JP7286635B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7286635B2 JP7286635B2 JP2020522570A JP2020522570A JP7286635B2 JP 7286635 B2 JP7286635 B2 JP 7286635B2 JP 2020522570 A JP2020522570 A JP 2020522570A JP 2020522570 A JP2020522570 A JP 2020522570A JP 7286635 B2 JP7286635 B2 JP 7286635B2
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- Engineering & Computer Science (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
IGBT領域8のエミッタ領域46およびダイオード領域9のカソード領域61は、コレクタ端子電極32に電気的に接続されている。
2 半導体層
3 第1主面
4 第2主面
8 IGBT領域
9 ダイオード領域
10 境界領域
34 コレクタ領域
35 FET構造
39 ゲートトレンチ
40 ゲート絶縁層
41 ゲート電極
45 ボディ領域
46 エミッタ領域
52 フローティング領域
54 領域分離トレンチ
71 ウェル領域
77 境界FET構造
161 半導体装置
162 半導体装置
163 半導体装置
164 半導体装置
165 半導体装置
166 半導体装置
167 半導体装置
168 半導体装置
169 半導体装置
170 半導体装置
171 半導体装置
173 半導体装置
Z 法線方向
Claims (19)
- 一方側の第1主面および他方側の第2主面を含む第1導電型の半導体層と、
前記第1主面の表層部に形成された第2導電型のボディ領域、前記ボディ領域の表層部に形成された第1導電型のエミッタ領域、および、ゲート絶縁層を介して前記ボディ領域および前記エミッタ領域に対向するゲート電極を含むFET構造、ならびに、前記第2主面の表層部に形成された第2導電型のコレクタ領域を含むIGBT領域と、
前記第1主面の表層部に形成された第2導電型の第1不純物領域、および、前記第2主面の表層部に形成された第1導電型の第2不純物領域を含むダイオード領域と、
前記IGBT領域および前記ダイオード領域の間の領域において前記第1主面の表層部に形成された第2導電型のウェル領域を含む境界領域と、
前記第1主面の上において前記エミッタ領域、前記第1不純物領域および前記ウェル領域に電気的に接続された第1主面電極と、を含み、
前記ダイオード領域と前記境界領域とを区画するトレンチが設けられ、前記トレンチの一端には前記ダイオード領域が接しており、前記トレンチの他端には前記境界領域のうちの前記第2導電型のウエル領域のみが接している、半導体装置。 - 前記第2主面の上において前記コレクタ領域および前記第2不純物領域に電気的に接続された第2主面電極をさらに含む、請求項1に記載の半導体装置。
- 前記境界領域は、平面視において前記コレクタ領域と重なる領域に形成された前記ウェル領域を含む、請求項1または2に記載の半導体装置。
- 前記境界領域は、平面視において前記第2不純物領域とは重ならない領域に形成された前記ウェル領域を含む、請求項1~3のいずれか一項に記載の半導体装置。
- 前記境界領域は、前記第1主面の表層部に形成された第2導電型の境界ボディ領域、前記境界ボディ領域の表層部に形成された第1導電型の境界エミッタ領域、および、境界ゲート絶縁層を介して前記境界ボディ領域および前記境界エミッタ領域に対向する境界ゲート電極を含み、前記第1主面において前記ウェル領域に隣り合う領域に形成された境界FET構造を含む、請求項1~4のいずれか一項に記載の半導体装置。
- 複数の前記ウェル領域が、前記第1主面の表層部に形成されており、
前記境界FET構造は、前記第1主面の表層部において複数の前記ウェル領域の間の領域に形成されている、請求項5に記載の半導体装置。 - 前記ウェル領域は、前記第1主面に形成された領域分離トレンチによって前記境界FET構造から区画されている、請求項5または6に記載の半導体装置。
- 前記IGBT領域は、前記第1主面の表層部において前記FET構造に隣り合うように形成された第2導電型のフローティング領域を含む、請求項5~7のいずれか一項に記載の半導体装置。
- 前記IGBT領域は、間隔を空けて形成された複数の前記FET構造、および、前記第1主面の表層部において複数の前記FET構造の間の領域に形成された前記フローティング領域を含む、請求項8に記載の半導体装置。
- 前記フローティング領域は、前記第1主面電極から電気的に分離されている、請求項8または9に記載の半導体装置。
- 前記ゲート電極は、前記第1主面に形成されたゲートトレンチ内において前記ゲート絶縁層を介して前記ボディ領域および前記エミッタ領域に対向している、請求項8~10のいずれか一項に記載の半導体装置。
- 前記フローティング領域は、前記第1主面に形成された領域分離トレンチによって前記FET構造から区画されている、請求項8~11のいずれか一項に記載の半導体装置。
- 前記IGBT領域は、前記第1主面の表層部において前記FET構造に隣り合うように形成された第2導電型のフローティング領域を含む、請求項1~4のいずれか一項に記載の半導体装置。
- 前記IGBT領域は、間隔を空けて形成された複数の前記FET構造、および、前記第1主面の表層部において複数の前記FET構造の間の領域に形成された前記フローティング領域を含む、請求項13に記載の半導体装置。
- 前記フローティング領域は、前記第1主面電極から電気的に分離されている、請求項13または14に記載の半導体装置。
- 前記ゲート電極は、前記第1主面に形成されたゲートトレンチ内において前記ゲート絶縁層を介して前記ボディ領域および前記エミッタ領域に対向している、請求項13~15のいずれか一項に記載の半導体装置。
- 前記フローティング領域は、前記第1主面に形成された領域分離トレンチによって前記FET構造から区画されている、請求項13~16のいずれか一項に記載の半導体装置。
- 前記IGBT領域、前記境界領域、前記ダイオード領域、前記境界領域および前記IGBT領域が、平面視において一方方向に沿ってこの順に形成されている、請求項1~17のいずれか一項に記載の半導体装置。
- 前記ダイオード領域、前記境界領域、前記IGBT領域、前記境界領域および前記ダイオード領域が、平面視において一方方向に沿ってこの順に形成されている、請求項1~18のいずれか一項に記載の半導体装置。
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WO2018074425A1 (ja) | 2016-10-17 | 2018-04-26 | 富士電機株式会社 | 半導体装置 |
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