JPH02266877A - Ultrasonic motor - Google Patents

Ultrasonic motor

Info

Publication number
JPH02266877A
JPH02266877A JP1083919A JP8391989A JPH02266877A JP H02266877 A JPH02266877 A JP H02266877A JP 1083919 A JP1083919 A JP 1083919A JP 8391989 A JP8391989 A JP 8391989A JP H02266877 A JPH02266877 A JP H02266877A
Authority
JP
Japan
Prior art keywords
vibration
ultrasonic motor
vibrator
piezoelectric ceramic
conversion member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1083919A
Other languages
Japanese (ja)
Other versions
JP2549310B2 (en
Inventor
Hiroshi Shimizu
洋 清水
Tetsuo Yoshida
哲男 吉田
Mitsuo Tamura
光男 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP1083919A priority Critical patent/JP2549310B2/en
Publication of JPH02266877A publication Critical patent/JPH02266877A/en
Application granted granted Critical
Publication of JP2549310B2 publication Critical patent/JP2549310B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To simplify the structure of an ultrasonic motor by employing a rod type vibrator and a vibration-rotation conversion member, provided at both ends of the vibrator. CONSTITUTION:An ultrasonic motor is constituted of a piezo-electric elliptic motion vibrator 11', consisting of a piezo-electric ceramic column 11 and annular supporting members 12 having contacts on one side surface of the column 11, and a cup type rotor 13, arranged with a vibration-rotation conversion member 13b and a driving shaft 13a. As a result, contact between the end of the vibrator 11' and the inner surface of the conversion member 13 is generated at a plurality of parts on the same circumference with respect to a rotary shaft whereby contacting area may be reduced and affection to the vibration may also be reduced.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は電子機器などに用いられる小型モータに関し、
特にローター直径の小さい小型の超音波モータに関する
ものである。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a small motor used in electronic equipment, etc.
In particular, it relates to a small ultrasonic motor with a small rotor diameter.

(従来の技術) 超音波モータは従来の電磁モータと比較して、低回転で
高いトルクが得られること、停止保持力を有すること、
電磁ノイズが小さいことなどの利点を有しており、カメ
ラのオートフォーカス用や自動車用パワーモータ等に使
用されている。
(Conventional technology) Compared to conventional electromagnetic motors, ultrasonic motors can obtain high torque at low rotation speeds and have stopping power.
It has advantages such as low electromagnetic noise, and is used for camera autofocus, automobile power motors, etc.

第7図及び第8図は従来の超音波モータの構造を示す概
略図であり、リング上の小歯状の突起部を設けた金属円
板51の突起部の形成さ杵ている面の裏側に二枚の圧電
セラミック円板52.53を接着した構造のステーター
51の上に円板状ローター54を圧接した構造となって
いる。圧電セラミックス円板52.53は偶数等分に分
極の向。
FIGS. 7 and 8 are schematic diagrams showing the structure of a conventional ultrasonic motor, in which the protrusions are formed on a metal disk 51 provided with small tooth-like protrusions on the ring. The stator 51 has a structure in which two piezoelectric ceramic discs 52 and 53 are bonded to each other, and a disc-shaped rotor 54 is pressed onto the stator 51. The piezoelectric ceramic disks 52 and 53 are polarized into even numbers.

きが厚さ方向に逆向きとなっており、これら二枚の圧電
セラミック円板は分割角度の半分の角度だけずらして接
着されている。
The piezoelectric ceramic disks are oriented in opposite directions in the thickness direction, and these two piezoelectric ceramic disks are adhered with an angle shifted by half the dividing angle.

(発明が解決しようとする課題) 第8図かられかるように従来の超音波モータにおいては
、ステーターを構成するために2枚の圧電セラミックス
円板と金属円板を接着しているため、接着工程が難しい
上に接着条件のばらつきに伴う特性のばらつきが大きい
と云う欠点があった。
(Problems to be Solved by the Invention) As shown in Figure 8, in conventional ultrasonic motors, two piezoelectric ceramic disks and a metal disk are bonded together to form the stator. The disadvantages are that the process is difficult and the characteristics vary widely due to variations in bonding conditions.

また、円板の中心部にローターの回転軸を設けるためス
テーターおよびローターの直径を大きくする必要がある
。そのため従来の超音波モータの実用的な最小直径は1
5mm〜20龍に限定されていた。
Furthermore, since the rotation axis of the rotor is provided at the center of the disk, it is necessary to increase the diameters of the stator and rotor. Therefore, the practical minimum diameter of a conventional ultrasonic motor is 1
It was limited to 5mm to 20 dragons.

本発明の技術課題は、ローターの直径を小さくし、接着
工程の少ない簡単な構造の超音波モータを提供すること
にある。
A technical problem of the present invention is to provide an ultrasonic motor with a simple structure in which the diameter of the rotor is reduced and the number of bonding steps is reduced.

本発明の別の技術課題はローターの直径として15m■
以下の超音波モータを提供することにある。
Another technical problem of the present invention is that the diameter of the rotor is 15 m.
The purpose of the present invention is to provide the following ultrasonic motors.

(課題を解決するための手段) 本発明によれば、楕円運動振動を行う端部を有する圧電
楕円運動振動子と、前記端部を覆うように接触して配さ
れ、前記楕円運動振動を回転軸の回りの回転運動に変換
する振動一回転変換部材とを有する超音波モータにおい
て、前記振動一回転変換部材は前記端部の全周のうち前
記回転軸に対して同一円周上の位置にある複数の部分の
み接触する接触部を有し前記端部に対する接触面積を小
さくするようにしたことを特徴とする超音波モータが得
られる。
(Means for Solving the Problem) According to the present invention, a piezoelectric elliptical motion vibrator having an end portion that performs elliptical motion vibration, and a piezoelectric elliptical motion vibrator disposed in contact with the end portion so as to cover the end portion, rotate the elliptical motion vibration. In an ultrasonic motor having a vibration one-rotation conversion member that converts vibration into rotational motion around an axis, the vibration one-rotation conversion member is located at a position on the same circumference with respect to the rotation axis among the entire circumference of the end portion. There is obtained an ultrasonic motor characterized in that it has a contact portion that contacts only a certain plurality of portions, and the contact area with respect to the end portion is reduced.

(作 用) 本発明の超音波モータにおいては、端部が円を含む楕円
運動を行う圧電楕円運動振動子を用い、この圧電楕円運
動振動子の端部と振動一回転変換部材との接触が振動一
回転変換部材の内面により行われ、この振動一回転変換
部材は、全周のうちの回転軸に対して同一円周上の位置
にある複数部分のみこの圧電楕円運動振動子の端部に接
触するように接触部の面積を小さくしたために、接触に
よるスティフネスが小さくなり圧電楕円運動振動子の振
動に対する影響が少なく、共振周波数の変化などが少な
い超音波モータが得られる。
(Function) In the ultrasonic motor of the present invention, a piezoelectric elliptical motion vibrator whose end portion performs an elliptical motion including a circle is used, and the end portion of the piezoelectric elliptic motion vibrator is in contact with the vibration one-rotation conversion member. The vibration is performed by the inner surface of the one-rotation converting member, and this vibration-one-rotation converting member only applies the vibration to the end of the piezoelectric elliptic motion oscillator in a plurality of parts located on the same circumference with respect to the rotation axis of the entire circumference. Since the area of the contact portion is reduced so as to make contact, the stiffness due to contact is reduced, and an ultrasonic motor with less influence on the vibration of the piezoelectric elliptic motion vibrator and less change in resonance frequency can be obtained.

(実施例) 以下本発明の超音波モータについて図面を用いて詳しく
説明する。
(Example) The ultrasonic motor of the present invention will be described in detail below with reference to the drawings.

第1図は本発明の実施例に係る超音波モータの構成を示
す図である。
FIG. 1 is a diagram showing the configuration of an ultrasonic motor according to an embodiment of the present invention.

第1図において超音波モータは圧電セラミックス円柱1
1と一面側にこの圧電セラミックス円柱との接点11 
a、  11 b、  11 c、  11 dを有す
るリング状支持枠12とよりなる圧電楕円運動振動子1
1′と、振動回転変換部材13bに駆動軸13aが配さ
れたカップ状のローター13とを有する。
In Figure 1, the ultrasonic motor is a piezoelectric ceramic cylinder 1
1 and a contact point 11 with this piezoelectric ceramic cylinder on one side.
A piezoelectric elliptic motion vibrator 1 consisting of a ring-shaped support frame 12 having a, 11 b, 11 c, and 11 d
1', and a cup-shaped rotor 13 in which a drive shaft 13a is disposed on a vibration rotation conversion member 13b.

第2図は本発明の超音波モータに用いる圧電セラミック
ス円柱11を示す斜視図である。
FIG. 2 is a perspective view showing a piezoelectric ceramic cylinder 11 used in the ultrasonic motor of the present invention.

第2図において、圧電セラミックス円柱11の周面の円
周を4分割した位置に、長さ方向に沿って互い平行な電
極31.32,33.34が形成されている。この圧電
セラミックスはリング状支持枠12.12を挿通して圧
電楕円振動子を構成する。
In FIG. 2, electrodes 31, 32, 33, 34 are formed parallel to each other along the length direction at positions where the circumference of the circumferential surface of the piezoelectric ceramic cylinder 11 is divided into four. This piezoelectric ceramic is inserted through a ring-shaped support frame 12.12 to form a piezoelectric elliptical vibrator.

第3図は本発明の超音波モータに用いる圧電セラミック
ス円柱11の断面図であり、第3図(a)は電極32.
34を(+)、電極31.33を(−)にして電圧を印
加した場合の分極の向きを破線の矢印21で示している
FIG. 3 is a sectional view of the piezoelectric ceramic cylinder 11 used in the ultrasonic motor of the present invention, and FIG. 3(a) shows the electrode 32.
The direction of polarization when a voltage is applied with 34 set to (+) and electrodes 31 and 33 set to (-) is shown by a broken arrow 21.

第3図(b)は第3図(a)のように分極下圧型セラミ
ックス円柱において実線方向の矢印21で示すように電
極33.34を(+)、電極31゜32を(−)にして
電圧を印加した場合の断面の歪みを示す図である。第3
図(b)において電圧は電極34から31.電極33か
ら32に印加される。そのために分極方向に依存して圧
電セラミックス円柱の周面に沿うように電極34.31
間は伸び、電極33.32間は縮む。その結果として第
3図(b)において、長さ方向に下側が膨らむように屈
曲する。また、印加電圧の極性が逆向きであれば屈曲も
逆になる。
Figure 3(b) shows a polarized low-pressure ceramic cylinder as shown in Figure 3(a), with electrodes 33 and 34 set to (+) and electrodes 31 and 32 set to (-) as shown by arrows 21 in the solid line direction. FIG. 3 is a diagram showing distortion in a cross section when a voltage is applied. Third
In figure (b) the voltage is applied from electrode 34 to 31. It is applied to electrodes 33 to 32. For this purpose, electrodes 34 and 31 are arranged along the circumferential surface of the piezoelectric ceramic cylinder depending on the polarization direction.
The gap between the electrodes 33 and 32 is expanded, and the gap between the electrodes 33 and 32 is shortened. As a result, as shown in FIG. 3(b), it is bent so that the lower side bulges in the length direction. Furthermore, if the polarity of the applied voltage is reversed, the bending will also be reversed.

第4図−(a)および第4図(b)は圧電セラミックス
円柱11に交流電圧を加えた場合の振動状態の説明図で
ある。
FIG. 4-(a) and FIG. 4(b) are explanatory diagrams of the vibration state when an alternating current voltage is applied to the piezoelectric ceramic cylinder 11.

電極33.34と電極31.33間に振動子の共振周波
数に等しい交流電圧を印加した場合、第4図(a)のよ
うに白抜き矢印22の方向に屈曲振動を発生する。電極
31.34および32゜33を接続して同様に振動子の
共振周波数に等しい周波数の交流電圧を印加すると屈曲
振動の方向は第4図(a)の方向とは直角の方向となる
When an AC voltage equal to the resonant frequency of the vibrator is applied between the electrodes 33, 34 and 31, 33, bending vibration is generated in the direction of the white arrow 22 as shown in FIG. 4(a). When electrodes 31, 34 and 32.degree. 33 are connected and an alternating current voltage having a frequency equal to the resonant frequency of the vibrator is similarly applied, the direction of bending vibration becomes perpendicular to the direction shown in FIG. 4(a).

従って、以上の二つの方向の屈曲振動の位相を90″ず
らせること、具体的には、印加される各々の交流駆動電
圧の印加電圧の位相を90@ずらせることにより、圧電
セラミックス円柱11の両端部に、第4図(b)に示す
ような円運動を含む楕円運動を励起することが可能であ
る。
Therefore, by shifting the phases of the bending vibrations in the above two directions by 90", specifically by shifting the phases of the applied AC drive voltages by 90", the piezoelectric ceramic cylinder 11 is It is possible to excite elliptical motion including circular motion as shown in FIG. 4(b) at both ends.

第5図は本発明の実施例に係る超音波モータに用いる振
動一回転変換部材13bの斜視図である。
FIG. 5 is a perspective view of a vibration-to-rotation converting member 13b used in an ultrasonic motor according to an embodiment of the present invention.

第5図において、振動一回転変換部材13の端部内側に
全周にわたって振動一回転変換部材13′の回転軸16
の同一円周上の位置に設けられ、回転軸16に向って突
出した錐状の微小突起部14が形成され、さらに端部に
この振動一回転変換部材の軸方向に沿って圧電セラミッ
クスの一端から中央に向うように複数個のスリット15
が形成されている。
In FIG. 5, the rotation shaft 16 of the vibration-to-rotation conversion member 13' is located inside the end of the vibration-to-rotation conversion member 13 over the entire circumference.
A conical minute protrusion 14 is formed at the same circumference position and protrudes toward the rotation axis 16, and one end of the piezoelectric ceramic is formed at the end along the axial direction of the vibration-rotation converting member. multiple slits 15 toward the center from
is formed.

第6図は、圧電セラミックス円柱11の端部に振動一回
転変換部材13bを組み合わせた状態を示す断面図であ
る。
FIG. 6 is a sectional view showing a state in which the vibration one-rotation conversion member 13b is combined with the end of the piezoelectric ceramic cylinder 11.

第6図に示したように、圧電セラミックス円柱11の端
部は先端部がわずかに細くなるようなデーパ面11aを
形成したテーパ加工が施されており、振動一回転変換部
材13と圧電セラミックス円柱11との咬合を加減する
ことにより振動一回転変換部材13bと圧電セラミック
ス円柱11の微小突起部14とテーパ面11aとの接触
圧力を:J!J節することが出来る。
As shown in FIG. 6, the end of the piezoelectric ceramic cylinder 11 is tapered to form a tapered surface 11a so that the tip becomes slightly thinner, and the vibration one-rotation conversion member 13 and the piezoelectric ceramic cylinder By adjusting the occlusion with 11, the contact pressure between the vibration one-rotation conversion member 13b, the micro protrusion 14 of the piezoelectric ceramic cylinder 11, and the tapered surface 11a can be adjusted: J! You can do section J.

第5図に示した形状の振動一回転変換部材13bを用い
た場合、圧電セラミックス円柱11に対してカップ状ロ
ーター13は端部の錐状の微小突起部14だけが接触す
ることになる。したがって、圧電セラミックス円柱11
の全周にわたって接触する場合と比較して接触によるス
ティフネスが小さくなり、圧電セラミックス円柱11の
振動に対して負荷が軽くなり、共振周波数のずれが少な
くなる。
When the vibration-one-rotation conversion member 13b having the shape shown in FIG. 5 is used, only the conical minute protrusion 14 at the end of the cup-shaped rotor 13 comes into contact with the piezoelectric ceramic cylinder 11. Therefore, the piezoelectric ceramic cylinder 11
The stiffness caused by the contact is smaller than that in the case where the piezoelectric ceramic cylinder 11 is in contact over its entire circumference, the load on the vibration of the piezoelectric ceramic cylinder 11 is reduced, and the shift in the resonant frequency is reduced.

尚、本実施例においては、圧電楕円運動振動子11′ 
として圧電セラミックス円柱11を用いたが、バイブ状
圧電セラミックスを使用した場合においても、同様な超
音波モータを構成することができる。
In this embodiment, the piezoelectric elliptical motion vibrator 11'
Although the piezoelectric ceramic cylinder 11 is used as the embodiment, a similar ultrasonic motor can be constructed even when a vibrator-shaped piezoelectric ceramic is used.

さらに本発明の実施例においては、圧電セラミックス円
柱あるいは圧電セラミックスバイブの側面に設けられた
長さ方向に平行な複数対の電極を有し、この圧電セラミ
ックス円柱の端面が円を含む楕円運動を行う圧電楕円運
動振動子を用いているため、圧電楕円運動振動子そのも
のは接着工程を含まないで構成することが出来るため振
動特性のばらつきが小さく、安定な楕円運動の振動が可
能となる。
Furthermore, the embodiment of the present invention has a plurality of pairs of electrodes parallel to the length direction provided on the side surface of the piezoelectric ceramic cylinder or the piezoelectric ceramic vibrator, and the end surface of the piezoelectric ceramic cylinder makes an elliptical motion including a circle. Since a piezoelectric elliptical motion vibrator is used, the piezoelectric elliptical motion vibrator itself can be constructed without any bonding process, so variations in vibration characteristics are small, and stable elliptical motion vibration is possible.

(発明の効果) 以上示したように本発明の超音波モータにおいては、駆
動力を発生させるための振動子の形状が単純で、回転あ
るいは楕円運動振動を発生させるための二つの振動モー
ドが同じ屈曲モードであることから、構造が簡単になる
。また楕円運動振動子として棒状の振動子及びこの棒状
の振動子の両端に配される振動一回転変換部材を使用し
ているため振動一回転変換部材の直径、即ちローターの
直径を小さくすることが容易で、ローター直径の小さい
超音波モータを得ることができる。モータの直径として
は、必要なトルクによって変わるが、原理的には10m
m以下も可能である。
(Effects of the Invention) As shown above, in the ultrasonic motor of the present invention, the shape of the vibrator for generating driving force is simple, and the two vibration modes for generating rotational or elliptical vibration are the same. Since it is a bending mode, the structure is simple. Furthermore, since a rod-shaped vibrator and vibration one-rotation converting members arranged at both ends of the rod-shaped vibrator are used as the elliptic motion vibrator, the diameter of the vibration one-rotation converting member, that is, the diameter of the rotor, can be reduced. It is easy to obtain an ultrasonic motor with a small rotor diameter. The diameter of the motor varies depending on the required torque, but in principle it is 10 m.
m or less is also possible.

また本発明の超音波モータにおいては、圧電楕円運動振
動子の端部とローターとして用いる振動一回転変換部材
との接触が、回転軸に対して同一円周上の位置にある複
数の部分のみ接触する接触部で行われるため、圧電楕円
運動振動子の振動に対する影響が少なく、共振周波数の
変化などが少ない超音波モータが得られる。
Furthermore, in the ultrasonic motor of the present invention, the end of the piezoelectric elliptical motion vibrator and the vibration one-rotation converting member used as the rotor are in contact only at a plurality of portions located on the same circumference with respect to the rotation axis. Since this is carried out at the contact portion, it is possible to obtain an ultrasonic motor that has little influence on the vibration of the piezoelectric elliptic motion vibrator and has little change in resonance frequency.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例に係る超音波モータの構成を示
す斜視図、第2図は本発明の実施例に係る超音波モータ
に用い圧電セラミックス円柱を示す斜視図、第3図およ
び第4図は本発明の超音波モータに用いる圧電セラミッ
クス円柱の断面図を用いて楕円運動振動子の動作原理を
説明するための説明図、第5図は本発明の実施例に係る
超音波モータに用いられるカップ状ローグーの構造を示
す斜視図、第6図は本発明の実施例に係る超音波モータ
において、圧電セラミックス円柱とカップ状ローターと
の組み合わせ状態を示す断面図、第7図および第8図は
従来の超音波モータの構造例の説明に供する図である。 図中、10は駆動軸、11は圧電セラミックス円柱、1
1′は圧電楕円運動振動子、12はリング状支持枠、1
3はカップ状ローター 13′は振動一回転変換部材、
13aは駆動軸、14は微小突起、15はスリット、1
6は回転軸、31゜32.33.34は電極、51は金
属円板、52゜53は圧電セラミックス円板である。 第3図 jIs4図
FIG. 1 is a perspective view showing the configuration of an ultrasonic motor according to an embodiment of the present invention, FIG. 2 is a perspective view showing a piezoelectric ceramic cylinder used in the ultrasonic motor according to an embodiment of the present invention, FIG. FIG. 4 is an explanatory diagram for explaining the operating principle of an elliptical motion vibrator using a cross-sectional view of a piezoelectric ceramic cylinder used in the ultrasonic motor of the present invention, and FIG. FIG. 6 is a perspective view showing the structure of the cup-shaped rotor used; FIG. 6 is a cross-sectional view showing the combination of the piezoelectric ceramic cylinder and the cup-shaped rotor in an ultrasonic motor according to an embodiment of the present invention; FIGS. The figure is a diagram for explaining an example of the structure of a conventional ultrasonic motor. In the figure, 10 is a drive shaft, 11 is a piezoelectric ceramic cylinder, 1
1' is a piezoelectric elliptical motion vibrator, 12 is a ring-shaped support frame, 1
3 is a cup-shaped rotor, 13' is a vibration one-rotation conversion member,
13a is a drive shaft, 14 is a microprotrusion, 15 is a slit, 1
6 is a rotating shaft, 31° 32, 33, and 34 are electrodes, 51 is a metal disk, and 52° 53 is a piezoelectric ceramic disk. Figure 3jIs4

Claims (1)

【特許請求の範囲】[Claims] 1.楕円運動振動を行う端部を有する圧電楕円運動振動
子と、 前記端部を覆うように接触して配され、前記楕円運動振
動を回転軸の回りの回転運動に変換する振動−回転変換
部材とを有する超音波モータにおいて、 前記振動−回転変換部材は前記端部の全周のうち前記回
転軸に対して同一円周上の位置にある複数の部分のみ接
触する接触部を有し前記端部に対する接触面積を小さく
するようにしたことを特徴とする超音波モータ。
1. a piezoelectric elliptical motion vibrator having an end portion that performs elliptical motion vibration; and a vibration-rotation conversion member disposed in contact with and covering the end portion and converting the elliptic motion vibration into rotational motion around a rotation axis. In the ultrasonic motor, the vibration-rotation converting member has a contact portion that contacts only a plurality of portions located on the same circumference with respect to the rotation axis out of the entire circumference of the end portion, and the end portion An ultrasonic motor characterized by having a small contact area with the motor.
JP1083919A 1989-04-04 1989-04-04 Ultrasonic motor Expired - Fee Related JP2549310B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1083919A JP2549310B2 (en) 1989-04-04 1989-04-04 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1083919A JP2549310B2 (en) 1989-04-04 1989-04-04 Ultrasonic motor

Publications (2)

Publication Number Publication Date
JPH02266877A true JPH02266877A (en) 1990-10-31
JP2549310B2 JP2549310B2 (en) 1996-10-30

Family

ID=13816010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1083919A Expired - Fee Related JP2549310B2 (en) 1989-04-04 1989-04-04 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JP2549310B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006141091A (en) * 2004-11-10 2006-06-01 Shimizu Corp Ultrasonic motor and variable rigidity spring
JP2015198522A (en) * 2014-04-01 2015-11-09 株式会社ダイセル Elastic body for actuator, and actuator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63213478A (en) * 1987-03-02 1988-09-06 Hitachi Maxell Ltd Ultrasonic motor varying in press-bonding diameter of rotor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63213478A (en) * 1987-03-02 1988-09-06 Hitachi Maxell Ltd Ultrasonic motor varying in press-bonding diameter of rotor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006141091A (en) * 2004-11-10 2006-06-01 Shimizu Corp Ultrasonic motor and variable rigidity spring
JP4573102B2 (en) * 2004-11-10 2010-11-04 清水建設株式会社 Ultrasonic motor and variable stiffness spring
JP2015198522A (en) * 2014-04-01 2015-11-09 株式会社ダイセル Elastic body for actuator, and actuator

Also Published As

Publication number Publication date
JP2549310B2 (en) 1996-10-30

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