JP7170017B2 - 成膜装置、これを用いた成膜方法及び電子デバイスの製造方法 - Google Patents
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/54—Apparatus specially adapted for continuous coating
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- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
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Description
図1は、電子デバイスの製造装置の一部の構成を模式的に示す平面図である。
図2は、本発明の一実施形態による成膜装置11の構成を示す模式図である。
以下、本実施形態による成膜装置を使用した成膜方法について説明する。
図3は、本発明の一実施形態による防着部材30の配置構造を示す、成膜装置の模式断面図である。
次に、本実施形態の成膜装置を用いた電子デバイスの製造方法の一例を説明する。以下、電子デバイスの例として有機EL表示装置の構成及び製造方法を例示する。
Claims (9)
- チャンバ内において、成膜源から放出される成膜材料をマスクを介して基板に成膜する成膜装置であって、
前記チャンバ内に配置され、前記成膜源から飛散する成膜材料が付着する複数の防着部材を有し、
前記複数の防着部材は、前記成膜源と対向する前記防着部材の対向面と前記基板の成膜面の法線との角度が、前記法線の方向における前記マスクからの距離に応じて異なり、前記法線の方向における前記マスクからの距離が遠い防着部材ほど前記対向面と前記法線との角度が小さいことを特徴とする成膜装置。 - 前記複数の防着部材は、第1防着部材と、第2防着部材とを含み、
前記第1防着部材及び前記第2防着部材は、別体であり、それぞれ前記チャンバの同じ側の壁面側の異なる場所に設けられた壁面側端部と、前記チャンバの内側の中央側端部と、を有し、
前記第1防着部材及び前記第2防着部材は、前記基板の成膜面の法線方向において、前記壁面側端部よりも前記中央側端部が前記マスクと近くなるように前記チャンバの壁面に対して傾斜して設置され、
前記第2防着部材と前記マスクとの距離は、前記第1防着部材と前記マスクとの距離よりも大きく、
前記成膜源と対向する前記第1防着部材の第1対向面と前記基板の成膜面の法線との第1の角度が、前記成膜源と対向する前記第2防着部材の第2対向面と前記法線との第2の角度より大きいことを特徴とする請求項1に記載の成膜装置。 - チャンバ内において、成膜源から放出される成膜材料をマスクを介して基板に成膜する成膜装置であって、
前記チャンバ内に配置され、前記成膜源から飛散する成膜材料が付着する第1防着部材と、
前記チャンバ内に配置され、前記マスクとの距離が前記第1防着部材と前記マスクとの距離よりも大きく、前記成膜源から飛散する成膜材料が付着する第2防着部材と、を備え、
前記成膜源と対向する前記第1防着部材の第1対向面と前記基板の成膜面の法線との第1の角度は、前記成膜源と対向する前記第2防着部材の第2対向面と前記法線との第2の角度より大きいことを特徴とする成膜装置。 - 前記チャンバ内に配置され、前記マスクとの距離が前記第2防着部材と前記マスクとの距離よりも大きく、前記成膜源から飛散する成膜材料が付着する第3防着部材をさらに有し、
前記成膜源と対向する前記第3防着部材の第3対向面と前記法線との第3の角度は、前記第2の角度より小さいことを特徴とする請求項3に記載の成膜装置。 - 前記第1防着部材の前記成膜源と対向する面は、鏡面加工されていることを特徴とする請求項2~4のいずれか一項に記載の成膜装置。
- チャンバ内において、成膜源から放出される成膜材料をマスクを介して基板に成膜する成膜装置であって、
前記チャンバ内に配置され、前記成膜源から飛散する成膜材料が付着する防着部材を有し、
前記防着部材は、前記基板の成膜面の法線方向において、前記チャンバの壁面と接続する端部よりも前記チャンバの内側の中央側端部が前記マスクと近くなるように前記チャンバの壁面に対して傾斜して設置され、かつ、前記壁面と接続する端部と前記中央側端部とを結ぶ直線の延長線が前記マスクの中央を通るように設置されていることを特徴とする成膜装置。 - 前記チャンバ内に配置された複数の前記防着部材は、前記成膜源と対向する前記防着部材の対向面と前記基板の成膜面の法線との角度が、前記法線の方向における前記マスクからの距離に応じて異なり、
前記防着部材の前記成膜源と対向する面は、鏡面加工されていることを特徴とする請求項6に記載の成膜装置。 - 請求項1~7のいずれか一項に記載の成膜装置を用いて、前記成膜装置のチャンバの内部でマスクを介して基板に成膜材料を成膜することを特徴とする成膜方法。
- 請求項8に記載の成膜方法を用いて、電子デバイスを製造することを特徴とする電子デバイスの製造方法。
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JP2008144214A (ja) | 2006-12-08 | 2008-06-26 | Seiko Epson Corp | 成膜装置 |
JP2010174344A (ja) | 2009-01-30 | 2010-08-12 | Seiko Epson Corp | 成膜装置 |
JP2015021170A (ja) | 2013-07-19 | 2015-02-02 | 株式会社日立ハイテクノロジーズ | 真空蒸着装置 |
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JPH04168278A (ja) * | 1990-10-31 | 1992-06-16 | Nec Corp | 蒸着装置 |
JPH06172973A (ja) * | 1992-12-04 | 1994-06-21 | Toyota Motor Corp | 薄膜形成装置 |
SG149680A1 (en) * | 2001-12-12 | 2009-02-27 | Semiconductor Energy Lab | Film formation apparatus and film formation method and cleaning method |
US20090260982A1 (en) * | 2008-04-16 | 2009-10-22 | Applied Materials, Inc. | Wafer processing deposition shielding components |
CN201826007U (zh) * | 2010-10-14 | 2011-05-11 | 北京京东方光电科技有限公司 | 一种防着板和薄膜沉积设备 |
JP5512881B2 (ja) * | 2011-03-30 | 2014-06-04 | シャープ株式会社 | 蒸着処理システム及び蒸着処理方法 |
JP2014055342A (ja) * | 2012-09-14 | 2014-03-27 | Hitachi High-Technologies Corp | 成膜装置 |
JP6641242B2 (ja) * | 2016-07-05 | 2020-02-05 | キヤノントッキ株式会社 | 蒸着装置及び蒸発源 |
CN206768212U (zh) * | 2017-06-08 | 2017-12-19 | 合肥鑫晟光电科技有限公司 | 成膜设备 |
KR101901072B1 (ko) * | 2017-10-31 | 2018-09-20 | 캐논 톡키 가부시키가이샤 | 증발원 장치, 성막 장치, 성막 방법 및 전자 디바이스의 제조 방법 |
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JP2006111916A (ja) | 2004-10-14 | 2006-04-27 | Mitsubishi Electric Corp | 蒸着装置 |
JP2008144214A (ja) | 2006-12-08 | 2008-06-26 | Seiko Epson Corp | 成膜装置 |
JP2010174344A (ja) | 2009-01-30 | 2010-08-12 | Seiko Epson Corp | 成膜装置 |
JP2015021170A (ja) | 2013-07-19 | 2015-02-02 | 株式会社日立ハイテクノロジーズ | 真空蒸着装置 |
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