JP7008370B2 - ワイヤボンディング装置 - Google Patents
ワイヤボンディング装置 Download PDFInfo
- Publication number
- JP7008370B2 JP7008370B2 JP2020530244A JP2020530244A JP7008370B2 JP 7008370 B2 JP7008370 B2 JP 7008370B2 JP 2020530244 A JP2020530244 A JP 2020530244A JP 2020530244 A JP2020530244 A JP 2020530244A JP 7008370 B2 JP7008370 B2 JP 7008370B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- ultrasonic
- electrode
- wire bonding
- lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003321 amplification Effects 0.000 claims description 15
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000004148 unit process Methods 0.000 claims description 3
- 210000001736 capillary Anatomy 0.000 description 54
- 101100350613 Arabidopsis thaliana PLL1 gene Proteins 0.000 description 29
- 101100082028 Arabidopsis thaliana PLL2 gene Proteins 0.000 description 29
- 239000004065 semiconductor Substances 0.000 description 27
- 238000001514 detection method Methods 0.000 description 11
- 230000006866 deterioration Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
- B06B1/0223—Driving circuits for generating signals continuous in time
- B06B1/0269—Driving circuits for generating signals continuous in time for generating multiple frequencies
- B06B1/0276—Driving circuits for generating signals continuous in time for generating multiple frequencies with simultaneous generation, e.g. with modulation, harmonics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
- B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
- B23K20/106—Features related to sonotrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/46—Structure, shape, material or disposition of the wire connectors prior to the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/72—Welding, joining, soldering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78313—Wedge
- H01L2224/78314—Shape
- H01L2224/78317—Shape of other portions
- H01L2224/78318—Shape of other portions inside the capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
- H01L2224/78347—Piezoelectric transducers
- H01L2224/78349—Piezoelectric transducers in the upper part of the bonding apparatus, e.g. in the capillary or wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
- H01L2224/78353—Ultrasonic horns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
- H01L2224/78353—Ultrasonic horns
- H01L2224/78355—Design, e.g. of the wave guide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/789—Means for monitoring the connection process
- H01L2224/78901—Means for monitoring the connection process using a computer, e.g. fully- or semi-automatic bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/789—Means for monitoring the connection process
- H01L2224/78925—Vibration adjusting means, e.g. sensors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85009—Pre-treatment of the connector or the bonding area
- H01L2224/8503—Reshaping, e.g. forming the ball or the wedge of the wire connector
- H01L2224/85035—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
- H01L2224/85045—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8512—Aligning
- H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
- H01L2224/85169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
- H01L2224/8518—Translational movements
- H01L2224/85181—Translational movements connecting first on the semiconductor or solid-state body, i.e. on-chip, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
- H01L2224/85206—Direction of oscillation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Description
以下、図面を参照しながら実施形態のワイヤボンディング装置100について説明する。図1に示すように、本実施形態のワイヤボンディング装置100は、フレーム10と、フレーム10の上に取り付けられたXYテーブル11と、XYテーブル11の上に取り付けられたボンディングヘッド12と、ボンディングヘッド12に取り付けられたボンディングアーム13と、ボンディングアーム13の先端に取り付けられた超音波ホーン14と、超音波ホーン14を超音波振動させる超音波振動子16と、超音波ホーン14の先端に取り付けられたボンディングツールであるキャピラリ15と、半導体ダイ19が取り付けられたリードフレーム20を加熱吸着するヒートブロック17と、制御部50と、を備えている。なお、図1において、XY方向は水平方向、Z方向は上下方向を示す。
以下、図3Aから図3Dを参照しながら、図1に示すワイヤボンディング装置100によって半導体ダイ19の電極19aとリードフレーム20のリード22の第2ボンド点24との間をワイヤ38によって接続するワイヤボンディングの工程について簡単に説明する。
次に図2、図4を参照しながら超音波振動子16と超音波ホーン14の超音波振動について詳しく説明する。
図7に示すように、制御部50は、画像取得部55と、画像取得部55が取得した画像を処理してリード22の伸びる方向25を算出する画像処理部56と、超音波振動子16の振動の大きさを調整してキャピラリ15の先端のY方向の振幅ΔYとX方向の振幅ΔXの比率ΔY/ΔXを調整する振幅調整部57との3つの機能ブロックを含んでいる。これらの各機能ブロックは、メモリ53に格納されているプログラムを実行することにより実現される。
次に、図8から図11を参照しながら、本実施形態のワイヤボンディング装置100の動作について説明する。
図8のステップS101に示すように、画像取得部55は、図1に示すカメラ37によって図2に示すリードフレーム20の画像を取得する。図9は、カメラ37の視野37aの中のリード22の画像を示す図である。なお、カメラ37でリードフレーム20を撮像すると視野37aの中には複数本のリード22の画像が含まれるが、図9では、1本のリード22の画像のみを取り出して記載し、他のリード22の画像の図示は省略した。画像取得部55は、撮像した画像を画像処理部56に出力する。
図8のステップS103、図10に示すように、振幅調整部57は、キャピラリ15の先端のX方向の振動の振幅ΔXとY方向の振幅ΔYの比率ΔY/ΔXが画像処理部56から入力されたリード22の伸びる方向25とY方向との角度θの絶対値のtan、つまり、tan(|θ|)となるような、超音波振動子ドライバ42のPLL1、PLL2のゲインの比率を算出する。この際、メモリ53に振幅ΔYとPLL1との関係及び振幅ΔXとPLL2との関係を規定したマップ等を格納しておき、このマップを参照して、PLL1、PLL2の比率を算出してもよい。
ボンディング動作は、先に図3Aから図3Dを参照して説明したのと同様の動作であるが、制御部50は、図3Cに示すリード22の第2ボンド点24へのボンディングを行う際に、メモリ53に格納した各リード22についてのPLL1、PLL2のゲインを読み出して超音波振動子16を動作させる。
Claims (9)
- ワイヤボンディング装置であって、
2つの異なる周波数でY方向に超音波振動可能な超音波振動子と、
前記超音波振動子から入力された第1周波数の超音波振動によりY方向に共振し、前記超音波振動子から入力された前記第1周波数と異なる第2周波数の超音波振動によりY軸周りにねじり共振し、先端に取り付けらけれたボンディングツールを異なる周波数でY方向と、Y方向に直交するX方向とに加振可能な超音波ホーンと、
前記超音波振動子に前記第1周波数の電力を供給する第1回路と、前記超音波振動子に第2周波数の電力を供給する第2回路とを備えるドライバと、
前記ドライバに接続されて2つの前記超音波振動の各振動の大きさを調整する制御部と、
前記電極の画像を撮像する撮像装置と、
を含み、
Y方向は、前記超音波ホーンの伸びる方向であり、
前記制御部は、
前記撮像装置によって撮像した前記電極の画像を処理してY方向に対する前記電極の伸びる方向の角度を算出し、
算出した前記角度に応じて前記第1回路と前記第2回路の各出力を調整することにより、前記ボンディングツールが振動する振動範囲の対角線が伸びる方向を前記電極が伸びる方向とすること、
を特徴とするワイヤボンディング装置。 - 請求項1に記載のワイヤボンディング装置であって、
前記ボンディングツールは、Y方向に対して傾斜して配置された帯状の電極にワイヤを接続すること、
を特徴とするワイヤボンディング装置。 - 請求項2に記載のワイヤボンディング装置であって、
前記制御部は、算出した前記角度が大きくなるほど前記ボンディングツールのX方向の振幅に対するY方向の振幅の比率が小さくなるように、前記第1回路の出力を小さくすること、
を特徴とするワイヤボンディング装置。 - 請求項2に記載のワイヤボンディング装置であって、
前記制御部は、
前記ボンディングツールのY方向とX方向との振幅の比率が前記電極の伸びる方向のY方向とX方向との比率となるように、前記第1回路と前記第2回路の各出力の比率を調整すること
を特徴とするワイヤボンディング装置。 - 請求項3に記載のワイヤボンディング装置であって、
前記制御部は、前記撮像装置によって撮像した前記電極の画像を処理して前記電極の伸びる方向と直角方向の前記電極の幅を算出し、
前記ボンディングツールの前記電極の伸びる方向と直角方向の振幅が算出した前記電極の前記幅を超えないように、前記第1回路と前記第2回路の各出力を調整すること、
を特徴とするワイヤボンディング装置。 - 請求項4に記載のワイヤボンディング装置であって、
前記制御部は、前記撮像装置によって撮像した前記電極の画像を処理して前記電極の伸びる方向と直角方向の前記電極の幅を算出し、
前記ボンディングツールの前記電極の伸びる方向と直角方向の振幅が算出した前記電極の前記幅を超えないように、前記第1回路と前記第2回路の各出力を調整すること、
を特徴とするワイヤボンディング装置。 - 請求項1から4又は6又は7のいずれか1項に記載のワイヤボンディング装置であって、
前記超音波ホーンは、前記超音波振動子から入力されたY方向の前記超音波振動を増幅して前記先端に伝達する振動増幅部と、Y方向の前記超音波振動を前記超音波ホーンのねじり振動に変換する振動変換部とを有すること、
を特徴とするワイヤボンディング装置。 - 請求項9に記載のワイヤボンディング装置であって、
前記振動増幅部は平面視で多角形形状であり、前記振動変換部は、Y方向に対して斜めに配置されたスリットであること、
を特徴とするワイヤボンディング装置。 - 請求項1から4又は6又は7のいずれか1項に記載のワイヤボンディング装置であって、
前記第1周波数と前記第2周波数とは互いに近接した周波数であること、
を特徴とするワイヤボンディング装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018131165 | 2018-07-11 | ||
JP2018131165 | 2018-07-11 | ||
PCT/JP2019/027437 WO2020013257A1 (ja) | 2018-07-11 | 2019-07-11 | ワイヤボンディング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020013257A1 JPWO2020013257A1 (ja) | 2021-06-24 |
JP7008370B2 true JP7008370B2 (ja) | 2022-02-14 |
Family
ID=69141592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020530244A Active JP7008370B2 (ja) | 2018-07-11 | 2019-07-11 | ワイヤボンディング装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11824038B2 (ja) |
JP (1) | JP7008370B2 (ja) |
KR (1) | KR102493623B1 (ja) |
CN (1) | CN112385026B (ja) |
SG (1) | SG11202013224RA (ja) |
TW (1) | TWI714164B (ja) |
WO (1) | WO2020013257A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3603826B1 (en) * | 2018-07-31 | 2023-05-10 | Infineon Technologies AG | Method for calibrating an ultrasonic bonding machine |
CN115244668A (zh) * | 2021-02-22 | 2022-10-25 | 株式会社新川 | 打线接合装置 |
CN118266071A (zh) * | 2021-11-16 | 2024-06-28 | 库利克和索夫工业公司 | 在焊线***上校准超声波特征的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013003821A (ja) | 2011-06-16 | 2013-01-07 | Shinkawa Ltd | パターン位置検出方法 |
JP2013506271A (ja) | 2009-08-12 | 2013-02-21 | クリック アンド ソッファ インダストリーズ、インク. | ワイヤーボンディング用の超音波トランスデューサ、ならびに超音波トランスデューサを使ってワイヤーボンドを形成する方法 |
WO2017094558A1 (ja) | 2015-12-04 | 2017-06-08 | 株式会社新川 | 超音波ホーン |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11135543A (ja) * | 1997-10-29 | 1999-05-21 | Sony Corp | 半導体製造装置 |
JP2008060210A (ja) | 2006-08-30 | 2008-03-13 | Fujitsu Ltd | ワイヤボンディング方法およびワイヤボンディング装置 |
JP4314313B1 (ja) * | 2008-06-30 | 2009-08-12 | 株式会社新川 | ボンディング装置 |
JP4275724B1 (ja) * | 2008-07-16 | 2009-06-10 | 株式会社新川 | ボンディング良否判定方法およびボンディング良否判定装置ならびにボンディング装置 |
CN102386236B (zh) | 2008-10-24 | 2016-02-10 | 株式会社半导体能源研究所 | 半导体器件和用于制造该半导体器件的方法 |
US10381321B2 (en) * | 2017-02-18 | 2019-08-13 | Kulicke And Soffa Industries, Inc | Ultrasonic transducer systems including tuned resonators, equipment including such systems, and methods of providing the same |
-
2019
- 2019-07-11 CN CN201980044546.8A patent/CN112385026B/zh active Active
- 2019-07-11 TW TW108124563A patent/TWI714164B/zh active
- 2019-07-11 JP JP2020530244A patent/JP7008370B2/ja active Active
- 2019-07-11 WO PCT/JP2019/027437 patent/WO2020013257A1/ja active Application Filing
- 2019-07-11 SG SG11202013224RA patent/SG11202013224RA/en unknown
- 2019-07-11 US US17/259,192 patent/US11824038B2/en active Active
- 2019-07-11 KR KR1020207036564A patent/KR102493623B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013506271A (ja) | 2009-08-12 | 2013-02-21 | クリック アンド ソッファ インダストリーズ、インク. | ワイヤーボンディング用の超音波トランスデューサ、ならびに超音波トランスデューサを使ってワイヤーボンドを形成する方法 |
JP2013003821A (ja) | 2011-06-16 | 2013-01-07 | Shinkawa Ltd | パターン位置検出方法 |
WO2017094558A1 (ja) | 2015-12-04 | 2017-06-08 | 株式会社新川 | 超音波ホーン |
Also Published As
Publication number | Publication date |
---|---|
CN112385026B (zh) | 2024-06-11 |
SG11202013224RA (en) | 2021-01-28 |
KR102493623B1 (ko) | 2023-01-31 |
WO2020013257A1 (ja) | 2020-01-16 |
US11824038B2 (en) | 2023-11-21 |
TW202006847A (zh) | 2020-02-01 |
TWI714164B (zh) | 2020-12-21 |
KR20210011979A (ko) | 2021-02-02 |
JPWO2020013257A1 (ja) | 2021-06-24 |
US20210272927A1 (en) | 2021-09-02 |
CN112385026A (zh) | 2021-02-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7008370B2 (ja) | ワイヤボンディング装置 | |
JP2004363612A (ja) | 超音波変換器組立体 | |
KR101475541B1 (ko) | 긴 혼을 포함하는 초음파 변환기 | |
JP2010218796A (ja) | 超音波接合方法及びその装置 | |
JPH0258845A (ja) | 超音波ワイヤボンディング装置 | |
JP5179918B2 (ja) | 超音波モータ装置 | |
WO2020067191A1 (ja) | 超音波接合方法 | |
TWI527137B (zh) | A bonding tool, a bonding device, and a semiconductor device | |
JPS63242479A (ja) | 複合振動を用いた超音波溶接方法およびその装置 | |
TWI833240B (zh) | 超音波焊頭及半導體裝置的製造裝置 | |
JP3374856B2 (ja) | 電子部品のボンディング装置 | |
TW201834092A (zh) | 打線接合裝置 | |
JP3409688B2 (ja) | 電子部品のボンディングツールおよびボンディング装置 | |
TW202400307A (zh) | 超音波複合振動裝置及半導體裝置的製造裝置 | |
JP2021052158A (ja) | ワイヤボンディング装置及びワイヤボンディング方法 | |
JP4207318B2 (ja) | 部品接合装置 | |
JP4549335B2 (ja) | バンプ接合装置 | |
JPH11135543A (ja) | 半導体製造装置 | |
JPH0799219A (ja) | 半導体装置の製造方法及びその製造装置 | |
JPH1056034A (ja) | ボンディング装置 | |
JP3374853B2 (ja) | 電子部品のボンディングツール | |
JP2022045409A (ja) | 超音波接合装置 | |
TW202035046A (zh) | 打線接合裝置 | |
JP2005064149A (ja) | 超音波フリップチップ接合装置および接合方法 | |
CN115707330A (zh) | 超声波复合振动装置及半导体装置的制造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A529 | Written submission of copy of amendment under article 34 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A5211 Effective date: 20201028 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201028 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211207 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211228 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7008370 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |