JP7039234B2 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
- Publication number
- JP7039234B2 JP7039234B2 JP2017190935A JP2017190935A JP7039234B2 JP 7039234 B2 JP7039234 B2 JP 7039234B2 JP 2017190935 A JP2017190935 A JP 2017190935A JP 2017190935 A JP2017190935 A JP 2017190935A JP 7039234 B2 JP7039234 B2 JP 7039234B2
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- film
- opening
- facing
- pressure position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
- C23C14/0078—Reactive sputtering by exposing the substrates to reactive gases intermittently by moving the substrates between spatially separate sputtering and reaction stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Fluid Mechanics (AREA)
- Physical Vapour Deposition (AREA)
Description
内部を真空とすることが可能な容器と、
前記容器内に設けられた、一端に開口を有する成膜室を有し、前記成膜室内に成膜材料からなるターゲットを備え、前記成膜室内のスパッタガスに生成されたプラズマによって、前記開口に対向するワークの表面に前記ターゲットの成膜材料を堆積させて成膜する成膜部と、
前記ワークを所定の搬送経路に沿って搬送することにより、前記成膜室の開口に対向する対向領域と、前記成膜室の開口に対向しない非対向領域とを繰り返し通過させる搬送体と、
を有し、
前記搬送体は、
前記ワークが載置される凹部を有し、前記対向領域を通過する際に、前記成膜室内をプラズマの着火下限圧力未満であり且つプラズマの放電維持下限圧力以上とする低圧ポジションと、
前記ワークが載置されず、前記対向領域を通過する際に、前記成膜室内を着火下限圧力以上とする高圧ポジションと、
を有し、
前記凹部は、前記ワークが載置される領域と前記ワークが載置されない領域を有し、前記凹部において前記ワークが載置されない領域であって前記開口に対向する対向面と前記ターゲットとの距離が、前記高圧ポジションの前記開口に対向する対向面と前記ターゲットとの距離よりも長いこと、
を特徴とする。
[概要]
本実施形態の成膜装置1は、図1に示すように、チャンバ2、成膜部3a~3f、膜処理部4、搬送体5を有する。チャンバ2は、内部を真空とすることが可能な容器である。成膜部3a~3fは、図2に示すように、一端に開口34aを有する成膜室34を有し、成膜室34内に成膜材料からなるターゲット30aを備え、成膜室34内のスパッタガスG1で生成されたプラズマによって、開口34aに対向するワークWの表面に、ターゲット30aの成膜材料を堆積させて成膜する構成部である。
以下、上記のような成膜装置1の構成を具体的に説明する。
(チャンバ)
チャンバ2は、図1及び図2に示すように、略円筒型の密閉容器である。チャンバ2には、図示しないポンプ等の減圧装置に接続された排気部2aが設けられており、この排気部2aからの排気により、チャンバ2の内部を真空とすることが可能となる。
成膜部3は、図2に示すように、スパッタ源30、DC電源31、スパッタガス導入部32、シールド部材33を有する。スパッタ源30は、ターゲット30a、バッキングプレート30b、電極30cを有する。ターゲット30aは、ワークW上に堆積されて膜となる成膜材料で構成された板状の部材である。ターゲット30aは、ワークWが成膜室34の下を通過する際に、ワークWと対向する位置に設置される。本実施形態のターゲット30aは、図1に示すように、円形のものが2つ設けられている。但し、ターゲット30aの数は、これには限定されない。ターゲット30aを1つとしても、3つ以上としてもよい。
膜処理部4は、図1及び図2に示すように、チャンバ2の上面に設置された箱型の電極40を備えている。電極40の形状は特に限定されないが、本実施形態では、平面視で略扇形となっている。電極40は底部に開口部41を有している。開口部41の外縁、すなわち電極40の下端は、搬送体5の上面に対して、わずかな隙間を介して対向している。
搬送体5は、図1及び平面図である図3に示すように、チャンバ2の内部に設けられた円盤形状の回転テーブルである。搬送体5の中心軸5a(図2参照)には、不図示の駆動機構が連結される。駆動機構の駆動によって、搬送体5は中心軸5aを回転軸として回転する。この搬送体5および駆動機構は、搬送部を構成する。
本実施形態の成膜装置1の動作を説明する。なお、以下の動作は、成膜部3a~3eでニオブ(Nb)の膜を形成し、膜処理部4で後酸化処理を行うことにより、酸化ニオブ(Nb2Ox)とする例である。
まず、チャンバ2の内部は、排気部2aから排気されて真空状態にされる。チャンバ2内の真空状態を維持しつつ、ロードロック部6から、トレイTに載置された未処理のワークWをチャンバ2内に搬入する。搬入されたトレイTは、ロードロック部6に順次位置決めされる搬送体5の低圧ポジション51に載置される。さらに、搬送体5を連続して回転させることにより、ワークWを搬送経路Lに沿って回転搬送して、図1及び図2に示すように、成膜部3a~3f、膜処理部4の下を通過させる。
以上のような成膜処理の過程での成膜室34の内部圧力が変化する原理を、図6~図10を参照して説明する。なお、図6~図10は、搬送体5とシールド部材33との位置関係を、図1のB方向から見た簡略縦断面図である。
以上のような本実施形態を適用した具体的な実施例を説明する。まず、成膜中に成膜室34内の圧力変動を測定した例を、図11を参照して説明する。この例では、放電維持下限圧力が0.08Pa程度、着火下限圧力が0.19Pa程度となる成膜室34、スパッタガスG1、スパッタ源30を用いた。また、ワークWを設置する低圧ポジション51は、搬送体5に1箇所だけ設けた。低圧ポジション51と隔壁33aとの間隔b1を30mmとし、高圧ポジション52と隔壁33aとの間隔b2を5mmとした(図2、図4参照)。
C1=S*S0/(S0-S*)
C2=309Kab2/l
α=100-t-r
(1)上述したように、本実施形態の成膜装置1は、一端に開口34aを有する成膜室34を有し、成膜室34内に成膜材料からなるターゲット30aを備え、成膜室34内のスパッタガスG1に生成されたプラズマによって、開口34aに対向するワークWの表面にターゲット30aの成膜材料を堆積させて成膜する成膜部3と、ワークWを所定の搬送経路Lに沿って搬送することにより、成膜室34の開口34aに対向する対向領域と、成膜室34の開口34aに対向しない非対向領域とを繰り返し通過させる搬送体5と、を有し、搬送体5は、ワークWが載置され、対向領域を通過する際に、成膜室34内をプラズマの着火下限圧力未満であり且つプラズマの放電維持下限圧力以上とする低圧ポジション51と、ワークWが載置されず、対向領域を通過する際に、成膜室34内を着火下限圧力以上とする高圧ポジション52とを有する。
本発明の実施形態は、上記の態様に限定されるものではなく、以下のような態様も含む。なお、上記の態様と同様の構成については、説明を省略する。
2 チャンバ
2a 排気部
3、3a、3b、3c、3d、3e、3f 成膜部
30 スパッタ源
30a ターゲット
30b バッキングプレート
30c 電極
31 DC電源
32 スパッタガス導入部
33 シールド部材
33a 隔壁
34 成膜室
34a 開口
4 膜処理部
40 電極
41 開口部
42 RF電源
43 プロセスガス導入部
5 搬送体
5a 中心軸
51 低圧ポジション
51a 凹部
52 高圧ポジション
6 ロードロック部
7 制御部
G1 スパッタガス
G2 プロセスガス
L 搬送経路
W ワーク
Claims (9)
- 内部を真空とすることが可能な容器と、
前記容器内に設けられた、一端に開口を有する成膜室を有し、前記成膜室内に成膜材料からなるターゲットを備え、前記成膜室内のスパッタガスに生成されたプラズマによって、前記開口に対向するワークの表面に前記ターゲットの成膜材料を堆積させて成膜する成膜部と、
前記ワークを所定の搬送経路に沿って搬送することにより、前記成膜室の開口に対向する対向領域と、前記成膜室の開口に対向しない非対向領域とを繰り返し通過させる搬送体と、
を有し、
前記搬送体は、
前記ワークが載置される凹部を有し、前記対向領域を通過する際に、前記成膜室内をプラズマの着火下限圧力未満であり且つプラズマの放電維持下限圧力以上とする低圧ポジションと、
前記ワークが載置されず、前記対向領域を通過する際に、前記成膜室内を着火下限圧力以上とする高圧ポジションと、
を有し、
前記凹部は、前記ワークが載置される領域と前記ワークが載置されない領域を有し、前記凹部において前記ワークが載置されない領域であって前記開口に対向する対向面と前記ターゲットとの距離が、前記高圧ポジションの前記開口に対向する対向面と前記ターゲットとの距離よりも長いこと、
を特徴とする成膜装置。 - 前記低圧ポジションの前記搬送経路に沿う方向の距離及び前記高圧ポジションの前記搬送経路に沿う方向の距離は、それぞれ前記開口の前記搬送経路に沿う方向の距離以上であることを特徴とする請求項1記載の成膜装置。
- 前記低圧ポジションと前記開口との間のコンダクタンスが、前記高圧ポジションと前記開口との間のコンダクタンスよりも大きいことを特徴とする請求項1又は請求項2記載の成膜装置。
- 前記搬送体は、前記ワークを円周の軌跡で循環搬送させる回転テーブルであり、
前記開口及び前記低圧ポジションは、扇形であることを特徴とする請求項1又は請求項2記載の成膜装置。 - 前記低圧ポジション及び前記高圧ポジションが対向する領域に、前記成膜部でワークに形成された膜に対して物質を化合させることにより、化合物膜を生成する処理を行う膜処理部を有し、
前記高圧ポジションと前記開口との間のコンダクタンスに対して、前記低圧ポジションと前記開口との間のコンダクタンスが1.0を超え、10.0倍以下であることを特徴とする請求項1又は請求項2記載の成膜装置。 - 前記低圧ポジションが前記対向領域を通過する際の前記成膜室内の圧力をP1、前記低圧ポジションの前記開口に対向する対向面と前記ターゲットとの距離をH1、前記高圧ポジションが前記対向領域を通過する際の前記成膜室内の圧力をP2、前記高圧ポジションの前記開口に対向する対向面と前記ターゲットとの距離をH2とすると、P1×H1≦P2×H2であることを特徴とする請求項1又は請求項2記載の成膜装置。
- 前記低圧ポジションの前記開口に対向する対向面と前記ターゲットとの距離が可変に設けられていることを特徴とする請求項1又は請求項2記載の成膜装置。
- 前記低圧ポジションには、単数又は複数のトレイを介して、ワークが載置されていることを特徴とする請求項1又は請求項2記載の成膜装置。
- 前記低圧ポジションが前記対向領域を通過する際に、前記成膜室内をプラズマの放電維持下限圧力以上、プラズマの着火下限圧力未満とし、前記高圧ポジションが前記対向領域を通過する際に、前記成膜室内を着火下限圧力以上とするように、前記スパッタガスを前記成膜室内へ供給するガス供給部を有することを特徴とする請求項1又は請求項2記載の成膜装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017190935A JP7039234B2 (ja) | 2017-09-29 | 2017-09-29 | 成膜装置 |
TW107134011A TWI710653B (zh) | 2017-09-29 | 2018-09-27 | 成膜裝置 |
CN201811130898.9A CN109576654B (zh) | 2017-09-29 | 2018-09-27 | 成膜装置 |
US16/143,927 US10896841B2 (en) | 2017-09-29 | 2018-09-27 | Film formation apparatus |
KR1020180116117A KR102175620B1 (ko) | 2017-09-29 | 2018-09-28 | 성막 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017190935A JP7039234B2 (ja) | 2017-09-29 | 2017-09-29 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019065336A JP2019065336A (ja) | 2019-04-25 |
JP7039234B2 true JP7039234B2 (ja) | 2022-03-22 |
Family
ID=65896883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017190935A Active JP7039234B2 (ja) | 2017-09-29 | 2017-09-29 | 成膜装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10896841B2 (ja) |
JP (1) | JP7039234B2 (ja) |
KR (1) | KR102175620B1 (ja) |
CN (1) | CN109576654B (ja) |
TW (1) | TWI710653B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7313308B2 (ja) * | 2019-04-25 | 2023-07-24 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜方法 |
CN111850471B (zh) * | 2019-04-25 | 2023-05-12 | 芝浦机械电子装置株式会社 | 成膜装置以及成膜方法 |
CN113924384B (zh) * | 2019-06-06 | 2024-02-09 | 芝浦机械电子装置株式会社 | 成膜装置 |
JP7412926B2 (ja) * | 2019-08-30 | 2024-01-15 | 芝浦メカトロニクス株式会社 | 成膜装置、成膜ワーク製造方法 |
CN114318238A (zh) * | 2021-12-30 | 2022-04-12 | 京东方科技集团股份有限公司 | 一种蒸发源装置、蒸镀设备及蒸镀方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016069727A (ja) | 2014-09-30 | 2016-05-09 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜基板製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000169963A (ja) | 1998-12-03 | 2000-06-20 | Matsushita Electric Ind Co Ltd | スパッタリング方法とその装置 |
JP2000192234A (ja) * | 1998-12-28 | 2000-07-11 | Matsushita Electric Ind Co Ltd | プラズマ処理装置 |
US6495010B2 (en) * | 2000-07-10 | 2002-12-17 | Unaxis Usa, Inc. | Differentially-pumped material processing system |
JP4416422B2 (ja) * | 2003-03-20 | 2010-02-17 | キヤノンアネルバ株式会社 | スパッタ装置 |
CN102217055B (zh) * | 2008-11-21 | 2013-09-18 | 芝浦机械电子株式会社 | 衬底处理方法及衬底处理装置 |
US8758580B2 (en) * | 2010-08-23 | 2014-06-24 | Vaeco Inc. | Deposition system with a rotating drum |
JP5611803B2 (ja) * | 2010-12-21 | 2014-10-22 | キヤノンアネルバ株式会社 | 反応性スパッタリング装置 |
US20150097485A1 (en) * | 2013-10-08 | 2015-04-09 | XEI Scientific Inc. | Method and apparatus for plasma ignition in high vacuum chambers |
CN105463386B (zh) * | 2014-09-30 | 2018-10-12 | 芝浦机械电子装置株式会社 | 成膜装置及成膜基板制造方法 |
ES2672245T3 (es) * | 2015-08-31 | 2018-06-13 | Total S.A. | Aparato generador de plasma y procedimiento de fabricación de dispositivos con patrones usando procesamiento de plasma resuelto espacialmente |
JP6569520B2 (ja) * | 2015-12-24 | 2019-09-04 | 東京エレクトロン株式会社 | 成膜装置 |
-
2017
- 2017-09-29 JP JP2017190935A patent/JP7039234B2/ja active Active
-
2018
- 2018-09-27 US US16/143,927 patent/US10896841B2/en active Active
- 2018-09-27 CN CN201811130898.9A patent/CN109576654B/zh active Active
- 2018-09-27 TW TW107134011A patent/TWI710653B/zh active
- 2018-09-28 KR KR1020180116117A patent/KR102175620B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016069727A (ja) | 2014-09-30 | 2016-05-09 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜基板製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102175620B1 (ko) | 2020-11-06 |
CN109576654A (zh) | 2019-04-05 |
CN109576654B (zh) | 2021-02-26 |
US10896841B2 (en) | 2021-01-19 |
TW201915206A (zh) | 2019-04-16 |
US20190103300A1 (en) | 2019-04-04 |
KR20190038430A (ko) | 2019-04-08 |
TWI710653B (zh) | 2020-11-21 |
JP2019065336A (ja) | 2019-04-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7039234B2 (ja) | 成膜装置 | |
TWI774283B (zh) | 用於產生派形加工的電漿源組件、處理腔室及方法 | |
JP4704087B2 (ja) | プラズマ処理装置およびプラズマ処理方法 | |
JP2017073535A (ja) | 被処理体を処理する方法 | |
US11127574B2 (en) | Plasma processing apparatus | |
TW201901733A (zh) | 用於旋轉基座的電漿源 | |
JP2022180370A (ja) | プラズマ処理装置 | |
KR20170037832A (ko) | 성막 장치 | |
TWI835782B (zh) | 在物理氣相沉積腔室中沉積之層中的電阻-面積乘積(ra)控制 | |
JP5405504B2 (ja) | プラズマ処理装置およびプラズマ処理方法 | |
US11004665B2 (en) | Plasma processing apparatus | |
TWI817764B (zh) | 成膜裝置 | |
JP7390997B2 (ja) | 成膜装置 | |
JP2009275281A (ja) | スパッタリング方法及び装置 | |
JP7111380B2 (ja) | スパッタ装置及びこれを用いた成膜方法 | |
TWI758740B (zh) | 成膜裝置 | |
JP5312138B2 (ja) | スパッタリング方法 | |
JP2022083129A (ja) | スパッタリング装置 | |
JP2010245145A (ja) | プラズマ処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200928 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210527 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210608 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20210806 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211007 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220208 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220309 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7039234 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |