JPH02177582A - Gas laser oscillation device - Google Patents
Gas laser oscillation deviceInfo
- Publication number
- JPH02177582A JPH02177582A JP33379788A JP33379788A JPH02177582A JP H02177582 A JPH02177582 A JP H02177582A JP 33379788 A JP33379788 A JP 33379788A JP 33379788 A JP33379788 A JP 33379788A JP H02177582 A JPH02177582 A JP H02177582A
- Authority
- JP
- Japan
- Prior art keywords
- gas pressure
- solenoid valve
- laser
- gas
- laser gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 title claims description 5
- 239000003595 mist Substances 0.000 claims abstract description 23
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 9
- 101100204059 Caenorhabditis elegans trap-2 gene Proteins 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は放電管の軸方向と光軸方向を一致させ、常時一
定のレーザビームを発振できるようにしたガスレーザ発
振装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction are aligned so that a constant laser beam can be oscillated at all times.
従来の技術
放電空間の一端に全反射鏡、他端に部分反射鏡を固定す
ることにより光共振器を形成し、部分反射鏡からレーザ
ビームを出力し、送気管を介してレーザガスを循環させ
るガスレーザ装置において、従来レーザガスを循環させ
るためのフロア周辺は第６図に示すように構成されてい
た。Conventional technology A gas laser that forms an optical resonator by fixing a total reflection mirror at one end of the discharge space and a partial reflection mirror at the other end, outputs a laser beam from the partial reflection mirror, and circulates laser gas through an air pipe. In the conventional apparatus, the area around the floor for circulating the laser gas was constructed as shown in FIG.
第６図において、１９はブロワ、２０はガス圧調整電磁
弁で、レーザガス系内のレーザガス圧を一定にしている
。 ２１はオイルトラップで、前記ブロワ１９に設けた
ギア室２２から発生するオイルミストをトラップし液化
して、前記ギア室２２に戻す、２３はガス圧センサで、
前記レーザガス圧を検出する。In FIG. 6, 19 is a blower, and 20 is a gas pressure regulating electromagnetic valve, which keeps the laser gas pressure in the laser gas system constant. 21 is an oil trap that traps oil mist generated from the gear chamber 22 provided in the blower 19, liquefies it, and returns it to the gear chamber 22; 23 is a gas pressure sensor;
Detecting the laser gas pressure.
２４は自動−制御回路で、設定ガス圧と前記レーザガス
圧センサ２３からの信号とを比較して前記ガス圧調整電
磁弁２０を開閉する。又、レーザガス補給管２５より常
時一定量の新しいレーザガスが補給される。２６はガス
フィルタでレーザガス系内へのオイルミストの流入を防
止している。２７は真空ポンプで、前記レーザガス補給
管２５から補給した量のレーザガスを常時レーザガス系
外に排出する。24 is an automatic control circuit which opens and closes the gas pressure regulating solenoid valve 20 by comparing the set gas pressure with the signal from the laser gas pressure sensor 23; Further, a constant amount of new laser gas is always supplied from the laser gas supply pipe 25. A gas filter 26 prevents oil mist from entering the laser gas system. A vacuum pump 27 constantly discharges the amount of laser gas supplied from the laser gas supply pipe 25 to the outside of the laser gas system.
上記のように構成された軸流型レーザ装置において、レ
ーザガス圧を一定にする動作について説明する。In the axial flow laser device configured as described above, an operation for keeping the laser gas pressure constant will be explained.
レーザガス補給管２５から新しいレーザガスを常時補給
しているので、レーザガス系内のガス圧を一定に保つに
は、その補給量の分だけ真空ポンプ２７によりレーザガ
ス系外に排出する必要がある。Since new laser gas is constantly replenished from the laser gas supply pipe 25, in order to keep the gas pressure within the laser gas system constant, it is necessary to discharge the supplied amount out of the laser gas system using the vacuum pump 27.
この時、真空ポンプ２７の排気速度の変動等の影響を除
外するため、自動制御回路２４がガス圧センサ２３から
のレーザガス圧に関する情報と設定ガス圧とを常時比較
してレーザガス系内のガス圧を一定になるようガス圧調
整電磁弁２０を制御している。At this time, in order to exclude the influence of fluctuations in the pumping speed of the vacuum pump 27, etc., the automatic control circuit 24 constantly compares the information regarding the laser gas pressure from the gas pressure sensor 23 with the set gas pressure to determine the gas pressure in the laser gas system. The gas pressure regulating solenoid valve 20 is controlled so that the pressure is kept constant.
発明が解決しようとする課題
上記のような構成及び作用を有する従来の装置は、第７
図に示すようにブロワ１９に設けたギア室２２内のガス
圧がガス圧調整電磁弁２０の開閉により変動するために
ギア室２２内のオイルミストが多量にオイルトラップ２
Ｉに流入する。その結果オイルトラップ２１では取りき
れなかったオイルミストがガス圧調整電磁弁２０に流入
し、ガス圧調整電磁弁２０を固着する等、開閉機能を損
ない、レーザガス系内のガス圧を調整することができな
くなるという問題があった。Problems to be Solved by the Invention The conventional device having the configuration and operation as described above is
As shown in the figure, since the gas pressure in the gear chamber 22 provided in the blower 19 fluctuates due to the opening and closing of the gas pressure regulating solenoid valve 20, a large amount of oil mist in the gear chamber 22 is generated in the oil trap 2.
Flows into I. As a result, oil mist that could not be removed by the oil trap 21 flows into the gas pressure adjustment solenoid valve 20, causing the gas pressure adjustment solenoid valve 20 to become stuck, impairing its opening/closing function, and preventing the gas pressure within the laser gas system from being adjusted. The problem was that I couldn't do it.
本発明の目的は上記問題点を解決するために、ブロワに
設けたギア室から流出するオイルミストを最少限に抑制
し、信頼性の優れたガスレーザ発振装置を提供しようと
するものである。SUMMARY OF THE INVENTION In order to solve the above problems, an object of the present invention is to provide a highly reliable gas laser oscillation device that minimizes oil mist flowing out from a gear chamber provided in a blower.
課題を解決するための手段
上記目的達成のため本発明は、放電管を有するレーザガ
ス系内を光軸方向にレーザガスを流すためのブロワと、
前記レーザガス系内のレーザガス圧を一定にするための
ガス圧調整電磁弁と、前記ブロワのギア室から発生する
オイルミストをトラップし液化して前記ギア室にもどす
ためのオイルトラップと、前記ギア室のガス圧を一定に
するためのギア室電磁弁と、前記レーザガス系内のガス
圧を検出するためのガス圧センサと、設定ガス圧に対し
前記ガス圧センサ信号と比較して前記ガス圧調整電磁弁
及び前記ギア室電磁弁を開閉するための自動制御回路と
、常時一定量の新しいレーザガスを補給するためのレー
ザガス補給管と、レーザガス系内へのオイルミスト流入
を防止するためのガスフィルタと、前記レーザガス系内
に補給した量のレーザガスを常時前記レーザガス系外へ
排出するための真空ポンプを備えたガスレーザ発振装置
とした。Means for Solving the Problems To achieve the above object, the present invention provides a blower for flowing laser gas in the optical axis direction within a laser gas system having a discharge tube;
a gas pressure adjustment solenoid valve for making the laser gas pressure in the laser gas system constant; an oil trap for trapping and liquefying oil mist generated from the gear chamber of the blower; and returning the liquefied oil mist to the gear chamber; and the gear chamber. a gear chamber solenoid valve for making the gas pressure constant; a gas pressure sensor for detecting the gas pressure in the laser gas system; and a gas pressure adjustment device that compares the gas pressure sensor signal with respect to the set gas pressure. An automatic control circuit for opening and closing a solenoid valve and the gear chamber solenoid valve, a laser gas replenishment pipe for constantly replenishing a constant amount of new laser gas, and a gas filter for preventing oil mist from flowing into the laser gas system. , the gas laser oscillation device is provided with a vacuum pump for constantly discharging the amount of laser gas replenished into the laser gas system to the outside of the laser gas system.
作用
本発明は上記のような構成を採ったので、自動制御回路
によって、ガス圧調整電磁弁の開閉動作に応じて、ギア
室電磁弁を開閉するよう°制御し、ブロワに設けたギア
室内のガス圧を一定にすることができ、前記ギア室内か
ら流出するオイルミスト量な最少限に抑制することがで
きる。Operation Since the present invention has the above-described configuration, the automatic control circuit controls the opening and closing of the gear chamber solenoid valve in accordance with the opening and closing operations of the gas pressure regulating solenoid valve. The gas pressure can be kept constant, and the amount of oil mist flowing out from the gear chamber can be suppressed to a minimum.
実施例
第１図は本発明の一実施例として示した軸流ガスレーザ
装置のブロック図である。Embodiment FIG. 1 is a block diagram of an axial gas laser apparatus shown as an embodiment of the present invention.
１はガラス等の誘電体から成る放電管で、２は全反射鏡
、３は部分反射鏡、４は放電空間で、端に全反射鏡２を
固定し、他端に部分反射鏡３を固定することにより光共
振器を形成している。５は部分反射鏡３より出力したレ
ーザビームを示している。６はレーザガスを循環させる
ブロワ、７はレーザガス循環用の送気管で、放電管１と
連通し、レーザガスは矢印Ｘで示すように循環している
。８．９は熱交換器で、ブロワ６の吸気側と送風側に設
けられ、前記放電空間４で放電により温度上昇したレー
ザガスの温度を低下させる。1 is a discharge tube made of a dielectric material such as glass, 2 is a total reflection mirror, 3 is a partial reflection mirror, and 4 is a discharge space, with the total reflection mirror 2 fixed at one end and the partial reflection mirror 3 fixed at the other end. By doing so, an optical resonator is formed. Reference numeral 5 indicates a laser beam output from the partial reflecting mirror 3. 6 is a blower for circulating the laser gas, and 7 is an air supply pipe for circulating the laser gas, which communicates with the discharge tube 1, and the laser gas is circulated as shown by the arrow X. A heat exchanger 8.9 is provided on the intake side and the blowing side of the blower 6, and lowers the temperature of the laser gas that has increased in temperature due to discharge in the discharge space 4.
第２図は前記ブロワ６周辺の拡大ブロック図である。１
０はガス圧調整電磁弁で、レーザガス系内のレーザガス
圧を一定にする。■はオイルトラップで、ブロワ６のギ
ア室１２から発生するオイルミストをトラップし液化し
て、前記ギア室！２に戻す、１３はギア室電磁弁で、前
記オイルトラップＩＩの出口に設け、ギア室１２内のガ
ス圧を一定にする。 １４はガス圧センサでレーザガス
系内のガス圧を検出する。 ＋５は自動制御回路で、レ
ーザガス系内の設定ガス圧と前記レーザガス圧センサ１
４からの信号とを比較して、前記ガス圧調整電磁弁１ｏ
とギア室電磁弁暑３との開閉を制御している。１６はレ
ーザガス補給管で、常時一定量の新しいレーザガスを補
給している。１７は真空ポンプで、前記レーザガス補給
管１６から補給した量のレーザガスを常時レーザガス系
外に排出する。 １８はガスフィルタで、レーザガス系
内へのオイルミストの流入を防止している。FIG. 2 is an enlarged block diagram of the vicinity of the blower 6. 1
0 is a gas pressure adjustment solenoid valve that keeps the laser gas pressure in the laser gas system constant. ■ is an oil trap that traps the oil mist generated from the gear chamber 12 of the blower 6 and liquefies it. Returning to 2, 13 is a gear chamber solenoid valve, which is provided at the outlet of the oil trap II to keep the gas pressure in the gear chamber 12 constant. A gas pressure sensor 14 detects the gas pressure within the laser gas system. +5 is an automatic control circuit that controls the set gas pressure in the laser gas system and the laser gas pressure sensor 1.
4, the gas pressure regulating solenoid valve 1o
It controls the opening and closing of the gear room solenoid valve 3. Reference numeral 16 denotes a laser gas replenishment pipe, which constantly supplies a constant amount of new laser gas. A vacuum pump 17 constantly discharges the amount of laser gas supplied from the laser gas supply pipe 16 to the outside of the laser gas system. A gas filter 18 prevents oil mist from flowing into the laser gas system.
上記実施例において、ガス圧調整電磁弁！０とギア室電
磁弁１３とは第３図に示すように、自動制御回路１５に
よって一方が開状態のとき、他方が閉状態に制御される
ことにより、第４図に実線で示すようにブロワのギア室
ｌｚ内のガス圧を一定に保つことができ、従来例（点Ｍ
）のようにギア室１２内のガス圧に変動がない。従って
ギア室１２内のオイルミストの発生量も第５図に示すよ
うに従来例にくらべて著しく少なく、且つ時間が経過し
ても少ないオイルミスト発生量を維持している。In the above embodiment, the gas pressure regulating solenoid valve! 0 and the gear chamber solenoid valve 13, as shown in FIG. 3, when one is in the open state and the other is controlled by the automatic control circuit 15 in the closed state, the blower is closed as shown by the solid line in FIG. The gas pressure in the gear chamber lz can be kept constant, and the conventional example (point M
), there is no fluctuation in the gas pressure inside the gear chamber 12. Therefore, as shown in FIG. 5, the amount of oil mist generated within the gear chamber 12 is significantly smaller than that of the conventional example, and the amount of oil mist generated is maintained at a small amount even with the passage of time.
上記のような構成及び作用を有するので、オイルトラッ
プに流通能力以上にオイルミストが流れるおそれがなく
、オイルミストにより、ガス圧調整電磁弁を損傷するお
それがなく、安定したレーザ加工を行なうことができる
。With the above structure and function, there is no risk of oil mist flowing into the oil trap beyond its flow capacity, and there is no risk of oil mist damaging the gas pressure regulating solenoid valve, allowing stable laser processing. can.
発明の効果
本発明は上記のような構成及び作用を有するので、ブロ
ワに設けたギア室でのオイルミストの発生量を最小限に
することができ、オイルトラップの能力以上に流れるこ
とがなく、ガス圧調整電磁弁まで流出することがない、
従って、ガス圧調整電磁弁はオイルミストによって固着
させられる等、その開閉機能を損なうこともなく、装置
の信頼性が高く優れたレーザ加工を行なうことができる
等の効果を有する。Effects of the Invention Since the present invention has the above-described configuration and operation, the amount of oil mist generated in the gear chamber provided in the blower can be minimized, and the oil mist does not flow beyond the capacity of the oil trap. No leakage to the gas pressure adjustment solenoid valve.
Therefore, the gas pressure regulating solenoid valve is not fixed by the oil mist and its opening/closing function is not impaired, and the apparatus has the advantage of being highly reliable and capable of performing excellent laser processing.
第１図は本発明によるガスレーザ装置の一実施例を示す
ブロック図、第２図は第１図のブロワ周辺の拡大ブロッ
ク図、第３図は本発明装置のギア室電磁弁とガス圧調整
電磁弁との開閉関係を示した説明図、第４図はブロワに
設けたギア室のガス圧の状態を示したもので、本発明装
置と従来例とを比較した説明図、第５図は従来例と本発
明とのオイルミスト発生量の違いを示した説明図、第６
図は従来のガスレーザ発振器のブロワ周辺の拡大ブロッ
ク図、第７図は従来のガス圧調整電磁弁の開閉動作とブ
ロワに設けたギア室のガス圧との関連を示した説明図で
ある。
１・・・放電管 ６・・・ブロワ
０・・・ガス圧調整電磁弁 １１・・・オイルトラッ
プ２・・・ギア室 １３・・・ギア室電磁弁４・・・
ガス圧センサ １５・・・自動制御回路６・・・レー
ザガス補給管 １７・・・真空ポンプ８・・・ガスフ
ィルタ
第１図
１：放電管
６：ブロワFig. 1 is a block diagram showing an embodiment of the gas laser device according to the present invention, Fig. 2 is an enlarged block diagram of the vicinity of the blower in Fig. 1, and Fig. 3 is a gear chamber solenoid valve and gas pressure adjustment solenoid of the device of the present invention. An explanatory diagram showing the opening/closing relationship with the valve, Fig. 4 shows the state of gas pressure in the gear chamber provided in the blower, an explanatory diagram comparing the device of the present invention with a conventional example, and Fig. 5 shows a conventional example. Explanatory diagram showing the difference in oil mist generation amount between the example and the present invention, No. 6
The figure is an enlarged block diagram of the area around the blower of a conventional gas laser oscillator, and FIG. 7 is an explanatory diagram showing the relationship between the opening/closing operation of a conventional gas pressure regulating solenoid valve and the gas pressure in a gear chamber provided in the blower. 1...Discharge tube 6...Blower 0...Gas pressure adjustment solenoid valve 11...Oil trap 2...Gear chamber 13...Gear chamber solenoid valve 4...
Gas pressure sensor 15... Automatic control circuit 6... Laser gas supply tube 17... Vacuum pump 8... Gas filter 1 Figure 1: Discharge tube 6: Blower
Claims (1)
ザガスを流すためのブロワと、前記レーザガス系内のレ
ーザガス圧を一定にするためのガス圧調整電磁弁と、前
記ブロワのギア室から発生するオイルミストをトラップ
し液化して前記ギア室にもどすためのオイルトラップと
、前記ギア室のガス圧を一定にするためのギア室電磁弁
と、前記レーザガス系内のガス圧を検出するためのガス
圧センサと、設定ガス圧に対し前記ガス圧センサ信号と
比較して前記ガス圧調整電磁弁及び前記ギア室電磁弁を
開閉するための自動制御回路と、常時一定量の新しいレ
ーザガスを補給するためのレーザガス補給管と、レーザ
ガス系内へのオイルミスト流入を防止するためのガスフ
ィルタと、前記レーザガス系内に補給した量のレーザガ
スを常時前記レーザガス系外へ排出するための真空ポン
プを備えたことを特徴とするガスレーザ発振装置。(1) A blower for flowing laser gas in the optical axis direction in a laser gas system having a discharge tube, a gas pressure adjustment solenoid valve for making the laser gas pressure in the laser gas system constant, and generation from the gear chamber of the blower. an oil trap for trapping and liquefying oil mist and returning it to the gear chamber; a gear chamber solenoid valve for keeping the gas pressure in the gear chamber constant; and a gear chamber solenoid valve for detecting the gas pressure in the laser gas system. a gas pressure sensor, an automatic control circuit for opening and closing the gas pressure regulating solenoid valve and the gear room solenoid valve by comparing the gas pressure sensor signal with respect to a set gas pressure, and constantly replenishing a constant amount of new laser gas. a gas filter for preventing oil mist from flowing into the laser gas system, and a vacuum pump for constantly discharging the amount of laser gas replenished into the laser gas system out of the laser gas system. A gas laser oscillation device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63333797A JPH0736459B2 (en) | 1988-12-28 | 1988-12-28 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63333797A JPH0736459B2 (en) | 1988-12-28 | 1988-12-28 | Gas laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02177582A true JPH02177582A (en) | 1990-07-10 |
| JPH0736459B2 JPH0736459B2 (en) | 1995-04-19 |
Family
ID=18270065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63333797A Expired - Lifetime JPH0736459B2 (en) | 1988-12-28 | 1988-12-28 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0736459B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7580439B2 (en) * | 2004-10-07 | 2009-08-25 | Panasonic Corporation | Gas laser oscillator |
-
1988
- 1988-12-28 JP JP63333797A patent/JPH0736459B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7580439B2 (en) * | 2004-10-07 | 2009-08-25 | Panasonic Corporation | Gas laser oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0736459B2 (en) | 1995-04-19 |
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