JP7175151B2 - 搬送方法 - Google Patents
搬送方法 Download PDFInfo
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- JP7175151B2 JP7175151B2 JP2018184353A JP2018184353A JP7175151B2 JP 7175151 B2 JP7175151 B2 JP 7175151B2 JP 2018184353 A JP2018184353 A JP 2018184353A JP 2018184353 A JP2018184353 A JP 2018184353A JP 7175151 B2 JP7175151 B2 JP 7175151B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
まず、本開示の一実施形態に係る基板処理装置10について、図1を参照しながら説明する。図1は、一実施形態に係る基板処理装置10の一例を示す図である。基板処理装置10は、真空に保持され、基板の一例であるウエハWを搬送するための真空搬送室1と、真空搬送室1の周囲にて各々気密に接続され、ウエハWに対して所定の処理を行う複数の処理モジュールとを有する。この例では、処理モジュールは例えば4つ設けられているが、2つ以上設けられていればよい。以下では、4つの処理モジュールを処理室PM1、PM2、PM3、PM4といい、総称して処理室PMという。本実施形態では、処理室PM1は第1処理室の一例であり、処理室PM4は第2処理室の一例である。4つの処理室PM1~PM4及び2つのロードロック室21は、6角形の真空搬送室1の各辺にそれぞれ接続されている。
以上、搬送動作について説明した。次に、制御部30が実行する搬送処理について図3を参照して説明する。図3は、一実施形態に係る搬送処理の一例を示すフローチャートである。上述したように、一実施形態に係る基板処理装置10では処理室PM1においてウエハWに対して低温処理が実行され、処理室PM4において高温処理が実行される。
2 基板搬送装置
3 FOUP
10 基板処理装置
11 第1の搬送アーム
12 第2の搬送アーム
14,15 ピック
21 ロードロック室
22 大気搬送室
23 ロードポート
24 大気搬送アーム
30 制御部
PM、PM1~PM4 処理室
Claims (6)
- 真空に保持された真空搬送室と、前記真空搬送室に接続された第1処理室、第2処理室及び前室と、前記真空搬送室に配置され、前記第1処理室、前記第2処理室及び前記前室の間で基板を搬送する基板搬送装置と、を有する基板処理装置において、前記前室から搬出した基板を前記第1処理室と前記第2処理室との順に連続して搬送する工程を各基板について繰り返し行う搬送方法であって、
(a)前記第1処理室と前記第2処理室とを、前記第1処理室の温度が前記第2処理室の温度よりも低温になるようにそれぞれ加熱する工程と、
(b)前記基板搬送装置により前記第1処理室から処理済の基板を受け取り、前記第2処理室に搬送する工程と、
(c)前記第1処理室にて基板の処理中、前記前室に未処理の基板を待機させ、前記第1処理室にて基板の処理後、前記第1処理室から処理後の基板を搬出した後、前記基板搬送装置により前記前室から未処理の基板を受け取り、前記第1処理室に搬送する工程と、
(d)前記基板搬送装置により前記前室から未処理の基板を受け取り、前記第1処理室に搬送する工程と、を有し、
前記(b)の工程と、前記(c)の工程又は前記(d)の工程とは、基板毎に繰り返し実行され、
前記(c)の工程は、前記第1処理室に基板が載置されている場合に実行され、
前記(d)の工程は、前記第1処理室に基板が載置されていない場合に実行される、搬送方法。 - 前記(d)の工程は、搬送動作を停止せずに、前記前室から前記第1処理室に未処理の基板を搬送する、
請求項1に記載の搬送方法。 - 前記(b)の工程は、前記(d)の工程よりも優先して実行される、
請求項1又は2に記載の搬送方法。 - 前記基板搬送装置は、2本のアームを有する、
請求項1~3のいずれか一項に記載の搬送方法。 - 前記(d)の工程は、前記基板搬送装置が有する一方のアームに前記前室から未処理の基板を受け取り、他方のアームに基板を保持しない状態で前記未処理の基板を前記第1処理室に搬送する、
請求項4に記載の搬送方法。 - 前記基板搬送装置は、前記第2処理室との間で基板を搬送する際に熱を受ける、
請求項1~5のいずれか一項に記載の搬送方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018184353A JP7175151B2 (ja) | 2018-09-28 | 2018-09-28 | 搬送方法 |
US16/581,607 US11302550B2 (en) | 2018-09-28 | 2019-09-24 | Transfer method |
KR1020190118894A KR102395352B1 (ko) | 2018-09-28 | 2019-09-26 | 반송 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2018184353A JP7175151B2 (ja) | 2018-09-28 | 2018-09-28 | 搬送方法 |
Publications (2)
Publication Number | Publication Date |
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JP2020053646A JP2020053646A (ja) | 2020-04-02 |
JP7175151B2 true JP7175151B2 (ja) | 2022-11-18 |
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JP2018184353A Active JP7175151B2 (ja) | 2018-09-28 | 2018-09-28 | 搬送方法 |
Country Status (3)
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US (1) | US11302550B2 (ja) |
JP (1) | JP7175151B2 (ja) |
KR (1) | KR102395352B1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000195925A (ja) | 1998-12-28 | 2000-07-14 | Anelva Corp | 基板処理装置 |
JP2011176197A (ja) | 2010-02-25 | 2011-09-08 | Nikon Corp | 搬送装置および基板接合装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0846013A (ja) * | 1994-05-23 | 1996-02-16 | Tokyo Electron Ltd | マルチチャンバ処理システム用搬送装置 |
WO2000028587A1 (fr) * | 1998-11-09 | 2000-05-18 | Tokyo Electron Limited | Dispositif de traitement |
JP4477982B2 (ja) | 2004-10-08 | 2010-06-09 | 東京エレクトロン株式会社 | クラスタツールの処理システム及び滞在時間監視プログラム |
JP4353903B2 (ja) | 2005-01-07 | 2009-10-28 | 東京エレクトロン株式会社 | クラスタツールの処理システム |
JP5454286B2 (ja) | 2010-03-26 | 2014-03-26 | 東京エレクトロン株式会社 | 基板処理装置 |
JP6013792B2 (ja) * | 2012-06-12 | 2016-10-25 | 東京エレクトロン株式会社 | 基板搬送方法及び基板搬送装置 |
JP6697984B2 (ja) * | 2016-08-31 | 2020-05-27 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理システム |
JP6270952B1 (ja) * | 2016-09-28 | 2018-01-31 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および記録媒体。 |
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2018
- 2018-09-28 JP JP2018184353A patent/JP7175151B2/ja active Active
-
2019
- 2019-09-24 US US16/581,607 patent/US11302550B2/en active Active
- 2019-09-26 KR KR1020190118894A patent/KR102395352B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000195925A (ja) | 1998-12-28 | 2000-07-14 | Anelva Corp | 基板処理装置 |
JP2011176197A (ja) | 2010-02-25 | 2011-09-08 | Nikon Corp | 搬送装置および基板接合装置 |
Also Published As
Publication number | Publication date |
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KR102395352B1 (ko) | 2022-05-06 |
KR20200036778A (ko) | 2020-04-07 |
US11302550B2 (en) | 2022-04-12 |
US20200105564A1 (en) | 2020-04-02 |
JP2020053646A (ja) | 2020-04-02 |
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