JPH0284078A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH0284078A JPH0284078A JP63233803A JP23380388A JPH0284078A JP H0284078 A JPH0284078 A JP H0284078A JP 63233803 A JP63233803 A JP 63233803A JP 23380388 A JP23380388 A JP 23380388A JP H0284078 A JPH0284078 A JP H0284078A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- ceramic cylinder
- ultrasonic motor
- ring
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 239000004020 conductor Substances 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 10
- 238000005452 bending Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、電子機器などに用いられる超音波モータに関
し、特にロータ直径の小さい小型の超音波モータに関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultrasonic motor used in electronic equipment and the like, and particularly to a small ultrasonic motor with a small rotor diameter.
［従来の技術］
超音波モータは従来の電磁モータと比較して、低回転で
高いトルクが得られること、停止保持力を有すること、
電磁ノイズが小さいことなどの利点を有しており、カメ
ラのオートフォーカス用や自動車用パワーモータ等に使
用されている。[Prior Art] Compared to conventional electromagnetic motors, ultrasonic motors have the following advantages: high torque can be obtained at low rotation speeds, and they have a stopping power.
It has advantages such as low electromagnetic noise, and is used for camera autofocus, automobile power motors, etc.
第７図及び第８図は従来の超音波モータの構造を示す概
略図であり、リング上の小歯状の突起部を設けた金属板
５１の突起部の形成されている面の裏側に２枚の圧電セ
ラミック円板５２．５３を接着した構造のステータ５１
の上に円板状ロータ５４を圧接した構造となっている。FIGS. 7 and 8 are schematic diagrams showing the structure of a conventional ultrasonic motor, in which a metal plate 51 on which small tooth-shaped protrusions are provided on a ring is provided with two A stator 51 having a structure in which piezoelectric ceramic disks 52 and 53 are bonded together.
It has a structure in which a disk-shaped rotor 54 is pressed onto the top of the rotor.
圧電セラミック円板５２．５３は、偶数等分に分極の向
きが逆向きとなっており、これら２枚の圧電セラミック
ス板は分割角度の半分の角度だけずらして接着されてい
る。The piezoelectric ceramic discs 52 and 53 are divided into even numbers with polarization directions opposite to each other, and these two piezoelectric ceramic discs are adhered with an angle shifted by half the dividing angle.
［発明が解決しようとする課題］
第７図から判るように従来の超音波モータにおいては、
ステータの超音波振動を平面的にローグーに伝達してい
るため、駆動トルクを大きくするには、ステータ及びロ
ータの直径を大きくする必要がある。その為、従来の超
音波モータの実用的な最小直径は２０〜３０ｍｍに限定
されていた。[Problem to be solved by the invention] As can be seen from FIG. 7, in the conventional ultrasonic motor,
Since the ultrasonic vibrations of the stator are transmitted in a planar and rough manner, in order to increase the driving torque, it is necessary to increase the diameters of the stator and rotor. Therefore, the practical minimum diameter of conventional ultrasonic motors has been limited to 20 to 30 mm.
そこで、本発明の技術的課題は、ローターの直径を小さ
くした小型の超音波モータを提供することにある。Therefore, a technical object of the present invention is to provide a small-sized ultrasonic motor with a reduced rotor diameter.
本発明の他の技術的課題は、ローグーの直径として、２
０ｍｍ以下の超音波モータを提供することにある。Another technical problem of the present invention is that the diameter of Rogue is 2
An object of the present invention is to provide an ultrasonic motor with a diameter of 0 mm or less.
［課題を解決するための手段］
本発明によれば、圧電セラミックス円柱の側面に設けら
れた長さ方向に平行な複数対の電極を有し、この圧電セ
ラミックス円柱の端面が円を含む楕円運動を行う圧電楕
円運動振動子と、この圧電楕円運動振動子の少なくとも
一方の端部に配された楕円運動一回転変換部材と、この
圧電セラミックス円柱の振動の節に設けられた絶縁材料
よりなる支持部材とを有し、前記圧電楕円運動振動子の
楕円運動を前記楕円運動一回転変換部材により回転運動
に変換して回転出力を得る超音波モータにおいて、
前記支持部材は、前記電極と対応した位置に導体パター
ンが形成されたリング形状を有し、前記電極と前記導体
パターンとを電気的に接続し、前記導体パターンより外
部リードを引き出したことを特徴とする超音波モータが
得られる。[Means for Solving the Problems] According to the present invention, a plurality of pairs of electrodes are provided on the side surfaces of a piezoelectric ceramic cylinder and are parallel to the length direction, and the end face of the piezoelectric ceramic cylinder moves in an elliptical motion including a circle. A piezoelectric elliptical motion vibrator that performs the above-mentioned vibration, an elliptic motion one-rotation conversion member disposed at at least one end of the piezoelectric elliptic motion vibrator, and a support made of an insulating material provided at the vibration node of the piezoelectric ceramic cylinder. an ultrasonic motor that converts the elliptical motion of the piezoelectric elliptical motion vibrator into a rotational motion by the elliptic motion one-rotation converting member to obtain a rotational output, the support member being located at a position corresponding to the electrode. There is obtained an ultrasonic motor characterized in that it has a ring shape on which a conductor pattern is formed, the electrode and the conductor pattern are electrically connected, and external leads are drawn out from the conductor pattern.
Ｃ作 用］
本発明の超音波モータにおいては、圧電セラミックス円
柱の側面に設けられた長さ方向に平行な複数対の電極を
有し、この圧電セラミックス円柱の端面が円を含む楕円
運動を行う圧電楕円運動振動子の振動の節が、リング状
の支持枠で支持されているために、支持による振動への
影譬が均一になり安定な楕円運動の励振が可能となる。C action] The ultrasonic motor of the present invention has a plurality of pairs of electrodes parallel to the length direction provided on the side surface of a piezoelectric ceramic cylinder, and the end face of the piezoelectric ceramic cylinder performs an elliptical motion including a circle. Since the vibration nodes of the piezoelectric elliptical motion vibrator are supported by the ring-shaped support frame, the influence of the support on the vibration is uniform, making it possible to excite stable elliptical motion.
さらに、圧電セラ・ミックス円柱の側面に設けられた電
極と、前記支持枠状に設けられた導体部が半田等により
、電気的に接続された後にリード線は、前記支持枠上の
導体部から取り出・されるため、リード線の断線も発生
しにくくなる。Furthermore, after the electrode provided on the side surface of the piezoelectric ceramic cylinder and the conductor portion provided in the support frame shape are electrically connected by soldering or the like, the lead wire is connected from the conductor portion on the support frame. Since the lead wire is taken out and removed, breakage of the lead wire is less likely to occur.
［実施例］ 以下本発明の超音波モータについて、詳しく説明する。[Example] The ultrasonic motor of the present invention will be explained in detail below.
第１図は本発明の実施例に係る超音波モータの構成を丞
す図である。FIG. 1 is a diagram illustrating the configuration of an ultrasonic motor according to an embodiment of the present invention.
この図において、超音波モータは、圧電セラミックス円
柱１１と、リング状支持枠１２と、カップ状ロータ１３
とを有する。In this figure, the ultrasonic motor includes a piezoelectric ceramic cylinder 11, a ring-shaped support frame 12, and a cup-shaped rotor 13.
and has.
第２図は本発明の超音波モータに用いる圧電セラミック
ス円柱を示す斜視図である。第３図は本発明の超音波モ
ータに用いる圧電セラミックス円柱の断面図であり、第
３図（ａ）は電極３２，３４を（＋）、電極３１．３３
を（−）にして、電圧を印加した場合の分極の向きを破
線の矢印で示している。第３図（ｂ）は、第３図（ａ）
のように分極した圧電セラミックス円柱において電極３
３．３４を（＋）、電極３１．３２を（−）にして電圧
を印加した場合の断面の歪みを示、す図である。第３図
（ｂ）において、電圧は電極３４から３１、電極３３か
ら３２に印加される。そのために、分極方向に依存して
、圧電セラミックス円柱の周面に沿うように電極３４．
３１間は伸び、電極３３．３２間は縮む。その結果とし
て、第３図（ｂ）において、長さ方向に下側が膨むよう
に屈曲する。また、印加電圧の極性が逆方向であれば、
屈曲も逆になる。FIG. 2 is a perspective view showing a piezoelectric ceramic cylinder used in the ultrasonic motor of the present invention. FIG. 3 is a cross-sectional view of a piezoelectric ceramic cylinder used in the ultrasonic motor of the present invention, and FIG. 3(a) shows electrodes 32 and 34 (+), electrodes 31 and 33
is set to (-) and the direction of polarization when a voltage is applied is shown by a broken arrow. Figure 3(b) is the same as Figure 3(a).
Electrode 3 in a piezoelectric ceramic cylinder polarized as
31.34 is (+) and electrode 31.32 is (-) and a voltage is applied. FIG. In FIG. 3(b), voltages are applied to electrodes 34-31 and electrodes 33-32. Therefore, depending on the polarization direction, the electrodes 34.
The area between electrodes 33 and 32 contracts. As a result, as shown in FIG. 3(b), it is bent so that the lower side swells in the length direction. Also, if the polarity of the applied voltage is in the opposite direction,
The bending is also reversed.
第４図（ａ）及び第４図（ｂ）は圧電セラミックス円柱
１１に交流電圧を加えた場合の振動状態の説明図である
。FIGS. 4(a) and 4(b) are explanatory diagrams of the vibration state when an alternating current voltage is applied to the piezoelectric ceramic cylinder 11. FIG.
電極３３．３４と電極３１．３２間に振動子の共振周波
数に等しい交流電圧を印加した場合、第４図（ａ）のよ
うに、白抜き矢印の方向に屈曲振動を発生する。電極３
１．３３及び３２．３３を接続して同様に振動子の共振
周波数に等しい周波数の交流電圧を印加すると、屈曲振
動の方向は第４図（ａ）の方向と・は直角になる。した
がって、以上の２つの方向の屈曲振動の位相を９０″ず
らせること、具体的には夫々の駆動電極の印加電圧の位
相を９０″ずらせることにより、圧電セラミックス円柱
１１の両端部に、Ｉ！４図（ｂ）に示すような円運動を
含む楕円運動を励起することが可能である。When an AC voltage equal to the resonant frequency of the vibrator is applied between the electrodes 33, 34 and 31, 32, bending vibration is generated in the direction of the white arrow, as shown in FIG. 4(a). Electrode 3
When 1.33 and 32.33 are connected and an alternating current voltage of a frequency equal to the resonant frequency of the vibrator is similarly applied, the direction of bending vibration becomes perpendicular to the direction of FIG. 4(a). Therefore, by shifting the phases of the bending vibrations in the above two directions by 90'', specifically by shifting the phases of the voltages applied to the respective drive electrodes by 90'', I ! It is possible to excite elliptical motion including circular motion as shown in FIG. 4(b).
第５図は圧電セラミックス円柱の振動の節を固定するた
めのリング状支持枠１２を示す図で、゛導体パターンが
形成されている。FIG. 5 shows a ring-shaped support frame 12 for fixing vibration nodes of a piezoelectric ceramic cylinder, and a conductor pattern is formed thereon.
第５図において、導体パターン３５，３６，３７．３８
は絶縁体よりなる圧電セラミックス円柱の電極と位置が
合うように、円周方向に４等分された位置に夫々形成さ
れている。圧電セラミック円柱１１をこのリング状支持
枠１２で支持し、さらにその両端に回転出力伝達のため
の一端に突出軸を有し、他端に孔部を有するカップ状ロ
ータ１３の他端側より付けると第１図示の超音波モータ
となる。In FIG. 5, conductor patterns 35, 36, 37, 38
are formed at positions equally divided into four in the circumferential direction so as to be aligned with the electrodes of a piezoelectric ceramic cylinder made of an insulator. A piezoelectric ceramic cylinder 11 is supported by this ring-shaped support frame 12, and is attached from the other end to a cup-shaped rotor 13, which has a protruding shaft at one end for transmitting rotational output and a hole at the other end. This results in the ultrasonic motor shown in the first diagram.
第６図は本発明の超音波モータにおいて圧電セラミック
ス円柱１１をリング状支持枠で支持し、さらに円筒状外
枠に支持した場合の斜視図あり、圧電セラミックス円柱
１１はリング状支持枠１２でその振動の節を支持される
。圧電セラミックス円柱１１の両端には、カップ状ロー
ター１３が、その空筒部に前記圧電セラミックス円柱１
１の端部が微小隙間をもって、挿入された状態で、装着
されている。リング状支持枠１２は、円筒状外枠１４に
挿入され、円筒状外枠に固定する。 また、円筒状外枠
１４に設けられたリード線引き出し穴１６よりリード線
が引き出されている。第６図において、圧電セラミック
ス円柱１１の端部が楕円運動を行うと、カップ状ロータ
１３の軸は、外枠内に挿入される軸受け１７によって、
回転自在に支持されているために安定に回転する。FIG. 6 is a perspective view of the ultrasonic motor of the present invention in which the piezoelectric ceramic cylinder 11 is supported by a ring-shaped support frame and further supported by a cylindrical outer frame. The nodes of vibration are supported. A cup-shaped rotor 13 is provided at both ends of the piezoelectric ceramic cylinder 11, and a cup-shaped rotor 13 is provided at both ends of the piezoelectric ceramic cylinder 11.
It is installed with the end of 1 inserted with a small gap. The ring-shaped support frame 12 is inserted into the cylindrical outer frame 14 and fixed thereto. Further, a lead wire is drawn out from a lead wire drawing hole 16 provided in the cylindrical outer frame 14. In FIG. 6, when the end of the piezoelectric ceramic cylinder 11 makes an elliptical motion, the axis of the cup-shaped rotor 13 is moved by the bearing 17 inserted into the outer frame.
It rotates stably because it is rotatably supported.
第１図に示したように、本発明においては、リング支持
枠を用いて圧電セラミックス円柱よりなる楕円運動振動
子の振動の節の部分を支持しており、支持枠の形状が対
称的であるため、円を含む楕円運動を励起するための互
いに直角な方向に対して支持による影響・が同じように
作用するため、安定した楕円運動が可能であり、さらに
、外部リード線を圧電セラミックス円柱の電極と電気的
に接続されたリング状の支持枠の導体部より引き出すこ
とにより、リード線の断線も発生しにくくなる。As shown in FIG. 1, in the present invention, a ring support frame is used to support the vibration nodes of an elliptical motion vibrator made of a piezoelectric ceramic cylinder, and the shape of the support frame is symmetrical. Therefore, the influence of support acts in the same way in directions perpendicular to each other to excite elliptical motion including circles, so stable elliptical motion is possible. Furthermore, the external lead wire can be connected to the piezoelectric ceramic cylinder By pulling out the conductor portion of the ring-shaped support frame that is electrically connected to the electrode, breakage of the lead wire becomes less likely to occur.
［発明の効果］
以上説明したように、本発明の超音波モータにおいては
、駆動力を発生させるための振動子の形状が単純で、回
転あるいは、楕円運動振動を発生させるための２つの振
動モードが同じ屈曲振動であることから、構造が簡単に
なる。また、楕円運動振動子として、棒状の振動子を使
用しているため、ローグーの直径を小さくすることが容
易で、ローター直径の小さい超音波モータを得ることが
できる。[Effects of the Invention] As explained above, in the ultrasonic motor of the present invention, the shape of the vibrator for generating driving force is simple, and two vibration modes for generating rotational and elliptical motion vibrations are possible. The structure is simplified because both have the same bending vibration. Furthermore, since a rod-shaped vibrator is used as the elliptical motion vibrator, it is easy to reduce the diameter of the rotor, and an ultrasonic motor with a small rotor diameter can be obtained.
さらに、本発明によれば、外部リード線も圧電セラミッ
クス円柱の電極より直接引き出さず、リング状支持枠の
導体パターンより半田付は等により引き出すことが可能
であるために、強度を増し、外部リード線の断線の可能
性も少なくなる。Furthermore, according to the present invention, the external lead wires are not drawn out directly from the electrodes of the piezoelectric ceramic cylinder, but can be drawn out from the conductor pattern of the ring-shaped support frame by soldering, etc., thereby increasing the strength of the external lead wires. The possibility of wire breakage is also reduced.
第１図は本発明の実施例に係る超音波モータの構成を示
す斜視図、第２図は本発明の超音波モータに用いる圧電
セラミックス円柱を示す斜視図、第３図は本発明の超音
波モータに用いる圧電セラミックス円柱の断面図、第３
図（ａ）は電極３２゜３４を（＋）、電極３１．３３を
（−）にして、電圧を印加した場合の圧電セラミックス
円柱断面の歪みを示す図、第４図（ａ）及び第４図（、
ｂ）は圧電セラミックス円柱に交流電圧を加えた場合の
振動状態の説明図、第５図は圧電セラミックス円柱の振
動の節を固定するためのリング状支持枠を示す斜視図、
第６図は本発明の超音波モータにおいて圧電セラミック
ス円柱をリング状支持枠で支持し、さらに円筒状外枠で
支持した場合の斜視図、第７図及び第８図は従来の超音
波モータの構造例の説明に供する図である。
図中１１は圧電セラミックス円柱、１２はリング状支持
枠、１３はカップ状ローター １４は円筒状外枠、１６
はリード線引き出し穴、１７は軸受け、３１，３２．３
３．３４は電極、５１は金属板、５２．５３は圧電セラ
ミック円板である。FIG. 1 is a perspective view showing the configuration of an ultrasonic motor according to an embodiment of the invention, FIG. 2 is a perspective view showing a piezoelectric ceramic cylinder used in the ultrasonic motor of the invention, and FIG. 3 is an ultrasonic motor of the invention. Cross-sectional view of a piezoelectric ceramic cylinder used in a motor, Part 3
Figure (a) shows the distortion of the piezoelectric ceramic cylinder cross section when a voltage is applied with the electrodes 32 and 34 set to (+) and the electrodes 31 and 33 set to (-). figure(,
b) is an explanatory diagram of the vibration state when an alternating current voltage is applied to the piezoelectric ceramic cylinder; FIG. 5 is a perspective view showing a ring-shaped support frame for fixing the vibration nodes of the piezoelectric ceramic cylinder;
FIG. 6 is a perspective view of the ultrasonic motor of the present invention in which a piezoelectric ceramic cylinder is supported by a ring-shaped support frame and further supported by a cylindrical outer frame, and FIGS. 7 and 8 are of a conventional ultrasonic motor. It is a figure provided for explanation of a structural example. In the figure, 11 is a piezoelectric ceramic cylinder, 12 is a ring-shaped support frame, 13 is a cup-shaped rotor, 14 is a cylindrical outer frame, 16
is the lead wire extraction hole, 17 is the bearing, 31, 32.3
3.34 is an electrode, 51 is a metal plate, and 52.53 is a piezoelectric ceramic disc.
Claims (1)
向に平行な複数対の電極を有し、該圧電セラミックス円
柱の端面が円を含む楕円運動を行う圧電楕円運動振動子
と、該圧電楕円運動振動子の少なくとも一方の端部に配
された楕円運動−回転変換部材と、該圧電セラミックス
円柱の振動の節に設けられた絶縁材料よりなる支持部材
とを有し、前記圧電楕円運動振動子の楕円運動を前記楕
円運動−回転変換部材により回転運動に変換して回転出
力を得る超音波モータにおいて、 前記支持部材は、前記電極と対応した位置に導体パタ
ーンが形成されたリング形状を有し、前記電極と前記導
体パターンとを電気的に接続し、前記導体パターンより
外部リードを引き出したことを特徴とする超音波モータ
。1. A piezoelectric elliptic motion vibrator having a plurality of pairs of electrodes parallel to the length direction provided on the side surface of a piezoelectric ceramic cylinder, and in which the end face of the piezoelectric ceramic cylinder makes an elliptical motion including a circle, and the piezoelectric elliptic motion vibrator an elliptical motion-rotation conversion member disposed at at least one end of the piezoelectric ceramic cylinder, and a support member made of an insulating material provided at a vibration node of the piezoelectric ceramic cylinder, In the ultrasonic motor that obtains a rotational output by converting the rotational motion into rotational motion by the elliptical motion-rotation conversion member, the support member has a ring shape with a conductor pattern formed at a position corresponding to the electrode, and the support member has a ring shape with a conductive pattern formed at a position corresponding to the electrode. and the conductor pattern are electrically connected to each other, and external leads are drawn out from the conductor pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63233803A JPH074074B2 (en) | 1988-09-20 | 1988-09-20 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63233803A JPH074074B2 (en) | 1988-09-20 | 1988-09-20 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0284078A true JPH0284078A (en) | 1990-03-26 |
| JPH074074B2 JPH074074B2 (en) | 1995-01-18 |
Family
ID=16960830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63233803A Expired - Lifetime JPH074074B2 (en) | 1988-09-20 | 1988-09-20 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074074B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5218258A (en) * | 1990-09-04 | 1993-06-08 | Mitsubishi Jukogyo Kabushiki Kaisha | Ultrasonic motor and laser beam welding apparatus using the same |
| EP0635930A1 (en) * | 1993-02-05 | 1995-01-25 | Oki Electric Industry Company, Limited | Ultrasonic motor and ultrasonic wave carrier |
| US5883460A (en) * | 1996-06-28 | 1999-03-16 | Ultex Corporation | Support unit for ultrasonic vibration resonator |
| US6885615B1 (en) | 1998-12-21 | 2005-04-26 | Seiko Epson Corporation | Piezoelectric actuator, time piece, and portable device |
| JP2006238644A (en) * | 2005-02-25 | 2006-09-07 | Seiko Instruments Inc | Piezoelectric actuator and electronic equipment using the same |
| KR100691270B1 (en) * | 2005-08-05 | 2007-03-12 | 삼성전기주식회사 | Supporting Structure For Finding the Nodal Point on the Piezoelectric Stator Automatically |
| JP2008253070A (en) * | 2007-03-30 | 2008-10-16 | Canon Inc | Vibration wave driver and oscillator |
| JP2008544315A (en) * | 2005-06-14 | 2008-12-04 | ニュー スケール テクノロジーズ インコーポレーティッド | Mechanism including ultrasonic lead screw motor |
| US7638926B2 (en) | 2005-08-05 | 2009-12-29 | Samsung Electro-Mechanics Co., Ltd. | Piezoelectric ultrasonic motor |
| US7862002B2 (en) | 2006-11-15 | 2011-01-04 | Ckd Corporation | Vacuum valve |
-
1988
- 1988-09-20 JP JP63233803A patent/JPH074074B2/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5218258A (en) * | 1990-09-04 | 1993-06-08 | Mitsubishi Jukogyo Kabushiki Kaisha | Ultrasonic motor and laser beam welding apparatus using the same |
| EP0635930A1 (en) * | 1993-02-05 | 1995-01-25 | Oki Electric Industry Company, Limited | Ultrasonic motor and ultrasonic wave carrier |
| EP0635930A4 (en) * | 1993-02-05 | 1997-07-23 | Oki Electric Ind Co Ltd | Ultrasonic motor and ultrasonic wave carrier. |
| US5883460A (en) * | 1996-06-28 | 1999-03-16 | Ultex Corporation | Support unit for ultrasonic vibration resonator |
| US7253552B2 (en) | 1998-12-21 | 2007-08-07 | Seiko Epson Corporation | Piezoelectric actuator, timepiece, and portable device |
| US6885615B1 (en) | 1998-12-21 | 2005-04-26 | Seiko Epson Corporation | Piezoelectric actuator, time piece, and portable device |
| US7078847B2 (en) | 1998-12-21 | 2006-07-18 | Seiko Epson Corporation | Piezoelectric actuator, timepiece, and portable device |
| JP2006238644A (en) * | 2005-02-25 | 2006-09-07 | Seiko Instruments Inc | Piezoelectric actuator and electronic equipment using the same |
| JP4550620B2 (en) * | 2005-02-25 | 2010-09-22 | セイコーインスツル株式会社 | Piezoelectric actuator and electronic device using the same |
| JP2008544315A (en) * | 2005-06-14 | 2008-12-04 | ニュー スケール テクノロジーズ インコーポレーティッド | Mechanism including ultrasonic lead screw motor |
| KR100691270B1 (en) * | 2005-08-05 | 2007-03-12 | 삼성전기주식회사 | Supporting Structure For Finding the Nodal Point on the Piezoelectric Stator Automatically |
| US7638926B2 (en) | 2005-08-05 | 2009-12-29 | Samsung Electro-Mechanics Co., Ltd. | Piezoelectric ultrasonic motor |
| US7834516B2 (en) | 2005-08-05 | 2010-11-16 | Samsung Electro-Mechanics Co., Ltd. | Piezoelectric ultrasonic motor |
| US7862002B2 (en) | 2006-11-15 | 2011-01-04 | Ckd Corporation | Vacuum valve |
| JP2008253070A (en) * | 2007-03-30 | 2008-10-16 | Canon Inc | Vibration wave driver and oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH074074B2 (en) | 1995-01-18 |
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