JP6724851B2 - 基材、それを用いたモールドパーケージ、基材の製造方法、およびモールドパッケージの製造方法 - Google Patents
基材、それを用いたモールドパーケージ、基材の製造方法、およびモールドパッケージの製造方法 Download PDFInfo
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- JP6724851B2 JP6724851B2 JP2017080679A JP2017080679A JP6724851B2 JP 6724851 B2 JP6724851 B2 JP 6724851B2 JP 2017080679 A JP2017080679 A JP 2017080679A JP 2017080679 A JP2017080679 A JP 2017080679A JP 6724851 B2 JP6724851 B2 JP 6724851B2
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- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Description
そして、請求項1では、さらに、一面は、封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、一面凹凸領域は、接続領域と異なる領域に構成されており、接続領域側に構成された第1凹凸領域(25a)と、第1凹凸領域を挟んで接続領域と反対側に構成された第2凹凸領域(25b)と、を有し、第1凹凸領域は、複数の金属粒子が積層されることで構成され、第2凹凸領域は、溝部(73)が形成されていると共に、溝部を含む領域に複数の金属粒子が積層されることで構成され、第1凹凸領域よりも凹凸の高低差が大きくされている。
また、請求項2では、さらに、一面は、封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、一面凹凸領域は、接続領域を含む領域に構成された第1凹凸領域(25a)と、第1凹凸領域と異なる領域に構成された第2凹凸領域(25b)と、を有し、第1凹凸領域は、複数の金属粒子が積層されることで構成され、第2凹凸領域は、溝部(73)が形成されていると共に、溝部を含む領域に複数の金属粒子が積層されることで構成され、第1凹凸領域よりも凹凸の高低差が大きくされている。
そして、請求項6では、さらに、一面は、封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、一面凹凸領域は、接続領域と異なる領域に構成されており、接続領域側に構成された第1凹凸領域(25a)と、第1凹凸領域を挟んで接続領域と反対側に構成された第2凹凸領域(25b)と、を有し、第1凹凸領域は、複数の金属粒子が積層されることで構成され、第2凹凸領域は、溝部(73)が形成されていると共に、溝部を含む領域に複数の金属粒子が積層されることで構成され、第1凹凸領域よりも凹凸の高低差が大きくされている。
また、請求項7では、さらに、一面は、封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、一面凹凸領域は、接続領域を含む領域に構成された第1凹凸領域(25a)と、第1凹凸領域と異なる領域に構成された第2凹凸領域(25b)と、を有し、第1凹凸領域は、複数の金属粒子が積層されることで構成され、第2凹凸領域は、溝部(73)が形成されていると共に、溝部を含む領域に複数の金属粒子が積層されることで構成され、第1凹凸領域よりも凹凸の高低差が大きくされている。
第1実施形態について図面を参照しつつ説明する。まず、本実施形態のモールドパッケージの構成について説明する。図1に示されるように、モールドパッケージ1は、搭載部10と、搭載部10に周囲に配置された複数の端子部20とを有している。なお、図1では、複数の端子部20のうちの1本の端子部20のみを図示している。
第2実施形態について説明する。本実施形態は、第1実施形態に対して、端子部20のワイヤ領域24にも凹凸形状が構成されたものであり、その他に関しては上記第1実施形態と同様であるため、ここでは説明を省略する。
第3実施形態について説明する。本実施形態は、第1実施形態に対して、端子部20に第2凹凸領域25bが形成されていないものであり、その他に関しては、第1実施形態と同様であるため、ここでは説明を省略する。
第3実施形態の変形例について説明する。第3実施形態において、端子部20のワイヤ領域24にマスクを形成せず、図14に示されるように、ワイヤ領域24も第1凹凸領域25aとされていてもよい。つまり、端子部20は、封止領域23における一面20aの全領域が第1凹凸領域25aとされていてもよい。このような構成としても、第1凹凸領域25aは、最大高さが300nm以下とされた微小凹凸部71で構成されるため、モールド樹脂60との密着性を向上しつつ、ボンディングワイヤ50との接合性が低下することを抑制できる。
第4実施形態について説明する。本実施形態は、第3実施形態に対して、金属粒子70の積層状態を変更したものであり、その他に関しては、第3実施形態と同様であるため、ここでは説明を省略する。
本発明は上記した実施形態に限定されるものではなく、特許請求の範囲に記載した範囲内において適宜変更が可能である。
10a 一面
10c〜10f 側面
13 封止領域
15 一面凹凸領域
16 側面凹凸領域
20 接続部(基材)
20a 一面
20c〜20f 側面
23 封止領域
26、27 側面凹凸領域
Claims (15)
- 一面(10a、20a)、および前記一面と連なる側面(10c〜10f、20c、20d、20f)を有し、前記一面および前記側面がモールド樹脂(60)で封止された封止領域(13、23)となる基材において、
前記一面のうちの前記封止領域を構成する領域には、凹凸形状とされた一面凹凸領域(15、25)が構成され、
前記側面のうちの前記封止領域を構成する領域には、凹凸形状とされた側面凹凸領域(16、26、27)が構成され、
前記一面凹凸領域および前記側面凹凸領域は、複数の金属粒子(70)が積層されることで構成されており、
前記一面は、前記封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、
前記一面凹凸領域は、前記接続領域と異なる領域に構成されており、前記接続領域側に構成された第1凹凸領域(25a)と、前記第1凹凸領域を挟んで前記接続領域と反対側に構成された第2凹凸領域(25b)と、を有し、
前記第1凹凸領域は、前記複数の金属粒子が積層されることで構成され、
前記第2凹凸領域は、溝部(73)が形成されていると共に、前記溝部を含む領域に前記複数の金属粒子が積層されることで構成され、前記第1凹凸領域よりも凹凸の高低差が大きくされている基材。 - 一面(10a、20a)、および前記一面と連なる側面(10c〜10f、20c、20d、20f)を有し、前記一面および前記側面がモールド樹脂(60)で封止された封止領域(13、23)となる基材において、
前記一面のうちの前記封止領域を構成する領域には、凹凸形状とされた一面凹凸領域(15、25)が構成され、
前記側面のうちの前記封止領域を構成する領域には、凹凸形状とされた側面凹凸領域(16、26、27)が構成され、
前記一面凹凸領域および前記側面凹凸領域は、複数の金属粒子(70)が積層されることで構成されており、
前記一面は、前記封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、
前記一面凹凸領域は、前記接続領域を含む領域に構成された第1凹凸領域(25a)と、前記第1凹凸領域と異なる領域に構成された第2凹凸領域(25b)と、を有し、
前記第1凹凸領域は、前記複数の金属粒子が積層されることで構成され、
前記第2凹凸領域は、溝部(73)が形成されていると共に、前記溝部を含む領域に前記複数の金属粒子が積層されることで構成され、前記第1凹凸領域よりも凹凸の高低差が大きくされている基材。 - 前記複数の金属粒子は、隣接する前記金属粒子の間に空隙(72)が構成される状態で積層され、
前記空隙は、互いに繋がっていると共に前記金属粒子が積層されている領域よりも外側の空間と繋がっている請求項1または2に記載の基材。 - 前記複数の金属粒子は、最大高さが300nm以下となる状態で積層されている請求項1ないし3のいずれか1つに記載の基材。
- 前記側面凹凸領域は、前記側面のうちの前記第2凹凸領域と連なる領域を含んで構成されている請求項1ないし4のいずれか1つに記載の基材。
- 搭載部(10)および端子部(20)がモールド樹脂(60)で封止されたモールドパッケージにおいて、
一面(10a)および前記一面と連なる側面(10c〜10f)を有する前記搭載部と、
一面(20a)および前記一面と連なる側面(20c、20d、20f)を有する前記端子部と、
前記搭載部の一面に搭載される半導体チップ(40)と、
前記半導体チップと前記端子部とを電気的に接続する接続部材(50)と、
前記半導体チップおよび前記接続部材を封止しつつ、前記搭載部の前記一面および前記側面、前記端子部の前記一面および前記側面を封止する前記モールド樹脂と、を備え、
前記搭載部および前記端子部は、前記モールド樹脂で封止される封止領域(13、23)において、前記一面に凹凸形状とされた一面凹凸領域(15、25)が構成され、前記側面に凹凸形状とされた側面凹凸領域(16、26、27)が構成され、
前記一面凹凸領域および前記側面凹凸領域は、複数の金属粒子(70)が積層されることで構成されており、
前記一面は、前記封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、
前記一面凹凸領域は、前記接続領域と異なる領域に構成されており、前記接続領域側に構成された第1凹凸領域(25a)と、前記第1凹凸領域を挟んで前記接続領域と反対側に構成された第2凹凸領域(25b)と、を有し、
前記第1凹凸領域は、前記複数の金属粒子が積層されることで構成され、
前記第2凹凸領域は、溝部(73)が形成されていると共に、前記溝部を含む領域に前記複数の金属粒子が積層されることで構成され、前記第1凹凸領域よりも凹凸の高低差が大きくされているモールドパッケージ。 - 搭載部(10)および端子部(20)がモールド樹脂(60)で封止されたモールドパッケージにおいて、
一面(10a)および前記一面と連なる側面(10c〜10f)を有する前記搭載部と、
一面(20a)および前記一面と連なる側面(20c、20d、20f)を有する前記端子部と、
前記搭載部の一面に搭載される半導体チップ(40)と、
前記半導体チップと前記端子部とを電気的に接続する接続部材(50)と、
前記半導体チップおよび前記接続部材を封止しつつ、前記搭載部の前記一面および前記側面、前記端子部の前記一面および前記側面を封止する前記モールド樹脂と、を備え、
前記搭載部および前記端子部は、前記モールド樹脂で封止される封止領域(13、23)において、前記一面に凹凸形状とされた一面凹凸領域(15、25)が構成され、前記側面に凹凸形状とされた側面凹凸領域(16、26、27)が構成され、
前記一面凹凸領域および前記側面凹凸領域は、複数の金属粒子(70)が積層されることで構成されており、
前記一面は、前記封止領域を構成する領域に接続部材(50)と接続される接続領域(24)を有し、
前記一面凹凸領域は、前記接続領域を含む領域に構成された第1凹凸領域(25a)と、前記第1凹凸領域と異なる領域に構成された第2凹凸領域(25b)と、を有し、
前記第1凹凸領域は、前記複数の金属粒子が積層されることで構成され、
前記第2凹凸領域は、溝部(73)が形成されていると共に、前記溝部を含む領域に前記複数の金属粒子が積層されることで構成され、前記第1凹凸領域よりも凹凸の高低差が大きくされているモールドパッケージ。 - 前記複数の金属粒子は、隣接する前記金属粒子の間に空隙(72)が構成される状態で積層され、
前記モールド樹脂は、前記空隙内に入り込んでいる請求項6または7に記載のモールドパッケージ。 - 一面(10a、20a)、および前記一面と連なる側面(10c〜10f、20c、20d、20f)を有し、前記一面および前記側面がモールド樹脂(60)で封止された封止領域(13、23)となる基材の製造方法において、
前記一面および前記側面を有し、金属材料で構成された基礎部材(80)を用意することと、
前記一面のうちの前記封止領域を構成する領域に、凹凸形状とされた一面凹凸領域(15、25)を形成することと、
前記側面のうちの前記封止領域を構成する領域に、凹凸形状とされた側面凹凸領域(16、26、27)を形成することと、を行い、
前記一面凹凸領域を形成すること、および前記側面凹凸領域を形成することでは、前記一面に、溝部(73)を形成することで金属粒子(70)を浮遊させ、浮遊した前記金属粒子を、前記一面のうちの前記溝部、および前記溝部の周囲に蒸着して当該金属粒子を積層すると共に、前記側面に蒸着して当該金属粒子を積層することにより、前記一面凹凸領域および前記側面凹凸領域を形成する基材の製造方法。 - 前記基礎部材を用意することでは、前記一面に接続部材(50)と接続される接続領域(24)を有するものを用意し、
前記一面凹凸領域を形成することでは、前記一面のうちの前記接続領域と異なる領域に前記溝部を形成し、かつ、前記接続領域と異なる領域に前記金属粒子を蒸着して積層する請求項9に記載の基材の製造方法。 - 前記基礎部材を用意することでは、前記一面に接続部材(50)と接続される接続領域を有するものを用意し、
前記一面凹凸領域を形成することでは、前記一面のうちの前記接続領域と異なる領域に前記溝部を形成し、かつ、前記接続領域を含む領域に前記金属粒子を蒸着して積層する請求項9に記載の基材の製造方法。 - 一面(10a、20a)、および前記一面と連なる側面(10c〜10f、20c、20d、20f)を有し、前記一面および前記側面がモールド樹脂(60)で封止された封止領域(13、23)となる基材の製造方法において、
前記一面および前記側面を有する基礎部材(80)を用意することと、
前記一面のうちの前記封止領域を構成する領域に、凹凸形状とされた一面凹凸領域(15、25)を形成することと、
前記側面のうちの前記封止領域を構成する領域に、凹凸形状とされた側面凹凸領域(16、26、27)を形成することと、を行い、
前記一面凹凸領域を形成すること、および前記側面凹凸領域を形成することでは、金属材料で構成されるターゲット部材(90)を用意することと、前記ターゲット部材から金属粒子(70)を浮遊させ、浮遊した前記金属粒子を前記一面および前記側面に蒸着して積層することにより、前記一面凹凸領域および前記側面凹凸領域を形成することと、を行う基材の製造方法。 - 前記基礎部材を用意することでは、前記一面に接続部材(50)と接続される接続領域を有するものを用意し、
前記一面凹凸領域を形成することでは、前記一面のうちの前記接続領域を含む領域に前記金属粒子を蒸着して積層する請求項12に記載の基材の製造方法。 - 前記金属粒子を蒸着して積層することでは、隣接する前記金属粒子の間で構成される空隙(72)が互いに繋がると共に、前記空隙と前記金属粒子が積層されている領域よりも外側の空間とが繋がるようにする請求項9ないし13のいずれか1つに記載の基材の製造方法。
- 請求項14に記載の製造方法にて製造された基材(10、20)を用意することと、
前記基材の一面および側面が封止されるように、前記モールド樹脂を形成することと、を行い、
前記モールド樹脂を形成することでは、当該モールド樹脂が前記空隙内に入り込んだ状態とするモールドパッケージの製造方法。
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