JP7254924B2 - ワークピースを処理するためのシステムおよび方法 - Google Patents
ワークピースを処理するためのシステムおよび方法 Download PDFInfo
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- JP7254924B2 JP7254924B2 JP2021527240A JP2021527240A JP7254924B2 JP 7254924 B2 JP7254924 B2 JP 7254924B2 JP 2021527240 A JP2021527240 A JP 2021527240A JP 2021527240 A JP2021527240 A JP 2021527240A JP 7254924 B2 JP7254924 B2 JP 7254924B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
本出願は、2018年11月19日付けで出願された”Systems and Methods for Workpiece Processing”と題する米国仮出願第62/769,152号の優先権の利益を主張し、参照により本明細書に援用される。
本開示は、一般にワークピースの処理に関し、より詳細には、半導体ワークピース等のワークピースを処理するためのシステムに関する。
Claims (10)
- 半導体ワークピースを処理するためのワークピース処理装置であって、
第1の間隔だけ離された第1の処理ステーションと第2の処理ステーションとを有し、10Torr未満の圧力で運転可能な第1の処理室と、
前記第1の間隔とは異なる第2の間隔だけ離された第3の処理ステーションと第4の処理ステーションとをまとめて有し、10Torr未満の圧力で運転可能な1つ以上の第2の処理室と、
処理フローにおいて前記第1の処理室と1つ以上の前記第2の処理室とに連絡しており、10Torr未満の圧力で運転可能な移送室と、
前記移送室内に配置されており、所定の軸線を中心として回転するように構成されており、第1のワークピースを支持するように動作可能な少なくとも1つのワークピースハンドリングコンポーネントを有する第1のアームと、第2のワークピースを支持するように動作可能な少なくとも1つのワークピースハンドリングコンポーネントを有する第2のアームとを有するワークピースハンドリングロボットと、
を有する、ワークピース処理装置において、
前記ワークピースハンドリングロボットは、前記第1のワークピースと前記第2のワークピースとを前記第1および第2の処理ステーションから同時に取り上げ、前記第1のワークピースと前記第2のワークピースとを、前記第3および第4の処理ステーションに同時に降ろすように構成されており、
前記ワークピースハンドリングロボットは、前記第1のアームと前記第2のアームとの間の横方向の間隔を調整するように構成されており、
前記第1の処理ステーションと前記第2の処理ステーションとの間の間隔と、前記第3の処理ステーションと前記第4の処理ステーションとの間の間隔とは、異なっている、
ワークピース処理装置。 - 前記第1のアームは、前記第2のアームに対して独立して伸長可能である、請求項1記載のワークピース処理装置。
- 前記ワークピースハンドリングロボットは、前記第1のアームおよび前記第2のアームの独立した伸長を用いて、前記第1のワークピースと前記第2のワークピースとを、前記第1の処理室内の前記第1および第2の処理ステーションから、前記第3および第4の処理ステーションに移送するように構成されている、請求項1記載のワークピース処理装置。
- 前記第3の処理ステーションおよび前記第4の処理ステーションは、同じ処理室内に配置されている、請求項1記載のワークピース処理装置。
- 当該ワークピース処理装置は、前記第1のワークピースと前記第2のワークピースとを積み重ねて配置した状態で支持するように動作可能なワークピース支持コラムを備えた移送位置を有している、請求項1記載のワークピース処理装置。
- 前記ワークピースハンドリングロボットは、前記第1のワークピースと前記第2のワークピースとを同時に前記ワークピース支持コラムから取り上げるまたは降ろすように構成されている、請求項5記載のワークピース処理装置。
- 処理フローにおいて前記移送室と連絡しており、該移送室から隔離されて運転可能なロードロック室をさらに有している、請求項1記載のワークピース処理装置。
- 前記ロードロック室は、10Torr~大気圧までの圧力において運転可能である、請求項7記載のワークピース処理装置。
- 前記第1の処理室は、エッチ処理室、ドライストリップ処理室、堆積処理室、熱処理室、イオン注入処理室、または表面処理室である、請求項1記載のワークピース処理装置。
- 前記第2の処理室は、エッチ処理室、ドライストリップ処理室、堆積処理室、熱処理室、イオン注入処理室、または表面処理室である、請求項1記載のワークピース処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201862769152P | 2018-11-19 | 2018-11-19 | |
US62/769,152 | 2018-11-19 | ||
PCT/US2019/058753 WO2020106418A1 (en) | 2018-11-19 | 2019-10-30 | Systems and methods for workpiece processing |
Publications (2)
Publication Number | Publication Date |
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JP2022507753A JP2022507753A (ja) | 2022-01-18 |
JP7254924B2 true JP7254924B2 (ja) | 2023-04-10 |
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Application Number | Title | Priority Date | Filing Date |
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JP2021527240A Active JP7254924B2 (ja) | 2018-11-19 | 2019-10-30 | ワークピースを処理するためのシステムおよび方法 |
Country Status (6)
Country | Link |
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US (1) | US20200161162A1 (ja) |
JP (1) | JP7254924B2 (ja) |
KR (1) | KR20210071094A (ja) |
CN (1) | CN112219269A (ja) |
TW (1) | TW202036755A (ja) |
WO (1) | WO2020106418A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11482434B2 (en) | 2016-10-18 | 2022-10-25 | Belting E-Town Semiconductor Technology Co., Ltd | Systems and methods for workpiece processing |
JP7183635B2 (ja) * | 2018-08-31 | 2022-12-06 | 東京エレクトロン株式会社 | 基板搬送機構、基板処理装置及び基板搬送方法 |
WO2021023194A1 (zh) * | 2019-08-08 | 2021-02-11 | 漳州片仔癀药业股份有限公司 | 吡嗪-2(1h)-酮类化合物的c晶型和e晶型及其制备方法 |
KR20210119185A (ko) * | 2020-03-24 | 2021-10-05 | 주식회사 원익아이피에스 | 이송로봇 및 이를 포함하는 기판처리시스템 |
CN117242562A (zh) * | 2021-03-03 | 2023-12-15 | 北京屹唐半导体科技股份有限公司 | 用于工件加工的***和方法 |
CN113488422A (zh) * | 2021-06-30 | 2021-10-08 | 北京屹唐半导体科技股份有限公司 | 传送装置和处理*** |
JP7465855B2 (ja) * | 2021-09-27 | 2024-04-11 | 芝浦メカトロニクス株式会社 | 加熱処理装置、搬入搬出治具、および有機膜の形成方法 |
CN115775735B (zh) * | 2022-12-02 | 2023-11-07 | 江苏东海半导体股份有限公司 | 一种带有沟槽的碳化硅积累态mosfet制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005019739A (ja) | 2003-06-26 | 2005-01-20 | Tokyo Electron Ltd | 被処理体の搬送方法 |
WO2008155932A1 (ja) | 2007-06-19 | 2008-12-24 | Ulvac, Inc. | 基板搬送方法 |
JP2010087177A (ja) | 2008-09-30 | 2010-04-15 | Tokyo Electron Ltd | 搬送機構の制御方法、基板処理装置、及び記憶媒体 |
JP2014527314A (ja) | 2011-09-16 | 2014-10-09 | パーシモン テクノロジーズ コーポレイション | 低変動ロボット |
WO2018075262A1 (en) | 2016-10-18 | 2018-04-26 | Mattson Technology, Inc. | Systems and methods for workpiece processing |
WO2018148317A1 (en) | 2017-02-07 | 2018-08-16 | Brooks Automation, Inc. | Method and apparatus for substrate transport |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8668422B2 (en) * | 2004-08-17 | 2014-03-11 | Mattson Technology, Inc. | Low cost high throughput processing platform |
TW200640767A (en) * | 2005-05-27 | 2006-12-01 | Innolux Display Corp | Apparatus for conveying substrate plates |
JP4684268B2 (ja) * | 2007-08-30 | 2011-05-18 | 株式会社アルバック | 真空処理装置、基板搬送方法 |
US20110265951A1 (en) * | 2010-04-30 | 2011-11-03 | Applied Materials, Inc. | Twin chamber processing system |
US9202733B2 (en) * | 2011-11-07 | 2015-12-01 | Persimmon Technologies Corporation | Robot system with independent arms |
CN104823272B (zh) * | 2012-11-30 | 2017-07-14 | 应用材料公司 | 具有非等长前臂的多轴机械手设备、电子装置制造***、及用于在电子装置制造中传送基板的方法 |
WO2014197537A1 (en) * | 2013-06-05 | 2014-12-11 | Persimmon Technologies, Corp. | Robot and adaptive placement system and method |
JP6671993B2 (ja) * | 2016-02-01 | 2020-03-25 | 東京エレクトロン株式会社 | 基板受け渡し位置の教示方法及び基板処理システム |
TWI742201B (zh) * | 2016-12-02 | 2021-10-11 | 美商應用材料股份有限公司 | 整合式原子層沉積工具 |
US20180197760A1 (en) * | 2017-01-07 | 2018-07-12 | Applied Materials, Inc. | Dual PVD Chamber And Hybrid PVD-CVD Chambers |
US10290523B2 (en) * | 2017-03-17 | 2019-05-14 | Asm Ip Holding B.V. | Wafer processing apparatus, recording medium and wafer conveying method |
-
2019
- 2019-10-30 WO PCT/US2019/058753 patent/WO2020106418A1/en active Application Filing
- 2019-10-30 CN CN201980033767.5A patent/CN112219269A/zh active Pending
- 2019-10-30 JP JP2021527240A patent/JP7254924B2/ja active Active
- 2019-10-30 KR KR1020217017080A patent/KR20210071094A/ko not_active IP Right Cessation
- 2019-10-30 US US16/667,986 patent/US20200161162A1/en active Pending
- 2019-11-04 TW TW108139881A patent/TW202036755A/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005019739A (ja) | 2003-06-26 | 2005-01-20 | Tokyo Electron Ltd | 被処理体の搬送方法 |
WO2008155932A1 (ja) | 2007-06-19 | 2008-12-24 | Ulvac, Inc. | 基板搬送方法 |
JP2010087177A (ja) | 2008-09-30 | 2010-04-15 | Tokyo Electron Ltd | 搬送機構の制御方法、基板処理装置、及び記憶媒体 |
JP2014527314A (ja) | 2011-09-16 | 2014-10-09 | パーシモン テクノロジーズ コーポレイション | 低変動ロボット |
WO2018075262A1 (en) | 2016-10-18 | 2018-04-26 | Mattson Technology, Inc. | Systems and methods for workpiece processing |
WO2018148317A1 (en) | 2017-02-07 | 2018-08-16 | Brooks Automation, Inc. | Method and apparatus for substrate transport |
Also Published As
Publication number | Publication date |
---|---|
KR20210071094A (ko) | 2021-06-15 |
CN112219269A (zh) | 2021-01-12 |
US20200161162A1 (en) | 2020-05-21 |
TW202036755A (zh) | 2020-10-01 |
JP2022507753A (ja) | 2022-01-18 |
WO2020106418A1 (en) | 2020-05-28 |
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