JP7054460B2 - 天井搬送車 - Google Patents
天井搬送車 Download PDFInfo
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- JP7054460B2 JP7054460B2 JP2020556680A JP2020556680A JP7054460B2 JP 7054460 B2 JP7054460 B2 JP 7054460B2 JP 2020556680 A JP2020556680 A JP 2020556680A JP 2020556680 A JP2020556680 A JP 2020556680A JP 7054460 B2 JP7054460 B2 JP 7054460B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Vehicle Step Arrangements And Article Storage (AREA)
- Led Device Packages (AREA)
Description
3 天井搬送車
6 天井吊下棚
30 下段棚用移載部(第2移載部)
40 上段棚用移載部(第1移載部)
51 チャック(第2保持部)
52 保持台(第1保持部)
62 上段棚
62a 上段支持面
63 上段側面ガイド
65 下段棚
65a 下段支持面
66 下段側面ガイド
80 FOUP(ウエハ搬送容器)
90 上段棚用移載部
97 第1保持部
Claims (16)
- 建屋の天井に設けられるレールに沿って走行して物品を搬送する天井搬送車において、
前記物品の側面及び底面の少なくとも一方を保持する第1保持部と、
前記物品を保持した状態で前記第1保持部を少なくとも上方に移動させる第1移載部と、
駆動部と、
前記駆動部が発生させた駆動力を伝達する操作部と、
を備え、
前記第1移載部は、
前記物品を保持して搬送中の保持位置から、
前記物品を移載するための位置であり、前記保持位置とは平面視での位置が異なり、かつ、当該保持位置よりも高い上移載位置まで、
前記第1保持部を移動させ、
前記操作部は、前記駆動力を前記上移載位置にある上段棚に伝達することで、当該上段棚に前記物品を移載可能な状態にすることを特徴とする天井搬送車。 - 請求項1に記載の天井搬送車であって、
前記第1移載部は第1保持部を下方に移動させることを特徴とする天井搬送車。 - 請求項1又は2に記載の天井搬送車であって、
前記第1移載部は、
移動方向の成分に横方向を含む第1移動を行って前記第1保持部を横出しして、
移動方向の成分に上方向を含む第2移動を行って前記第1保持部を上昇させて前記物品を前記上移載位置に移載することを特徴とする天井搬送車。 - 請求項3に記載の天井搬送車であって、
前記駆動部及び前記操作部が、前記第1移動とともに横出しされることを特徴とする天井搬送車。 - 請求項2から4までの何れか一項に記載の天井搬送車であって、
前記第1移載部は、
移動方向の成分に横方向を含む第1移動を行って前記第1保持部を横出しして、
移動方向の成分に下方向を含む第2移動を行って前記第1保持部を下降させて前記物品を下移載位置に移載することを特徴とする天井搬送車。 - 請求項1から5までの何れか一項に記載の天井搬送車であって、
前記第1移載部は、少なくとも前記レールと同じ高さまで前記第1保持部を上昇させることを特徴とする天井搬送車。 - 建屋の天井に設けられるレールに沿って走行して物品を搬送する天井搬送車において、
前記物品の側面及び底面の少なくとも一方を保持する第1保持部と、
前記物品を保持した状態で前記第1保持部を少なくとも上方に移動させる第1移載部と、
前記物品の側面及び上面の少なくとも一方を保持する第2保持部と、
前記物品を保持した状態で前記第2保持部を少なくとも下方に移動させる第2移載部と、
を備え、
前記第1移載部は、
前記物品を保持して搬送中の保持位置から、
前記物品を移載するための位置であり、前記保持位置とは平面視での位置が異なり、かつ、当該保持位置よりも高い上移載位置まで、
前記第1保持部を移動させることを特徴とする天井搬送車。 - 請求項7に記載の天井搬送車であって、
前記第1移載部は、前記第2移載部が前記第2保持部を下方に移動させる軌跡から、前記第1保持部を退避させる退避機構を備えることを特徴とする天井搬送車。 - 請求項7又は8に記載の天井搬送車であって、
前記第2移載部は、移動方向の成分に横方向を含む第3移動を行って前記第2保持部を横出しして、
移動方向の成分に下方向を含む第4移動を行って前記第2保持部を下降させて前記物品を下移載位置に移載し、
前記第1移載部は、前記第2移載部の横出し時よりも高い位置まで、前記第1保持部を上昇させることを特徴とする天井搬送車。 - 請求項9に記載の天井搬送車であって、
前記第1移動後における前記第1移載部の下端位置は、前記下移載位置に移載された物品の上端よりも上方にあることを特徴とする天井搬送車。 - 請求項1から10までの何れか一項に記載の天井搬送車であって、
前記第1移載部は、
前記第1保持部を横方向にスライドする横スライド機構と、
前記第1保持部を上方向にスライドする上スライド機構と、
を備えることを特徴とする天井搬送車。 - 請求項1から10までの何れか一項に記載の天井搬送車であって、
前記第1移載部は、
回転可能に連結された複数のアームを含むアーム機構を備え、
前記アームを独立して動作させることで、前記第1保持部を前記保持位置から前記上移載位置まで移動させることを特徴とする天井搬送車。 - 請求項1から12までの何れか一項に記載の天井搬送車であって、
前記物品がウエハ搬送容器であり、
前記第1保持部は、
前記ウエハ搬送容器を保持する保持面と、
前記保持面に形成されており、前記ウエハ搬送容器の下面の凹部に挿入される挿入ピンと、
を備えることを特徴とする天井搬送車。 - 請求項13に記載の天井搬送車であって、
前記第1保持部が前記ウエハ搬送容器を保持した状態で、レールに沿って走行して当該ウエハ搬送容器を搬送することを特徴とする天井搬送車。 - 請求項7から10までの何れか一項に記載の天井搬送車であって、
前記物品がウエハ搬送容器であり、
前記第2保持部は、前記ウエハ搬送容器の上面のフランジ部を保持するチャックであることを特徴とする天井搬送車。 - 請求項7から10までの何れか一項に記載の天井搬送車であって、
前記レールに沿って走行中に、前記第1保持部と前記第2保持部との間で前記物品を持ち替えることを特徴とする天井搬送車。
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Application Number | Priority Date | Filing Date | Title |
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JP2018208651 | 2018-11-06 | ||
JP2018208651 | 2018-11-06 | ||
PCT/JP2019/038474 WO2020095570A1 (ja) | 2018-11-06 | 2019-09-30 | 天井搬送車 |
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JPWO2020095570A1 JPWO2020095570A1 (ja) | 2021-12-02 |
JP7054460B2 true JP7054460B2 (ja) | 2022-04-14 |
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US (1) | US11876009B2 (ja) |
EP (1) | EP3862297A4 (ja) |
JP (1) | JP7054460B2 (ja) |
KR (1) | KR102441814B1 (ja) |
CN (1) | CN112930312B (ja) |
WO (1) | WO2020095570A1 (ja) |
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CN112912321B (zh) * | 2018-11-06 | 2022-11-11 | 村田机械株式会社 | 顶棚悬吊搁板 |
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- 2019-09-30 US US17/289,784 patent/US11876009B2/en active Active
- 2019-09-30 KR KR1020217006612A patent/KR102441814B1/ko active IP Right Grant
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- 2019-09-30 JP JP2020556680A patent/JP7054460B2/ja active Active
- 2019-09-30 WO PCT/JP2019/038474 patent/WO2020095570A1/ja active Search and Examination
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WO2020095570A1 (ja) | 2020-05-14 |
US20210398835A1 (en) | 2021-12-23 |
US11876009B2 (en) | 2024-01-16 |
CN112930312A (zh) | 2021-06-08 |
KR102441814B1 (ko) | 2022-09-08 |
CN112930312B (zh) | 2022-08-30 |
KR20210040126A (ko) | 2021-04-12 |
EP3862297A4 (en) | 2022-07-13 |
JPWO2020095570A1 (ja) | 2021-12-02 |
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