JPH0240978A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPH0240978A JPH0240978A JP19173688A JP19173688A JPH0240978A JP H0240978 A JPH0240978 A JP H0240978A JP 19173688 A JP19173688 A JP 19173688A JP 19173688 A JP19173688 A JP 19173688A JP H0240978 A JPH0240978 A JP H0240978A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- laser
- electrodes
- gas
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims description 13
- 230000010355 oscillation Effects 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 3
- 238000004891 communication Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、放電管の軸方向と光軸方向が一致したガスレ
ーザ発振装置に係り、特に、放電空間における放電状態
の安定化対策を講じたガスレーザ発振装置に関するもの
である。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction coincide with each other, and in particular, a gas laser oscillation device that takes measures to stabilize the discharge state in the discharge space. This invention relates to a gas laser oscillation device.
従来、この種のガスレーザ発振装置としては例えば第３
図および第４図に示すように、ガラス等の誘電体よりな
る円筒状の放電管（１）の外周面管軸方向の両側２箇所
に所定間隔を設けて一対の金属電極（２）（３）を互い
に対向状に密着して配設すると共に、これら一対の金属
電極（２）（３）を高周波交流電源（４）に接続して、
両電極（２）（３）に例えば１３．５６ＭＨｚ、 ２ｋ
Ｖの高周波高電圧を印加する一方、両電極（２）（３）
間に挟まれた放電管（１）内の放電空間（５）の両端に
全反射鏡（６）と部分反射鏡（７）とを固定位置に配設
して、これら全反射鏡（６）および部分反射鏡（７）に
より光共振器を構成してあり、また前記放電管（１）の
両電極（２）（３）間の中央から送気管（８）を連通状
態で設けると共に、放電管（１）の両端側と送気管（８
）の他端間に一対の分岐管（９）Ｏｎ）を両管（１）（
８）と連通状態で配設して、放電管（１）の中央から２
方向に分岐する一対の循環通路を構成し、更に、前記送
気管（８）の途中部に送風機（１１）を設けて、この送
風機（１０の両側方となる送気管（８）中に、放電空間
（５）中での放電および送風機（１１）の駆動により昇
温したレーザガスを冷却する熱交換機０２）（１３）を
配設してなる、いわゆる軸流型ガスレーザ発振装置が知
られている。Conventionally, as this type of gas laser oscillation device, for example, the third
As shown in FIG. 4 and FIG. 4, a pair of metal electrodes (2) (3 ) are arranged in close contact with each other in a state facing each other, and the pair of metal electrodes (2) and (3) are connected to a high frequency AC power source (4),
For example, 13.56MHz, 2k for both electrodes (2) and (3).
While applying a high frequency high voltage of V, both electrodes (2) (3)
A total reflection mirror (6) and a partial reflection mirror (7) are arranged at fixed positions at both ends of the discharge space (5) in the discharge tube (1) sandwiched between them, and these total reflection mirrors (6) and a partially reflecting mirror (7) constitute an optical resonator, and an air pipe (8) is provided in communication with the center between the electrodes (2) and (3) of the discharge tube (1), and Both ends of the pipe (1) and the air pipe (8
) A pair of branch pipes (9) On) are connected between the other ends of both pipes (1) (
8) in communication with the discharge tube 2 from the center of the discharge tube (1).
A pair of circulation passages branching in the direction are formed, and furthermore, a blower (11) is provided in the middle of the air pipe (8), and a discharge is generated in the air pipe (8) on both sides of the blower (10). A so-called axial flow type gas laser oscillation device is known, which is provided with heat exchangers 02 and 13 for cooling laser gas heated by discharge in a space (5) and driving of a blower (11).
なお、前記送風機（１１）としては、放電空間（５）に
おいて流速が約１００ｍ／ｓｅｃ程度のガス流を得るこ
とができる程度の送風能力を備えたものを使用する必要
がある。Note that the blower (11) needs to have a blowing capacity capable of producing a gas flow at a flow rate of about 100 m/sec in the discharge space (5).
上記構成の従来装置では、まず、一対の金属電極（２）
（３）に高周波電源（４）から高周波高電圧を印加して
放電空間（５）にグロー状の放電を発生させると、この
放電空間（５）を通過するレーザガスは前記放電エネル
ギーを得て励起されると共に、全反射鏡（６）および部
分反射鏡（７）により形成された光共振器の作用により
共振状態となり、これによって部分反射鏡（７）からレ
ーザビーム（Ｂ）が出力され、このレーザビーム（Ｂ）
をレーザ加工等の用途に供することになる。In the conventional device with the above configuration, first, a pair of metal electrodes (2)
When a high-frequency high voltage is applied to (3) from the high-frequency power source (4) to generate a glow-like discharge in the discharge space (5), the laser gas passing through the discharge space (5) obtains the discharge energy and is excited. At the same time, the optical resonator formed by the total reflection mirror (6) and the partial reflection mirror (7) enters a resonant state, and the partial reflection mirror (7) outputs a laser beam (B). Laser beam (B)
will be used for purposes such as laser processing.
上記のように、金属電極（２）（３）間に高周波高電圧
を印加してレーザビーム（Ｂ）を発生させるときは、前
記金属電極（２）（３）間のインピーダンスによって放
電状態が支配されるものであるが、特に、放電空間（５
）内はレーザガスが高速で流れているため、インピーダ
ンスの時間的な変動が激しい。したがって、放電空間（
５）内の放電の安定化対策を特に講じていない従来装置
の場合、同放電空間（５）内における放電状態が不安定
で、出力が安定したレーザビーム（Ｂ）を得ることがで
きないという問題点があった。As mentioned above, when applying a high frequency high voltage between metal electrodes (2) and (3) to generate a laser beam (B), the discharge state is controlled by the impedance between the metal electrodes (2) and (3). However, in particular, the discharge space (5
), the laser gas flows at high speed, so the impedance fluctuates rapidly over time. Therefore, the discharge space (
5) In the case of conventional devices that do not take particular measures to stabilize the discharge within the discharge space (5), the discharge state within the discharge space (5) is unstable, making it impossible to obtain a laser beam (B) with a stable output. There was a point.
本発明は、上記のような従来の問題点を解決するために
なされたもので、放電空間における放電状態を安定化す
ることで出力変動を抑制して、出力の安定したレーザビ
ームが得られるガスレーザ発振装置の提供を目的とする
ものである。The present invention has been made in order to solve the above-mentioned conventional problems, and provides a gas laser that can suppress output fluctuations and obtain a laser beam with stable output by stabilizing the discharge state in the discharge space. The purpose is to provide an oscillation device.
上記目的を達成するために本発明は、誘電体よりなる放
電管内を光軸方向にレーザガスを流し、前記放電管の外
周面に管径方向で互いに対向して設けられた金属電極間
に高周波電圧を印加してこの放電管内に放電を発生させ
、この放電をレーザ励起源として前記放電管の管軸方向
にレーザビームを発生するガスレーザ発振装置において
、前記放電管の前記金属電極配設部位よりもレーザガス
上流側となる外周面部分に予備放電電極を対向して設け
たことを特徴とするものであるガスレーザ発振装置。In order to achieve the above object, the present invention causes a laser gas to flow in the optical axis direction inside a discharge tube made of a dielectric material, and generates a high-frequency voltage between metal electrodes provided on the outer peripheral surface of the discharge tube so as to face each other in the tube diameter direction. In a gas laser oscillation device that generates a discharge in the discharge tube by applying A gas laser oscillation device characterized in that preliminary discharge electrodes are provided facing each other on the outer circumferential surface portion on the upstream side of the laser gas.
本発明は上記構成により、放電管内のレーザガス上流側
部分に設けた予備放電電極管に所定の高周波電圧を印加
して、その電界中を流れるレーザガスを予備電離した上
で、プラズマ化したレーザガスを放電管内の下流側に送
り込み、金属電極間で本放電することにより、レーザビ
ームの出力を安定化することができるものである。With the above configuration, the present invention applies a predetermined high-frequency voltage to the pre-discharge electrode tube provided in the upstream portion of the laser gas in the discharge tube, pre-ionizes the laser gas flowing in the electric field, and then discharges the laser gas turned into plasma. The output of the laser beam can be stabilized by feeding it into the downstream side of the tube and causing a main discharge between the metal electrodes.
以下、本発明の実施例を図面に基づき詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail based on the drawings.
なお、この実施例装置は、前述した従来例と基本構成が
共通しているので、構成並びに作用が共通する部分は共
通の符号を付すこととし、重複を避けるためにその説明
を省略するものとする。This embodiment device has the same basic configuration as the conventional example described above, so parts with the same configuration and function will be given the same reference numerals, and their explanation will be omitted to avoid duplication. do.
第１図において、この実施例に係るガスレーザ発振装置
においては、放電管（１）の金属電極（２）（３）配設
部位よりもレーザガス上流側となる外周面部分に一対の
予備放電電極０４を対向して配設してあり、両予備放電
電極０４）間に所定の高周波電圧を印加して、その電界
中を流れるレーザガスを予備電離した上で、プラズマ化
したレーザガスを放電管内の下流側に送り込み、前記予
備放電電極側から所定間隔を置いて形成された金属電極
（２）（３）間で本放電を行うものである。In FIG. 1, in the gas laser oscillator according to this embodiment, a pair of preliminary discharge electrodes 04 are provided on the outer circumferential surface portion of the discharge tube (1), which is located upstream of the laser gas from the metal electrodes (2) and (3). A predetermined high-frequency voltage is applied between both pre-discharge electrodes 04) to pre-ionize the laser gas flowing in the electric field, and then the plasma-formed laser gas is transferred to the downstream side of the discharge tube. The main discharge is carried out between the metal electrodes (2) and (3) formed at a predetermined interval from the preliminary discharge electrode side.
第２図は予備放電電極０４）を設けた本発明装置と、同
予備放電電極を備えていない従来装置におけるレーザ出
力の安定度を測定した結果を示しており、この結果から
明らかなように、予備放電電極側によるレーザガスの予
備電離を行うことで、レーザビーム出力が著しく安定す
るものである。FIG. 2 shows the results of measuring the stability of laser output in the device of the present invention equipped with a preliminary discharge electrode 04) and the conventional device without the same preliminary discharge electrode. As is clear from the results, By performing preliminary ionization of the laser gas on the preliminary discharge electrode side, the laser beam output is significantly stabilized.
以上説明したように本発明によれば、放電管の金属電極
配設部位よりもレーザガス上流側となる外周面部分に予
備放電電極を対向して設けたものとしたので、放電空間
内における放電状態の安定化を図ることができ、これに
よって出力変動が抑制された安定なレーザビームを取出
すことができ、高品質のレーザ加工を実現できるものと
なった。As explained above, according to the present invention, since the preliminary discharge electrode is provided facing the outer peripheral surface portion of the discharge tube which is upstream of the laser gas than the metal electrode disposed portion, the discharge condition in the discharge space is As a result, a stable laser beam with suppressed output fluctuations can be extracted, making it possible to achieve high-quality laser processing.
第１図は本発明の一実施例を示す放電管の縦断面図、第
２図は予備放電電極の有無によるレーザ出力の安定性を
経時的に示す線図、第３図は従来例の縦断正面図、第４
図は従来例の放電管の縦断側面図である。
（１）・・・放電管、（２）（３）・・・金属電極。０
４）・・・予備放電電極。
第１
第２Fig. 1 is a longitudinal cross-sectional view of a discharge tube showing an embodiment of the present invention, Fig. 2 is a graph showing the stability of laser output over time depending on the presence or absence of a preliminary discharge electrode, and Fig. 3 is a longitudinal cross-sectional view of a conventional example. Front view, 4th
The figure is a longitudinal sectional side view of a conventional discharge tube. (1)...discharge tube, (2)(3)...metal electrode. 0
4)...Preliminary discharge electrode. 1st 2nd
Claims (1)
し、前記放電管の外周面に管径方向で互いに対向して設
けられた金属電極間に高周波電圧を印加してこの放電管
内に放電を発生させ、この放電をレーザ励起源として前
記放電管の管軸方向にレーザビームを発生するガスレー
ザ発振装置において、前記放電管の前記金属電極配設部
位よりもレーザガス上流側となる外周面部分に予備放電
電極を対向して設けたことを特徴とするガスレーザ発振
装置。A laser gas is caused to flow in the optical axis direction within a discharge tube made of a dielectric material, and a high-frequency voltage is applied between metal electrodes provided on the outer peripheral surface of the discharge tube facing each other in the tube diameter direction to generate a discharge within the discharge tube. In a gas laser oscillation device that uses this discharge as a laser excitation source to generate a laser beam in the tube axis direction of the discharge tube, a preliminary discharge is applied to a portion of the outer circumferential surface of the discharge tube that is upstream of the laser gas from the metal electrode disposed portion. A gas laser oscillation device characterized by having electrodes facing each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19173688A JPH0240978A (en) | 1988-07-30 | 1988-07-30 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19173688A JPH0240978A (en) | 1988-07-30 | 1988-07-30 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240978A true JPH0240978A (en) | 1990-02-09 |
Family
ID=16279643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19173688A Pending JPH0240978A (en) | 1988-07-30 | 1988-07-30 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240978A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992019028A1 (en) * | 1991-04-20 | 1992-10-29 | Deutsche Forschungsanstalt für Luft- und Raumfahrt e.V. | Pulsed gas discharge laser system |
-
1988
- 1988-07-30 JP JP19173688A patent/JPH0240978A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992019028A1 (en) * | 1991-04-20 | 1992-10-29 | Deutsche Forschungsanstalt für Luft- und Raumfahrt e.V. | Pulsed gas discharge laser system |
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