | High speed axial flow type gas laser device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514759U (en) * | 1978-07-14 | 1980-01-30 |
-
1986
- 1986-02-07 JP JP2404986A patent/JPS62183581A/en active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4731421U (en) * | 1971-04-20 | 1972-12-08 | ||
| JPS4827662U (en) * | 1971-08-02 | 1973-04-03 | ||
| JPS5514759B2 (en) * | 1976-04-12 | 1980-04-18 | ||
| JPS6052070A (en) * | 1983-09-01 | 1985-03-23 | Mitsubishi Electric Corp | Coaxial type laser oscillator |
| JPS61112389A (en) * | 1984-11-07 | 1986-05-30 | Nec Corp | High speed axial flow type gas laser device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62183581A (en) | 1987-08-11 |
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