JP2020145146A - Anisotropic conductive sheet - Google Patents

Anisotropic conductive sheet Download PDF

Info

Publication number
JP2020145146A
JP2020145146A JP2019042649A JP2019042649A JP2020145146A JP 2020145146 A JP2020145146 A JP 2020145146A JP 2019042649 A JP2019042649 A JP 2019042649A JP 2019042649 A JP2019042649 A JP 2019042649A JP 2020145146 A JP2020145146 A JP 2020145146A
Authority
JP
Japan
Prior art keywords
thickness direction
anisotropic conductive
conductor portion
opening
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019042649A
Other languages
Japanese (ja)
Inventor
孝俊 坂倉
Takatoshi Sakakura
孝俊 坂倉
誉大 ▲高▼野
誉大 ▲高▼野
Takahiro Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2019042649A priority Critical patent/JP2020145146A/en
Priority to KR1020200026458A priority patent/KR20200107823A/en
Publication of JP2020145146A publication Critical patent/JP2020145146A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations

Landscapes

  • Non-Insulated Conductors (AREA)

Abstract

To provide an anisotropic conductive sheet provided with an anisotropic conductive portion having excellent anisotropic conductivity while being able to prevent the anisotropic conductive portion from falling off from an insulating layer.SOLUTION: An anisotropic conductive sheet 1 includes an insulating layer 2 having a through hole 6 and an anisotropic conductive portion 3 arranged in the through hole 6. The through hole 6 includes a first opening 60 and a second opening 70. The insulating layer 2 has a second peripheral side surface 8 that partitions the second opening 70. The second peripheral side surface 8 has a tapered surface 9. The anisotropic conductive portion 3 includes a first conductor portion 4 arranged in the first opening 60 and a second conductor portion 5 arranged in the second opening 70. The first conductor portion 4 is formed in a substantially flat plate shape. In the first conductor portion 4, a second surface 32 is exposed to the other side, a peripheral end portion 12 is in contact with the insulating layer 2, and the inner portion 11 is in contact with the second conductor portion 70. The second conductor portion 70 is in contact with the tapered surface 9. In the second conductor portion 70, a fifth surface 35 is in contac with the inner portion 11, and a sixth surface 36 is exposed to one side.SELECTED DRAWING: Figure 2

Description

本発明は、異方導電性シートに関する。 The present invention relates to an anisotropic conductive sheet.

従来、貫通孔を有する絶縁層と、貫通孔に配置され、厚み方向両側に露出する異方導電部とを備える異方導電性シートが知られている（例えば、下記特許文献１参照。）。 Conventionally, an anisotropic conductive sheet having an insulating layer having a through hole and an anisotropic conductive portion arranged in the through hole and exposed on both sides in the thickness direction is known (see, for example, Patent Document 1 below).

特許文献１の図１０で開示される異方導電性シートでは、異方導電部が、平板状の中央部と、中央部の周端縁から、外側に向かうに従って厚み方向一方側に傾斜する傾斜部とを一体的に有している。異方導電部の厚み方向他方面において、中央部、および、傾斜部の内側部は、絶縁層から露出する一方、傾斜部の外側部は、絶縁層に被覆されている。 In the anisotropic conductive sheet disclosed in FIG. 10 of Patent Document 1, the anisotropic conductive portion is inclined toward one side in the thickness direction from the flat central portion and the peripheral edge of the central portion toward the outside. It has an integral part. On the other surface of the anisotropic conductive portion in the thickness direction, the central portion and the inner portion of the inclined portion are exposed from the insulating layer, while the outer portion of the inclined portion is covered with the insulating layer.

特許文献１では、傾斜部の外側部が絶縁層に被覆されて固定されているので、端子やプローブなどが厚み方向両側から異方導電部に対して加圧する場合でも、異方導電部が絶縁層から脱落することを抑制する。 In Patent Document 1, since the outer portion of the inclined portion is covered with an insulating layer and fixed, the anisotropic conductive portion is insulated even when a terminal or a probe pressurizes the anisotropic conductive portion from both sides in the thickness direction. Suppresses falling out of the layer.

ＷＯ２０１８／０６６５４１のパンフレットWO2018 / 066541 pamphlet

しかるに、異方導電性シートには、より一層優れた異方導電性が要求される。 However, the anisotropic conductive sheet is required to have even better anisotropic conductivity.

しかし、特許文献１に記載される異方導電性シートでは、異方導電部の他方面のうち、中央部、および、傾斜部の内側部が、厚み方向他方側における端子と接触するものの、傾斜部の外側部は、絶縁層に被覆されるため、上記した端子と接触できず、異方導電部の他方面が、厚み方向他方側の端子と十分に接触するには、限界がある。そのため、異方導電部の異方導電性を十分に確保できないという不具合がある。 However, in the anisotropic conductive sheet described in Patent Document 1, of the other surfaces of the anisotropic conductive portion, the central portion and the inner portion of the inclined portion come into contact with the terminals on the other side in the thickness direction, but are inclined. Since the outer portion of the portion is covered with an insulating layer, it cannot come into contact with the terminals described above, and there is a limit to sufficient contact between the other surface of the anisotropic conductive portion with the terminal on the other side in the thickness direction. Therefore, there is a problem that the anisotropic conductivity of the anisotropic conductive portion cannot be sufficiently ensured.

本発明は、異方導電部の絶縁層からの脱落を抑制できながら、異方導電性に優れる異方導電部を備える異方導電性シートを提供する。 The present invention provides an anisotropic conductive sheet having an anisotropic conductive portion having excellent anisotropic conductivity while suppressing the anisotropic conductive portion from falling off from the insulating layer.

本発明（１）は、厚み方向を貫通する貫通孔を有する絶縁層と、前記貫通孔に配置され、前記厚み方向に対向する一方面および他方面のそれぞれが前記厚み方向一方側および他方側のそれぞれに露出する異方導電部とを備え、前記貫通孔は、前記厚み方向他方側部分に区画される第１開口部、および、前記第１開口部に連通し、前記厚み方向一方側部分に区画される第２開口部を有し、前記絶縁層は、前記第２開口部を区画する周側面を有し、前記周側面は、前記第２開口部の厚み方向他端縁から前記厚み方向一方側に向かって開口断面積が次第に大きくなるテーパ面を有し、前記異方導電部は、前記第１開口部に配置される第１導体部と、前記第２開口部に配置される第２導体部とを備え、前記第１導体部は、前記厚み方向に直交する面方向に延びる略平板形状に形成され、前記第１導体部において、他方面が、前記厚み方向他方側に露出し、一方面の周端部が、前記絶縁層に接触し、一方面において前記周端部の内側に位置する内側部が、前記第２導体部に接触し、前記第２導体部は、前記テーパ面に接触し、前記第２導体部において、前記他方面が、前記第１導体部の前記内側部に接触し、前記一方面が、前記厚み方向一方側に露出する、異方導電性シートを含む。 In the present invention (1), an insulating layer having a through hole penetrating in the thickness direction and one surface and the other surface which are arranged in the through hole and face each other in the thickness direction are on one side and the other side in the thickness direction, respectively. Each of them is provided with an eccentric conductive portion that is exposed, and the through hole communicates with a first opening portion that is partitioned on the other side portion in the thickness direction and the first opening portion, and is formed on one side portion in the thickness direction. It has a second opening to be partitioned, the insulating layer has a peripheral side surface for partitioning the second opening, and the peripheral side surface is from the other end edge in the thickness direction of the second opening to the thickness direction. It has a tapered surface whose opening cross-sectional area gradually increases toward one side, and the anisotropic conductive portion has a first conductor portion arranged in the first opening portion and a first conductor portion arranged in the second opening portion. The first conductor portion includes two conductor portions, and the first conductor portion is formed in a substantially flat plate shape extending in a plane direction orthogonal to the thickness direction. In the first conductor portion, the other surface is exposed to the other side in the thickness direction. , The peripheral end portion of one surface is in contact with the insulating layer, the inner portion located inside the peripheral end portion on one surface is in contact with the second conductor portion, and the second conductor portion is tapered. An idiosyncratic conductive sheet that comes into contact with a surface, the other surface of the second conductor portion contacts the inner portion of the first conductor portion, and the one surface is exposed to one side in the thickness direction. Including.

この異方導電性シートでは、第１導体部は、略平板形状に形成され、その厚み方向他方面が露出するので、第１導体部の厚み方向他方面の全面が、端子と接触でき、そのため、異方導電部の厚み方向他方面と端子との十分な接触面積（接触機会）を確保できる。 In this anisotropic conductive sheet, the first conductor portion is formed in a substantially flat plate shape, and the other surface in the thickness direction thereof is exposed, so that the entire surface of the other surface in the thickness direction of the first conductor portion can come into contact with the terminals, and therefore. , A sufficient contact area (contact opportunity) between the other surface of the anisotropic conductive portion in the thickness direction and the terminal can be secured.

また、第１導体部の厚み方向一方面の周端部と、第２導体部においてテーパ面に接触する部分とが、絶縁層においてテーパ面に対応する部分を挟み込むことができる。そうすると、絶縁層における上記した部分が、異方導電部に対する楔（くさび）となり、その結果、異方導電部の絶縁層からの脱落を抑制することができる。 Further, the peripheral end portion of one surface of the first conductor portion in the thickness direction and the portion of the second conductor portion that contacts the tapered surface can sandwich the portion of the insulating layer corresponding to the tapered surface. Then, the above-mentioned portion of the insulating layer becomes a wedge with respect to the anisotropic conductive portion, and as a result, the detachment of the anisotropic conductive portion from the insulating layer can be suppressed.

従って、この異方導電性シートは、異方導電部の絶縁層からの脱落の抑制と、異方導電部の優れた異方導電性とを両立することができる。 Therefore, this anisotropic conductive sheet can achieve both the suppression of the anisotropic conductive portion from falling off from the insulating layer and the excellent anisotropic conductivity of the anisotropic conductive portion.

本発明（２）は、前前記第１導体部の前記他方面は、前記絶縁層の厚み方向他方面と面一である、（１）に記載の異方導電性シートを含む。 The present invention (2) includes the anisotropic conductive sheet according to (1), wherein the other surface of the first conductor portion is flush with the other surface in the thickness direction of the insulating layer.

この異方導電性シートでは、第１導体部の厚み方向他方面は、絶縁層の厚み方向他方面と面一であるので、異方導電性シートの厚み方向他方面の平滑化を図ることができる。 In this anisotropic conductive sheet, the other surface in the thickness direction of the first conductor portion is flush with the other surface in the thickness direction of the insulating layer, so that the other surface in the thickness direction of the anisotropic conductive sheet can be smoothed. it can.

本発明の異方導電性シートは、異方導電部の絶縁層からの脱落の抑制と、異方導電部の優れた異方導電性とを両立することができる。 The anisotropic conductive sheet of the present invention can achieve both the suppression of the anisotropic conductive portion from falling off from the insulating layer and the excellent anisotropic conductivity of the anisotropic conductive portion.

図１は、本発明の異方導電性シートの一実施形態の平面図を示す。FIG. 1 shows a plan view of an embodiment of the anisotropic conductive sheet of the present invention. 図２は、図１に示す異方導電性シートの拡大断面図を示す。FIG. 2 shows an enlarged cross-sectional view of the anisotropic conductive sheet shown in FIG. 図３Ａ〜図３Ｅは、図２に示す異方導電性シートの製造工程図であり、図３Ａが、基材シートを準備する工程、図３Ｂが、第１導体部を配置する工程、図３Ｃが、絶縁層を配置する工程、図３Ｄが、第２導体部を配置する工程、図３Ｅが、基材シートを除去する工程を示す。3A to 3E are manufacturing process diagrams of the anisotropic conductive sheet shown in FIG. 2, FIG. 3A is a process of preparing a base material sheet, FIG. 3B is a process of arranging a first conductor portion, and FIG. 3C. 3D shows a step of arranging the insulating layer, FIG. 3D shows a step of arranging the second conductor portion, and FIG. 3E shows a step of removing the base material sheet. 図４は、図２に示す異方導電性シートの変形例（異方導電性シートが第３導体部を備える態様）の断面図を示す。FIG. 4 shows a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 2 (a mode in which the anisotropic conductive sheet includes a third conductor portion). 図５は、図２に示す異方導電性シートの変形例（周側面の全部がテーパ面である態様）の断面図を示す。FIG. 5 shows a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 2 (a mode in which all of the peripheral side surfaces are tapered surfaces). 図６は、図２に示す異方導電性シートの変形例（第１導体層の第１他方面が、絶縁層の絶縁第２面より、厚み方向他方側に位置する態様）の断面図を示す。FIG. 6 is a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 2 (a mode in which the first other surface of the first conductor layer is located on the other side in the thickness direction from the second insulating surface of the insulating layer). Shown. 図７は、図２に示す異方導電性シートの変形例（周側面の全部がテーパ面であり、かつ、第１導体層の第１他方面が、絶縁層の絶縁第２面より、厚み方向他方側に位置する態様）の断面図を示す。FIG. 7 shows a modified example of the anisotropic conductive sheet shown in FIG. 2 (the entire peripheral side surface is a tapered surface, and the first other surface of the first conductor layer is thicker than the insulating second surface of the insulating layer. The cross-sectional view of the aspect (aspect located on the other side of the direction) is shown. 図８は、図２に示す異方導電性シートの変形例（第２導体部が、絶縁層の周側面の全面を被覆する態様）の断面図を示す。FIG. 8 shows a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 2 (a mode in which the second conductor portion covers the entire peripheral side surface of the insulating layer). 図９は、図２に示す異方導電性シートの変形例（第２導体部が、絶縁層のテーパ面および断面に接触する態様）の断面図を示す。FIG. 9 shows a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 2 (a mode in which the second conductor portion contacts the tapered surface and the cross section of the insulating layer).

＜一実施形態＞
本発明の異方導電性シートの一実施形態を図１〜図２を参照して説明する。 <One Embodiment>
An embodiment of the anisotropic conductive sheet of the present invention will be described with reference to FIGS. 1 and 2.

図１〜図２に示すように、異方導電性シート１は、厚み方向に直交する面方向に延びる。異方導電性シート１は、厚み方向に互いに対向する一方面および他方面を有する。この異方導電性シート１は、次に説明する異方導電部３において厚み方向（異方）に導電性（電気伝導性）を有しており、後述する半導体素子やフレキシブルプリント配線板の導通検査に使用される検査用シートである。 As shown in FIGS. 1 and 2, the anisotropic conductive sheet 1 extends in the plane direction orthogonal to the thickness direction. The anisotropic conductive sheet 1 has one surface and the other surface facing each other in the thickness direction. This anisotropic conductive sheet 1 has conductivity (electrical conductivity) in the thickness direction (anisotropic) in the anisotropic conductive portion 3 to be described next, and conducts semiconductor elements and flexible printed wiring boards, which will be described later. An inspection sheet used for inspection.

異方導電性シート１は、絶縁層２と、絶縁層２に配置される複数の異方導電部３とを備える。好ましくは、異方導電性シート１は、単数の絶縁層２と、複数の異方導電部３とのみを備える。 The anisotropic conductive sheet 1 includes an insulating layer 2 and a plurality of anisotropic conductive portions 3 arranged on the insulating layer 2. Preferably, the anisotropic conductive sheet 1 includes only a single insulating layer 2 and a plurality of anisotropic conductive portions 3.

絶縁層２は、面方向に延びるシート形状を有する。絶縁層２は、厚み方向一方面である絶縁第１面２１と、絶縁第１面２１と厚み方向他方側に対向する厚み方向他方面である絶縁第２面２２とを有する。 The insulating layer 2 has a sheet shape extending in the plane direction. The insulating layer 2 has an insulating first surface 21 which is one surface in the thickness direction, and an insulating second surface 22 which is the other surface in the thickness direction facing the first surface 21 in the thickness direction and the other side in the thickness direction.

絶縁第１面２１は、異方導電性シート１の厚み方向一方面を形成する。 The first insulating surface 21 forms one surface of the anisotropic conductive sheet 1 in the thickness direction.

絶縁第２面２２は、異方導電性シート１の厚み方向他方面を形成する。 The insulating second surface 22 forms the other surface of the anisotropic conductive sheet 1 in the thickness direction.

また、絶縁層２には、複数の貫通孔６が形成されている。 Further, a plurality of through holes 6 are formed in the insulating layer 2.

複数の貫通孔６は、複数の異方導電部３に対応して設けられる。つまり、複数の貫通孔６は、複数の異方導電部３と１対１対応で形成されている。複数の貫通孔６のそれぞれは、絶縁層２の厚み方向を貫通する。貫通孔６は、第１開口部６０および第２開口部７０を備える。 The plurality of through holes 6 are provided corresponding to the plurality of anisotropic conductive portions 3. That is, the plurality of through holes 6 are formed in a one-to-one correspondence with the plurality of anisotropic conductive portions 3. Each of the plurality of through holes 6 penetrates in the thickness direction of the insulating layer 2. The through hole 6 includes a first opening 60 and a second opening 70.

第１開口部６０は、貫通孔６における厚み方向他方側部分（領域）に区画されている。第１開口部６０は、後述する第１導体部４に対応する形状を有する。具体的には、第１開口部６０は、断面視略矩形状を有する。第１開口部６０は、絶縁第２面２２から厚み方向一方側に向かって凹む形状を有する。具体的には、第１開口部６０は、絶縁層２の第１周側面６１と、第１一方面６２とによって、区画されている。 The first opening 60 is divided into a portion (region) on the other side in the thickness direction of the through hole 6. The first opening 60 has a shape corresponding to the first conductor portion 4 described later. Specifically, the first opening 60 has a substantially rectangular shape in cross section. The first opening 60 has a shape recessed from the insulating second surface 22 toward one side in the thickness direction. Specifically, the first opening 60 is partitioned by a first peripheral side surface 61 of the insulating layer 2 and a first one side surface 62.

第１周側面６１は、第１開口部６０の面方向外側面を区画する。第１周側面６１は、絶縁第２面２２から厚み方向一方側に延びる略筒形状（具体的には、円筒形状）を有する。 The first peripheral side surface 61 partitions the outer surface in the surface direction of the first opening 60. The first peripheral side surface 61 has a substantially cylindrical shape (specifically, a cylindrical shape) extending from the insulating second surface 22 to one side in the thickness direction.

第１一方面６２は、第１開口部６０の厚み方向一方面を区画する。第１一方面６２は、底面視略円環（リング）形状を有する。なお、第１一方面６２の内側部分においては、第１開口部６０が第２開口部７０と連通する。 The first one surface 62 partitions one surface of the first opening 60 in the thickness direction. The first one-sided surface 62 has a substantially ring-shaped bottom view. In the inner portion of the first one surface 62, the first opening 60 communicates with the second opening 70.

第２開口部７０は、第１開口部６０に連通しており、貫通孔６における厚み方向一方側部分（領域）に区画されている。第２開口部７０は、第１開口部６０の厚み方向一方側に位置する。第２開口部７０は、周側面の一例としての絶縁層２の第２周側面８によって区画されている。 The second opening 70 communicates with the first opening 60, and is partitioned into a portion (region) on one side in the thickness direction of the through hole 6. The second opening 70 is located on one side of the first opening 60 in the thickness direction. The second opening 70 is partitioned by the second peripheral side surface 8 of the insulating layer 2 as an example of the peripheral side surface.

第２周側面８は、厚み方向に延びる形状を有する。第２周側面８は、平面視において、例えば、第１周側面６１の内側に配置されており、また、厚み方向に投影したときに、第１一方面６２に包含される。第２周側面８は、テーパ面９と、テーパ面９に連続する縦面１０とを含む。 The second peripheral side surface 8 has a shape extending in the thickness direction. The second peripheral side surface 8 is arranged inside, for example, the first peripheral side surface 61 in a plan view, and is included in the first one side surface 62 when projected in the thickness direction. The second peripheral side surface 8 includes a tapered surface 9 and a vertical surface 10 continuous with the tapered surface 9.

テーパ面９は、第２周側面８における厚み方向他方側部分に相当する。テーパ面９は、第１一方面６２の内端縁から厚み方向一方側に向かう形状を有する。テーパ面９は、例えば、面方向に沿う断面積（正断面積）が、第１一方面６２の内端縁から厚み方向一方側に向かって次第に大きくなる略錐台形状（具体的には、略円錐台形状）を有する。つまり、テーパ面９は、厚み方向に沿う断面視において、厚み方向一方側に向かって、面方向において互いに対向する対向距離が次第に長くなる傾斜面である。 The tapered surface 9 corresponds to the other side portion in the thickness direction on the second peripheral side surface 8. The tapered surface 9 has a shape extending from the inner edge of the first one surface 62 to one side in the thickness direction. The tapered surface 9 has, for example, a substantially truncated cone shape (specifically, a truncated cone shape) in which the cross-sectional area (normal cross-sectional area) along the surface direction gradually increases from the inner end edge of the first one surface 62 toward one side in the thickness direction. It has a substantially truncated cone shape). That is, the tapered surface 9 is an inclined surface in which the facing distances facing each other in the surface direction gradually increase toward one side in the thickness direction in a cross-sectional view along the thickness direction.

テーパ面９と、第１一方面６２とのなす角度αは、例えば、鋭角であり、好ましくは、７５度以下、より好ましくは、６０度以下であり、また、例えば、１５度以上、好ましくは、３０度以上である。 The angle α formed by the tapered surface 9 and the first one surface 62 is, for example, an acute angle, preferably 75 degrees or less, more preferably 60 degrees or less, and for example, 15 degrees or more, preferably 15 degrees or more. , 30 degrees or more.

縦面１０は、テーパ面９に対して厚み方向一方側に配置される。縦面１０は、第２周側面８における厚み方向一方側部分に相当する。具体的には、縦面１０は、テーパ面９の厚み方向一端縁から、厚み方向一方側に延び、絶縁第１面２１に連続する。縦面１０は、厚み方向に沿って延びる略筒形状（具体的には、テーパ面９の錐台形状と軸線を共有する略円筒形状）を有する。縦面１０は、断面視において、ストレート面である。具体的には、断面視において、面方向に対向する２つの縦面１０の対向距離は、同一である。 The vertical surface 10 is arranged on one side in the thickness direction with respect to the tapered surface 9. The vertical surface 10 corresponds to a portion on one side in the thickness direction of the second peripheral side surface 8. Specifically, the vertical surface 10 extends from one end edge in the thickness direction of the tapered surface 9 to one side in the thickness direction and is continuous with the first insulating surface 21. The vertical surface 10 has a substantially cylindrical shape extending along the thickness direction (specifically, a substantially cylindrical shape sharing an axis with the frustum shape of the tapered surface 9). The vertical surface 10 is a straight surface in a cross-sectional view. Specifically, in the cross-sectional view, the facing distances of the two vertical surfaces 10 facing each other in the surface direction are the same.

また、第１一方面６２は、第１周側面６１に対して直交する。縦面１０は、第１一方面６２に対して直交する。テーパ面９は、縦面１０および第１一方面６２に対して傾斜する。 Further, the first one surface 62 is orthogonal to the first peripheral side surface 61. The vertical surface 10 is orthogonal to the first one surface 62. The tapered surface 9 is inclined with respect to the vertical surface 10 and the first one surface 62.

また、絶縁層２は、第１一方面６２およびテーパ面９に挟まれる楔部１３を含む。楔部１３は、断面視略鋭角三角形状を有する。楔部１３は、テーパ面９より面方向外側における領域であって、厚み方向に投影したときに、縦面１０より面方向内側における領域に位置する。 Further, the insulating layer 2 includes a wedge portion 13 sandwiched between the first one surface 62 and the tapered surface 9. The wedge portion 13 has an acute-angled triangular shape in cross-sectional view. The wedge portion 13 is a region outside the tapered surface 9 in the surface direction, and is located in a region inside the vertical surface 10 in the surface direction when projected in the thickness direction.

絶縁層２の材料として、例えば、ポリイミドなどの樹脂が挙げられる。 Examples of the material of the insulating layer 2 include a resin such as polyimide.

絶縁層２の寸法は、その用途および応じて適宜設定される。絶縁層２の厚みは、例えば、５μｍ以上、例えば、１００μｍ以下である。 The dimensions of the insulating layer 2 are appropriately set according to the application and use thereof. The thickness of the insulating layer 2 is, for example, 5 μm or more, for example, 100 μm or less.

第１開口部６０の面方向における最大長さＬ１は、断面視において面方向に対向する第１周側面６１間の最大距離であり、例えば、１μｍ以上、好ましくは、１０μｍ以上、より好ましくは、２０μｍ以上、さらに好ましくは、３０μｍ以上であり、また、例えば、１，０００μｍ以下である。また、第１開口部６０の開口断面積は、例えば、５０μｍ２以上、好ましくは、３００μｍ２以上、より好ましくは、７００μｍ２以上であり、また、例えば、８００，０００μｍ２以下である。 The maximum length L1 in the surface direction of the first opening 60 is the maximum distance between the first peripheral side surfaces 61 facing the surface direction in a cross-sectional view, and is, for example, 1 μm or more, preferably 10 μm or more, more preferably. It is 20 μm or more, more preferably 30 μm or more, and for example, 1,000 μm or less. The opening cross-sectional area of the first opening 60 is, for example, 50 [mu] m 2 or more, preferably, 300 [mu] m 2 or more, more preferably at 700 .mu.m 2 or more, and is, for example, it is 800,000Myuemu 2 or less.

第１開口部６０の深さ（厚み方向長さ）は、第１周側面６１の厚み方向長さであり、例えば、２μｍ以上、好ましくは、３μｍ以上であり、また、例えば、２５μｍ以下、好ましくは、１８μｍ以下である。絶縁層２の厚みに対する第１開口部６０の深さの比は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、０．９以下、好ましくは、０．８以下である。 The depth (length in the thickness direction) of the first opening 60 is the length in the thickness direction of the first peripheral side surface 61, for example, 2 μm or more, preferably 3 μm or more, and for example, 25 μm or less, preferably 25 μm or less. Is 18 μm or less. The ratio of the depth of the first opening 60 to the thickness of the insulating layer 2 is, for example, 0.1 or more, preferably 0.2 or more, and for example, 0.9 or less, preferably 0.8. It is as follows.

テーパ面９の厚み方向長さＬ２は、例えば、０．１μｍ以上、好ましくは、０．５μｍ以上、好ましくは、１．０μｍ以上であり、また、例えば、５０μｍ以下、好ましくは、２０μｍ以下である。テーパ面９の面方向長さＬ３は、例えば、０．１μｍ以上、好ましくは、０．５μｍ以上、好ましくは、１μｍ以上であり、また、例えば、２０μｍ以下、好ましくは、１０μｍ以下である。テーパ面９において面方向に互いに対向する厚み方向他端縁間の長さＬ４は、例えば、１０μｍ以上、好ましくは、１５μｍ以上であり、また、例えば、２００μｍ以下、好ましくは、１００μｍ以下である。テーパ面９において面方向に互いに対向する厚み方向一端縁間の長さＬ５は、例えば、１０μｍ以上、好ましくは、１５μｍ以上であり、また、例えば、２００μｍ以下、好ましくは、１００μｍ以下である。 The length L2 of the tapered surface 9 in the thickness direction is, for example, 0.1 μm or more, preferably 0.5 μm or more, preferably 1.0 μm or more, and for example, 50 μm or less, preferably 20 μm or less. .. The plane length L3 of the tapered surface 9 is, for example, 0.1 μm or more, preferably 0.5 μm or more, preferably 1 μm or more, and for example, 20 μm or less, preferably 10 μm or less. The length L4 between the other edges in the thickness direction of the tapered surface 9 facing each other in the surface direction is, for example, 10 μm or more, preferably 15 μm or more, and for example, 200 μm or less, preferably 100 μm or less. The length L5 between the edges of one end in the thickness direction of the tapered surface 9 facing each other in the surface direction is, for example, 10 μm or more, preferably 15 μm or more, and for example, 200 μm or less, preferably 100 μm or less.

断面視におけるテーパ面９の長さは、１μｍ以上、好ましくは、３μｍ以上であり、また、例えば、５０μｍ以下、好ましくは、２０μｍ以下である。 The length of the tapered surface 9 in cross-sectional view is 1 μm or more, preferably 3 μm or more, and for example, 50 μm or less, preferably 20 μm or less.

縦面１０の厚み方向長さＬ６は、例えば、０μｍ超過、好ましくは、１μｍ以上であり、また、例えば、１００μｍ以下、好ましくは、２０μｍ以下である。 The length L6 of the vertical surface 10 in the thickness direction is, for example, more than 0 μm, preferably 1 μm or more, and for example, 100 μm or less, preferably 20 μm or less.

第２開口部７０の深さ（厚み方向長さ）Ｌ７は、テーパ面９の厚み方向長さＬ２、および、縦面１０の厚み方向長さＬ６の合計Ｌ７（Ｌ２＋Ｌ６）であり、例えば、３μｍ以上、例えば、１００μｍ以下である。絶縁層２の厚みに対する第２開口部７０の深さの比は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、０．９以下、好ましくは、０．８以下である。 The depth (thickness direction length) L7 of the second opening 70 is the total L7 (L2 + L6) of the thickness direction length L2 of the tapered surface 9 and the thickness direction length L6 of the vertical surface 10, for example, 3 μm. As mentioned above, for example, it is 100 μm or less. The ratio of the depth of the second opening 70 to the thickness of the insulating layer 2 is, for example, 0.1 or more, preferably 0.2 or more, and for example, 0.9 or less, preferably 0.8. It is as follows.

第２開口部７０の深さＬ７に対する、テーパ面９の厚み方向長さＬ２の比（Ｌ２／Ｌ７）は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、０．９以下、好ましくは、０．８以下である。 The ratio (L2 / L7) of the length L2 of the tapered surface 9 in the thickness direction to the depth L7 of the second opening 70 is, for example, 0.1 or more, preferably 0.2 or more, and for example. It is 0.9 or less, preferably 0.8 or less.

絶縁層２の寸法が上記した範囲にあれば、異方導電部の異方導電性が向上する。 When the dimensions of the insulating layer 2 are within the above range, the anisotropic conductivity of the anisotropic conductive portion is improved.

複数の異方導電部３のそれぞれは、複数の貫通孔６のそれぞれに配置されている。異方導電部３は、第１開口部６０と、第２開口部７０の一部とに充填されており、それらに対応する形状を有する。 Each of the plurality of anisotropic conductive portions 3 is arranged in each of the plurality of through holes 6. The anisotropic conductive portion 3 is filled in the first opening 60 and a part of the second opening 70, and has a shape corresponding to them.

異方導電部３は、第１開口部６０に配置される第１導体部４と、第２開口部７０に配置される第２導体部５とを備える。好ましくは、この異方導電部３は、第１導体部４および第２導体部５のみを備える。 The anisotropic conductive portion 3 includes a first conductor portion 4 arranged in the first opening 60 and a second conductor portion 5 arranged in the second opening 70. Preferably, the anisotropic conductive portion 3 includes only the first conductor portion 4 and the second conductor portion 5.

第１導体部４は、第１開口部６０の全部に充填されている。これにより、第１導体部４は、第１開口部６０と同一形状を有する。具体的には、第１導体部４は、面方向に延びる略平板形状を有する。第１導体部４は、厚み方向一方面である第１面３１と、第１面３１と厚み方向他方側に対向する他方面である第２面３２と、第１面３１の周端縁および第２面３２の周端縁を連結する第３面３３とを一体的に有する。 The first conductor portion 4 is filled in the entire first opening 60. As a result, the first conductor portion 4 has the same shape as the first opening portion 60. Specifically, the first conductor portion 4 has a substantially flat plate shape extending in the plane direction. The first conductor portion 4 includes a first surface 31 which is one surface in the thickness direction, a second surface 32 which is the other surface facing the first surface 31 and the other side in the thickness direction, and a peripheral edge of the first surface 31. It integrally has a third surface 33 that connects the peripheral edges of the second surface 32.

第１面３１は、面方向に沿う平坦面である。第１面３１は、周端部１２と、周端部１２の内側に位置する内側部１１とに区画される。 The first surface 31 is a flat surface along the surface direction. The first surface 31 is divided into a peripheral end portion 12 and an inner portion 11 located inside the peripheral end portion 12.

周端部１２は、第１一方面６２に面する。具体的には、周端部１２は、第１面３１において、第１一方面６２に接触する領域である。周端部１２は、平面視において、第１一方面６２と同一形状を有する。 The peripheral end portion 12 faces the first one surface 62. Specifically, the peripheral end portion 12 is a region of the first surface 31 that comes into contact with the first one surface 62. The peripheral end portion 12 has the same shape as the first one surface 62 in a plan view.

内側部１１は、第１面３１において、周端部１２より内側に位置する領域である。一方、この内側部１１は、平面視において、第１一方面６２から面方向内側にずれている。 The inner portion 11 is a region located inside the peripheral end portion 12 on the first surface 31. On the other hand, the inner portion 11 is displaced inward in the plane direction from the first one surface 62 in a plan view.

第２面３２は、第１面３１に平行する平坦面である。第２面３２は、絶縁層２から露出する。第２面３２は、異方導電部３において厚み方向他方側に露出する厚み方向他方面の一例である。具体的には、第２面３２は、絶縁層２の絶縁第２面２２から、厚み方向他方側に向かって露出する。また、第２面３２は、絶縁第２面２２と面一である。第２面３２の外端縁は、絶縁第２面２２の内端縁と連続する。 The second surface 32 is a flat surface parallel to the first surface 31. The second surface 32 is exposed from the insulating layer 2. The second surface 32 is an example of the other surface in the thickness direction exposed on the other side in the thickness direction in the anisotropic conductive portion 3. Specifically, the second surface 32 is exposed from the insulating second surface 22 of the insulating layer 2 toward the other side in the thickness direction. Further, the second surface 32 is flush with the insulating second surface 22. The outer edge of the second surface 32 is continuous with the inner edge of the insulating second surface 22.

第３面３３は、第１導体部４の側面（周側面）である。第３面３３は、第１周側面６１に接触する。第３面３３は、厚み方向に沿って延びており、断面視において、ストレート形状を有する。 The third surface 33 is a side surface (peripheral side surface) of the first conductor portion 4. The third surface 33 comes into contact with the first peripheral side surface 61. The third surface 33 extends along the thickness direction and has a straight shape in a cross-sectional view.

この第１導体部４では、第１面３１の周端部１２と、第３面３３とが、絶縁層２に接触する。なお、第１面３１の周端部１２は、楔部１３と接触する。 In the first conductor portion 4, the peripheral end portion 12 of the first surface 31 and the third surface 33 come into contact with the insulating layer 2. The peripheral end portion 12 of the first surface 31 comes into contact with the wedge portion 13.

一方、第２面３２の全面は、絶縁層２から露出している。 On the other hand, the entire surface of the second surface 32 is exposed from the insulating layer 2.

第２導体部５は、第２開口部７０に配置されている。具体的には、第２導体部５は、第２開口部７０の厚み方向他方側部分を充填している。 The second conductor portion 5 is arranged in the second opening 70. Specifically, the second conductor portion 5 fills the other side portion of the second opening 70 in the thickness direction.

また、第２導体部５は、第１導体部４の第１面３１の内側部１１と、テーパ面９とに接触する。 Further, the second conductor portion 5 comes into contact with the inner portion 11 of the first surface 31 of the first conductor portion 4 and the tapered surface 9.

第２導体部５は、面方向に延びる略平板形状を有する。第２導体部５は、第１面３１の内側部１１およびテーパ面９に対応する形状を有し、具体的には、厚み方向他方側に向かって正断面積が小さくなる、薄肉の略錐台形状（具体的には、第１導体部４の略円板形状と軸線を共有する略円錐台形状）を有する。 The second conductor portion 5 has a substantially flat plate shape extending in the plane direction. The second conductor portion 5 has a shape corresponding to the inner portion 11 and the tapered surface 9 of the first surface 31, and specifically, a thin-walled substantially cone in which the regular cross-sectional area decreases toward the other side in the thickness direction. It has a trapezoidal shape (specifically, a substantially truncated cone shape that shares an axis with the substantially disc shape of the first conductor portion 4).

第２導体部５は、厚み方向一方面である第４面３４と、第４面３４と厚み方向他方側に対向する他方面である第５面３５と、第４面３４の周端縁および第５面３５の周端縁を連結する第６面３６とを一体的に有する。 The second conductor portion 5 includes a fourth surface 34, which is one surface in the thickness direction, a fifth surface 35, which is the other surface facing the fourth surface 34 and the other side in the thickness direction, and a peripheral edge of the fourth surface 34. It integrally has a sixth surface 36 that connects the peripheral edges of the fifth surface 35.

第４面３４は、第１導体部４の第１面３１に平行し、平坦な形状を有する。第４面３４は、異方導電部３において厚み方向一方側に向かって露出する厚み方向一方面の一例である。第４面３４は、面方向に投影したときに、テーパ面９に包含される一方、縦面１０と厚み方向他方側に間隔が隔てられる。 The fourth surface 34 is parallel to the first surface 31 of the first conductor portion 4 and has a flat shape. The fourth surface 34 is an example of one surface in the thickness direction exposed in the anisotropic conductive portion 3 toward one side in the thickness direction. The fourth surface 34 is included in the tapered surface 9 when projected in the surface direction, while the vertical surface 10 and the other side in the thickness direction are spaced apart from each other.

第５面３５は、その全面が、第１面３１の内側部１１に接触する。第５面３５は、平坦な形状を有する。 The entire surface of the fifth surface 35 comes into contact with the inner portion 11 of the first surface 31. The fifth surface 35 has a flat shape.

第６面３６は、第２導体部５の側面（周側面）である。第６面３６は、テーパ面９の少なくとも厚み方向他方側部分に接触し、これを被覆する。第６面３６は、テーパ面９の厚み方向他方側部分に対応する形状を有する。具体的には、第６面３６は、第２導体部５の正断面積が、厚み方向一方側に向かって次第に大きくなるテーパ形状を有する。第６面３６は、楔部１３に接触する。 The sixth surface 36 is a side surface (peripheral side surface) of the second conductor portion 5. The sixth surface 36 contacts and covers at least the other side portion of the tapered surface 9 in the thickness direction. The sixth surface 36 has a shape corresponding to the other side portion of the tapered surface 9 in the thickness direction. Specifically, the sixth surface 36 has a tapered shape in which the regular cross-sectional area of the second conductor portion 5 gradually increases toward one side in the thickness direction. The sixth surface 36 comes into contact with the wedge portion 13.

この第２導体部５では、第５面３５および第６面３６のそれぞれが、内側部１１およびテーパ面９のそれぞれに接触する一方、第４面３４が、厚み方向一方側に露出する。 In the second conductor portion 5, each of the fifth surface 35 and the sixth surface 36 comes into contact with the inner portion 11 and the tapered surface 9, respectively, while the fourth surface 34 is exposed to one side in the thickness direction.

異方導電部３の材料は、特に限定されず、例えば、銅、クロム、ニッケル、金などの金属が挙げられる。これらは、単独使用または併用することができる。第１導体部４の材料として、好ましくは、銅が挙げられる。第２導体部５の材料として、好ましくは、ニッケル、金が挙げられる。なお、第２導体部５は、厚み方向に複数の層が積層された積層体であってもよい。 The material of the anisotropic conductive portion 3 is not particularly limited, and examples thereof include metals such as copper, chromium, nickel, and gold. These can be used alone or in combination. As the material of the first conductor portion 4, copper is preferably mentioned. As the material of the second conductor portion 5, nickel and gold are preferable. The second conductor portion 5 may be a laminated body in which a plurality of layers are laminated in the thickness direction.

異方導電部３の寸法は、その用途および応じて適宜設定される。異方導電部３の厚みは、例えば、５μｍ以上、好ましくは、１０μｍ以上であり、また、例えば、１００μｍ以下、好ましくは、５０μｍ以下である。 The dimensions of the anisotropic conductive portion 3 are appropriately set according to the application and use thereof. The thickness of the anisotropic conductive portion 3 is, for example, 5 μm or more, preferably 10 μm or more, and for example, 100 μm or less, preferably 50 μm or less.

第１導体部４の寸法は、第１開口部６０の寸法と同一の寸法を有する。第２面３２の面積（第１導体部４の底面積）は、第１開口部６０の開口断面積と同一である。なお、異方導電部３の厚みに対する第１導体部４の厚みの割合は、例えば、２０％以上、好ましくは、４０％以上であり、また、例えば、９０％以下、好ましくは、８０％以下である。 The dimensions of the first conductor portion 4 have the same dimensions as the dimensions of the first opening 60. The area of the second surface 32 (bottom area of the first conductor portion 4) is the same as the opening cross section of the first opening 60. The ratio of the thickness of the first conductor portion 4 to the thickness of the anisotropic conductive portion 3 is, for example, 20% or more, preferably 40% or more, and for example, 90% or less, preferably 80% or less. Is.

第２導体部５の厚みＴは、例えば、１μｍ以上、好ましくは、２μｍ以上であり、また、例えば、２５μｍ以下、好ましくは、１８μｍ以下である。異方導電部３の厚みに対する第２導体部５の厚みＴの割合は、例えば、５％以上、好ましくは、１５％以上であり、また、例えば、８０％以下、好ましくは、６０％以下である。第１導体部４の厚みに対する第２導体部５の厚みＴの比は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、５以下、好ましくは、２以下である。また、テーパ面９の厚み方向長さＬ２に対する第２導体部５の厚みＴの比（Ｔ／Ｌ２）は、例えば、１以下、好ましくは、０．８以下であり、また、例えば、０．３以上、好ましくは、０．５超過である。 The thickness T of the second conductor portion 5 is, for example, 1 μm or more, preferably 2 μm or more, and for example, 25 μm or less, preferably 18 μm or less. The ratio of the thickness T of the second conductor portion 5 to the thickness of the anisotropic conductive portion 3 is, for example, 5% or more, preferably 15% or more, and for example, 80% or less, preferably 60% or less. is there. The ratio of the thickness T of the second conductor portion 5 to the thickness of the first conductor portion 4 is, for example, 0.1 or more, preferably 0.2 or more, and for example, 5 or less, preferably 2 or less. is there. The ratio (T / L2) of the thickness T of the second conductor portion 5 to the length L2 of the tapered surface 9 in the thickness direction is, for example, 1 or less, preferably 0.8 or less, and for example, 0. 3 or more, preferably 0.5 or more.

異方導電部３の寸法が上記した範囲にあれば、異方導電部３の異方導電性が向上する。 When the dimensions of the anisotropic conductive portion 3 are within the above range, the anisotropic conductivity of the anisotropic conductive portion 3 is improved.

次に、図３Ａ〜図３Ｅを参照して、図１および図２に示す異方導電性シート１の製造方法を説明する。 Next, a method for manufacturing the anisotropic conductive sheet 1 shown in FIGS. 1 and 2 will be described with reference to FIGS. 3A to 3E.

まず、図３Ａに示すように、基材シート２０を準備する。 First, as shown in FIG. 3A, the base sheet 20 is prepared.

基材シート２０は、面方向に延びるシート形状を有する。基材シート２０は、例えば、ステンレスなどの金属からなる金属層（図示せず）と、金属層の厚み方向一方面に配置され、例えば、ポリイミドなどの樹脂からなる樹脂層とを備える。 The base sheet 20 has a sheet shape extending in the plane direction. The base sheet 20 includes, for example, a metal layer made of a metal such as stainless steel (not shown) and a resin layer made of a resin such as polyimide, which is arranged on one side of the metal layer in the thickness direction.

次いで、図３Ｂに示すように、複数の第１導体部４（図１参照）を基材シート２０の厚み方向一方面に配置する。例えば、アディティブ法やサブトラクティブ法などのパターンニング法により、複数の第１導体部４を、基材シート２０の厚み方向一方面に、面方向に互いに間隔を隔てて形成する。 Next, as shown in FIG. 3B, a plurality of first conductor portions 4 (see FIG. 1) are arranged on one surface of the base sheet 20 in the thickness direction. For example, a plurality of first conductor portions 4 are formed on one surface of the base sheet 20 in the thickness direction at intervals in the surface direction by a patterning method such as an additive method or a subtractive method.

次いで、図３Ｃに示すように、絶縁層２を、基材シート２０の厚み方向一方面に、複数の第１導体部４の内側部１１を露出するように、配置する。例えば、感光性の樹脂のワニスを、基材シート２０の一方面に、複数の第１導体部４の第１面３１および第３面３３を被覆するように塗布し、続いて、露光および現像により、複数の第２開口部７０を形成する。これにより、複数の内側部１１を露出する絶縁層２を形成する。 Next, as shown in FIG. 3C, the insulating layer 2 is arranged so as to expose the inner portions 11 of the plurality of first conductor portions 4 on one surface in the thickness direction of the base sheet 20. For example, a photosensitive resin varnish is applied to one surface of the base sheet 20 so as to cover the first surface 31 and the third surface 33 of the plurality of first conductor portions 4, followed by exposure and development. Therefore, a plurality of second openings 70 are formed. As a result, the insulating layer 2 that exposes the plurality of inner portions 11 is formed.

なお、絶縁層２は、基材シート２０の厚み方向一方側に配置される複数の第１導体部５の第１面３１の周端部１２および第３面３３を被覆していることから、複数の第１開口部６０が形成される。 Since the insulating layer 2 covers the peripheral end portion 12 and the third surface 33 of the first surface 31 of the plurality of first conductor portions 5 arranged on one side in the thickness direction of the base sheet 20. A plurality of first openings 60 are formed.

次いで、図３Ｄに示すように、複数の第２導体部５のそれぞれを複数の第２開口部７０のそれぞれに配置する。 Next, as shown in FIG. 3D, each of the plurality of second conductor portions 5 is arranged in each of the plurality of second openings 70.

複数の第２導体部５を配置する方法としては、例えば、上記した金属を含有するめっき浴を用いるめっき、例えば、上記した金属からなる粒子を含有するペースト組成物の塗布などが挙げられ、好ましくは、めっき、より好ましくは、無電解めっきが挙げられる。 Examples of the method for arranging the plurality of second conductor portions 5 include plating using the above-mentioned metal-containing plating bath, for example, application of the above-mentioned paste composition containing metal particles, and the like. Is plating, more preferably electroless plating.

これにより、複数の第２導体部５のそれぞれを、複数の第１導体部４のそれぞれの第１面３１の内側部１１に積層する。 As a result, each of the plurality of second conductor portions 5 is laminated on the inner portion 11 of the first surface 31 of each of the plurality of first conductor portions 4.

なお、めっきでは、内側部１１の周端縁では、面方向外側に膨出するように、第２導体部５の材料が析出する。そのため、テーパ面９にも、上記した材料が接触する。つまり、第６面３６が、テーパ面９に接触する。 In plating, the material of the second conductor portion 5 is deposited so as to bulge outward in the plane direction at the peripheral edge of the inner portion 11. Therefore, the above-mentioned material also comes into contact with the tapered surface 9. That is, the sixth surface 36 comes into contact with the tapered surface 9.

これによって、絶縁層２と、第１導体部４および第２導体部５を有する複数の異方導電部３とを備える異方導電性シート１を、基材シート２０の厚み方向一方面に製造する。 As a result, the anisotropic conductive sheet 1 including the insulating layer 2 and the plurality of anisotropic conductive portions 3 having the first conductor portion 4 and the second conductor portion 5 is manufactured on one surface in the thickness direction of the base sheet 20. To do.

その後、図３Ｅに示すように、基材シート２０を除去する。例えば、エッチングなどによって、金属層および樹脂層を、厚み方向他方側から順次除去する。 Then, as shown in FIG. 3E, the base sheet 20 is removed. For example, the metal layer and the resin layer are sequentially removed from the other side in the thickness direction by etching or the like.

これにより、第２面３２および絶縁第２面２２が、厚み方向他方側に露出する。 As a result, the second surface 32 and the insulating second surface 22 are exposed on the other side in the thickness direction.

これによって、絶縁層２と複数の異方導電部３とを備える異方導電性シート１を製造する。 As a result, the anisotropic conductive sheet 1 including the insulating layer 2 and the plurality of anisotropic conductive portions 3 is manufactured.

次に、異方導電性シート１を用いて導通検査を実施する方法を、図３Ｅを参照して説明する。 Next, a method of performing a continuity inspection using the anisotropic conductive sheet 1 will be described with reference to FIG. 3E.

まず、図３Ｅの仮想線で示すように、異方導電性シート１の厚み方向一方側に、複数の第１端子４１を配置する。併せて、異方導電性シート１の厚み方向他方側に、複数の第２端子４２を配置する。 First, as shown by the virtual line in FIG. 3E, a plurality of first terminals 41 are arranged on one side in the thickness direction of the anisotropic conductive sheet 1. At the same time, a plurality of second terminals 42 are arranged on the other side of the anisotropic conductive sheet 1 in the thickness direction.

複数の第１端子４１としては、例えば、被検査用端子、具体的には、半導体素子の端子、フレキシブルプリント配線板の端子などが挙げられる。複数の第２端子４２としては、例えば、検査用端子などが挙げられ、具体的には、テスタープローブなどが挙げられる。 Examples of the plurality of first terminals 41 include terminals to be inspected, specifically, terminals of semiconductor elements, terminals of flexible printed wiring boards, and the like. Examples of the plurality of second terminals 42 include inspection terminals and the like, and specific examples thereof include a tester probe and the like.

続いて、図３Ｅの実線で示すように、複数の第１端子４１のそれぞれ、および、複数の第２端子４２のそれぞれの先端を、異方導電部３の複数の第４面３４のそれぞれ、および、複数の第２面３２のそれぞれに接触させる。その後、第２端子４２が備えられる検査装置（具体的には、テスター）の駆動に基づいて、第１端子４１が備えられる半導体素子やフレキシブルプリント配線板を導通検査する。 Subsequently, as shown by the solid line in FIG. 3E, the tips of the plurality of first terminals 41 and the tips of the plurality of second terminals 42 are respectively attached to the plurality of fourth surfaces 34 of the anisotropic conductive portion 3. And, each of the plurality of second surfaces 32 is brought into contact with each other. After that, the semiconductor element provided with the first terminal 41 and the flexible printed wiring board are inspected for continuity based on the drive of the inspection device (specifically, the tester) provided with the second terminal 42.

そして、この異方導電性シート１では、第１導体部４は、略平板形状に形成され、その第２面３２が露出するので、第１導体部４の第２面３２の全面が、第２端子４２（図３Ｅ参照）と接触でき、第２面３２と、第２端子４２との十分な接触面積（接触機会）を確保できる。 Then, in the anisotropic conductive sheet 1, the first conductor portion 4 is formed in a substantially flat plate shape, and the second surface 32 thereof is exposed. Therefore, the entire surface of the second surface 32 of the first conductor portion 4 is the first. It can come into contact with the two terminals 42 (see FIG. 3E), and a sufficient contact area (contact opportunity) between the second surface 32 and the second terminal 42 can be secured.

また、第１導体部４の第１面３１の周端部１２と、第２導体部５の第６面３６とが、絶縁層２の楔部１３を挟み込むことができる。そうすると、絶縁層２の楔部１３が、異方導電部３に対する楔（くさび）として作用でき、その結果、異方導電部３の絶縁層２からの厚み方向における脱落を抑制することができる。 Further, the peripheral end portion 12 of the first surface 31 of the first conductor portion 4 and the sixth surface 36 of the second conductor portion 5 can sandwich the wedge portion 13 of the insulating layer 2. Then, the wedge portion 13 of the insulating layer 2 can act as a wedge (wedge) with respect to the anisotropic conductive portion 3, and as a result, the loss of the anisotropic conductive portion 3 from the insulating layer 2 in the thickness direction can be suppressed.

従って、この異方導電性シート１では、異方導電部３の絶縁層２からの脱落の抑制と、異方導電部３の優れた異方導電性とを両立することができる。 Therefore, in this anisotropic conductive sheet 1, it is possible to both suppress the anisotropic conductive portion 3 from falling off from the insulating layer 2 and the excellent anisotropic conductivity of the anisotropic conductive portion 3.

＜変形例＞
変形例において、一実施形態と同様の部材および工程については、同一の参照符号を付し、その詳細な説明を省略する。また、変形例は、特記する以外、一実施形態と同様の作用効果を奏することができる。さらに、一実施形態およびその変形例を適宜組み合わせることができる。 <Modification example>
In the modified example, the same members and processes as in one embodiment are designated by the same reference numerals, and detailed description thereof will be omitted. Further, the modified example can exert the same action and effect as that of one embodiment, except for special mention. Further, one embodiment and a modification thereof can be appropriately combined.

一実施形態では、貫通孔６および異方導電部３を、いずれも、平面視略円形状で説明しているが、その平面視形状は特に限定されず、例えば、図示しないが、平面視略矩形状であってもよい。 In one embodiment, the through hole 6 and the anisotropic conductive portion 3 are both described in a substantially circular shape in a plan view, but the plan view shape is not particularly limited. For example, although not shown, the plan view is omitted. It may be rectangular.

また、一実施形態では、異方導電性シート１は、貫通孔６および異方導電部３のそれぞれを、複数備えるが、例えば、単数であってもよい。 Further, in one embodiment, the anisotropic conductive sheet 1 includes a plurality of through holes 6 and a plurality of anisotropic conductive portions 3, but may be singular, for example.

また、図４に示すように、異方導電性シート１が第３導体部３７をさらに備えることができる。第３導体部３７は、第１導体部４の第２面３２に積層されている。そのため、第３導体部３７、第１導体部４および第２導体部５が、厚み方向一方側に向かって順に配置されている。 Further, as shown in FIG. 4, the anisotropic conductive sheet 1 can further include a third conductor portion 37. The third conductor portion 37 is laminated on the second surface 32 of the first conductor portion 4. Therefore, the third conductor portion 37, the first conductor portion 4, and the second conductor portion 5 are arranged in order toward one side in the thickness direction.

第３導体部３７は、面方向に延びる略平板形状を有しており、第１導体部４の第２面３２と、第１導体部４の周囲（外側近傍）に位置する絶縁層２の絶縁第２面２２とに接触している。第３導体部３７は、底面視において、第１導体部４を包含しており、第１導体部４よりやや大きい寸法（面方向長さ）を有する。つまり、第３導体部３７は、底面視において、貫通孔６を包含する寸法を有する。 The third conductor portion 37 has a substantially flat plate shape extending in the surface direction, and is formed of the second surface 32 of the first conductor portion 4 and the insulating layer 2 located around the first conductor portion 4 (near the outside). It is in contact with the second insulating surface 22. The third conductor portion 37 includes the first conductor portion 4 when viewed from the bottom surface, and has a dimension (length in the plane direction) slightly larger than that of the first conductor portion 4. That is, the third conductor portion 37 has a size including the through hole 6 in the bottom view.

第３導体部３７を形成する方法としては、例えば、めっき、塗布などが挙げられ、好ましくは、めっきが挙げられる。めっきでは、第３導体部３７を第２導体部４と同時に形成する。 Examples of the method for forming the third conductor portion 37 include plating, coating, and the like, and plating is preferable. In plating, the third conductor portion 37 is formed at the same time as the second conductor portion 4.

一実施形態では、第２周側面８が、縦面１０を含むが、例えば、図５に示すように、縦面１０を含まず、テーパ面９のみを含むこともできる。 In one embodiment, the second peripheral side surface 8 includes the vertical surface 10, but for example, as shown in FIG. 5, the vertical surface 10 may not be included and only the tapered surface 9 may be included.

図５に示すように、この変形例では、第２周側面８は、テーパ面９からなる。つまり、第２周側面８の全部が、テーパ面９である。 As shown in FIG. 5, in this modified example, the second peripheral side surface 8 is composed of a tapered surface 9. That is, all of the second peripheral side surface 8 is the tapered surface 9.

また、一実施形態では、この異方導電性シート１では、第１導体部４の第２面３２は、絶縁層２の絶縁第２面２２と面一であったが、図６に示すように、絶縁層２の絶縁第２面２２より、厚み方向他方側に位置してもよい。 Further, in one embodiment, in the anisotropic conductive sheet 1, the second surface 32 of the first conductor portion 4 is flush with the insulating second surface 22 of the insulating layer 2, as shown in FIG. In addition, the insulating layer 2 may be located on the other side in the thickness direction from the insulating second surface 22.

この変形例では、図６に示すように、第１導体部４は、その厚み方向他方側部分が、面方向に投影したときに、絶縁層２の絶縁第２面２２から厚み方向他方側に突出している。具体的には、第１導体部４の第３面３３は、その厚み方向一方側部分が絶縁層２に被覆される一方、その厚み方向他方側部分が絶縁層２から露出する。 In this modification, as shown in FIG. 6, when the other side portion in the thickness direction of the first conductor portion 4 is projected in the plane direction, the first conductor portion 4 is moved from the insulating second surface 22 of the insulating layer 2 to the other side in the thickness direction. It is protruding. Specifically, the third surface 33 of the first conductor portion 4 is covered with the insulating layer 2 on one side in the thickness direction, while the other side in the thickness direction is exposed from the insulating layer 2.

なお、図６に示す変形例より、図２に示す一実施形態および図５に示す変形例が、好適である。図２に示す一実施形態および図５に示す変形例は、第２面３２が絶縁第２面２２と面一であるので、第２面３２が絶縁第２面２２より厚み方向一方側に突出する図６に示す変形例より、異方導電性シート１の厚み方向他方面の平滑化を図ることができる。 From the modified example shown in FIG. 6, one embodiment shown in FIG. 2 and the modified example shown in FIG. 5 are more preferable. In one embodiment shown in FIG. 2 and the modified example shown in FIG. 5, since the second surface 32 is flush with the insulating second surface 22, the second surface 32 projects from the insulating second surface 22 to one side in the thickness direction. From the modified example shown in FIG. 6, the other surface of the anisotropic conductive sheet 1 in the thickness direction can be smoothed.

図７に示すように、第２周側面８が、縦面１０を含まず、テーパ面９からなり、かつ、第２面３２が絶縁第２面２２より厚み方向一方側に突出することもできる。 As shown in FIG. 7, the second peripheral side surface 8 does not include the vertical surface 10 and is composed of the tapered surface 9, and the second surface 32 can protrude from the insulating second surface 22 to one side in the thickness direction. ..

図５の変形例では、第２導体部５は、テーパ面９の厚み方向他方側部分のみに接触しているが、例えば、図８に示すように、テーパ面９の全面に接触することもできる。 In the modified example of FIG. 5, the second conductor portion 5 is in contact with only the other side portion of the tapered surface 9 in the thickness direction, but for example, as shown in FIG. 8, it may be in contact with the entire surface of the tapered surface 9. it can.

図８に示すように、この第２導体部５は、第１導体部４の第１面３１の内側部１１と、テーパ面９とに追従する形状を有する。具体的には、第２導体部５は、断面視において、厚み方向一方側に向かって開放される略Ｕ字形状を有する。 As shown in FIG. 8, the second conductor portion 5 has a shape that follows the inner portion 11 of the first surface 31 of the first conductor portion 4 and the tapered surface 9. Specifically, the second conductor portion 5 has a substantially U-shape that opens toward one side in the thickness direction in a cross-sectional view.

第５面３５は、第１導体部４の第１面３１の内側部１１と、テーパ面９とに接触する。第４面３４は、第５面３５に平行する形状を有する。第６面３６は、面方向外側に露出する。 The fifth surface 35 comes into contact with the inner portion 11 of the first surface 31 of the first conductor portion 4 and the tapered surface 9. The fourth surface 34 has a shape parallel to the fifth surface 35. The sixth surface 36 is exposed to the outside in the surface direction.

また、図９に示すように、第２導体部５は、テーパ面９に加え、縦面１０に接触することもできる。 Further, as shown in FIG. 9, the second conductor portion 5 can come into contact with the vertical surface 10 in addition to the tapered surface 9.

テーパ面９の厚み方向長さＬ２に対する第２導体部５の厚みＴの比（Ｔ／Ｌ２）は、例えば、１超過であり、また、例えば、２以下である。 The ratio (T / L2) of the thickness T of the second conductor portion 5 to the length L2 of the tapered surface 9 in the thickness direction is, for example, 1 or more, and is, for example, 2 or less.

また、図５〜図９のそれぞれの変形例において、仮想線で示すように、異方導電性シート１が、第３導体部３７をさらに備えることができる。 Further, in each of the modified examples of FIGS. 5 to 9, the anisotropic conductive sheet 1 can further include a third conductor portion 37 as shown by a virtual line.

また、一実施形態では、第１導体部４は、平面視において、第２導体部５より大きいが、例えば、図示しないが、同一寸法またはそれより小さい寸法を有することができる。例えば、図示しないが、第１導体部４の第３面３３は、厚み方向に投影したときに、第６面３６（の面方向中間部または周端部）と重複してもよい。なお、この変形例でも、絶縁層２は、楔部１３を有する。 Further, in one embodiment, the first conductor portion 4 may have a size larger than that of the second conductor portion 5 in a plan view, but may have the same dimensions or smaller dimensions, for example, although not shown. For example, although not shown, the third surface 33 of the first conductor portion 4 may overlap with the sixth surface 36 (intermediate portion or peripheral end portion in the surface direction) when projected in the thickness direction. Even in this modification, the insulating layer 2 has a wedge portion 13.

１ 異方導電性シート
２ 絶縁層
３ 異方導電部
４ 第１導体部
５ 第２導体部
６ 貫通孔
８ 第２周側面
９ テーパ面
１１ 内側部
１２ 周端部
１３ 楔部
２２ 絶縁第２面
３１ 第１面（第１導体部）
３２ 第２面（第１導体部）
３４ 第４面（第２導体部）
６０ 第１開口部
７０ 第２開口部
1 Heteroconductive sheet 2 Insulation layer 3 Heteroconductive part 4 First conductor part 5 Second conductor part 6 Through hole 8 Second peripheral side surface 9 Tapered surface 11 Inner part 12 Peripheral end part 13 Cuneus part 22 Insulation second surface 31 First surface (first conductor part)
32 Second surface (first conductor part)
34 Fourth surface (second conductor part)
60 1st opening 70 2nd opening

Claims (2)

厚み方向を貫通する貫通孔を有する絶縁層と、
前記貫通孔に配置され、前記厚み方向に対向する一方面および他方面のそれぞれが前記厚み方向一方側および他方側のそれぞれに露出する異方導電部とを備え、
前記貫通孔は、前記厚み方向他方側部分に区画される第１開口部、および、前記第１開口部に連通し、前記厚み方向一方側部分に区画される第２開口部を有し、
前記絶縁層は、前記第２開口部を区画する周側面を有し、
前記周側面は、前記第２開口部の厚み方向他端縁から前記厚み方向一方側に向かって開口断面積が次第に大きくなるテーパ面を有し、
前記異方導電部は、前記第１開口部に配置される第１導体部と、前記第２開口部に配置される第２導体部とを備え、
前記第１導体部は、前記厚み方向に直交する面方向に延びる略平板形状に形成され、
前記第１導体部において、
他方面が、前記厚み方向他方側に露出し、
一方面の周端部が、前記絶縁層に接触し、
一方面において前記周端部の内側に位置する内側部が、前記第２導体部に接触し、
前記第２導体部は、前記テーパ面に接触し、
前記第２導体部において、
前記他方面が、前記第１導体部の前記内側部に接触し、
前記一方面が、前記厚み方向一方側に露出することを特徴とする、異方導電性シート。 An insulating layer having a through hole penetrating in the thickness direction,
It is provided with an anisotropic conductive portion which is arranged in the through hole and whose one surface and the other surface facing each other in the thickness direction are exposed to each of the one side and the other side in the thickness direction.
The through hole has a first opening defined in the other side portion in the thickness direction and a second opening portion communicating with the first opening portion and partitioned in the one side portion in the thickness direction.
The insulating layer has a peripheral side surface that partitions the second opening.
The peripheral side surface has a tapered surface in which the opening cross section gradually increases from the other end edge in the thickness direction of the second opening toward one side in the thickness direction.
The anisotropic conductive portion includes a first conductor portion arranged in the first opening portion and a second conductor portion arranged in the second opening portion.
The first conductor portion is formed in a substantially flat plate shape extending in a plane direction orthogonal to the thickness direction.
In the first conductor portion
The other surface is exposed to the other side in the thickness direction,
The peripheral end of one surface comes into contact with the insulating layer,
The inner portion located inside the peripheral end portion on one surface comes into contact with the second conductor portion, and
The second conductor portion comes into contact with the tapered surface and
In the second conductor portion
The other surface comes into contact with the inner portion of the first conductor portion,
An anisotropic conductive sheet, characterized in that one surface is exposed to one side in the thickness direction. 前記第１導体部の前記他方面は、前記絶縁層の厚み方向他方面と面一であることを特徴とする、請求項１に記載の異方導電性シート。 The anisotropic conductive sheet according to claim 1, wherein the other surface of the first conductor portion is flush with the other surface in the thickness direction of the insulating layer.
JP2019042649A 2019-03-08 2019-03-08 Anisotropic conductive sheet Pending JP2020145146A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2019042649A JP2020145146A (en) 2019-03-08 2019-03-08 Anisotropic conductive sheet
KR1020200026458A KR20200107823A (en) 2019-03-08 2020-03-03 Anisotropic conductive sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019042649A JP2020145146A (en) 2019-03-08 2019-03-08 Anisotropic conductive sheet

Publications (1)

Publication Number Publication Date
JP2020145146A true JP2020145146A (en) 2020-09-10

Family

ID=72354467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019042649A Pending JP2020145146A (en) 2019-03-08 2019-03-08 Anisotropic conductive sheet

Country Status (2)

Country Link
JP (1) JP2020145146A (en)
KR (1) KR20200107823A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018066541A1 (en) 2016-10-06 2018-04-12 日東電工株式会社 Anisotropic conductive sheet

Also Published As

Publication number Publication date
KR20200107823A (en) 2020-09-16

Similar Documents

Publication Publication Date Title
CN106605454B (en) Multi-layer flexible printed circuit board and its manufacturing method
JP4178077B2 (en) Printed circuit board
CN105722302B (en) It is embedded in the circuit board and its processing method of boss Metal Substrate
US8618424B2 (en) Multilayer wiring substrate and method of manufacturing the same
US20120006591A1 (en) Wiring Substrate and Method for Manufacturing Wiring Substrate
JP7081090B2 (en) How to manufacture wiring boards, probe cards, and wiring boards
KR20090110596A (en) Printed circuit board and method for manufacturing the same
JP2015088729A (en) Substrate structure and method for manufacturing the same
JP5798435B2 (en) Wiring board for electronic component inspection apparatus and manufacturing method thereof
TW201940020A (en) Magnetic wiring circuit board and method for manufacturing same
CN107708287A (en) Distributing board and its manufacture method
TWI357291B (en)
CN1976556B (en) Wired circuit board
CN106304662A (en) Circuit board and preparation method thereof
CN105491796B (en) The production method of circuit board
JP2020145146A (en) Anisotropic conductive sheet
JP7448309B2 (en) Wired circuit board and its manufacturing method
JP5777997B2 (en) Wiring board for electronic component inspection apparatus and manufacturing method thereof
CN105992458B (en) Micro-aperture conductive through hole structure of flexible circuit board and manufacturing method thereof
CN109429442A (en) Circuit board and preparation method thereof
JP2020145145A (en) Anisotropic conductive sheet
JP2006339350A (en) Printed wiring board and its manufacturing method
CN1937333A (en) Electric connector and its manufacturing method
JP2004146757A (en) Wiring board and method for manufacturing the wiring board
TWI281842B (en) Manufacture method for multiple-circuit chip with protruding electrode