JP7028049B2 - 量子カスケードレーザ - Google Patents
量子カスケードレーザ Download PDFInfo
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Description
量子カスケードレーザ11の構造。
基板17;n型InP半導体。
上部クラッド層27d及び下部クラッド層(27b);n型InP。
第1超格子層23及び第2超格子層25(コア層):GaInAs/AlInAsの超格子層。
回折格子層27c:n型GaInAs。
コンタクト層27e:n型GaInAs。
半導体埋込領域28:FeドープInP。
単位超格子構造の積層数、ターンオン電圧。
27、6.4ボルト。
38、8.2ボルト。
52、10.8ボルト。
第1構造は、第1メサ部分19aの第1超格子層23及び第2超格子層25が全部で52段の単位超格子構造(29、31)を含むと共に、第2メサ部分19bの第1超格子層23が全部で38段の単位超格子構造(29)を含む。第1構造では、第1メサ部分19aの方が第2メサ部分19bより単位超格子構造の積層数が多いため、第2メサ部分19bがターンオンしても第1メサ部分19aはターンオンせず、高抵抗を維持する。その結果、本構造においては、第1端面21aにおけるリーク電流を低減できる為、これに起因し、量子カスケードレーザの故障の主原因となっていた、端面劣化を効果的に抑制することが可能となる。
活性層35:AlInAs/GaInAs超格子。
注入層37:活性層35と異なるAlInAs/GaInAs超格子。
レーザ発振波長:4~15。
量子カスケードレーザ11によれば、活性層35のサブバンド構造及び注入層37のミニバンド構造の各々は、AlInAs/GaInAs超格子によって提供される。
Claims (9)
- 量子カスケードレーザであって、
第1軸の方向に配列された基板及び半導体メサを含み、前記第1軸の方向に交差する第2軸の方向に配置された第1端面及び第2端面を有するレーザ構造体と、
前記半導体メサ上に設けられた第1電極と、
を備え、
前記レーザ構造体は、第1領域及び第2領域を含み、前記第1領域は、前記第1端面を含み、前記第2領域は、前記第2端面と前記第1領域との間にあり、
前記半導体メサは、第1メサ部分及び第2メサ部分を含み、前記第1メサ部分及び前記第2メサ部分は、それぞれ、前記第1領域及び前記第2領域に含まれ、
前記半導体メサは、第1超格子層、第2超格子層及び導電性半導体領域を含み、前記第1超格子層は、前記第1端面から前記第2軸の方向に延在し、前記第1超格子層は、前記第1メサ部分及び前記第2メサ部分に含まれ、前記第2超格子層は、前記第1メサ部分及び前記第2メサ部分のいずれか一方に設けられ、前記第1超格子層は、サブバンドを提供する単位超格子構造の配列を含み、前記第2超格子層は、サブバンドを提供する単位超格子構造の配列を含む、量子カスケードレーザ。 - 前記第2超格子層は、前記第1メサ部分に設けられ、前記第1端面に到達する、請求項1に記載された量子カスケードレーザ。
- 前記第1電極は、前記第1端面からみて、前記第2端面に向かう方向に前記第1端面から離れた端部を有する、請求項1又は請求項2に記載された量子カスケードレーザ。
- 前記レーザ構造体の前記基板に接続された第2電極を更に備え、
前記第2電極は、前記第1端面からみて、前記第2端面に向かう方向に前記第1端面から離れた端部を有する、請求項1~請求項3何れか一項に記載された量子カスケードレーザ。 - 前記第1超格子層及び前記第2超格子層は、前記第1軸の方向において互いに接触するように配置される、請求項1~請求項4何れか一項に記載された量子カスケードレーザ。
- 前記第1超格子層は前記第2超格子層から前記第1軸の方向において離れている、請求項1~請求項4何れか一項に記載された量子カスケードレーザ。
- 前記半導体メサは、前記第2メサ部分から前記第1メサ部分への方向に減少するメサ幅を前記第1メサ部分に有する、請求項1~請求項6何れか一項に記載された量子カスケードレーザ。
- 前記第1超格子層の前記単位超格子構造は、サブバンド間遷移を可能にする活性層と、前記活性層にキャリアを注入する注入層とを含み、
前記第2超格子層の前記単位超格子構造は、前記第1超格子層の前記単位超格子構造に実質的に同じである、請求項1~請求項7何れか一項に記載された量子カスケードレーザ。 - 前記第1超格子層の前記単位超格子構造は、AlInAs/GaInAs超格子を含む活性層と、AlInAs/GaInAs超格子を含む注入層とを含み、
前記第2超格子層の前記単位超格子構造は、AlInAs/GaInAs超格子を含む活性層と、AlInAs/GaInAs超格子を含む注入層とを含む、請求項1~請求項8何れか一項に記載された量子カスケードレーザ。
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Citations (10)
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