JP6951786B2 - ヒートシンク - Google Patents
ヒートシンク Download PDFInfo
- Publication number
- JP6951786B2 JP6951786B2 JP2019538800A JP2019538800A JP6951786B2 JP 6951786 B2 JP6951786 B2 JP 6951786B2 JP 2019538800 A JP2019538800 A JP 2019538800A JP 2019538800 A JP2019538800 A JP 2019538800A JP 6951786 B2 JP6951786 B2 JP 6951786B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- layer
- heat sink
- path
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
- H01L23/4735—Jet impingement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/031029 WO2019043801A1 (ja) | 2017-08-29 | 2017-08-29 | ヒートシンク |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019043801A1 JPWO2019043801A1 (ja) | 2020-10-15 |
JP6951786B2 true JP6951786B2 (ja) | 2021-10-20 |
Family
ID=65525131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019538800A Active JP6951786B2 (ja) | 2017-08-29 | 2017-08-29 | ヒートシンク |
Country Status (5)
Country | Link |
---|---|
US (2) | US11948860B2 (zh) |
EP (1) | EP3678174B1 (zh) |
JP (1) | JP6951786B2 (zh) |
CN (1) | CN111052360B (zh) |
WO (1) | WO2019043801A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102648693B1 (ko) * | 2022-12-16 | 2024-03-19 | 최병규 | 반도체 소자 테스트 장치 |
KR102648699B1 (ko) * | 2022-12-16 | 2024-03-19 | 최병규 | 반도체 소자 테스트 장치 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108966583B (zh) * | 2017-05-17 | 2020-04-14 | 华为技术有限公司 | 散热器以及通信设备 |
WO2020031753A1 (ja) * | 2018-08-09 | 2020-02-13 | 富士電機株式会社 | 冷却器、半導体モジュール |
CN111479442B (zh) * | 2020-03-25 | 2022-03-29 | 中航光电科技股份有限公司 | 一种阵列微射流及微通道复合冷板 |
US20210242108A1 (en) * | 2021-03-26 | 2021-08-05 | Intel Corporation | Technologies for liquid cooling systems |
KR102593733B1 (ko) * | 2021-05-27 | 2023-10-25 | 주식회사 아모그린텍 | 히트싱크 일체형 세라믹 기판 및 그 제조방법 |
JP7231668B2 (ja) * | 2021-06-10 | 2023-03-01 | Necプラットフォームズ株式会社 | 冷却部品 |
US20230007809A1 (en) * | 2021-07-02 | 2023-01-05 | Rohde & Schwarz Gmbh & Co. Kg | Heat management arrangement, method of manufacturing and electronic device |
CN114280443A (zh) * | 2021-11-03 | 2022-04-05 | 浙江大学杭州国际科创中心 | 一种功率芯片歧管式微通道换热器测试装置 |
CN114630566A (zh) * | 2022-03-14 | 2022-06-14 | 西安交通大学 | 一种多层分流液冷板 |
CN115966533B (zh) * | 2022-12-01 | 2023-09-05 | 山东大学 | 一种带有逆流区的歧管式微通道散热器 |
CN115881666B (zh) * | 2022-12-01 | 2023-09-05 | 山东大学 | 一种逆流式新型复合微通道热沉 |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3361195A (en) * | 1966-09-23 | 1968-01-02 | Westinghouse Electric Corp | Heat sink member for a semiconductor device |
US4494171A (en) * | 1982-08-24 | 1985-01-15 | Sundstrand Corporation | Impingement cooling apparatus for heat liberating device |
US5269372A (en) | 1992-12-21 | 1993-12-14 | International Business Machines Corporation | Intersecting flow network for a cold plate cooling system |
DE4443864A1 (de) * | 1994-12-09 | 1996-06-13 | Abb Management Ag | Gek}hltes Wandteil |
US6000908A (en) * | 1996-11-05 | 1999-12-14 | General Electric Company | Cooling for double-wall structures |
US6141219A (en) * | 1998-12-23 | 2000-10-31 | Sundstrand Corporation | Modular power electronics die having integrated cooling apparatus |
DK174881B1 (da) * | 2002-05-08 | 2004-01-19 | Danfoss Silicon Power Gmbh | Anordning med flere køleceller til køling af halvledere |
JP3651677B2 (ja) * | 2002-07-12 | 2005-05-25 | 株式会社東芝 | 発熱素子冷却装置及び電子機器 |
US7836597B2 (en) * | 2002-11-01 | 2010-11-23 | Cooligy Inc. | Method of fabricating high surface to volume ratio structures and their integration in microheat exchangers for liquid cooling system |
US8464781B2 (en) * | 2002-11-01 | 2013-06-18 | Cooligy Inc. | Cooling systems incorporating heat exchangers and thermoelectric layers |
JP2004270970A (ja) | 2003-03-05 | 2004-09-30 | Denso Corp | 冷却装置 |
US7075959B1 (en) * | 2003-11-14 | 2006-07-11 | Hamilton Sundstrand Corporation | Cooling device for diode pumped laser |
US7188662B2 (en) * | 2004-06-04 | 2007-03-13 | Cooligy, Inc. | Apparatus and method of efficient fluid delivery for cooling a heat producing device |
US20060096738A1 (en) * | 2004-11-05 | 2006-05-11 | Aavid Thermalloy, Llc | Liquid cold plate heat exchanger |
US7255153B2 (en) * | 2005-05-25 | 2007-08-14 | International Business Machines Corporation | High performance integrated MLC cooling device for high power density ICS and method for manufacturing |
JP5137379B2 (ja) | 2005-11-14 | 2013-02-06 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 衝突冷却器 |
DE102005058780A1 (de) * | 2005-12-09 | 2007-06-14 | Forschungszentrum Karlsruhe Gmbh | Mikrowärmeübertrager sowie die Verwendung desselben als Fluidkühler für elektronische Bauteile |
US20110226448A1 (en) * | 2008-08-08 | 2011-09-22 | Mikros Manufacturing, Inc. | Heat exchanger having winding channels |
US8474516B2 (en) * | 2008-08-08 | 2013-07-02 | Mikros Manufacturing, Inc. | Heat exchanger having winding micro-channels |
US8490419B2 (en) * | 2009-08-20 | 2013-07-23 | United States Thermoelectric Consortium | Interlocked jets cooling method and apparatus |
US8169779B2 (en) * | 2009-12-15 | 2012-05-01 | GM Global Technology Operations LLC | Power electronics substrate for direct substrate cooling |
US8427832B2 (en) * | 2011-01-05 | 2013-04-23 | Toyota Motor Engineering & Manufacturing North America, Inc. | Cold plate assemblies and power electronics modules |
CN102280671B (zh) * | 2011-06-23 | 2013-11-27 | 台达电子企业管理(上海)有限公司 | 冷却*** |
US9061382B2 (en) * | 2011-07-25 | 2015-06-23 | International Business Machines Corporation | Heat sink structure with a vapor-permeable membrane for two-phase cooling |
GB2500703A (en) * | 2012-03-30 | 2013-10-02 | Ibm | Cooling devices for photovoltaic modules |
KR101624523B1 (ko) | 2012-07-18 | 2016-05-26 | 가부시키가이샤 도요다 지도숏키 | 방열 장치 및, 반도체 장치 |
JP5969898B2 (ja) | 2012-11-12 | 2016-08-17 | 浜松ホトニクス株式会社 | ヒートシンク |
WO2014184912A1 (ja) | 2013-05-15 | 2014-11-20 | 三菱電機株式会社 | 積層型ヘッダー、熱交換器、及び、空気調和装置 |
US9960100B2 (en) * | 2014-03-20 | 2018-05-01 | Fuji Electric Co., Ltd | Cooler and semiconductor module using same |
US9445526B2 (en) * | 2014-12-22 | 2016-09-13 | Toyota Motor Engineering & Manufacturing North America, Inc. | Modular jet impingement assemblies with passive and active flow control for electronics cooling |
JP6477276B2 (ja) * | 2015-06-12 | 2019-03-06 | 富士通株式会社 | クーリングプレート及びクーリングプレートを備える情報処理装置 |
WO2017047825A1 (ja) * | 2015-09-18 | 2017-03-23 | 株式会社ティラド | 積層型ヒートシンク |
WO2017047824A1 (ja) * | 2015-09-18 | 2017-03-23 | 株式会社ティラド | 積層コア型ヒートシンク |
US10096537B1 (en) * | 2015-12-31 | 2018-10-09 | Microfabrica Inc. | Thermal management systems, methods for making, and methods for using |
US10770372B2 (en) * | 2016-09-23 | 2020-09-08 | Altera Corporation | Fluid routing devices and methods for cooling integrated circuit packages |
US10136550B2 (en) * | 2016-09-30 | 2018-11-20 | International Business Machines Corporation | Cold plate device for a two-phase cooling system |
WO2018117962A1 (en) * | 2016-12-19 | 2018-06-28 | Agency For Science, Technology And Research | Heat sinks and methods for fabricating a heat sink |
JP6922612B2 (ja) * | 2017-09-27 | 2021-08-18 | 富士通株式会社 | クーリングプレート、及び情報処理装置 |
US10533809B1 (en) * | 2018-07-06 | 2020-01-14 | Keysight Technologies, Inc. | Cooling apparatus and methods of use |
JP2020150170A (ja) * | 2019-03-14 | 2020-09-17 | 富士通株式会社 | 冷却プレート、冷却装置及び電子機器 |
-
2017
- 2017-08-29 EP EP17923311.9A patent/EP3678174B1/en active Active
- 2017-08-29 WO PCT/JP2017/031029 patent/WO2019043801A1/ja unknown
- 2017-08-29 US US16/642,747 patent/US11948860B2/en active Active
- 2017-08-29 JP JP2019538800A patent/JP6951786B2/ja active Active
- 2017-08-29 CN CN201780094306.XA patent/CN111052360B/zh active Active
-
2024
- 2024-02-28 US US18/590,568 patent/US20240203828A1/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102648693B1 (ko) * | 2022-12-16 | 2024-03-19 | 최병규 | 반도체 소자 테스트 장치 |
KR102648699B1 (ko) * | 2022-12-16 | 2024-03-19 | 최병규 | 반도체 소자 테스트 장치 |
Also Published As
Publication number | Publication date |
---|---|
US20200258815A1 (en) | 2020-08-13 |
EP3678174B1 (en) | 2022-11-16 |
EP3678174A4 (en) | 2021-04-07 |
JPWO2019043801A1 (ja) | 2020-10-15 |
EP3678174A1 (en) | 2020-07-08 |
CN111052360A (zh) | 2020-04-21 |
US20240203828A1 (en) | 2024-06-20 |
US11948860B2 (en) | 2024-04-02 |
CN111052360B (zh) | 2023-08-04 |
WO2019043801A1 (ja) | 2019-03-07 |
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