JPS61269387A - Electrode structure for laser oscillator - Google Patents
Electrode structure for laser oscillatorInfo
- Publication number
- JPS61269387A JPS61269387A JP11025385A JP11025385A JPS61269387A JP S61269387 A JPS61269387 A JP S61269387A JP 11025385 A JP11025385 A JP 11025385A JP 11025385 A JP11025385 A JP 11025385A JP S61269387 A JPS61269387 A JP S61269387A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- dielectric tube
- laser
- gas
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0385—Shape
- H01S3/0387—Helical shape
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はレーザ発振器の電極構造の改良に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in the electrode structure of a laser oscillator.
一般にレーザ加工に供されるレーザ光線の発振器として
はＣＯ，ガスレーザ発振器が主流であ多、ＣＯ！ガスの
励起は直流放電−より行なわれている。すなわち円筒形
ガス管の両端に陰極と陽極とを設け、この間に高電圧直
流電源によりブロー放電を形危し、ガラス管内を流通す
るＣＯ３含有ガスのＣＯを分子を放電励起しレーザ発振
動作をさせるのである。In general, CO and gas laser oscillators are the mainstream as laser beam oscillators used for laser processing, and CO! Excitation of the gas is performed by direct current discharge. In other words, a cathode and an anode are provided at both ends of a cylindrical gas tube, and a blow discharge is generated between them using a high-voltage DC power source, and the molecules of CO in the CO3-containing gas flowing inside the glass tube are excited by discharge to produce a laser oscillation operation. It is.
上記のような従来の００１発振器は、該ＣＯ２発振器が
１９６０年代に発明されて以来種々改良がされてきたが
、電極に金属を使用し、かつ電極はレーザガス中に露出
しているため、放電がアーク放電に移行しやすく放電に
安定性を欠いていることや、金属が放電によりレーザガ
スと反応し、ガスを汚染するなどの欠点があシ、このた
め単位放電長当シのレーザ出力は５００ Ｗ／ｍ程度が
現在技術の限界である。The conventional 001 oscillator described above has undergone various improvements since the CO2 oscillator was invented in the 1960s, but because it uses metal for the electrodes and is exposed in the laser gas, the discharge does not occur. There are disadvantages such as easy transition to arc discharge, lack of stability in discharge, and metal reacting with laser gas due to discharge, contaminating the gas.As a result, the laser output per unit discharge length is 500 W. /m is the limit of current technology.
上記従来装置の欠点を除去し、かつ単位電極長ａｂの放
電入力（レーザ出力）を飛躍的に増大しうる放電型式と
して、金属間に誘電体を介在せしめた交流放電、すなわ
ちオゾン発生装置などでょ〈知られる無声放電をレーザ
励起に適用する方法が開発されている。この方法によれ
は電極はセラミックス等の誘電体で構成できるので、ガ
ス汚染がなく、又周知の誘電体におけるＣＡＰＡＣＩＴ
Ｉ■ＢＡＬＬＡＳＴ ＥＦＦＥＣＴ （静電容量パラ
スト効果）Ｖｃより放電は集中することなく極めて安定
でその結果単位長さ当りの電力投入量を増大させること
ができるので、レーザ出力は’Ｉ−０００Ｗ／ｒｎ 以
上忙高めることが可能となる。As a discharge type that eliminates the drawbacks of the above conventional devices and can dramatically increase the discharge input (laser output) of a unit electrode length ab, an alternating current discharge with a dielectric interposed between metals, that is, an ozone generator, etc. is used. A method has been developed to apply the known silent discharge to laser excitation. According to this method, since the electrode can be constructed of a dielectric material such as ceramics, there is no gas contamination, and the CAPACIT
I■BALLAST EFFECT (Capacitance Palast Effect) The discharge is extremely stable without concentration due to Vc, and as a result, the amount of power input per unit length can be increased, so the laser output is over 'I-000W/rn. It is possible to become more busy.
ところで、上記改良されたレーザ発振器においては、誘
電体管の外側に金属の電極を設ける構成となっている。By the way, in the above-mentioned improved laser oscillator, a metal electrode is provided on the outside of the dielectric tube.
しかし電気的特性を損なうことなく、誘電体管外側に金
属電極を固着させることは、技術的にかなシ困難で、絶
縁物を介して固定し九シ、溶射や電鋳等の被覆する方法
で金属電極を形成したフする幾つかの方法が試みられて
いるが、いずれも構造が複雑になったシ、製作費が嵩む
などの問題点を擁している。However, it is technically difficult to fix metal electrodes to the outside of the dielectric tube without damaging the electrical characteristics, so it is difficult to fix them through an insulator or coat them using thermal spraying or electroforming. Several methods have been attempted for forming metal electrodes, but all of them have problems such as complicated structures and increased production costs.
本発明は上記問題点を解消した、構造が簡単で安価に製
造しうる電極構造を提供しようとするものである。The present invention aims to provide an electrode structure that solves the above problems, has a simple structure, and can be manufactured at low cost.
本発明はレーザ発振器の電極構造を、円筒形状の誘電体
の外側にはね性を有する金属材料によ多形成された少な
くとも１対の金Ｎ［極を互いに等間隔にスパイラル状に
設けることにより構成した。The present invention provides an electrode structure for a laser oscillator by providing at least one pair of gold electrodes formed of a resilient metal material on the outside of a cylindrical dielectric body, with poles spaced equally apart from each other in a spiral shape. Configured.
金属電極ははね性を有する材料により構成されているの
で、円筒形状誘電体の外側に強固に固着される。上記電
極間に高周波交流電圧を印加すれば、円筒状島電体の内
側のレーザガスが励起し、レーザ発振を起すのである。Since the metal electrode is made of a resilient material, it is firmly fixed to the outside of the cylindrical dielectric. When a high-frequency AC voltage is applied between the electrodes, the laser gas inside the cylindrical island electric body is excited, causing laser oscillation.
第１図は本発明の一実楕例を示す正面図、第２図はその
Ａ−Ａ断面図である。FIG. 1 is a front view showing an elliptical example of the present invention, and FIG. 2 is a sectional view taken along line A-A.
図中（１１はセラミック等で形成された誘電体管、（２
ａ）、（２ｂ）は誘電体管（１）の外側に巻かれた１対
の金属電極、（３）は電極（２ａ）、 （２ｂ）に電力
を供給する高電圧高周波電源、（４）は誘電体管（１）
内のレーザ媒質ガスを循環させるためのガス循環装置、
（５）は電極（２ａ）、 （２ｂ）間の無声放電、（６
）は全反射鏡、（７）は部分反射鏡、（８）はレーザ光
である。In the figure (11 is a dielectric tube made of ceramic etc.), (2
a) and (2b) are a pair of metal electrodes wound around the outside of the dielectric tube (1), (3) is a high-voltage, high-frequency power source that supplies power to the electrodes (2a) and (2b), and (4) is dielectric tube (1)
a gas circulation device for circulating the laser medium gas in the
(5) is a silent discharge between electrodes (2a) and (2b), (6
) is a total reflection mirror, (7) is a partial reflection mirror, and (8) is a laser beam.
図において誘電体管（１１の外側に捲かれた金属電極（
２ａ）、 （２ｂ）ははね性を有するステンレス鋼等で
形成され、自白状態ではその内径は誘電体管（１）の外
径より僅かに小さく成形されているため、誘電体管（１
）Ｋ装着する七七のはね力によｐ強固忙固着される。In the figure, the metal electrode (11) wrapped around the outside of the dielectric tube (11)
2a) and (2b) are made of resilient stainless steel or the like, and in their state their inner diameters are slightly smaller than the outer diameter of the dielectric tube (1).
) P is firmly fixed by the spring force of 77 when K is attached.
この１対の電極（２ａ）と（２ｂ）間に高電圧高周波電
源（３）により入力すると、上記電極（２ａ ）、 （
２ｂ）間に無声放電（５）を発生し、誘電体管（１）内
のＣＯ。When a high voltage, high frequency power source (3) is input between this pair of electrodes (2a) and (2b), the electrodes (2a), (
2b) A silent discharge (5) occurs between the CO in the dielectric tube (1).
ガスが励起され、円筒軸上に配設された全反射鏡（６）
と部分反射鏡（７）により共振増幅され波長１０．６μ
農のＣＯ，ガスレーザ光（８）を出射する。The gas is excited and the total reflection mirror (6) is placed on the cylindrical axis.
The resonance is amplified by the partial reflecting mirror (7) and the wavelength is 10.6μ.
Emit agricultural CO, gas laser light (8).
なお上記実施例ではＣｏｔガスレーザの場合を示したが
、他のガスレーザの場合でも同様である。In the above embodiment, the case of a Cot gas laser is shown, but the same applies to the case of other gas lasers.
本発Ｆ！Ａけレーザ発振器の電極を、円筒形状の誘電体
の外側に、ばね性を有する金属材料によりその内径を上
記誘電体管の外径より僅かに小さく形成した少なくとも
１対の金属電極を、互いに等間隔にスパイラル状に捲き
つけて構成したので、金属電極は誘電体管に強固に固着
されるだけでなく、電極の構造が簡単となシ、その製作
費も安価ですむという優れた効果を上げることができた
。Original F! For the electrodes of the A-sized laser oscillator, at least one pair of metal electrodes made of a metal material with spring properties and whose inner diameter is slightly smaller than the outer diameter of the dielectric tube are placed on the outside of a cylindrical dielectric body, and are made of a metal material having spring properties. Since the metal electrode is wound spirally at intervals, it is not only firmly fixed to the dielectric tube, but also has the excellent effect of simplifying the structure of the electrode and reducing its manufacturing cost. I was able to do that.
第１図は本発明の一実施例を示すＣＯ，ガスレーザ発振
器の構成図、第２図はそのＡ−Ａ断面図である。
図中（１）は誘電体管、（２ａ）、 （２ｂ）は金属電
極、（３）は高圧高周波電源、（４）はガス循環装置、
（５）は無声放電、（６）は全反射鏡、（力は部分反射
鏡、（８）はＣＯ，ガスレーザ光である。
なお図中同一符号は同−又は相当部品を示すものである
。FIG. 1 is a block diagram of a CO, gas laser oscillator showing one embodiment of the present invention, and FIG. 2 is a sectional view taken along line A-A. In the figure, (1) is a dielectric tube, (2a) and (2b) are metal electrodes, (3) is a high-voltage high-frequency power source, (4) is a gas circulation device,
(5) is a silent discharge, (6) is a total reflection mirror, (force is a partial reflection mirror, and (8) is CO and gas laser light. In the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
流通し、上記誘電体外側に設けた金属電極に高周波電圧
を印加して電極間に無声放電を発生し、該放電により上
記レーザガスを励起し、レーザ発振を動作せしめるレー
ザ発振器において、その電極をばね性を有する金属素材
より、その内径を前記誘電体管の外径より僅かに小さく
形成した少なくとも１対の金属電極を、上記誘電体管の
外側にスパイラル状に設けて構成したことを特徴とする
レーザ発振器の電極構造。A laser gas is passed inside a cylindrical dielectric in the direction of the cylinder axis, and a high frequency voltage is applied to a metal electrode provided outside the dielectric to generate a silent discharge between the electrodes, which excites the laser gas. In a laser oscillator that operates a laser oscillation, at least one pair of metal electrodes, each of which is made of a metal material having spring properties and whose inner diameter is slightly smaller than the outer diameter of the dielectric tube, is attached to the dielectric tube. An electrode structure for a laser oscillator, characterized in that it is arranged in a spiral shape on the outside of the oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11025385A JPS61269387A (en) | 1985-05-24 | 1985-05-24 | Electrode structure for laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11025385A JPS61269387A (en) | 1985-05-24 | 1985-05-24 | Electrode structure for laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61269387A true JPS61269387A (en) | 1986-11-28 |
Family
ID=14530996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11025385A Pending JPS61269387A (en) | 1985-05-24 | 1985-05-24 | Electrode structure for laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61269387A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988009577A1 (en) * | 1987-05-28 | 1988-12-01 | Fanuc Ltd | Laser oscillator |
| JPS6466983A (en) * | 1987-09-07 | 1989-03-13 | Komatsu Mfg Co Ltd | Gas laser device |
-
1985
- 1985-05-24 JP JP11025385A patent/JPS61269387A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988009577A1 (en) * | 1987-05-28 | 1988-12-01 | Fanuc Ltd | Laser oscillator |
| JPS6466983A (en) * | 1987-09-07 | 1989-03-13 | Komatsu Mfg Co Ltd | Gas laser device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4677637A (en) | TE laser amplifier | |
| US4597086A (en) | Coaxial type laser oscillator for excitation by silent discharge | |
| JPS61269387A (en) | Electrode structure for laser oscillator | |
| US3396301A (en) | Gas laser tube having a hollow elongated cathode electrode | |
| JPS61280689A (en) | Gas laser apparatus | |
| JPS639393B2 (en) | ||
| JP2001177173A (en) | Gas laser oscillator | |
| JPS61142783A (en) | Electrode tube for laser oscillator | |
| JP2640345B2 (en) | Gas laser oscillation device | |
| JPS60178681A (en) | Gas laser device | |
| JPH02281671A (en) | Gas laser oscillation device | |
| JPS6052070A (en) | Coaxial type laser oscillator | |
| JPH047110B2 (en) | ||
| JPH02281670A (en) | High frequency excitation gas laser oscillation device | |
| JP4312395B2 (en) | Axial pumped gas laser device and injection-locked gas laser device | |
| JP3159528B2 (en) | Discharge pumped excimer laser device | |
| JP2633604B2 (en) | Metal vapor laser device | |
| JPS62183580A (en) | Silent discharge gas laser device | |
| JP2004186310A (en) | Corona preionization method and device for gas laser | |
| JPS63227074A (en) | Gas laser device | |
| JPS63274191A (en) | Flash lamp excited laser device | |
| JPH02281675A (en) | Gas laser oscillation device | |
| JPS6197983A (en) | Gas laser oscillator | |
| JPS61159780A (en) | Silent discharge type gas laser device | |
| JPS63228776A (en) | Gas laser device |