JPH0239870B2 - - Google Patents
Info
- Publication number
- JPH0239870B2 JPH0239870B2 JP59010950A JP1095084A JPH0239870B2 JP H0239870 B2 JPH0239870 B2 JP H0239870B2 JP 59010950 A JP59010950 A JP 59010950A JP 1095084 A JP1095084 A JP 1095084A JP H0239870 B2 JPH0239870 B2 JP H0239870B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- discharge tube
- electrodes
- tube
- silent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003989 dielectric material Substances 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は軸流型無声放電励起ガスレーザー装
置に関するものであり、良質なレーザー光を出力
することができるようにしたものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an axial flow type silent discharge excited gas laser device, which is capable of outputting high quality laser light.
従来この種の装置として第1図および第2図に
示すものが知られている。図において、符号1は
放電管であり、誘電体により略円筒状に構成さ
れ、該放電管にはレーザー媒質ガス2が適宜の手
段により供給されている。3A,3Bは電極であ
り、これらの電極は上記放電管1の外側に密着す
る如く対向して配設され、かつ該電極間には交流
電源4が接続されている。
2. Description of the Related Art Conventionally, devices of this type are shown in FIGS. 1 and 2. In the figure, reference numeral 1 denotes a discharge tube, which is made of a dielectric material and has a substantially cylindrical shape, and a laser medium gas 2 is supplied to the discharge tube by appropriate means. Reference numerals 3A and 3B are electrodes, and these electrodes are disposed facing each other in close contact with the outside of the discharge tube 1, and an AC power source 4 is connected between the electrodes.
この交流電源4により電極3A,3B間に交流
電圧が印加されると、上記放電管1内に無声放電
5が発生し、該放電管の端部に設けられた全反射
鏡6と部分透過鏡7との間でレーザー発振を生ず
る。該レーザー発振によるレーザー光8は上記部
分透過鏡7側から出力され、レーザー加工等に用
いられる。 When an AC voltage is applied between the electrodes 3A and 3B by this AC power supply 4, a silent discharge 5 is generated within the discharge tube 1, and a total reflection mirror 6 and a partial transmission mirror provided at the end of the discharge tube are 7, laser oscillation is generated. Laser light 8 resulting from the laser oscillation is output from the partially transmitting mirror 7 side and used for laser processing or the like.
ところで、上記した電極3A,3B間の距離
は、その中心部分は長いが端部は短くなり、この
ため上記無声放電5は電極3A,3Bの端部にお
いて強く発生する。図では、無声放電5の強い部
分を濃く書き記してある。 By the way, the distance between the electrodes 3A and 3B is long at the center but short at the ends, and therefore the silent discharge 5 is strongly generated at the ends of the electrodes 3A and 3B. In the figure, the strong parts of the silent discharge 5 are marked darkly.
従来の軸流型無声放電励起ガスレーザー装置は
上記したように構成されているので、無声放電5
が均一にはならず、電極3A,3Bの端部9に電
界が集中して、放電管1を絶縁破壊することがあ
るという欠点があり、またレーザー発振が均一で
ないため、レーザー発振の良質なモードとされる
シングルモードが得にくいという欠点があつた。 Since the conventional axial flow type silent discharge excited gas laser device is configured as described above, the silent discharge 5
is not uniform, and the electric field is concentrated at the ends 9 of the electrodes 3A and 3B, which may cause dielectric breakdown of the discharge tube 1.Also, since the laser oscillation is not uniform, the quality of the laser oscillation cannot be improved. The drawback was that it was difficult to obtain a single mode.
〔発明の概要〕
この発明は上記した従来の欠点を除去するもの
で、誘電体により構成された略円筒状の放電管と
該放電管の内側にレーザー媒質ガスを流す手段
と、該放電管の外側に配設された電極とを備え、
該電極に交流電圧を印加し、該放電管内に無声放
電を発生させることにより上記レーザー媒質ガス
を励起し、レーザー光を発生する軸流型無声放電
励起ガスレーザー装置において、上記誘電体より
なる放電管の厚みが、上記電極の中心部分では薄
く、かつ該中心より遠くなるのに従つて厚くなる
ように該放電管を構成し、この放電管の外側に平
板状の誘電体からなる一対の電極を密着したもの
であり、上記電極に交流電圧を印加することによ
つて得られる放電空間を均一なものとすることが
でき、従つて良質なレーザー光を出力することが
できる軸流型無声放電励起ガスレーザー装置を提
供するものである。[Summary of the Invention] The present invention eliminates the above-mentioned conventional drawbacks, and includes a substantially cylindrical discharge tube made of a dielectric, a means for flowing a laser medium gas inside the discharge tube, and a discharge tube. Equipped with an electrode arranged on the outside,
In an axial silent discharge excited gas laser device that excites the laser medium gas and generates laser light by applying an alternating current voltage to the electrode and generating a silent discharge in the discharge tube, the discharge made of the dielectric material is used. The discharge tube is configured such that the thickness of the tube is thin at the center of the electrode and becomes thicker as the distance from the center increases, and a pair of electrodes made of a flat dielectric material are provided on the outside of the discharge tube. This is an axial flow type silent discharge that can make the discharge space uniform by applying an alternating current voltage to the electrodes, and can therefore output high-quality laser light. The present invention provides an excited gas laser device.
以下、この発明の一実施例を図について説明す
る。第3図は放電管の断面を示すものであり、上
記従来例で説明した第2図に対応するものであ
る。この第3図において、前記の第1図または第
2図と同一符号は同一または相当部分を示すもの
であるが、上記のように誘電体により構成された
略円筒状の放電管1の厚みが、上記電極3A,3
Bの中心部分では薄く、かつ該中心より遠くなる
のに従つて厚くなるように該放電管が構成されて
いる。このように構成された放電管1の部位10
は部位11に比較して、該放電管を構成する誘電
体による静電容量が大きく、このため交流に対す
るインピーダンスが高くなり、この放電管1の電
極3A,3Bに前記交流電源4から交流電圧を印
加すると、上記電極3A,3Bにおける部位10
での放電距離が部位11での放電距離に比較して
長くなり、このため放電電圧が高くなるが、無声
放電5の電流は均一になり、均一な放電空間を得
ることができる。また、電極3A,3Bは平板状
の導電体により形成されており、第3図にみられ
るように放電管1に密着される部分は、第2図の
従来例に示されているような凹状面ではなく、平
面で接続されている。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 3 shows a cross section of the discharge tube, and corresponds to FIG. 2 described in the above conventional example. In FIG. 3, the same reference numerals as in FIG. 1 or 2 indicate the same or corresponding parts, but as mentioned above, the thickness of the approximately cylindrical discharge tube 1 made of dielectric material is , the above electrodes 3A, 3
The discharge tube is constructed so that it is thin at the center of B and becomes thicker as it gets farther from the center. Part 10 of the discharge tube 1 configured in this way
The capacitance due to the dielectric material constituting the discharge tube is larger than that of the portion 11, and therefore the impedance to alternating current is high. When applied, the portion 10 in the electrodes 3A, 3B
Although the discharge distance at the region 11 is longer than the discharge distance at the portion 11, and therefore the discharge voltage becomes higher, the current of the silent discharge 5 becomes uniform, and a uniform discharge space can be obtained. Further, the electrodes 3A and 3B are formed of a flat conductor, and as shown in FIG. 3, the part that is in close contact with the discharge tube 1 has a concave shape as shown in the conventional example of FIG. They are connected by planes, not faces.
上記実施例では、誘電体により構成された略円
筒状の放電管1の厚みが、電極3A,3Bの中心
部分では薄く、かつ該中心より遠くなるのに従つ
て厚くなるように該放電管の形状を構成したが、
第4図に示すように、放電管1に電極3A,3B
の中心部分では薄く、かつ該中心より遠くなるの
に従つて厚くなる形状を有する誘導体12を添設
して実質上放電管1の厚みが、電極3A,3Bの
中心部分では薄く、かつ該中心より遠くなるのに
従つて厚くなるようにしても、同様の効果が得ら
れる。尚、第4図において、第3図と同一符号は
同一または相当部分を示すものである。 In the above embodiment, the thickness of the approximately cylindrical discharge tube 1 made of a dielectric material is thin at the center of the electrodes 3A, 3B, and becomes thicker as the distance from the center increases. Although the shape was constructed,
As shown in FIG. 4, electrodes 3A and 3B are attached to the discharge tube 1.
By attaching a dielectric 12 having a shape that is thin at the center part and thickens as it gets farther from the center, the thickness of the discharge tube 1 is substantially thinner at the center part of the electrodes 3A, 3B, and the thickness becomes thinner at the center part. A similar effect can be obtained by increasing the thickness as the distance increases. In FIG. 4, the same reference numerals as in FIG. 3 indicate the same or corresponding parts.
この発明は上記したように、誘電体により構成
された略円筒状の放電管1と該放電管の内側にレ
ーザー媒質ガス2を流す手段と、該放電管の外側
に配設された一対の平板状の電極3A,3Bとを
備え、該電極に交流電源4からの交流電圧を印加
し、該放電管内に無声放電5を発生させることに
より上記レーザー媒質ガス2を励起し、レーザー
光8を発生する軸流型無声放電励起ガスレーザー
装置において、上記誘電体よりなる放電管1の厚
みが、上記電極3A,3Bの中心部分では薄く、
かつ該中心より遠くなるのに従つて厚くなるよう
に該放電管を構成したので、電極の形成及び組立
が容易になり、さらに放電空間は均一なものとな
り、良質なレーザー光を出力することができる。
As described above, the present invention includes a substantially cylindrical discharge tube 1 made of a dielectric material, a means for flowing a laser medium gas 2 inside the discharge tube, and a pair of flat plates disposed outside the discharge tube. By applying an AC voltage from an AC power supply 4 to the electrodes and generating a silent discharge 5 in the discharge tube, the laser medium gas 2 is excited and a laser beam 8 is generated. In the axial flow type silent discharge excited gas laser device, the thickness of the discharge tube 1 made of the dielectric material is thin at the central portion of the electrodes 3A and 3B,
In addition, since the discharge tube is configured so that it becomes thicker as it gets farther from the center, it is easier to form and assemble the electrodes, and the discharge space becomes uniform, making it possible to output high-quality laser light. can.
第1図は従来の軸流型無声放電励起ガスレーザ
ー装置を示す縦断正面図、第2図は第1図のもの
の拡大縦断側面図、第3図はこの発明の一実施例
を示す軸流型無声放電励起ガスレーザー装置の縦
断側面図、第4図は他の実施例を示す縦断側面図
である。
1:放電管、2:レーザー媒質ガス、3A,3
B:電極、4:交流電源、5:無声放電、8:レ
ーザー光、12:誘電体。なお、同一符号は同一
又は相当部分を示すものとする。
Fig. 1 is a longitudinal sectional front view showing a conventional axial flow type silent discharge excited gas laser device, Fig. 2 is an enlarged longitudinal sectional side view of the one shown in Fig. 1, and Fig. 3 is an axial flow type showing an embodiment of the present invention. FIG. 4 is a longitudinal side view of the silent discharge excited gas laser device, and FIG. 4 is a longitudinal side view showing another embodiment. 1: Discharge tube, 2: Laser medium gas, 3A, 3
B: Electrode, 4: AC power supply, 5: Silent discharge, 8: Laser light, 12: Dielectric material. Note that the same reference numerals indicate the same or equivalent parts.
Claims (1)
と、該放電管の内側にレーザー媒質ガスを流す手
段と、上記放電管の外側に配設された電極とを備
え、該電極に交流電圧を印加し、上記放電管内に
無声放電を発生させることにより上記レーザー媒
質ガスを励起し、レーザー光を発生する軸流型無
声放電励起ガスレーザー装置において、 上記誘電体よりなる放電管の厚みを上記電極の
中心部分では薄く、かつ該中心より遠くなるのに
従つて厚くなるように構成すると共に、上記放電
管の外側に平板状の導電体からなる一対の電極を
密着して取付けたことを特徴とする軸流型無声放
電励起ガスレーザー装置。[Claims] 1. A substantially cylindrical discharge tube made of a dielectric, means for flowing a laser medium gas inside the discharge tube, and an electrode disposed outside the discharge tube, In an axial silent discharge excited gas laser device which excites the laser medium gas and generates laser light by applying an alternating current voltage to the electrode and generating a silent discharge in the discharge tube, the discharge made of the dielectric material The thickness of the tube is thin at the center of the electrode and becomes thicker as the distance from the center increases, and a pair of electrodes made of a flat conductor are closely attached to the outside of the discharge tube. An axial flow type silent discharge excited gas laser device characterized by the following:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1095084A JPS60157277A (en) | 1984-01-26 | 1984-01-26 | Axial-flow type noiseless discharge excitation gas laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1095084A JPS60157277A (en) | 1984-01-26 | 1984-01-26 | Axial-flow type noiseless discharge excitation gas laser device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60157277A JPS60157277A (en) | 1985-08-17 |
JPH0239870B2 true JPH0239870B2 (en) | 1990-09-07 |
Family
ID=11764475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1095084A Granted JPS60157277A (en) | 1984-01-26 | 1984-01-26 | Axial-flow type noiseless discharge excitation gas laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60157277A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2640345B2 (en) * | 1987-06-30 | 1997-08-13 | 株式会社小松製作所 | Gas laser oscillation device |
JPH01258482A (en) * | 1988-04-08 | 1989-10-16 | Fanuc Ltd | Discharge tube for gas laser device |
JPH0274086A (en) * | 1988-09-09 | 1990-03-14 | Fanuc Ltd | Gas laser device discharge tube |
US10593776B2 (en) | 2016-05-05 | 2020-03-17 | Auroma Technologies, Co., Llc. | Dielectric electrode assembly and method of manufacture thereof |
US10333268B2 (en) * | 2016-05-05 | 2019-06-25 | Access Laser | Dielectric electrode assembly and method of manufacture thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4359777A (en) * | 1981-01-22 | 1982-11-16 | The United States Of America As Represented By The Secretary Of The Army | High efficiency transversely excited electrodeless gas lasers |
-
1984
- 1984-01-26 JP JP1095084A patent/JPS60157277A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4359777A (en) * | 1981-01-22 | 1982-11-16 | The United States Of America As Represented By The Secretary Of The Army | High efficiency transversely excited electrodeless gas lasers |
Also Published As
Publication number | Publication date |
---|---|
JPS60157277A (en) | 1985-08-17 |
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