JPH0240973A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPH0240973A JPH0240973A JP19173188A JP19173188A JPH0240973A JP H0240973 A JPH0240973 A JP H0240973A JP 19173188 A JP19173188 A JP 19173188A JP 19173188 A JP19173188 A JP 19173188A JP H0240973 A JPH0240973 A JP H0240973A
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- discharge
- gas laser
- tube
- inner diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000003989 dielectric material Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、放電管の軸方向と光軸方向が一致したガスレ
ーザ発振装置に係り、特に、レーザ発振の高効率化を図
ったガスレーザ発振装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction coincide, and in particular, to a gas laser oscillation device that achieves high laser oscillation efficiency. It is related to.
従来、この種のガスレーザ発振装置としては例えば第３
図および第４図に示すように、ガラス等の誘電体よりな
る円筒状の放電管（１）の外周面に管軸方向の両側２箇
所に所定間隔を設けて一対の金属電極（２）（３）を互
いに対向状に密着して配設すると共に、これら一対の金
属電極（２）（３）を高周波交流電源（４）に接続して
、両電極（２）（３）に例えば１３．５６ＭＨｚ、２ｋ
Ｖの高周波高電圧を印加する一方、両金属電極（２）（
３）間に挟まれた放電管（１）内の放電空間（５）の両
端に全反射鏡（６）と部分反射鏡（７）とを固定位置に
配設して、これら全反射鏡（６）および部分反射鏡（７
）により光共振器を構成してあり、また、前記放電管（
１）の両電極（２）（３）間の中央から送気管（８）を
連通状態で設けると共に、放電管（１）の両端側と送気
管（８）の他端間に一対の分岐管（９）０１を両管（１
）（８）と連通状態で配設して、放電管（すの中央から
２方向に分岐する一対の循環通路を構成し、更に、前記
送気管（８）の途中部に送風機（１１）を設けて、この
送風機（１１）の両側方となる送気管（８）中に、放電
空間（５）中での放電および送風機θ１）の駆動により
昇温したレーザガスを冷却する熱交換器０２）側を配設
してなる、いわゆる軸流型のガスレーザ発振装置が知ら
れている。Conventionally, as this type of gas laser oscillation device, for example, the third
As shown in Figures 1 and 4, a pair of metal electrodes (2) ( 3) are arranged in close contact with each other in a manner opposite to each other, and the pair of metal electrodes (2) and (3) are connected to a high frequency AC power source (4), and both electrodes (2) and (3) are connected to, for example, 13. 56MHz, 2k
While applying a high frequency high voltage of V, both metal electrodes (2) (
3) A total reflection mirror (6) and a partial reflection mirror (7) are arranged at fixed positions at both ends of the discharge space (5) in the discharge tube (1) sandwiched between them, and these total reflection mirrors ( 6) and partially reflective mirror (7
) constitutes an optical resonator, and the discharge tube (
An air pipe (8) is provided in communication from the center between both electrodes (2) and (3) of 1), and a pair of branch pipes are provided between both ends of the discharge tube (1) and the other end of the air pipe (8). (9) 01 for both tubes (1
) (8) to form a pair of circulation passages branching in two directions from the center of the discharge tube (8), and furthermore, a blower (11) is installed in the middle of the air pipe (8). A heat exchanger 02) side is provided in the air pipe (8) on both sides of the blower (11) to cool the laser gas heated by discharge in the discharge space (5) and driving of the blower θ1). A so-called axial flow type gas laser oscillation device is known.
なお、前記送風機（１１）としては、放電空間（５）に
おいて流速が約１００ｍ／ｓｅｃ程度のガス流を得るこ
とができる程度の送風能力を備えたものを使用する必要
がある。Note that the blower (11) needs to have a blowing capacity capable of producing a gas flow at a flow rate of about 100 m/sec in the discharge space (5).
上記構成の従来装置では、まず、高周波電源（４）から
一対の金属電極（２）（３）に高周波高電圧を印加する
と、放電空間（５）を通過するレーザガスはこの放電エ
ネルギーを得て励起されると共に全反射鏡（６）および
部分反射鏡（７）により形成された光共振器の作用によ
りで共振状態となり、これによって部分反射鏡（７）か
らレーザビーム（Ｂ）が出力され、このレーザビーム（
Ｂ）をレーザ加工等の用途に供することになる。In the conventional device with the above configuration, first, when a high frequency high voltage is applied from the high frequency power source (4) to the pair of metal electrodes (2) and (3), the laser gas passing through the discharge space (5) obtains this discharge energy and is excited. At the same time, due to the action of the optical resonator formed by the total reflection mirror (6) and the partial reflection mirror (7), the laser beam (B) is outputted from the partial reflection mirror (7). Laser beam (
B) will be used for purposes such as laser processing.
ところで、上記のように金属電極（２）（３）間に高周
波高電圧を印加してレーザビーム（Ｂ）を得る場合、画
電極（２） （３１間のインピーダンスによって放電状
態が支配されるため、特に、誘電体である放電管（１）
の誘電体損失の変化によって放電空間（５）内に注入可
能な電力が決定されることになる。このため、放電管（
１）の肉厚が薄いと放電空間（５）の電界分布に不均一
が生じて放電集中が起こることになり、これを防止する
ために、従来では放電管（１）の肉厚を厚くするように
していた。By the way, when obtaining the laser beam (B) by applying a high frequency high voltage between the metal electrodes (2) and (3) as described above, the discharge state is controlled by the impedance between the picture electrodes (2) and (31). , especially a dielectric discharge tube (1)
The power that can be injected into the discharge space (5) is determined by the change in dielectric loss. For this reason, the discharge tube (
If the wall thickness of the discharge tube (1) is thin, the electric field distribution in the discharge space (5) becomes uneven and discharge concentration occurs.To prevent this, conventionally, the wall thickness of the discharge tube (1) is made thick. That's what I was doing.
しかしながら、放電管（１）の肉厚を厚くした従来のガ
スレーザ発振装置の場合、放電管（１）の誘電体損失に
より、放電空間（５）内に注入できる電力も損失減少す
るため、レーザビームを効率よく取り出すことができな
いという問題点があった。However, in the case of a conventional gas laser oscillation device in which the wall thickness of the discharge tube (1) is thick, the power that can be injected into the discharge space (5) also decreases due to the dielectric loss of the discharge tube (1). There was a problem in that it was not possible to take out the material efficiently.
本発明は、かかる従来の問題点を解決するためになされ
たもので、放電管内の放電空間における放電集中が起こ
らず、しかも放電管での注入電力の損失を最少限に抑制
し得るガスレーザ発振装置を提供することを目的とする
ものである。The present invention has been made in order to solve these conventional problems, and is a gas laser oscillation device that does not cause discharge concentration in the discharge space within the discharge tube and can minimize the loss of power injected into the discharge tube. The purpose is to provide the following.
上記目的を達成するために本発明は、誘電体よりなる放
電管内を光軸方向にレーザガスを流し、前記放電管の外
周面に管径方向で互いに対向して設けられた金属電極間
に高周波電圧を印加してこの放電管内に放電を発生させ
、この放電をレーザ励起源として前記放電管の管軸方向
にレーザビームを発生するガスレーザ発振装置において
、前記放電管の内径と肉厚の比を９：１から９：２の範
囲としたことを特徴とするものである。In order to achieve the above object, the present invention causes a laser gas to flow in the optical axis direction inside a discharge tube made of a dielectric material, and generates a high-frequency voltage between metal electrodes provided on the outer peripheral surface of the discharge tube so as to face each other in the tube diameter direction. In a gas laser oscillator device that generates a discharge in the discharge tube by applying a voltage of :1 to 9:2.
本発明は上記構成により、実施例を示す図面中、第２図
に示すように、内径／肉厚比を９７１〜９／２に設定し
た放電管を用いることでレーザ出力効率がほぼ最大とな
って、レーザビームを最も効率良く取り出すことができ
るものであり、しかも、前記放電管の肉厚が極端に薄い
ものではないので、放電集中の発生を確実に抑止できる
ものである。With the above configuration, as shown in FIG. 2 in the drawings showing the embodiment, the present invention uses a discharge tube with an inner diameter/wall thickness ratio of 971 to 9/2, so that the laser output efficiency is almost maximized. Therefore, the laser beam can be extracted most efficiently, and since the thickness of the discharge tube is not extremely thin, the occurrence of discharge concentration can be reliably suppressed.
以下、本発明の実施例を図面に基づき詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail based on the drawings.
なお、この実施例装置は、前述した従来例と基本構成が
共通しているので、構成並びに作用が共通する部分は共
通の符号を付すこととし、重複を避けるためにその説明
を省略するものとする。第１図において、この実施例に
係るガスレーザ発振装置においては、放電管（１）の内
径（ｄ）を２００ＩＩＩ１１に、また、肉厚＜１＞ を
３Ｉｌｌｌ１１とし、内径／肉厚比を９／１〜９７２間
に納まる９／１．３５に設定している。This embodiment device has the same basic configuration as the conventional example described above, so parts with the same configuration and function will be given the same reference numerals, and their explanation will be omitted to avoid duplication. do. In FIG. 1, in the gas laser oscillator according to this embodiment, the inner diameter (d) of the discharge tube (1) is 200III11, the wall thickness <1> is 3Ill11, and the inner diameter/wall thickness ratio is 9/1. It is set to 9/1.35, which falls between ~972.
第２図にレーザ出力効率と放電管の内径／肉厚比との関
係を測定した結果を示しており、この結果から明らかな
ように、放電管の内径／肉厚比は上記９７１〜９／２の
範囲内が最良であり、内径／肉厚比を前記の比率で設定
したことで、放電管（１）内の放電空間（５）における
放電集中を抑制でき、しかも最良のレーザ出力効率を得
ることができる。Figure 2 shows the results of measuring the relationship between the laser output efficiency and the inner diameter/wall thickness ratio of the discharge tube.As is clear from this result, the inner diameter/wall thickness ratio of the discharge tube is 971~9/ By setting the inner diameter/thickness ratio at the above ratio, it is possible to suppress discharge concentration in the discharge space (5) within the discharge tube (1), and to achieve the best laser output efficiency. Obtainable.
以上説明したように本発明によれば、放電管の内径と肉
厚の比を９：１から９：２の範囲という最適な状態に設
定しているので、放電管内の放電空間における放電集中
を抑制でき、しかも最良のレーザ出力効率を発揮するガ
スレーザ発振装置を提供できる。したがって、電力消費
が節減できて経済性に冨む上、優れたレーザ加工性能を
実現できるなどの効果を奏するに至った。As explained above, according to the present invention, the ratio of the inner diameter to the wall thickness of the discharge tube is set to an optimum range of 9:1 to 9:2, so that discharge concentration in the discharge space within the discharge tube is reduced. It is possible to provide a gas laser oscillation device that can reduce the amount of laser output and exhibit the best laser output efficiency. Therefore, not only power consumption can be reduced and economical efficiency increased, but also excellent laser processing performance can be realized.
第１図は、本発明の一実施例を示す放電管の縦断側面図
、第２図は、レーザ出力効率と放電管の内径／肉厚比と
の関係を示す線図、第３図は、従来例の縦断正面図、第
４図は従来例の放電管の縦断側面図である。
（］）・・・放電管、（２）（３）・・・金属電極第１
第２
内径／肉厚FIG. 1 is a longitudinal side view of a discharge tube showing an embodiment of the present invention, FIG. 2 is a diagram showing the relationship between laser output efficiency and the inner diameter/thickness ratio of the discharge tube, and FIG. FIG. 4 is a longitudinal sectional side view of the conventional discharge tube. (])...Discharge tube, (2)(3)...Metal electrode 1st 2nd inner diameter/thickness
Claims (1)
し、前記放電管の外周面に管径方向で互いに対向して設
けられた金属電極間に高周波電圧を印加してこの放電管
内に放電を発生させ、この放電をレーザ励起源として前
記放電管の管軸方向にレーザビームを発生するガスレー
ザ発振装置において、前記放電管の内径と肉厚の比を９
：１から９：２の範囲としたことを特徴とするガスレー
ザ発振装置。A laser gas is caused to flow in the optical axis direction within a discharge tube made of a dielectric material, and a high-frequency voltage is applied between metal electrodes provided on the outer peripheral surface of the discharge tube facing each other in the tube diameter direction to generate a discharge within the discharge tube. In a gas laser oscillation device that uses this discharge as a laser excitation source to generate a laser beam in the tube axis direction of the discharge tube, the ratio of the inner diameter to the wall thickness of the discharge tube is 9.
A gas laser oscillation device characterized in that the ratio is in the range of :1 to 9:2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19173188A JPH0240973A (en) | 1988-07-30 | 1988-07-30 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19173188A JPH0240973A (en) | 1988-07-30 | 1988-07-30 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240973A true JPH0240973A (en) | 1990-02-09 |
Family
ID=16279555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19173188A Pending JPH0240973A (en) | 1988-07-30 | 1988-07-30 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240973A (en) |
-
1988
- 1988-07-30 JP JP19173188A patent/JPH0240973A/en active Pending
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