JP7356812B2 - 有機発光表示装置 - Google Patents
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- JP7356812B2 JP7356812B2 JP2019072394A JP2019072394A JP7356812B2 JP 7356812 B2 JP7356812 B2 JP 7356812B2 JP 2019072394 A JP2019072394 A JP 2019072394A JP 2019072394 A JP2019072394 A JP 2019072394A JP 7356812 B2 JP7356812 B2 JP 7356812B2
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- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
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Description
ゲート電極155がストレージキャパシタCstの第1維持電極E1をなす駆動トランジスタT1と、
スキャン線151の信号にしたがって駆動トランジスタT1にデータ電圧Dmを供給する第2トランジスタT2と、
駆動トランジスタT1を通ることで変化した補償電圧(Dm+Vthの電圧)が、ストレージキャパシタCstの第2維持電極E2に伝達されるようにするために、スキャン線151の信号にしたがって作動する第3トランジスタと、
前段スキャン線152の信号に応じて、駆動トランジスタT1のゲート電極G1およびストレージキャパシタCstの第2維持電極E2を初期化させる第4トランジスタT4と、
発光制御線153の信号に応じて、駆動電圧ELVDDを駆動トランジスタT1に伝達する第5トランジスタT5と、
発光制御線153の信号に応じて、駆動トランジスタT1から出力される駆動電流Idを有機発光ダイオードOLEDに伝達する第6トランジスタT6と、
バイパス信号、または、前段スキャン線152の信号に応じて、有機発光ダイオードOLEDのアノードを初期化させる第7トランジスタT7と
を備え
各トランジスタのチャネル領域、及び、これらを連結する配線がポリシリコンにより形成される有機発光表示装置において、
各画素PXの面積を最小限にしつつ、作動の信頼性を確保し、製品不良を低減すべく、下記A1~A3などとする。
73:データ連結部材
110:基板
111:バリア層
112:バッファ層
126:維持線
141:第1ゲート絶縁膜
142:第2ゲート絶縁膜
151:スキャン線
152:前段スキャン線
153:発光制御線
155:ゲート電極
157:初期化電圧線
160:層間絶縁膜
171:データ線
172:駆動電圧線
180:保護膜
741:共通電圧線
T1、T2、T3-1、T3-2、T4-1、T4-2、T5、T6、T7:トランジスタ
S1、S2、S3-1、S3-2、S4-1、S4-2、S5、S6、S7:第1電極
D1、D2、D3-1、D3-2、D4-1、D4-2、D5、D6、D7:第2電極
Cst:ストレージキャパシタ
E1、E2:維持電極
PBLK:ドーピングマスク
PS:半導体層
PSE、PSE2:拡張部
PX:画素
Claims (10)
- 基板と、
前記基板上に位置する半導体層と、
前記半導体層を覆う第1ゲート絶縁膜と、
前記第1ゲート絶縁膜の上に位置する第1ゲート導電体と、
前記第1ゲート導電体を覆う第2ゲート絶縁膜と、
前記第2ゲート絶縁膜の上に位置する第2ゲート導電体と、
前記第2ゲート導電体を覆う層間絶縁膜と、
前記層間絶縁膜の上に位置するデータ導電体とを含み、
前記半導体層のパターンはドーピング領域およびドーピングされない領域を含み、
前記第1ゲート導電体の第1パターンと重なる箇所で、前記半導体層の一の線状パターンは、2つの前記ドーピングされない領域と、これらの間に位置する前記ドーピング領域とを含む、有機発光表示装置。 - 前記ドーピング領域の両側に位置する前記ドーピングされない領域により、それぞれ、第4-1トランジスタのチャンネルおよび第4-2トランジスタのチャンネルが形成され、前記ドーピング領域により、前記第4-1トランジスタの一電極および前記第4-2トランジスタの一電極が形成される、請求項1に記載の有機発光表示装置。
- 前記ドーピング領域により、前記第4-2トランジスタの第1電極および前記第4-1トランジスタの第2電極が形成され、
前記ドーピング領域、および、前記ドーピング領域の両側に位置する前記ドーピングされない領域を含む前記半導体層の一の線状パターンは、一方向に延長される直線構造を有し、
前記第1ゲート導電体の第1パターンは前段スキャン線を含み、
前記前段スキャン線は、前記ドーピング領域および前記ドーピングされない領域を含む前記半導体層の一の線状パターンを覆うように幅が拡張された拡張部を有する、請求項2に記載の有機発光表示装置。 - 前記半導体層のパターンは、第1拡張部をさらに含み、
前記第1ゲート絶縁膜は、前記第1拡張部を露出させる第1開口を含み、
前記第1ゲート導電体の第2パターンは、前記第1開口を通じて前記第1拡張部と直接連結される、請求項1に記載の有機発光表示装置。 - 前記第1ゲート導電体の第2パターンは、駆動トランジスタのゲート電極を含み、
前記第2ゲート導電体は、拡張された部分を含む維持線を含み、
前記駆動トランジスタの前記ゲート電極は、これと重なる、前記維持線の前記拡張された部分と、これらの間に位置する前記第2ゲート絶縁膜と共に、ストレージキャパシタを形成し、
前記維持線には駆動電圧が印加される、請求項4に記載の有機発光表示装置。 - 前記データ導電体は、拡張部を含む駆動電圧線を含み、
前記駆動電圧線の拡張部は、前記層間絶縁膜に形成された開口を通じて前記維持線と直接連結されており、
前記駆動電圧線の前記拡張部は、直列連結された第3-1トランジスタと第3-2トランジスタとの間の連結ノードについて少なくとも一部分を覆う、請求項5に記載の有機発光表示装置。 - 前記連結ノードは、前記半導体層の線状パターンの一部の、ドーピングされない部分により形成される、請求項6に記載の有機発光表示装置。
- 前記第1ゲート導電体の第3パターンは、スキャン線を含み、
前記半導体層のパターンは、第1方向の一側に延長されて前記第3-2トランジスタのチャンネルを形成してから前記第1方向と交差する第2方向の一側に折り曲げられた後に前記第1方向の逆側に折り曲げられることでUターン部分を形成し、続いて前記第3-1トランジスタのチャンネルを形成する構造部分を有し、
前記スキャン線は、前記第3-2トランジスタの前記チャンネルおよび前記第3-1トランジスタの前記チャンネルと重なり、
前記半導体層のパターンにおける前記第1拡張部は、前記第3-1トランジスタの前記チャンネルから、さらに延長された部分により形成され、
前記半導体層のパターンは、前記第3-1トランジスタの前記チャンネルから、さらに延長されて前記第2方向の一側に折り曲げられ前記第1方向の一側に折り曲げられることでさらなるUターン部分を形成し、続いてさらに延長されることで、第4-1トランジスタおよび第4-2トランジスタのチャンネルを順次形成している、請求項7に記載の有機発光表示装置。 - 前記半導体層のパターンは、第2拡張部をさらに含み、
前記第1ゲート絶縁膜は、前記第2拡張部を露出させる第2開口を含み、
前記第1ゲート導電体の第4パターンは、駆動トランジスタのゲート電極とは異なり、前記第2開口を通じて前記第2拡張部と直接連結され、
前記第1ゲート導電体の第4パターンは初期化電圧線である、請求項1に記載の有機発光表示装置。 - 前記第1ゲート導電体の第1パターンは前段スキャン線を含み,
前記第1ゲート導電体の第2パターンは駆動トランジスタのゲート電極を含み、
前記第1ゲート導電体の第3パターンはスキャン線を含み、
前記第1ゲート導電体の第4パターンは初期化電圧線を含み、
前記第1ゲート導電体の第5パターンは発光制御線を含み、
前記データ導電体はデータ線および駆動電圧線を含み、
一つの画素は、
光を放出する有機発光素子と、
前記スキャン線および前記データ線に連結されている第2トランジスタと、
前記有機発光素子に電流を印加する前記駆動トランジスタと、
前記発光制御線に連結されている第5トランジスタおよび第6トランジスタと、
直列連結されている第3-1トランジスタおよび第3-2トランジスタと、
直列連結されている第4-1トランジスタおよび第4-2トランジスタとを含む、請求項1に記載の有機発光表示装置。
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