JP6778003B2 - Ozone generator and ozone treatment equipment - Google Patents

Ozone generator and ozone treatment equipment Download PDF

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JP6778003B2
JP6778003B2 JP2016060255A JP2016060255A JP6778003B2 JP 6778003 B2 JP6778003 B2 JP 6778003B2 JP 2016060255 A JP2016060255 A JP 2016060255A JP 2016060255 A JP2016060255 A JP 2016060255A JP 6778003 B2 JP6778003 B2 JP 6778003B2
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ozone
fluid
lamp
storage chamber
fan
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JP2017171540A (en
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今井　正人
正人 今井
小林　剛
剛 小林
芹澤　和泉
和泉 芹澤
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Orc Manufacturing Co Ltd
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/18—Liquid substances or solutions comprising solids or dissolved gases
    • A61L2/183—Ozone dissolved in a liquid
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    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/20—Gaseous substances, e.g. vapours
    • A61L2/202—Ozone
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/26—Accessories or devices or components used for biocidal treatment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/015—Disinfection, sterilisation or deodorisation of air using gaseous or vaporous substances, e.g. ozone
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/18—Radiation
    • A61L9/20—Ultraviolet radiation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/11—Apparatus for generating biocidal substances, e.g. vaporisers, UV lamps
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/14—Means for controlling sterilisation processes, data processing, presentation and storage means, e.g. sensors, controllers, programs
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/15—Biocide distribution means, e.g. nozzles, pumps, manifolds, fans, baffles, sprayers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/10—Apparatus features
    • A61L2209/11—Apparatus for controlling air treatment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/10—Apparatus features
    • A61L2209/13—Dispensing or storing means for active compounds
    • A61L2209/134—Distributing means, e.g. baffles, valves, manifolds, nozzles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/20—Method-related aspects
    • A61L2209/21—Use of chemical compounds for treating air or the like
    • A61L2209/212—Use of ozone, e.g. generated by UV radiation or electrical discharge

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  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
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  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Description

本発明はオゾン生成装置及びオゾン処理装置に関する。 The present invention relates to an ozone generator and an ozone treatment device.

オゾンによって被処理物の脱臭や殺菌を行うオゾン処理装置が広く用いられている。この種のオゾン処理装置は、オゾンを流体（気体や液体）に含有させるオゾン生成装置を備え、オゾンを含有させた流体を被処理物に供給して所要の効果を得る。 Ozone treatment equipment that deodorizes and sterilizes the object to be treated with ozone is widely used. This type of ozone treatment device includes an ozone generator that contains ozone in a fluid (gas or liquid), and supplies the ozone-containing fluid to the object to be processed to obtain the required effect.

オゾン生成装置は外部から取り込んだ流体にオゾンを含有させてから流出させるが、オゾン生成装置に取り込まれた段階の流体に高濃度のオゾンが含まれていると、オゾン生成装置を構成する機器に対して害を及ぼす。例えば、特許文献１や特許文献２に記載されている従来のオゾン生成装置では、オゾン生成装置を密閉空間内で使用すると、オゾン生成装置から密閉空間に放出されたオゾンが、密閉空間内を循環した後に再びオゾン生成装置に取り込まれ、オゾンを発生させるランプ、ランプに電力を供給する電源、流体を循環させるファン等がオゾンによって劣化するおそれがある。 In the ozone generator, the fluid taken in from the outside contains ozone and then flows out, but if the fluid at the stage of being taken in by the ozone generator contains a high concentration of ozone, the equipment that composes the ozone generator Harm against it. For example, in the conventional ozone generators described in Patent Documents 1 and 2, when the ozone generator is used in a closed space, the ozone released from the ozone generator into the closed space circulates in the closed space. After that, it is taken into the ozone generator again, and the lamp that generates ozone, the power supply that supplies power to the lamp, the fan that circulates the fluid, etc. may be deteriorated by ozone.

特許文献３に記載されている生活用品脱臭装置では、オゾン生成装置で発生させたオゾンを含む空気を処理室内に供給し、処理室内で脱臭を行った後の空気を装置外の大気中に排出する。この排出通路中にオゾン分解器を配設し、排出される空気に含まれるオゾンをオゾン分解器により分解してオゾン濃度を低下させる。このような構成であると、オゾン分解器の分解性能を超える高濃度のオゾンを処理室内に満たした場合や、オゾン分解器が劣化している場合に、十分にオゾンが分解されず、環境基準値以上のオゾンを含む空気が装置外に漏出してしまう。また、オゾンが残留した外気をオゾン生成装置が再び取り込んでしまい、オゾン生成装置の構成部品がオゾンによって劣化してしまうおそれもある。特に、エキシマランプのように効率よく高濃度のオゾンを生成する部品をオゾン生成装置に用いた場合に、顕著な問題となる。 In the household goods deodorizing device described in Patent Document 3, air containing ozone generated by the ozone generator is supplied to the processing chamber, and the air after deodorizing in the processing chamber is discharged to the atmosphere outside the device. To do. An ozone decomposer is arranged in this discharge passage, and ozone contained in the discharged air is decomposed by the ozone decomposer to reduce the ozone concentration. With such a configuration, when the treatment chamber is filled with ozone having a high concentration exceeding the decomposition performance of the ozone decomposer, or when the ozone decomposer is deteriorated, ozone is not sufficiently decomposed, which is an environmental standard. Air containing ozone above the value leaks out of the device. In addition, the ozone generator may take in the outside air in which ozone remains, and the components of the ozone generator may be deteriorated by ozone. In particular, when a component that efficiently generates high-concentration ozone such as an excimer lamp is used in the ozone generator, it becomes a remarkable problem.

特許文献４に記載されているロッカー等の脱臭装置では、脱臭の対象となる収納部とは別に設けた気流ダクト内に、空気の流れの上流側から順にファン、オゾン発生器、反応室及び触媒ユニットを設けている。ファンの回転により収納部から気流ダクトに吸引した空気に含まれる臭気成分が、オゾン発生器により供給されるオゾンにより反応室内で酸化分解され、脱臭済みの空気が気流ダクトから排出されて収納部に戻される。このとき、反応室で臭気成分と反応されなかった未反応のオゾンが触媒ユニットを通過することで分解される。このような構成であると、臭気成分とオゾンとの反応時間が短いので、効率的よく脱臭を行うことができないという問題がある。臭気成分とオゾンとの反応時間を長くさせるために反応室を大きくすると、脱臭装置をコンパクトにすることが難しい。また、気流ダクトからの排気に含まれるオゾンについては反応室の下流側に設けた触媒ユニットで分解するが、外部から気流ダクトに吸引する空気に含まれるオゾンについては対策されていないため、特許文献１ないし特許文献３と同様に、循環する空気に含まれるオゾンによってファンやオゾン発生器が劣化するおそれがある。 In the deodorizing device such as a rocker described in Patent Document 4, a fan, an ozone generator, a reaction chamber, and a catalyst are sequentially provided in an air flow duct provided separately from a storage portion to be deodorized from the upstream side of the air flow. A unit is provided. The odorous components contained in the air sucked from the storage unit into the airflow duct by the rotation of the fan are oxidatively decomposed in the reaction chamber by the ozone supplied by the ozone generator, and the deodorized air is discharged from the airflow duct to the storage unit. Be returned. At this time, unreacted ozone that has not reacted with the odorous component in the reaction chamber is decomposed by passing through the catalyst unit. With such a configuration, since the reaction time between the odorous component and ozone is short, there is a problem that deodorization cannot be performed efficiently. If the reaction chamber is enlarged in order to prolong the reaction time between the odor component and ozone, it is difficult to make the deodorizing device compact. Further, ozone contained in the exhaust gas from the airflow duct is decomposed by a catalyst unit provided on the downstream side of the reaction chamber, but ozone contained in the air sucked into the airflow duct from the outside is not dealt with. Similar to 1 to Patent Document 3, ozone contained in the circulating air may deteriorate the fan and the ozone generator.

特開平７−１８７６１１号公報Japanese Unexamined Patent Publication No. 7-187611 特開平７−２３６６８４号公報Japanese Unexamined Patent Publication No. 7-236684 特開２００２−３４５９３７号公報JP-A-2002-345937 特開平９−２３９０１６号公報Japanese Unexamined Patent Publication No. 9-239016

本発明は、オゾンによる部品の劣化が生じにくいオゾン生成装置を提供することを目的とする。本発明はまた、効率のよい脱臭や殺菌を行うことが可能であり、かつオゾンによる部品の劣化が生じにくいオゾン処理装置を提供することを目的とする。 An object of the present invention is to provide an ozone generator in which parts are less likely to be deteriorated by ozone. Another object of the present invention is to provide an ozone treatment apparatus capable of efficiently deodorizing and sterilizing, and less likely to cause deterioration of parts due to ozone.

本発明のオゾン生成装置は、流体が流入する流入口と流体が流出する流出口の間に位置し、紫外線を放射することによりオゾンを生成するランプと、ランプに電力を供給する電源とを有するオゾン発生手段と、オゾン発生手段よりも流体の流れの上流側に配設されたオゾン除去手段と、流入口から流出口へ流体を流れさせるファンと、ランプを収納するランプ収納室と電源を収納する電源収納室との間に設けられ、ランプから放射される紫外線を電源に対して遮蔽し、ファンの回転中心である中心軸よりも電源側に位置する隔壁と、を備え、オゾン除去手段は、流体に含有されるオゾンの少なくとも一部を除去し、オゾン発生手段は、オゾン除去手段を通過した流体にオゾンを含有させ、流入口から流入した流体は、隔壁の上流側において分流して、ランプ収納室を流れてランプによりオゾンを含有させた流体と、オゾン除去手段によりオゾンの少なくとも一部が除去されて電源収納室を流れた流体とが、隔壁の下流側において合流して、流出口より流出することを特徴とする。 The ozone generator of the present invention is located between the inlet where the fluid flows in and the outlet where the fluid flows out, and has a lamp that generates ozone by radiating ultraviolet rays and a power source that supplies power to the lamp. Stores the ozone generating means, the ozone removing means arranged on the upstream side of the fluid flow from the ozone generating means , the fan that allows the fluid to flow from the inlet to the outlet, the lamp storage room that houses the lamp, and the power supply. The ozone removal means is provided between the power supply storage chamber and the partition wall that shields the ultraviolet rays radiated from the lamp from the power supply and is located on the power supply side of the central axis that is the center of rotation of the fan. , At least a part of ozone contained in the fluid is removed, the ozone generating means makes the fluid passing through the ozone removing means contain ozone, and the fluid flowing in from the inflow port is diverted on the upstream side of the partition wall. The fluid flowing through the lamp storage chamber and containing ozone by the lamp and the fluid flowing through the power storage chamber after at least a part of ozone is removed by the ozone removing means merge at the downstream side of the partition wall and flow out. It is characterized by more outflow .

流入口と流出口のそれぞれの中心を、隔壁に関して電源収納室よりもランプ収納室側に寄せて配置し、流入口とオゾン発生手段の間の流路上にファンを備えた構成にすることが好ましい。 It is preferable that the centers of the inflow port and the outflow port are arranged closer to the lamp storage chamber side than the power supply storage chamber with respect to the partition wall, and a fan is provided on the flow path between the inflow port and the ozone generating means. ..

オゾン発生手段の動作とファンの動作を制御する制御手段を備え、制御手段によって、オゾン発生手段によるオゾンの生成を停止させてから時間差をおいてファンの動作を停止させてもよい。これによって、流体に残留するオゾンをオゾン除去手段によって効率的に除去することができる。 A control means for controlling the operation of the ozone generating means and the operation of the fan may be provided, and the operation of the fan may be stopped with a time lag after the ozone generation by the ozone generating means is stopped by the control means. As a result, ozone remaining in the fluid can be efficiently removed by the ozone removing means.

さらに、本発明のオゾン処理装置は、流体が流入する流入口と流体が流出する流出口の間に位置し、紫外線を放射することによりオゾンを生成するランプと、ランプに電力を供給する電源とを有するオゾン発生手段と、オゾン発生手段よりも流体の流れの上流側に配設されたオゾン除去手段と、流入口から流出口へ流体を流れさせるファンと、ランプを収納するランプ収納室と電源を収納する電源収納室との間に設けられ、ランプから放射される紫外線を電源に対して遮蔽し、ファンの回転中心である中心軸よりも電源側に位置する隔壁と、を備え、オゾン除去手段は、流体に含有されるオゾンの少なくとも一部を除去し、オゾン発生手段は、オゾン除去手段を通過した流体にオゾンを含有させ、流入口から流入した流体は、隔壁の上流側において分流して、ランプ収納室を流れてランプによりオゾンを含有させた流体と、オゾン除去手段によりオゾンの少なくとも一部が除去されて電源収納室を流れた流体とが、隔壁の下流側において合流して、流出口より流出し、オゾン発生手段でオゾンを含有させた流体により被処理物を処理した後に、オゾン除去手段でオゾンの少なくとも一部が除去される流体がオゾン発生手段に再び流入することを特徴とする。 Further, the ozone treatment apparatus of the present invention is located between the inlet where the fluid flows in and the outlet where the fluid flows out, and has a lamp that generates ozone by radiating ultraviolet rays and a power source that supplies power to the lamp. An ozone generating means having an ozone generating means, an ozone removing means arranged on the upstream side of the fluid flow from the ozone generating means, a fan for flowing the fluid from the inlet to the outlet, a lamp storage chamber for accommodating the lamp, and a power supply. It is provided between the power storage room and the power storage room, which shields the ultraviolet rays emitted from the lamp from the power supply, and has a partition wall located on the power supply side of the central axis, which is the center of rotation of the fan, to remove ozone. The means removes at least a part of ozone contained in the fluid, the ozone generating means causes the fluid that has passed through the ozone removing means to contain ozone, and the fluid that has flowed in from the inflow port is diverted on the upstream side of the partition wall. Then, the fluid flowing through the lamp storage chamber and containing ozone by the lamp and the fluid having at least a part of ozone removed by the ozone removing means and flowing through the power storage chamber merge on the downstream side of the partition wall. It is characterized in that after the object to be treated is treated with a fluid containing ozone by the ozone generating means, which flows out from the outlet, the fluid from which at least a part of ozone is removed by the ozone removing means flows into the ozone generating means again. And.

本発明によると、オゾン発生手段よりも上流側に配設したオゾン除去手段により、流体に含有されるオゾンの少なくとも一部が除去されるので、オゾン発生手段の構成部品がオゾンによる劣化を受けにくいオゾン生成装置やオゾン処理装置を得ることができる。また、オゾン発生手段の下流側の流路構成における制約が少ないため、被処理物の効率のよい脱臭や殺菌を行うことが可能なオゾン処理装置を得ることができる。また、オゾン生成装置において隔壁をファンの中心軸よりも電源側に配置したことで、流体がランプ収納室側へ支配的に流れ、流体に効率よくオゾンを含有させることができる。 According to the present invention, since at least a part of ozone contained in the fluid is removed by the ozone removing means arranged on the upstream side of the ozone generating means, the components of the ozone generating means are less likely to be deteriorated by ozone. An ozone generator or an ozone treatment device can be obtained. Further, since there are few restrictions on the flow path configuration on the downstream side of the ozone generating means, it is possible to obtain an ozone treatment device capable of efficiently deodorizing and sterilizing the object to be treated. Further, by arranging the partition wall on the power supply side of the central axis of the fan in the ozone generator, the fluid predominantly flows to the lamp storage chamber side, and the fluid can efficiently contain ozone.

本発明を適用したオゾン生成装置の内部構造を示す断面図である。It is sectional drawing which shows the internal structure of the ozone generator to which this invention was applied. 本発明を適用した異なる実施形態のオゾン生成装置の内部構造を示す断面図である。It is sectional drawing which shows the internal structure of the ozone generator of a different embodiment to which this invention was applied. 本発明を適用したオゾン処理装置の内部構造を示す断面図である。It is sectional drawing which shows the internal structure of the ozone processing apparatus to which this invention was applied.

図１に示すオゾン生成装置１０は、筺体１１に形成した流入口１２から流体を取り込み、筺体１１内で流体にオゾンを含有させて流出口１３から筺体１１外に排出する。筺体１１内には、ファン３０、エキシマランプ３１（オゾン発生手段）、電源３２（オゾン発生手段）及び始動補助光源３３が配設される。 The ozone generator 10 shown in FIG. 1 takes in a fluid from an inflow port 12 formed in the housing 11, makes the fluid contain ozone in the housing 11, and discharges the fluid from the outflow port 13 to the outside of the housing 11. A fan 30, an excimer lamp 31 (ozone generating means), a power source 32 (ozone generating means), and a starting auxiliary light source 33 are arranged in the housing 11.

筺体１１は、略平行な一対の端壁１４，１５と、端壁１４と端壁１５を接続する略平行な一対の側壁１６，１７とを有しており、端壁１４に流入口１２が形成され、端壁１５に流出口１３が形成されている。断面図である図１では端壁１４，１５と側壁１６，１７の４つの壁部のみを示しているが、筺体１１は流入口１２と流出口１３以外の箇所が密閉された構造になっている。側壁１６と側壁１７を結ぶ方向（図１の上下方向）を筺体１１の幅方向とする。筺体１１の幅方向において、流入口１２と流出口１３はそれぞれ対応する端壁１４，１５の略中央に位置している。筺体１１内には隔壁１８が設けられている。隔壁１８は、筐体１１の幅方向で側壁１６と側壁１７の間に位置し、側壁１６及び側壁１７と略平行に延設されており、側壁１６と隔壁１８の間にランプ収納室１９が形成され、側壁１７と隔壁１８の間に電源収納室２０が形成される。筺体１１内には、流入口１２とランプ収納室１９及び電源収納室２０の間を空間的に接続する流入室２１と、流出口１３とランプ収納室１９及び電源収納室２０の間を空間的に接続する流出室２２が形成される。 The housing 11 has a pair of substantially parallel end walls 14 and 15 and a pair of substantially parallel side walls 16 and 17 connecting the end wall 14 and the end wall 15, and the inflow port 12 is provided on the end wall 14. It is formed, and an outlet 13 is formed on the end wall 15. In FIG. 1, which is a cross-sectional view, only the four wall portions of the end walls 14 and 15 and the side walls 16 and 17 are shown, but the housing 11 has a structure in which the portions other than the inflow port 12 and the outflow port 13 are sealed. There is. The direction connecting the side wall 16 and the side wall 17 (vertical direction in FIG. 1) is the width direction of the housing 11. In the width direction of the housing 11, the inflow port 12 and the outflow port 13 are located substantially in the center of the corresponding end walls 14 and 15, respectively. A partition wall 18 is provided in the housing 11. The partition wall 18 is located between the side wall 16 and the side wall 17 in the width direction of the housing 11, extends substantially parallel to the side wall 16 and the side wall 17, and the lamp storage chamber 19 is located between the side wall 16 and the partition wall 18. It is formed, and a power storage chamber 20 is formed between the side wall 17 and the partition wall 18. Inside the housing 11, there is an inflow chamber 21 that spatially connects the inflow port 12 and the lamp storage chamber 19 and the power storage chamber 20, and a spatial space between the outflow port 13 and the lamp storage chamber 19 and the power storage chamber 20. An outflow chamber 22 connected to is formed.

ファン３０は、流入口１２に隣接する位置で流入室２１内に配設されており、中心軸３０ｘを中心として回転する。ファン３０が回転すると、図１に白抜きの太矢印で示す流体の流れが生じる。まず筺体１１の外部から流入口１２を通して流入室２１内に流体が流入し、流入した流体は隔壁１８の両側に分流されてランプ収納室１９と電源収納室２０を通り、流出室２２で合流して流出口１３を通って筺体１１の外に排出される。つまり、流入口１２側を上流、流出口１３側を下流として流体が流れる流路が形成され、隔壁１８が設けられた範囲で流路が筺体１１の幅方向に分割されている。隔壁１８は、筺体１１の幅方向において中心軸３０ｘよりも側壁１７寄りの位置に配設されている。そのため、ファン３０が回転すると、流入室２１から下流に進む流体はランプ収納室１９側へ支配的に流れる。また、筺体１１の幅方向において、流入口１２の中心と流出口１３の中心はそれぞれ、ファン３０の中心軸３０ｘと略一致する位置にある。すなわち、幅方向において、流入口１２の中心と流出口１３の中心はいずれも、隔壁１８よりも側壁１６（ランプ収納室１９）寄りに位置している。 The fan 30 is arranged in the inflow chamber 21 at a position adjacent to the inflow port 12, and rotates about the central axis 30x. When the fan 30 rotates, the fluid flow shown by the thick white arrow in FIG. 1 occurs. First, a fluid flows into the inflow chamber 21 from the outside of the housing 11 through the inflow port 12, and the inflowing fluid is divided into both sides of the partition wall 18, passes through the lamp storage chamber 19 and the power storage chamber 20, and merges in the outflow chamber 22. It is discharged to the outside of the housing 11 through the outlet 13. That is, a flow path through which the fluid flows is formed with the inflow port 12 side upstream and the outflow port 13 side downstream, and the flow path is divided in the width direction of the housing 11 within the range where the partition wall 18 is provided. The partition wall 18 is arranged at a position closer to the side wall 17 than the central axis 30x in the width direction of the housing 11. Therefore, when the fan 30 rotates, the fluid traveling downstream from the inflow chamber 21 predominantly flows to the lamp storage chamber 19 side. Further, in the width direction of the housing 11, the center of the inflow port 12 and the center of the outflow port 13 are located at positions substantially coincide with the central axis 30x of the fan 30, respectively. That is, in the width direction, both the center of the inflow port 12 and the center of the outflow port 13 are located closer to the side wall 16 (lamp storage chamber 19) than the partition wall 18.

エキシマランプ３１はランプ収納室１９内に配設され、電源３２は電源収納室２０内に配設されている。エキシマランプ３１は紫外線を放射して周囲の酸素からオゾンを生成する。始動補助光源３３は隔壁１８に取り付けられており、紫外線を放射してエキシマランプ３１の始動を容易にさせる。電源３２は、ファン３０、エキシマランプ３１及び始動補助光源３３に電力を供給する。オゾン生成装置１０には筐体１１の外部から操作可能な操作部３４（制御手段）が設けられ、操作部３４を操作することによってオゾン生成装置１０におけるファン３０やエキシマランプ３１の動作を制御することができる。例えば、オゾン生成装置１０の起動時に、ファン３０とエキシマランプ３１をほぼ同時に動作させることや、先にエキシマランプ３１を点灯させ、所定（一定）の時間が経過した後、ファン３０を回転させることもできる。また、オゾン生成装置１０の停止時は、先にエキシマランプ３１を消灯させ、その消灯から所定（一定）の時間が経過した後、ファン３０の回転を止めるといった動作が可能である。 The excimer lamp 31 is arranged in the lamp storage chamber 19, and the power supply 32 is arranged in the power supply storage chamber 20. The excimer lamp 31 radiates ultraviolet rays to generate ozone from surrounding oxygen. The start auxiliary light source 33 is attached to the partition wall 18 and radiates ultraviolet rays to facilitate the start of the excimer lamp 31. The power supply 32 supplies electric power to the fan 30, the excimer lamp 31, and the starting auxiliary light source 33. The ozone generation device 10 is provided with an operation unit 34 (control means) that can be operated from the outside of the housing 11, and controls the operation of the fan 30 and the excimer lamp 31 in the ozone generation device 10 by operating the operation unit 34. be able to. For example, when the ozone generator 10 is started, the fan 30 and the excimer lamp 31 are operated almost at the same time, or the excimer lamp 31 is turned on first and the fan 30 is rotated after a predetermined (constant) time has elapsed. You can also. Further, when the ozone generator 10 is stopped, the excimer lamp 31 can be turned off first, and after a predetermined (constant) time has elapsed from the turning off, the rotation of the fan 30 can be stopped.

オゾン生成装置１０はさらに、オゾンを除去する能力を有するオゾン除去手段４０を備えている。オゾンの除去とは、分解や吸着のように流体に含まれるオゾンを減らす機能全般を含む概念であり、オゾンを吸着分解する活性炭や触媒、波長２５４ｎｍの光を放射してオゾンを分解する低圧水銀ランプ等、任意のものをオゾン除去手段４０として選択可能である。オゾン除去手段４０は流入口１２の入り口に設けられており、流入口１２から流入室２１内に流入する流体のオゾン濃度を低下させることができる。 The ozone generator 10 further includes an ozone removing means 40 capable of removing ozone. Ozone removal is a concept that includes all functions that reduce ozone contained in a fluid, such as decomposition and adsorption. Activated carbon and catalysts that adsorb and decompose ozone, and low-pressure mercury that emits light with a wavelength of 254 nm to decompose ozone. Any one such as a lamp can be selected as the ozone removing means 40. The ozone removing means 40 is provided at the inlet of the inflow port 12, and can reduce the ozone concentration of the fluid flowing into the inflow chamber 21 from the inflow port 12.

以上の構成のオゾン生成装置１０は、筺体１１の外部にある流体にオゾンが含まれている場合に、上流側に位置するオゾン除去手段４０によってオゾンの少なくとも一部を除去してから流入口１２を通して筺体１１内に流体を流入させるため、筺体１１内に配設されているファン３０、エキシマランプ３１、電源３２及び始動補助光源３３等の構成部品がオゾンにより劣化することを防止または軽減できる。筺体１１の流入室２１に流入した流体（オゾン除去手段４０によるオゾン除去を経た流体）は、ランプ収納室１９を通過する際に、エキシマランプ３１により生成された高濃度のオゾンを含有する状態となる。一方、電源収納室２０を通る流体は、オゾン除去手段４０によりオゾンが除去された状態を維持して電源３２を冷却する。そして、ランプ収納室１９と電源収納室２０のそれぞれを通ったオゾン濃度の異なる流体が流出室２２で合流し、オゾンが含有された流体が流出口１３から排出される。流入口１２から流入室２１に流れる流体よりも、流出室２２から流出口１３に流れる流体の方がオゾンの濃度が高い。このようにオゾン生成装置１０は、上流側に設けたオゾン除去手段４０によってオゾンを除去して筺体１１内の構成部品をオゾンによる劣化から守りつつ、高濃度のオゾンを含む流体を効率よく外部に供給することができる。また、流入口１２を塞ぐ程度の大きさのオゾン除去手段４０を設けた構成は、オゾン生成装置１０のコンパクト化も損なわない。 In the ozone generator 10 having the above configuration, when ozone is contained in the fluid outside the housing 11, at least a part of ozone is removed by the ozone removing means 40 located on the upstream side, and then the inflow port 12 Since the fluid flows into the housing 11 through the housing 11, it is possible to prevent or reduce the deterioration of the components such as the fan 30, the excimer lamp 31, the power supply 32, and the starting auxiliary light source 33 arranged in the housing 11 due to ozone. The fluid that has flowed into the inflow chamber 21 of the housing 11 (the fluid that has undergone ozone removal by the ozone removing means 40) contains a high concentration of ozone generated by the excimer lamp 31 when passing through the lamp storage chamber 19. Become. On the other hand, the fluid passing through the power supply storage chamber 20 keeps the ozone removed by the ozone removing means 40 and cools the power supply 32. Then, the fluids having different ozone concentrations passing through the lamp storage chamber 19 and the power supply storage chamber 20 merge in the outflow chamber 22, and the fluid containing ozone is discharged from the outflow port 13. The concentration of ozone is higher in the fluid flowing from the outflow chamber 22 to the outflow port 13 than in the fluid flowing from the inflow port 12 to the inflow chamber 21. In this way, the ozone generator 10 removes ozone by the ozone removing means 40 provided on the upstream side to protect the components inside the housing 11 from deterioration due to ozone, and efficiently sends a fluid containing a high concentration of ozone to the outside. Can be supplied. Further, the configuration provided with the ozone removing means 40 having a size enough to block the inflow port 12 does not impair the compactification of the ozone generator 10.

オゾン生成装置１０ではさらに、エキシマランプ３１と電源３２の間に設けた隔壁１８によって、エキシマランプ３１が放射する紫外線から電源３２を保護することができる。また、上述のように、筐体１１の幅方向において隔壁１８をファン３０の中心軸３０ｘよりも電源３２（側壁１７）側に配置したことで、流入室２１から下流に進む流体がエキシマランプ３１を有するランプ収納室１９側へ支配的に流れ、流体に効率よくオゾンを含有させることができる。 Further, in the ozone generator 10, the partition wall 18 provided between the excimer lamp 31 and the power supply 32 can protect the power supply 32 from the ultraviolet rays radiated by the excimer lamp 31. Further, as described above, by arranging the partition wall 18 closer to the power supply 32 (side wall 17) than the central axis 30x of the fan 30 in the width direction of the housing 11, the fluid traveling downstream from the inflow chamber 21 is the excimer lamp 31. It flows predominantly to the lamp storage chamber 19 side having the above, and the fluid can efficiently contain ozone.

以上に説明したオゾン生成装置１０では、最も上流側の流入口１２に隣接する位置にオゾン除去手段４０を配設しているが、オゾン除去手段を配設する位置を異ならせることもできる。その一例として示す図２のオゾン生成装置１１０では、オゾン除去手段１４０を電源収納室２０内における電源３２の上流に配設している。この構成によると、流入室２１からランプ収納室１９と電源収納室２０に分流される流体のうち、電源収納室２０を通って電源３２を冷却する流体に含有されるオゾンの少なくとも一部をオゾン除去手段１４０によって除去することで、オゾンによる電源３２の劣化を防止または軽減できる。このように、オゾン発生手段の一部の構成要素の上流に限定した形態でオゾン除去手段を設ける構成も有効である。 In the ozone generation device 10 described above, the ozone removing means 40 is arranged at a position adjacent to the inflow port 12 on the most upstream side, but the position where the ozone removing means is arranged may be different. In the ozone generator 110 of FIG. 2 shown as an example thereof, the ozone removing means 140 is arranged upstream of the power supply 32 in the power supply storage chamber 20. According to this configuration, of the fluid divided from the inflow chamber 21 into the lamp storage chamber 19 and the power storage chamber 20, at least a part of ozone contained in the fluid that cools the power supply 32 through the power storage chamber 20 is ozone. By removing by the removing means 140, deterioration of the power source 32 due to ozone can be prevented or reduced. As described above, it is also effective to provide the ozone removing means in a form limited to the upstream of some of the components of the ozone generating means.

また、図２のオゾン除去手段１４０に加えて、ランプ収納室１９内におけるエキシマランプ３１の上流側にオゾン除去手段を配設することも可能である。この構成では、図１のオゾン生成装置１０と同じく、エキシマランプ３１と電源３２の両方についてオゾンによる劣化を防ぐ効果が得られる。さらなる変形例として、流入室２１内にオゾン除去手段を配設することも可能である。つまり、オゾン発生手段を構成する要素よりも上流側であるという条件を満たしていれば、任意の位置にオゾン除去手段を配置することができる。 Further, in addition to the ozone removing means 140 of FIG. 2, it is also possible to dispose the ozone removing means on the upstream side of the excimer lamp 31 in the lamp storage chamber 19. In this configuration, similarly to the ozone generator 10 of FIG. 1, the effect of preventing deterioration due to ozone can be obtained for both the excimer lamp 31 and the power supply 32. As a further modification, it is also possible to dispose the ozone removing means in the inflow chamber 21. That is, the ozone removing means can be arranged at an arbitrary position as long as the condition that it is on the upstream side of the elements constituting the ozone generating means is satisfied.

図３に示すオゾン処理装置５０は、先に説明した図１のオゾン生成装置１０を外部筐体５１内に収めたものである。外部筐体５１内には、オゾン生成装置１０における流出口１３の下流側と流入口１２の上流側を空間的に接続する処理室５２が形成されており、処理室５２内には被処理物５３が配設される。オゾン生成装置１０のファン３０を回転させると、流入口１２から流入室２１内に流入した流体がランプ収納室１９と電源収納室２０に分流する。流入室２１内の流体はオゾン除去手段４０によりオゾンの少なくとも一部が除去されており、ランプ収納室１９を通る流体にはエキシマランプ３１により生成したオゾンが含有され、電源収納室２０を通る流体はオゾン除去手段４０によりオゾンが除去された状態が維持され、これらの流体が流出室２２で合流して流出口１３から流出して処理室５２内に流れる。流出口１３から流出したオゾンを含む流体は、処理室５２内で被処理物５３を処理した後に、オゾン除去手段４０で残留オゾンの少なくとも一部が除去されて流入口１２から再び流入室２１に流入する。このような構成にすることで、外部筐体５１内の密閉した処理室５２に対してエキシマランプ３１により高濃度のオゾンを含む流体を供給した場合でも、処理室５２を経てオゾン生成装置１０に再び流入する流体のオゾン濃度をオゾン除去手段４０により下げるので、オゾン生成装置１０内のファン３０、エキシマランプ３１、電源３２及び始動補助光源３３等がオゾンにより劣化することを防止または軽減できる。また、オゾン生成装置１０における上流側にオゾン除去手段４０を配設しているため、オゾン生成装置１０のコンパクト化は損なわずに、処理室５２については被処理物５３を処理するための十分な大きさや形状に設定することができ、効率よく被処理物５３の脱臭や殺菌を行うことが可能である。なお、図３のオゾン処理装置５０は図１のオゾン生成装置１０を外部筐体５１内に収めているが、外部筐体５１内に図２のオゾン生成装置１１０等の異なる形態のオゾン生成手段を収めることもできる。 The ozone treatment device 50 shown in FIG. 3 is a device in which the ozone generation device 10 of FIG. 1 described above is housed in an outer housing 51. A processing chamber 52 that spatially connects the downstream side of the outflow port 13 and the upstream side of the inflow port 12 in the ozone generator 10 is formed in the outer housing 51, and the object to be processed is formed in the processing chamber 52. 53 is arranged. When the fan 30 of the ozone generator 10 is rotated, the fluid flowing into the inflow chamber 21 from the inflow port 12 is divided into the lamp storage chamber 19 and the power supply storage chamber 20. At least a part of ozone is removed from the fluid in the inflow chamber 21 by the ozone removing means 40, and the fluid passing through the lamp storage chamber 19 contains ozone generated by the excimer lamp 31 and passes through the power storage chamber 20. Is maintained in a state where ozone is removed by the ozone removing means 40, and these fluids merge in the outflow chamber 22 and flow out from the outflow port 13 and flow into the processing chamber 52. The ozone-containing fluid flowing out of the outflow port 13 is treated with the object to be treated 53 in the treatment chamber 52, and then at least a part of the residual ozone is removed by the ozone removing means 40, and the inflow chamber 21 is returned from the inflow port 12. Inflow. With such a configuration, even when a fluid containing a high concentration of ozone is supplied to the closed processing chamber 52 in the outer housing 51 by the excimer lamp 31, the ozone generation device 10 is supplied through the processing chamber 52. Since the ozone concentration of the fluid flowing in again is lowered by the ozone removing means 40, it is possible to prevent or reduce the deterioration of the fan 30, the excimer lamp 31, the power supply 32, the starting auxiliary light source 33, and the like in the ozone generator 10 due to ozone. Further, since the ozone removing means 40 is arranged on the upstream side of the ozone generating device 10, the processing chamber 52 is sufficient for treating the object to be processed 53 without impairing the compactification of the ozone generating device 10. The size and shape can be set, and the object to be treated 53 can be efficiently deodorized and sterilized. Although the ozone treatment device 50 of FIG. 3 houses the ozone generation device 10 of FIG. 1 in the outer housing 51, different forms of ozone generation means such as the ozone generation device 110 of FIG. 2 are housed in the outer housing 51. Can also be stored.

図３に示すオゾン処理装置５０の動作は、オゾン生成装置１０の筐体１１に設けた操作部３４もしくはオゾン処理装置５０の外部筐体５１に設けた操作部（図示せず）を介して制御する。動作態様の一例としては、まず始動補助光源３３を照射してエキシマランプ３１を点灯させる。エキシマランプ３１の点灯から所定（一定）の時間経過後、ファン３０を回転させる。先にエキシマランプ３１を点灯させることで、ランプ収納室１９内の残存流体にオゾンを含ませておくことができるため、オゾン生成装置１０の起動初期段階からオゾンが含有した流体を筺体１１の外に排出できる。なお、エキシマランプ３０の点灯とファン３０の回転はほぼ同時でもよいし、あるいは、ファン３０の回転後にエキシマランプ３０を点灯させても構わない。 The operation of the ozone treatment device 50 shown in FIG. 3 is controlled via an operation unit 34 provided in the housing 11 of the ozone generation device 10 or an operation unit (not shown) provided in the outer housing 51 of the ozone treatment device 50. To do. As an example of the operation mode, first, the start auxiliary light source 33 is irradiated to light the excimer lamp 31. After a predetermined (constant) time has elapsed from the lighting of the excimer lamp 31, the fan 30 is rotated. By turning on the excimer lamp 31 first, ozone can be contained in the residual fluid in the lamp storage chamber 19, so that the fluid contained in ozone is outside the housing 11 from the initial stage of starting the ozone generator 10. Can be discharged to. The excimer lamp 30 may be turned on and the fan 30 may be rotated at substantially the same time, or the excimer lamp 30 may be turned on after the fan 30 is rotated.

そして、処理室５２内で被処理物５３を処理した後、エキシマランプ３１を消灯させる。エキシマランプ３１の消灯後に時間差をおいてファン３０の回転を止めて、オゾン生成装置１０の動作を停止させる。先にエキシマランプ３０を消灯させることで、ランプ収納室１９を通る流体にオゾンは含有されなくなり、電源収納室２０を通る流体はオゾン除去手段４０により少なくとも一部のオゾンが除去された状態が維持されるため、流出口１３から流出した流体のオゾン濃度は下がる。そして、流出口１３から流出した流体は、処理室５２を通って再びオゾン除去手段４０でオゾンの少なくとも一部が除去されて流入口１２から再び流入室２１に流入する。すなわち、エキシマランプ３０を消灯させた後もファン３０を回転させて流体の循環を継続させることで、オゾン処理装置５０内（オゾン生成装置１０内および処理室５２内）を流れる流体に含まれるオゾンは、オゾン除去手段によって徐々に除去される。このような動作にすることで、オゾン処理装置５０内のオゾン濃度を効率良く環境基準値以下まで下げることができ、オゾン処理装置５０を安全に使用することができる。エキシマランプ３１の消灯（オゾンの生成停止）後にファン３０の回転を停止するタイミングとしては、所定（一定）の時間経過後に自動的に停止するように制御することができる。また、オゾン生成装置１０の筐体１１もしくはオゾン処理装置５０の外部筐体５１には、一定濃度以上のオゾンが含まれるか否かを検出するオゾンセンサ（図示せず）を設けてもよい。この構成では、エキシマランプ３１の消灯（オゾンの生成停止）後に、オゾンセンサによって検出されるオゾンの濃度が所定値以下になったときにファン３０を停止させるように制御することができる。なお、オゾン処理装置５０の動作態様は上述に限らず、適宜制御できる。 Then, after processing the object to be processed 53 in the processing chamber 52, the excimer lamp 31 is turned off. After the excimer lamp 31 is turned off, the rotation of the fan 30 is stopped with a time lag to stop the operation of the ozone generator 10. By turning off the excimer lamp 30 first, ozone is not contained in the fluid passing through the lamp storage chamber 19, and the fluid passing through the power storage chamber 20 is maintained in a state in which at least a part of ozone is removed by the ozone removing means 40. Therefore, the ozone concentration of the fluid flowing out from the outlet 13 decreases. Then, the fluid flowing out from the outflow port 13 passes through the treatment chamber 52 again, at least a part of ozone is removed by the ozone removing means 40, and flows into the inflow chamber 21 again from the inflow port 12. That is, even after the excimer lamp 30 is turned off, the fan 30 is rotated to continue the circulation of the fluid, so that ozone contained in the fluid flowing in the ozone processing device 50 (inside the ozone generator 10 and in the processing chamber 52) is contained. Is gradually removed by ozone removing means. By performing such an operation, the ozone concentration in the ozone treatment device 50 can be efficiently lowered to the environmental standard value or less, and the ozone treatment device 50 can be used safely. The timing for stopping the rotation of the fan 30 after the excimer lamp 31 is turned off (stopping the generation of ozone) can be controlled so as to automatically stop after a predetermined (constant) time has elapsed. Further, the housing 11 of the ozone generation device 10 or the outer housing 51 of the ozone treatment device 50 may be provided with an ozone sensor (not shown) for detecting whether or not ozone at a certain concentration or higher is contained. In this configuration, after the excimer lamp 31 is turned off (the generation of ozone is stopped), the fan 30 can be controlled to be stopped when the concentration of ozone detected by the ozone sensor becomes equal to or less than a predetermined value. The operation mode of the ozone treatment device 50 is not limited to the above, and can be appropriately controlled.

以上の各実施形態のオゾン生成装置１０，１１０では、流入口１２と流出口１３を筐体１１の幅方向の略中央に配置している。この構成と異なり、流入口１２や流出口１３を筐体１１の幅方向でランプ収納室１９（側壁１６）側に寄せて配置してもよい。筐体１１の幅方向において、流入口１２と流出口１３のそれぞれの中心は隔壁１８に関して電源収納室２０よりもランプ収納室１９（側壁１６）寄りに位置しているが、さらに筐体１１の端壁１４，１５に関しても、流入口１２と流出口１３をランプ収納室１９寄りの配置にしてもよい。これらのような配置にすることで、筐体１１内で分流される流体がランプ収納室１９側に流れやすくなり、エキシマランプ３１による流体へのオゾンの含有を効率的に行わせることができる。 In the ozone generators 10 and 110 of each of the above embodiments, the inflow port 12 and the outflow port 13 are arranged substantially in the center in the width direction of the housing 11. Unlike this configuration, the inflow port 12 and the outflow port 13 may be arranged closer to the lamp storage chamber 19 (side wall 16) side in the width direction of the housing 11. In the width direction of the housing 11, the centers of the inflow port 12 and the outflow port 13 are located closer to the lamp storage chamber 19 (side wall 16) than the power storage chamber 20 with respect to the partition wall 18, but the housing 11 is further located. Regarding the end walls 14 and 15, the inflow port 12 and the outflow port 13 may be arranged closer to the lamp storage chamber 19. With such an arrangement, the fluid split in the housing 11 can easily flow to the lamp storage chamber 19, and the excimer lamp 31 can efficiently contain ozone in the fluid.

本発明のオゾン生成装置とオゾン処理装置は、オゾンを含有させる流体として気体と液体のいずれに適用することも可能である。実施形態のオゾン生成装置１０，１１０とオゾン処理装置５０はそれぞれ、オゾン発生手段としてエキシマランプ３１を有し、このタイプはオゾンを含有させる流体として気体（空気）が適している。しかし、オゾン発生手段等の構成を適宜変更することで、流体として液体を用いるタイプのオゾン生成装置やオゾン処理装置にも適用が可能である。また、エキシマランプ３１以外にもオゾン発生手段として、低圧水銀ランプや、放電を利用したもの（放電方式）が適用可能である。 The ozone generator and ozone treatment apparatus of the present invention can be applied to either a gas or a liquid as a fluid containing ozone. The ozone generators 10 and 110 and the ozone treatment apparatus 50 of the embodiment each have an excimer lamp 31 as an ozone generating means, and a gas (air) is suitable as a fluid containing ozone in this type. However, by appropriately changing the configuration of the ozone generating means and the like, it can be applied to an ozone generating device and an ozone processing device of a type that uses a liquid as a fluid. In addition to the excimer lamp 31, a low-pressure mercury lamp or one using electric discharge (discharge method) can be applied as an ozone generating means.

なお、オゾン生成装置１０，１１０とオゾン処理装置５０は、上述の形態に限定されるものではない。本発明はオゾン発生手段を備えたオゾン生成装置及びオゾン処理装置全般に適応可能である。 The ozone generators 10 and 110 and the ozone treatment apparatus 50 are not limited to the above-described forms. The present invention is applicable to all ozone generators and ozone treatment devices provided with ozone generating means.

１０ １１０ オゾン生成装置
１１ 筺体
１２ 流入口
１３ 流出口
１４ １５ 端壁
１６ １７ 側壁
１８ 隔壁
１９ ランプ収納室
２０ 電源収納室
２１ 流入室
２２ 流出室
３０ ファン
３０ｘ 中心軸
３１ エキシマランプ（オゾン発生手段）
３２ 電源（オゾン発生手段）
３３ 始動補助光源
３４ 操作部（制御手段）
４０ １４０ オゾン除去手段
５０ オゾン処理装置
５１ 外部筐体
５２ 処理室
５３ 被処理物 10 110 Ozone generator 11 Housing 12 Inflow port 13 Outlet 14 15 End wall 16 17 Side wall 18 Partition wall 19 Lamp storage room 20 Power storage room 21 Inflow room 22 Outflow room 30 Fan 30 x Central axis 31 Excimer lamp (ozone generating means)
32 Power supply (ozone generating means)
33 Start auxiliary light source 34 Operation unit (control means)
40 140 Ozone removing means 50 Ozone processing device 51 External housing 52 Processing chamber 53 Object to be processed

Claims (4)

流体が流入する流入口と流体が流出する流出口の間に位置し、紫外線を放射することによりオゾンを生成するランプと、前記ランプに電力を供給する電源とを有するオゾン発生手段と、
前記オゾン発生手段よりも流体の流れの上流側に配設されたオゾン除去手段と、
前記流入口から前記流出口へ流体を流れさせるファンと、
前記ランプを収納するランプ収納室と前記電源を収納する電源収納室との間に設けられ、前記ランプから放射される紫外線を前記電源に対して遮蔽し、前記ファンの回転中心である中心軸よりも前記電源側に位置する隔壁と、
を備え、
前記オゾン除去手段は、流体に含有されるオゾンの少なくとも一部を除去し、
前記オゾン発生手段は、前記オゾン除去手段を通過した流体にオゾンを含有させ、
前記流入口から流入した流体は、前記隔壁の上流側において分流して、前記ランプ収納室を流れて前記ランプによりオゾンを含有させた流体と、前記オゾン除去手段によりオゾンの少なくとも一部が除去されて前記電源収納室を流れた流体とが、前記隔壁の下流側において合流して、前記流出口より流出することを特徴とするオゾン生成装置。 An ozone generating means located between an inlet where a fluid flows in and an outlet where a fluid flows out, and having a lamp that generates ozone by radiating ultraviolet rays and a power source that supplies electric power to the lamp.
An ozone removing means arranged on the upstream side of the fluid flow from the ozone generating means,
A fan that allows fluid to flow from the inlet to the outlet,
It is provided between the lamp storage chamber for accommodating the lamp and the power storage chamber for accommodating the power supply, shields ultraviolet rays radiated from the lamp from the power supply, and is provided from a central axis which is the rotation center of the fan. With the partition wall located on the power supply side,
With
The ozone removing means removes at least a part of ozone contained in the fluid.
The ozone generating means contains ozone in a fluid that has passed through the ozone removing means.
The fluid flowing in from the inflow port is split on the upstream side of the partition wall, flows through the lamp storage chamber, contains ozone by the lamp, and at least a part of ozone is removed by the ozone removing means. An ozone generator characterized in that the fluid flowing through the power supply storage chamber merges on the downstream side of the partition wall and flows out from the outlet. 前記流入口と前記流出口のそれぞれの中心は、前記隔壁に関して前記電源収納室よりも前記ランプ収納室側に寄せて配置され、
前記流入口と前記オゾン発生手段の間の流路上に前記ファンを備えることを特徴とする請求項１に記載のオゾン生成装置。 The centers of the inlet and the outlet are arranged closer to the lamp storage chamber than the power storage chamber with respect to the partition wall.
The ozone generator according to claim 1, wherein the fan is provided on a flow path between the inlet and the ozone generating means. 前記オゾン発生手段の動作と前記ファンの動作を制御する制御手段を備え、
前記制御手段は、前記オゾン発生手段によるオゾンの生成を停止させてから時間差をおいて前記ファンの動作を停止させることを特徴とする請求項１又は２に記載のオゾン生成装置。 A control means for controlling the operation of the ozone generating means and the operation of the fan is provided.
The ozone generation device according to claim 1 or 2, wherein the control means stops the operation of the fan with a time lag after stopping the generation of ozone by the ozone generation means. 流体が流入する流入口と流体が流出する流出口の間に位置し、紫外線を放射することによりオゾンを生成するランプと、前記ランプに電力を供給する電源とを有するオゾン発生手段と、
前記オゾン発生手段よりも流体の流れの上流側に配設されたオゾン除去手段と、
前記流入口から前記流出口へ流体を流れさせるファンと、
前記ランプを収納するランプ収納室と前記電源を収納する電源収納室との間に設けられ、前記ランプから放射される紫外線を前記電源に対して遮蔽し、前記ファンの回転中心である中心軸よりも前記電源側に位置する隔壁と、
を備え、
前記オゾン除去手段は、流体に含有されるオゾンの少なくとも一部を除去し、
前記オゾン発生手段は、前記オゾン除去手段を通過した流体にオゾンを含有させ、
前記流入口から流入した流体は、前記隔壁の上流側において分流して、前記ランプ収納室を流れて前記ランプによりオゾンを含有させた流体と、前記オゾン除去手段によりオゾンの少なくとも一部が除去されて前記電源収納室を流れた流体とが、前記隔壁の下流側において合流して、前記流出口より流出し、
前記オゾン発生手段でオゾンを含有させた流体により被処理物を処理した後に、前記オゾン除去手段で前記オゾンの少なくとも一部が除去される流体が前記オゾン発生手段に再び流入することを特徴とするオゾン処理装置。 An ozone generating means located between an inlet where a fluid flows in and an outlet where a fluid flows out, and having a lamp that generates ozone by radiating ultraviolet rays and a power source that supplies electric power to the lamp.
An ozone removing means arranged on the upstream side of the fluid flow from the ozone generating means,
A fan that allows fluid to flow from the inlet to the outlet,
It is provided between the lamp storage chamber for accommodating the lamp and the power storage chamber for accommodating the power supply, shields ultraviolet rays radiated from the lamp from the power supply, and is provided from a central axis which is the rotation center of the fan. With the partition wall located on the power supply side,
With
The ozone removing means removes at least a part of ozone contained in the fluid.
The ozone generating means contains ozone in a fluid that has passed through the ozone removing means.
The fluid flowing in from the inflow port is split on the upstream side of the partition wall, flows through the lamp storage chamber, contains ozone by the lamp, and at least a part of ozone is removed by the ozone removing means. The fluid flowing through the power storage chamber merges on the downstream side of the partition wall and flows out from the outlet.
After treating the object to be treated with the fluid containing ozone by the ozone generating means, the fluid from which at least a part of the ozone is removed by the ozone removing means flows into the ozone generating means again. Ozone treatment equipment.
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