JP7196403B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7196403B2 JP7196403B2 JP2018042674A JP2018042674A JP7196403B2 JP 7196403 B2 JP7196403 B2 JP 7196403B2 JP 2018042674 A JP2018042674 A JP 2018042674A JP 2018042674 A JP2018042674 A JP 2018042674A JP 7196403 B2 JP7196403 B2 JP 7196403B2
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- 239000004065 semiconductor Substances 0.000 title claims description 123
- 239000000758 substrate Substances 0.000 claims description 78
- 239000010410 layer Substances 0.000 claims description 35
- 230000004888 barrier function Effects 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000002344 surface layer Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 70
- 229910010271 silicon carbide Inorganic materials 0.000 description 69
- 239000011295 pitch Substances 0.000 description 63
- 238000009792 diffusion process Methods 0.000 description 14
- 230000006866 deterioration Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000006872 improvement Effects 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000007480 spreading Effects 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- -1 MOS silicon carbide Chemical class 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 102220015909 rs138331646 Human genes 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Description
実施の形態にかかる半導体装置は、半導体材料としてシリコン(Si)よりもバンドギャップが広い半導体(ワイドバンドギャップ半導体とする)を用いて構成される。以下、実施の形態にかかる半導体装置の構造について、半導体材料として炭化珪素(SiC)を用いた場合を例に説明する。図1は、実施の形態にかかる炭化珪素半導体装置の要部を半導体基板のおもて面側から見たレイアウトを示す平面図である。図1には、図2,3のゲートトレンチ7および第1,2p+型領域(第3,4半導体領域)21,22のレイアウトを示す。図2は、図1の切断線A-A’における断面構造を示す断面図である。図3は、図1の切断線B-B’における断面構造を示す断面図である。
次に、トレンチゲート型MOSFET41のオン抵抗とボディダイオードの動作開始電流との関係について検証した。トレンチゲート型MOSFET41のボディダイオードとは、トレンチゲート型MOSFET41のp型ベース領域4とn-型ドリフト領域2およびn+型出発基板1とのpn接合で形成される寄生のpinダイオードである。図4は、実施の形態にかかる炭化珪素半導体装置のトレンチゲート型MOSFETのオン抵抗とボディダイオードの動作開始電流との関係を示す特性図である。
次に、トレンチゲート型MOSFET41のセルピッチP11とオン抵抗との関係について検証した。図5は、実施の形態にかかる炭化珪素半導体装置のトレンチゲート型MOSFETのセルピッチとオン抵抗との関係を示す特性図である。図5には、横軸にゲートトレンチ7のピッチP1に対するトレンチゲート型MOSFET41のセルピッチP11(=トレンチゲート型MOSFET41のセルピッチP11/ゲートトレンチ7のピッチP1)を示し、縦軸にトレンチゲート型MOSFET41のオン抵抗を示す。
次に、平面SBD42のセルピッチP12とトレンチゲート型MOSFET41のボディダイオードの動作開始電流との関係について検証した。図6は、実施の形態にかかる炭化珪素半導体装置の平面SBDのセルピッチとトレンチゲート型MOSFETのボディダイオード動作開始時のドレイン電流密度との関係を示す特性図である。図6には、横軸にゲートトレンチ7のピッチP1に対する平面SBD42のセルピッチP12(=平面SBD42のセルピッチP12/ゲートトレンチ7のピッチP1)を示し、縦軸にトレンチゲート型MOSFET41のボディダイオード動作開始時のドレイン電流密度を示す。
2 n-型ドリフト領域
3 n型電流拡散領域
3a メサ領域
4 p型ベース領域
5 n+型ソース領域
6 p+型コンタクト領域
7 ゲートトレンチ
8 ゲート絶縁膜
9 ゲート電極
10 炭化珪素基板
11,12 導電層
13 層間絶縁膜
13a,13b コンタクトホール
14 おもて面電極
15 裏面電極
21 ゲートトレンチの底面を覆うp+型領域(第1p+型領域)
21a 第1p+型領域のストライプ状のレイアウトを構成する直線部
22 メサ領域のp+型領域(第2p+型領域)
31 n-型炭化珪素層
41 トレンチゲート型MOSFET
42 平面SBD
P1 ゲートトレンチのピッチ
P11 トレンチゲート型MOSFETのセルピッチ
P12 平面SBDのセルピッチ
X トレンチゲート型MOSFETの単位セルが並列に配置される方向(第1方向)
Y 炭化珪素基板のおもて面に平行な方向で、かつ第1方向と直交する方向(第2方向)
Z 深さ方向
Claims (5)
- シリコンよりもバンドギャップの広い半導体からなる第1導電型の半導体基板と、
前記半導体基板のおもて面から所定深さで、かつ前記半導体基板のおもて面に平行な第1方向と直交する第2方向に延在するストライプ状で、所定ピッチに設けられた複数のトレンチと、
前記トレンチの内部にゲート絶縁膜を介して設けられたゲート電極と、
前記トレンチが隣り合う第1のトレンチ間に挟まれた第1メサ領域に、当該第1のトレンチ間にわたって設けられた第2導電型の第1半導体領域と、
前記第1半導体領域の内部に選択的に設けられた第1導電型の第2半導体領域と、
前記第1メサ領域で、前記ゲート絶縁膜、前記ゲート電極、前記第1半導体領域および前記第2半導体領域で構成されたMOSゲート構造と、
前記第1のトレンチ間と異なる第2のトレンチ間に挟まれた第2メサ領域の表面上に設けられた導電層と、
前記第2メサ領域で、前記導電層と前記半導体基板とのショットキー接合で構成されたショットキーバリアダイオードと、
前記半導体基板の内部に選択的に設けられ、前記第1のトレンチ間から前記第2のトレンチ間にかけて前記第1方向に延在するストライプ状に配置され、前記トレンチの底面と接する第2導電型の第3半導体領域と、
前記第1メサ領域のみで、前記第1半導体領域と前記第3半導体領域との間に、前記第1半導体領域および前記第3半導体領域に接して、かつ前記トレンチと離して選択的に設けられた第2導電型の第4半導体領域と、
前記第1半導体領域、前記第2半導体領域および前記導電層に電気的に接続された第1電極と、
前記半導体基板の裏面に設けられた第2電極と、
を備えることを特徴とする半導体装置。 - 1つの前記第1メサ領域に前記MOSゲート構造の1つの単位セルが設けられ、
前記MOSゲート構造の単位セルは、前記第1方向に所定ピッチで配置されていることを特徴とする請求項1に記載の半導体装置。 - 前記ショットキーバリアダイオードの単位セルは、前記第2方向に所定ピッチで配置されていることを特徴とする請求項1または2に記載の半導体装置。
- 前記第1方向に、2つの前記第1メサ領域が隣接して配置されるごとに1つの前記第2メサ領域が配置されることを特徴とする請求項2または3に記載の半導体装置。
- 前記半導体基板のおもて面の表面層に設けられ、前記半導体基板のおもて面から前記トレンチの底面よりも深い位置に達する、前記半導体基板よりも不純物濃度の高い第1導電型の第5半導体領域をさらに備え、
前記第1半導体領域、前記第3半導体領域および前記第4半導体領域は、前記第5半導体領域の内部に設けられていることを特徴とする請求項1~4のいずれか一つに記載の半導体装置。
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