JPH023302B2 - - Google Patents

Info

Publication number: JPH023302B2
Authority: JP; Japan
Prior art keywords: movable beam; film; semiconductor device; substrate; polysilicon
Prior art date: 1985-06-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP60120366A

Other languages

English (en)

Japanese (ja)

Other versions

JPS61105861A (ja

Inventor

Shigeo Hoshino

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nissan Motor Co Ltd

Original Assignee

Nissan Motor Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-06-05

Filing date

1985-06-05

Publication date

1990-01-23

1985-06-05 Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd

1985-06-05 Priority to JP60120366A priority Critical patent/JPS61105861A/ja

1986-05-23 Publication of JPS61105861A publication Critical patent/JPS61105861A/ja

1990-01-23 Publication of JPH023302B2 publication Critical patent/JPH023302B2/ja

Status Granted legal-status Critical Current

Links

229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 27
229920005591 polysilicon Polymers 0.000 claims description 27
239000004065 semiconductor Substances 0.000 claims description 25
239000000758 substrate Substances 0.000 claims description 20
239000003513 alkali Substances 0.000 claims description 8
150000004767 nitrides Chemical class 0.000 description 12
125000006850 spacer group Chemical group 0.000 description 11
238000000034 method Methods 0.000 description 10
238000001259 photo etching Methods 0.000 description 9
238000005530 etching Methods 0.000 description 8
239000003990 capacitor Substances 0.000 description 7
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
229910004298 SiO 2 Inorganic materials 0.000 description 5
230000001133 acceleration Effects 0.000 description 5
239000007864 aqueous solution Substances 0.000 description 5
229910052796 boron Inorganic materials 0.000 description 5
238000004518 low pressure chemical vapour deposition Methods 0.000 description 5
238000001514 detection method Methods 0.000 description 4
238000004519 manufacturing process Methods 0.000 description 4
230000003647 oxidation Effects 0.000 description 4
238000007254 oxidation reaction Methods 0.000 description 4
238000005468 ion implantation Methods 0.000 description 3
238000005406 washing Methods 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
238000010586 diagram Methods 0.000 description 2
238000001035 drying Methods 0.000 description 2
230000002265 prevention Effects 0.000 description 2
230000003014 reinforcing effect Effects 0.000 description 2
PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
229910000147 aluminium phosphate Inorganic materials 0.000 description 1
230000003064 anti-oxidating effect Effects 0.000 description 1
238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000000605 extraction Methods 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910052760 oxygen Inorganic materials 0.000 description 1
239000001301 oxygen Substances 0.000 description 1
238000001020 plasma etching Methods 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
239000000243 solution Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Semiconductor Integrated Circuits (AREA)

JP60120366A 1985-06-05 1985-06-05 梁構造体を有する半導体装置 Granted JPS61105861A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP60120366A JPS61105861A (ja)	1985-06-05	1985-06-05	梁構造体を有する半導体装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP60120366A JPS61105861A (ja)	1985-06-05	1985-06-05	梁構造体を有する半導体装置

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
JP58163270A Division JPS6055655A (ja)	1983-09-07	1983-09-07	梁構造体を有する半導体装置

Publications (2)

Publication Number	Publication Date
JPS61105861A JPS61105861A (ja)	1986-05-23
JPH023302B2 true JPH023302B2 (fr)	1990-01-23

Family

ID=14784416

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP60120366A Granted JPS61105861A (ja)	1985-06-05	1985-06-05	梁構造体を有する半導体装置

Country Status (1)

Country	Link
JP (1)	JPS61105861A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19961299B4 (de) *	1999-12-18	2009-04-30	Robert Bosch Gmbh	Sensor zur Erkennung des Klopfens bei einer Brennkraftmaschine
EP1310136B1 (fr) *	2000-08-11	2006-03-22	Knowles Electronics, LLC	Transducteur a bande large miniature

1985
- 1985-06-05 JP JP60120366A patent/JPS61105861A/ja active Granted

Also Published As

Publication number	Publication date
JPS61105861A (ja)	1986-05-23

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