JP7504081B2 - エッチング組成物 - Google Patents
エッチング組成物 Download PDFInfo
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- JP7504081B2 JP7504081B2 JP2021513969A JP2021513969A JP7504081B2 JP 7504081 B2 JP7504081 B2 JP 7504081B2 JP 2021513969 A JP2021513969 A JP 2021513969A JP 2021513969 A JP2021513969 A JP 2021513969A JP 7504081 B2 JP7504081 B2 JP 7504081B2
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- 239000000203 mixture Substances 0.000 title claims description 173
- 238000005530 etching Methods 0.000 title claims description 112
- 238000000034 method Methods 0.000 claims description 82
- 239000004065 semiconductor Substances 0.000 claims description 56
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 48
- 229910017107 AlOx Inorganic materials 0.000 claims description 47
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 31
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 30
- 239000002245 particle Substances 0.000 claims description 30
- 239000003989 dielectric material Substances 0.000 claims description 22
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 21
- 229910017604 nitric acid Inorganic materials 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 15
- 230000007797 corrosion Effects 0.000 claims description 15
- 238000005260 corrosion Methods 0.000 claims description 15
- 239000003112 inhibitor Substances 0.000 claims description 15
- 239000004094 surface-active agent Substances 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 11
- 239000002904 solvent Substances 0.000 claims description 10
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 125000003277 amino group Chemical group 0.000 claims description 7
- 229910052785 arsenic Inorganic materials 0.000 claims description 6
- 229910052791 calcium Inorganic materials 0.000 claims description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052745 lead Inorganic materials 0.000 claims description 6
- 229910052744 lithium Inorganic materials 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- 229910052748 manganese Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 229910052700 potassium Inorganic materials 0.000 claims description 6
- 229910052708 sodium Inorganic materials 0.000 claims description 6
- 229910052712 strontium Inorganic materials 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 150000003536 tetrazoles Chemical class 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 5
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 58
- 238000012360 testing method Methods 0.000 description 30
- 238000009472 formulation Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 21
- 239000010410 layer Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 241001449342 Chlorocrambe hastata Species 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
- 150000002430 hydrocarbons Chemical group 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- -1 polysiloxane Polymers 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 238000013019 agitation Methods 0.000 description 5
- 239000002518 antifoaming agent Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 239000000908 ammonium hydroxide Substances 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 150000001923 cyclic compounds Chemical class 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000015654 memory Effects 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000012488 sample solution Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000012085 test solution Substances 0.000 description 2
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical compound C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- KJUGUADJHNHALS-UHFFFAOYSA-N 1H-tetrazole Substances C=1N=NNN=1 KJUGUADJHNHALS-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- GDDNTTHUKVNJRA-UHFFFAOYSA-N 3-bromo-3,3-difluoroprop-1-ene Chemical compound FC(F)(Br)C=C GDDNTTHUKVNJRA-UHFFFAOYSA-N 0.000 description 1
- LRUDIIUSNGCQKF-UHFFFAOYSA-N 5-methyl-1H-benzotriazole Chemical compound C1=C(C)C=CC2=NNN=C21 LRUDIIUSNGCQKF-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229940123973 Oxygen scavenger Drugs 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical class C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- ZUQAPLKKNAQJAU-UHFFFAOYSA-N acetylenediol Chemical compound OC#CO ZUQAPLKKNAQJAU-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- KHPLPBHMTCTCHA-UHFFFAOYSA-N ammonium chlorate Chemical compound N.OCl(=O)=O KHPLPBHMTCTCHA-UHFFFAOYSA-N 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- ZRDJERPXCFOFCP-UHFFFAOYSA-N azane;iodic acid Chemical compound [NH4+].[O-]I(=O)=O ZRDJERPXCFOFCP-UHFFFAOYSA-N 0.000 description 1
- YUUVAZCKXDQEIS-UHFFFAOYSA-N azanium;chlorite Chemical compound [NH4+].[O-]Cl=O YUUVAZCKXDQEIS-UHFFFAOYSA-N 0.000 description 1
- URGYLQKORWLZAQ-UHFFFAOYSA-N azanium;periodate Chemical compound [NH4+].[O-]I(=O)(=O)=O URGYLQKORWLZAQ-UHFFFAOYSA-N 0.000 description 1
- 150000003851 azoles Chemical class 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 239000003139 biocide Substances 0.000 description 1
- ZCILODAAHLISPY-UHFFFAOYSA-N biphenyl ether Natural products C1=C(CC=C)C(O)=CC(OC=2C(=CC(CC=C)=CC=2)O)=C1 ZCILODAAHLISPY-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical class OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- SYELZBGXAIXKHU-UHFFFAOYSA-N dodecyldimethylamine N-oxide Chemical group CCCCCCCCCCCC[N+](C)(C)[O-] SYELZBGXAIXKHU-UHFFFAOYSA-N 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- PJUIMOJAAPLTRJ-UHFFFAOYSA-N monothioglycerol Chemical compound OCC(O)CS PJUIMOJAAPLTRJ-UHFFFAOYSA-N 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- 150000002790 naphthalenes Chemical class 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 description 1
- 239000001230 potassium iodate Substances 0.000 description 1
- 229940093930 potassium iodate Drugs 0.000 description 1
- 235000006666 potassium iodate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 159000000001 potassium salts Chemical class 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- LUVHDTDFZLTVFM-UHFFFAOYSA-M tetramethylazanium;chlorate Chemical compound [O-]Cl(=O)=O.C[N+](C)(C)C LUVHDTDFZLTVFM-UHFFFAOYSA-M 0.000 description 1
- FDXKBUSUNHRUIZ-UHFFFAOYSA-M tetramethylazanium;chlorite Chemical compound [O-]Cl=O.C[N+](C)(C)C FDXKBUSUNHRUIZ-UHFFFAOYSA-M 0.000 description 1
- ZRVXFJFFJZFRLQ-UHFFFAOYSA-M tetramethylazanium;iodate Chemical compound [O-]I(=O)=O.C[N+](C)(C)C ZRVXFJFFJZFRLQ-UHFFFAOYSA-M 0.000 description 1
- ZCWKIFAQRXNZCH-UHFFFAOYSA-M tetramethylazanium;perchlorate Chemical compound C[N+](C)(C)C.[O-]Cl(=O)(=O)=O ZCWKIFAQRXNZCH-UHFFFAOYSA-M 0.000 description 1
- HLQAWDQQEJSALG-UHFFFAOYSA-M tetramethylazanium;periodate Chemical compound C[N+](C)(C)C.[O-]I(=O)(=O)=O HLQAWDQQEJSALG-UHFFFAOYSA-M 0.000 description 1
- 229940035024 thioglycerol Drugs 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- AQLJVWUFPCUVLO-UHFFFAOYSA-N urea hydrogen peroxide Chemical compound OO.NC(N)=O AQLJVWUFPCUVLO-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/06—Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
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Description
本出願は2018年9月12日に出願された米国仮出願第62/730,043号の優先権を主張し、その内容は、その全体が参照により本明細書に組み込まれる。
開示の分野
本開示は、金属導体、バリア材料、絶縁体材料(例えば、高k誘電体材料)などの他の露出したまたは下にある材料の存在下で、酸化アルミニウム(Al2O3などのAlOx)、タングステン(W)および/または窒化チタン(TiN)を選択的にエッチングするための組成物およびプロセスに関する。
(A)AlOx、Wおよび/またはTiNを含む半導体基板を提供する工程と、
(B)半導体基板を本明細書に記載のエッチング組成物と接触させる工程と、
(C)半導体基板を1種または複数種の適切なリンス溶媒でリンスする工程と、
(D)任意選択で、(例えば、リンス溶媒を除去し且つ半導体基板の完全性を損なわない任意の好適な手段によって)半導体基板を乾燥させる工程と、
を含む。
配合ブレンド
材料及び方法
ビーカー試験によるエッチング評価
1.スピアヘッドなし(1%未満)
2.わずかなスピアヘッド(3%未満)
3.ある程度のスピアヘッド(5%未満)
4.ひどいスピアヘッド(10%超)
本願発明の例示的な態様を以下に記載する。
<1>
エッチング組成物であって、
前記組成物の約65重量%~約90重量%の量のリン酸と、
前記組成物の約0.01重量%~約4重量%の量の酢酸と、
前記組成物の約0.01重量%~約5重量%の量の硝酸と、
水と、
を含む、エッチング組成物。
<2>
前記リン酸が、前記組成物の約70重量%~約85重量%の量で存在する、<1>に記載の組成物。
<3>
前記リン酸が、前記組成物の約72重量%~約76重量%の量で存在する、<1>に記載の組成物。
<4>
前記酢酸が、前記組成物の約0.1重量%~約3.5重量%の量で存在する、<1>に記載の組成物。
<5>
前記酢酸が、前記組成物の約0.3重量%~約0.7重量%の量で存在する、<1>に記載の組成物。
<6>
前記硝酸が、前記組成物の約0.05重量%~約4重量%の量で存在する、<1>に記載の組成物。
<7>
前記硝酸が、前記組成物の約0.3重量%~約0.7重量%の量で存在する、<1>に記載の組成物。
<8>
前記水が、前記組成物の約10重量%~約30重量%の量で存在する、<1>に記載の組成物。
<9>
Sbをさらに含む、<1>に記載の組成物。
<10>
前記Sbが、前記組成物の約1ppb~約100ppbの量で存在する、<9>に記載の組成物。
<11>
Cu、K、Ca、Na、Fe、Pb、Sr、As、Ni、Mn、Mg、およびLiからなる群から選択される1種または複数種の金属元素をさらに含む、<9>に記載の組成物。
<12>
前記Sbの量が、Cu、K、Ca、Pb、Sr、As、Ni、Mn、Mg、およびLiの各々の量よりも多い、<9>に記載の組成物。
<13>
前記Sbの量が、NaおよびFeの各々の量よりも多い、<9>に記載の組成物。
<14>
少なくとも1種の金属腐食防止剤をさらに含む、<1>に記載の組成物。
<15>
前記少なくとも1種の金属腐食防止剤が、式(A)の化合物、式(B)の化合物、式(C)の化合物、または置換テトラゾールを含む、<14>に記載の組成物:
式中、
R 1A ~R 5A は、それぞれ独立に、水素原子、置換もしくは非置換の炭化水素基、ヒドロキシル基、チオール基、カルボキシ基、または置換もしくは非置換のアミノ基であり、但し、ヒドロキシル基、カルボキシ基、および置換もしくは非置換のアミノ基から選択される少なくとも1つの基が式(A)に含まれており、
R 1B ~R 4B は、それぞれ独立に、水素原子、ヒドロキシル基、または置換もしくは非置換の炭化水素基であり、
R 1C 、R 2C およびR N は、それぞれ独立に、水素原子または置換もしくは非置換の炭化水素基であるか、または、R 1C およびR 2C は、それらが結合している炭素原子と共に、環を形成している。
<16>
前記少なくとも1種の金属腐食防止剤が、前記組成物の約0.0001重量%~約1重量%の量で存在する、<14>に記載の組成物。
<17>
約0.1μm~約1μmの平均サイズを有する複数の粒子をさらに含む、<1>に記載の組成物。
<18>
前記複数の粒子が、前記組成物の最大で約150個/mlの量で存在する、<17>に記載の組成物。
<19>
少なくとも1種のアルミニウムエッチング界面活性剤をさらに含む、<1>に記載の組成物。
<20>
前記少なくとも1種のアルミニウムエッチング界面活性剤が、式(D):R-N(CH 3 ) 2 -O(D)(RはC 8 -C 24 アルキルである)の化合物を含む、<19>に記載の組成物。
<21>
前記少なくとも1種のアルミニウムエッチング界面活性剤が、前記組成物の約0.0001重量%~約1重量%の量で存在する、<19>に記載の組成物。
<22>
前記組成物が、リン酸、酢酸、硝酸、および水のみからなる、<1>に記載の組成物。
<23>
AlOx、WまたはTiNを含む半導体基板を<1>~<22>のいずれか1項に記載の組成物と接触させて前記AlOx、WまたはTiNを除去することを含む、方法。
<24>
前記接触させる工程の後に、前記半導体基板をリンス溶媒でリンスすることをさらに含む、<23>に記載の方法。
<25>
前記リンスする工程の後に、前記半導体基板を乾燥させることをさらに含む、<24>に記載の方法。
<26>
前記方法が、前記半導体基板上のCuまたは誘電体材料を実質的に除去しない、<23>に記載の方法。
<27>
前記方法が、WまたはTiNに対してAlOxを選択的にエッチングする、<23>に記載の方法。
<28>
<23>に記載の方法によって形成された物品であって、半導体デバイスである物品。
<29>
前記半導体デバイスが集積回路である、<28>に記載の物品。
Claims (29)
- AlOx、WまたはTiNを選択的にエッチングするエッチング組成物であって、
前記組成物の65重量%~85重量%の量のリン酸と、
前記組成物の0.01重量%~4重量%の量の酢酸と、
前記組成物の0.01重量%~5重量%の量の硝酸と、
水と、
を含み、
WまたはTiNに対してAlOxを選択的にエッチングする、エッチング組成物。 - 前記リン酸が、前記組成物の70重量%~85重量%の量で存在する、請求項1に記載の組成物。
- 前記リン酸が、前記組成物の72重量%~76重量%の量で存在する、請求項1に記載の組成物。
- 前記酢酸が、前記組成物の0.1重量%~3.5重量%の量で存在する、請求項1に記載の組成物。
- 前記酢酸が、前記組成物の0.3重量%~0.7重量%の量で存在する、請求項1に記載の組成物。
- 前記硝酸が、前記組成物の0.05重量%~4重量%の量で存在する、請求項1に記載の組成物。
- 前記硝酸が、前記組成物の0.3重量%~0.7重量%の量で存在する、請求項1に記載の組成物。
- 前記水が、前記組成物の10重量%~30重量%の量で存在する、請求項1に記載の組成物。
- Sbをさらに含む、請求項1に記載の組成物。
- 前記Sbが、前記組成物の1ppb~100ppbの量で存在する、請求項9に記載の組成物。
- Cu、K、Ca、Na、Fe、Pb、Sr、As、Ni、Mn、Mg、およびLiからなる群から選択される1種または複数種の金属元素をさらに含む、請求項9に記載の組成物。
- 前記Sbの量が、Cu、K、Ca、Pb、Sr、As、Ni、Mn、Mg、およびLiの各々の量よりも多い、請求項9に記載の組成物。
- 前記Sbの量が、NaおよびFeの各々の量よりも多い、請求項9に記載の組成物。
- 少なくとも1種の金属腐食防止剤をさらに含む、請求項1に記載の組成物。
- 前記少なくとも1種の金属腐食防止剤が、式(A)の化合物、式(B)の化合物、式(C)の化合物、または置換テトラゾールを含む、請求項14に記載の組成物:
式中、
R1A~R5Aは、それぞれ独立に、水素原子、置換もしくは非置換の炭化水素基、ヒドロキシル基、チオール基、カルボキシ基、または置換もしくは非置換のアミノ基であり、但し、ヒドロキシル基、カルボキシ基、および置換もしくは非置換のアミノ基から選択される少なくとも1つの基が式(A)に含まれており、
R1B~R4Bは、それぞれ独立に、水素原子、ヒドロキシル基、または置換もしくは非置換の炭化水素基であり、
R1C、R2CおよびRNは、それぞれ独立に、水素原子または置換もしくは非置換の炭化水素基であるか、または、R1CおよびR2Cは、それらが結合している炭素原子と共に、環を形成している。 - 前記少なくとも1種の金属腐食防止剤が、前記組成物の0.0001重量%~1重量%の量で存在する、請求項14に記載の組成物。
- 0.1μm~1μmの平均サイズを有する複数の粒子をさらに含む、請求項1に記載の組成物。
- 前記複数の粒子が、前記組成物の最大で150個/mlの量で存在する、請求項17に記載の組成物。
- 少なくとも1種のアルミニウムエッチング界面活性剤をさらに含む、請求項1に記載の組成物。
- 前記少なくとも1種のアルミニウムエッチング界面活性剤が、式(D):R-N(CH3)2-O(D)(RはC8-C24アルキルである)の化合物を含む、請求項19に記載の組成物。
- 前記少なくとも1種のアルミニウムエッチング界面活性剤が、前記組成物の0.0001重量%~1重量%の量で存在する、請求項19に記載の組成物。
- 前記組成物が、リン酸、酢酸、硝酸、および水のみからなる、請求項1に記載の組成物。
- AlOx、WまたはTiNを含む半導体基板を請求項1~請求項22のいずれか1項に記載の組成物と接触させて前記AlOx、WまたはTiNを除去することを含む、方法。
- 前記接触させる工程の後に、前記半導体基板をリンス溶媒でリンスすることをさらに含む、請求項23に記載の方法。
- 前記リンスする工程の後に、前記半導体基板を乾燥させることをさらに含む、請求項24に記載の方法。
- 前記方法が、前記半導体基板上のCuまたは誘電体材料を実質的に除去しない、請求項23に記載の方法。
- 前記方法が、WまたはTiNに対してAlOxを選択的にエッチングする、請求項23に記載の方法。
- 請求項23に記載の方法によって形成される物品の製造方法であって、
前記物品が半導体デバイスである、物品の製造方法。 - 前記半導体デバイスが集積回路である、請求項28に記載の物品の製造方法。
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CN112752867A (zh) | 2021-05-04 |
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TWI823984B (zh) | 2023-12-01 |
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WO2020055529A1 (en) | 2020-03-19 |
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